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UNIVERSITY OF CALIFORNIA Santa Barbara Dynamic Friction Measurement and Modeling at the Micro/Nano Scale A Dissertation submitted in partial satisfaction of the requirements for the degree Doctor of Philosophy in Mechanical Engineering by Abhishek Srivastava Committee in charge: Professor Kimberly Turner, Chair Professor Karl Astrom Professor Noel MacDonald Professor Jacob Israelachvili September 2006

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Page 1: UNIVERSITY OF CALIFORNIA Santa Barbaratmems/wp/wp-content/uploads/2013/07... · This project could not have been ... VITA OF ABHISHEK SRIVASTAVA August 2006 ... Master of Arts in

UNIVERSITY OF CALIFORNIA

Santa Barbara

Dynamic Friction Measurement and Modeling at the Micro/Nano Scale

A Dissertation submitted in partial satisfaction of the

requirements for the degree Doctor of Philosophy

in Mechanical Engineering

by

Abhishek Srivastava

Committee in charge:

Professor Kimberly Turner, Chair

Professor Karl Astrom

Professor Noel MacDonald

Professor Jacob Israelachvili

September 2006

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The dissertation of Abhishek Srivastava is approved.

____________________________________________ Karl Astrom

____________________________________________ Noel MacDonald

____________________________________________ Jacob Israelachvili

____________________________________________ Kimberly Turner, Committee Chair

August 2006

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ACKNOWLEDGEMENTS

I would like to express my heartfelt gratitude towards Professor Kimberly L.

Turner, committee chair, advisor, mentor, for her guidance and support. This project

could not have been completed without her vision, thoughtfulness and brilliance. I

shall remain forever indebted to her for shaping my thinking as required for research

and continually steering my career in the right direction. She is probably the person

with the greatest influence in my life and her guidance during the course of my

research and course-work has invariably led to many positive changes in my outlook

and personality. I feel privileged to have had the opportunity to obtain supervision

from the finest advisor and person one could hope for.

I feel honored to have worked under the expert guidance of Prof. Karl

Astrom, co-advisor, a person of high eminence and profound knowledge, a rare

privilege indeed. I am deeply indebted to him for his active involvement in spite of

limitations in the actual time we could spend together and for his constructive

criticism on many occasions.

I would like to thank Professor Jacob Israelachvili for the many discussions

and for extending his expertise to provide the right guidance in my research work. I

am also grateful to Professor Noel MacDonald for participating in my doctoral

dissertation committee and for providing important feedback from time to time. I am

thankful to Prof. Pirouz Kavehpour at UCLA for his insightful contribution and

active involvement granting both time and resources as required for collaborative

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research. I would also like to thank Professor Eckart Meiburg, chair, and Professor

Bud Homsy for supporting me in my delayed application to UCSB’s graduate

program.

Few works are the product of the efforts of one person alone. Insight,

assistance and suggestions go a long way in shaping any work to the final form and I

shall forever remain indebted to all my friends at the Turner-group including people I

spent a long time: Weibin, Wenhua, Mike North, Mike Requa, Laura, Barry, Kari,

Mark and Benedikt – for providing exactly that. Kirk Fields, Jeff Oakes and Dave

Bothman were people I could always resort to for any difficulties I faced during my

work. My deepest thanks to Kenny Rosenberg for being a great friend and for

offering his insight in guiding my research work, to Hongbo Zeng for his immense

help with my experimentation, to Seth Downs at Hysitron for patiently replying to

my long emails helping me figure things out and to Alejandro Bonilla at Asylum for

his advice and help. I would like to thank Professor Samir Mitragotri for his

friendship, advice and support. I am also thankful to Dr. Peter Hartwell and Dr. Steve

Naberhuis at HP Research Labs with whom I had much fun learning for two

consecutive summers, and to Dr. Amitava De at IIT Bombay for his guidance and

support throughout.

I shall forever remain indebted to all my friends and family listed below and

forgotten. I was fortunate to have in Professor Makarand Ratnaparkhi, Department of

Statistics at Wright State University, an experienced researcher in the family who,

through various discussions, helped me shape a well-rounded view on many things.

