SIMULATION OF TRANSIENTS AND TRANSPORT IN PLASMA PROCESSING REACTORS BY PRAMOD SUBRAMONIUM B.Tech., Indian Institute of Technology, Madras, 1999 M.S., University of Illinois at Urbana-Champaign, 2000 DISSERTATION Submitted in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Chemical and Biomolecular Engineering in the Graduate College of the University of Illinois at Urbana-Champaign, 2003 Urbana, Illinois