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I would like to extend my heartfelt thanks to my friend, Professor Amit Kanvinde at

UC-Davis, for the various insightful discussions. I really cherish the good times we

had, the tennis games and all the great food he so enthusiastically cooked. I am

indebted to Rahul Khatod for graciously letting me spend two summers at his place

during my internship and for helping me with programming. I would like to thank

my friend Harith, for all the tennis games, discussion and cooking! I would also like

to thank my friends - Shiva, Devleena, Sameer, Anuradha, Mayur, Gauri, Kaushik,

Nilesh, Sachin, Rahul, Siddharth, Gaurav, Shaunak, Shriram, Mihir, Ashish and all

others. I would also like to thank everyone at the Vedanta Society for acting as

friends, philosophers and guides throughout.

Finally, I would like to thank my parents Arvind and Dr. Mukul Srivastava -

for everything and my sister, Kanupriya, for all the fun times we have shared. Most

of all, I would like to thank my wife, Dr. Priya Kulkarni for always having

unshakable faith in me. Her patience, understanding, and support throughout has

helped me come a long way.

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VITA OF ABHISHEK SRIVASTAVA August 2006

EDUCATION Bachelor of Technology in Mechanical Engineering, Indian Institute of Technology, Bombay, April 1999 Master of Arts in Mechanical Engineering, University of California, Santa Barbara, June 2004 Doctor of Philosophy in Mechanical Engineering, University of California, Santa Barbara, August 2006 (expected) PROFESSIONAL EMPLOYMENT 1999-2001: Systems Analyst, Deloitte Consulting, Santa Ana 2001-2005: Teaching Assistant, Department of Mechanical Engineering, University of California, Santa Barbara 2002-2006: Research Assistant, Department of Mechanical Engineering, University of California, Santa Barbara Summer 2002-2003: Summer Internship, Hewlett-Packard Research Labs, Palo Alto PUBLICATIONS “Experimental Characterization of Micro-friction on a mica surface using a nanoindenter”, Tribology Letters, (Submitted). “Quantitative measurement of sliding friction dynamics in the micro-regime using the scratch functionality of a traditional nanoindenter”, Review of Scientific

Instruments, (To be submitted). FIELDS OF STUDY Major Field: Micro/Nanoscale Systems Studies in Dynamic Friction Modeling with Prof. Karl Astrom and Prof. Kimberly L. Turner

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ABSTRACT

Dynamic Friction Measurement and Modeling at the Micro/Nano Scale

by

Abhishek Srivastava

An experimental characterization of friction forces between asymmetric surfaces

in the micro-regime is performed by exploring the lateral scratching functionality of

a traditional nanoindenter (Hysitron Triboindenter) to determine friction properties at

low velocities. Classical friction experiments are reproduced using the triboindenter

with high repeatability. It is observed that real-time depth measurements closely

follow the Hertzian prediction. Friction spikes with magnitude dependent upon the

desired velocity input function (higher peak values in reduced rise times) are

observed, indicating an onset of kinetic friction effects even before the motion

begins. Anisotropy is observed between surfaces of different materials with stick-slip

occurring only at specific relative orientations. Experimental estimation of the

control parameters of the triboindenter is combined with the LuGre model for

describing friction for simulation of the experiments. Data obtained from a tribo-

rheometer is least-square fitted to the LuGre model and modifications to the model

that describe the friction behavior more accurately and provide a physical basis for it

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are investigated. Comparison experiments are performed with the tribo-rheometer

and the surface force apparatus (SFA) using similar material and scratch parameters

to determine the validity of the triboindenter as a nano/micro-scale friction testing

tool. Limitations of the triboindenter as a tribological tool and methods to overcome

some of them are discussed. Advanced equipment for expanding the current range of

the triboindenter which allow experimentation from the nano to the macro scale are

tested. Novel methods for scaling friction are described along with possible

applications of such tribological investigations in MEMS and nano-scale devices.

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TABLE OF CONTENTS

1. Introduction ..........................................................................................................1

1.1. Motivation for the Study.................................................................................1

1.2. Objectives and Scope of the Study..................................................................4

1.3. Organization and Outline ................................................................................7

2. Theoretical Background ....................................................................................10

2.1. Dynamic Regimes in Friction .......................................................................10

2.1.1. Static Friction .....................................................................................11

2.1.2. Boundary Lubrication.........................................................................12

2.1.3. Partial Fluid Lubrication ....................................................................12

2.1.4. Full Fluid Lubrication ........................................................................13

2.2. Empirical Models..........................................................................................16

2.2.1. Bo and Pavelescu Model ....................................................................16

2.2.2. Armstrong’s Seven Parameter Model ................................................17

2.3. Theoretical Models .......................................................................................18

2.3.1. Dahl Model.........................................................................................18

2.3.2. Lugre Model .......................................................................................20

3. New Friction Measurement Instrument - The Hysitron Triboindenter® .....24

3.1. Historical Overview of Tribological Instrumentation...................................24

3.2. The Hysitron Triboindenter® - Components and Design ..............................26

3.2.1. Stage and Optics.................................................................................27

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3.2.2. Triboscanner.......................................................................................28

3.2.3. 1-D and 2-D Transducers ...................................................................29

3.2.4. Displacement/Force Application and Measurement ..........................30

3.2.5. Limitations of the Lateral Force Transducer: Nonlinearity and

Transducer ‘Breakpoint’ ........................................................................31

3.3. The Hysitron Triboindenter® - Data Acquisition ..........................................33

3.3.1. Load Functions ...................................................................................33

3.3.2. Software-based Tilt Correction ..........................................................35

3.3.3. Drift ....................................................................................................37

4. Experiments with the Triboindenter: Design, Results and Analysis.............40

4.1. Sample Preparation and Characterization .....................................................40

4.1.1. Structure of Mica................................................................................41

4.1.2. AFM Imaging of Mica Surface ..........................................................42

4.1.3. Preparation of the Mica Sample .........................................................44

4.2. Triboindenter Tips.........................................................................................46

4.2.1. Cono-spherical Tip Design.................................................................47

4.2.2. Tip Selection ......................................................................................48

4.2.3. AFM Imaging of Cono-spherical Tips ...............................................49

4.3. Experiment Design........................................................................................51

4.4. Experimental Results and Analysis...............................................................56

4.4.1. Velocity Limits of the Triboindenter..................................................56

4.4.2. Friction Force Variation with Normal Load.......................................57

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4.4.3. Friction Force Variation with Velocity at Different Normal Loads...58

4.4.4. Repeatability of Experiments .............................................................59

4.4.5. Steady State Attainment through Repeated Scratching......................60

4.4.6. Friction Spikes and Effect of Resting Time .......................................60

4.4.7. Stick-Slip and Anisotropy ..................................................................63

4.4.8. Depth of Scratches and Orientation Effects .......................................70

4.4.9. Friction Force Variation with Tip Radius and Geometry...................74

4.4.10. SEM Imaging of Mica Cleavage Structure ........................................77

5. Further Analysis of Data and Triboindenter Control System Modeling ......80

5.1. Actuation and Sensing Mechanisms of the Transducer ................................80

5.1.1. Electrostatic Actuation .......................................................................80

5.1.2. Displacement Sensing ........................................................................81

5.2. Tilt Characterization of the Triboindenter ....................................................85

5.3. Analysis of the Transition from Static to Kinetic Friction Regime ..............89

5.3.1. Friction Force and Velocity Characteristics .......................................89

5.3.2. Lateral Displacement (Input and Output) Characteristics ..................93

5.3.3. Lateral Displacement and Friction Force Variation with Normal Load.

............................................................................................................96

5.4. Modeling and Simulation..............................................................................99

5.4.1. PID Parameters for Displacement Control .......................................100

5.4.2. Modeling of the Experiment ............................................................103

5.4.3. Matlab Simulations ..........................................................................105

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6. Tribo-rheometer: Data Fitting to the Lugre Model and Comparison

Experiments .....................................................................................................109

6.1. Rheology and Tribology..............................................................................109

6.2. The Tribo-rheometer ...................................................................................111

6.2.1. Experimental Setup ..........................................................................111

6.2.2. Alignment.........................................................................................113

6.2.3. Experimental Measurements ............................................................113

6.3. Tribo-rheometer Data Fitting to the Lugre Model ......................................114

6.3.1. Model Description............................................................................114

6.3.2. Curve Fitting ....................................................................................115

6.4. Experimental Comparison of the Nanoindenter and Tribo-rheometer .......121

6.4.1. Experiment Setup .............................................................................122

6.4.2. Nanoindenter – Experimental Results and Discussion ....................123

6.4.3. Tribo-rheometer – Experimental Results and Discussion................129

7. SFA Comparison Experiments: Friction Measurements with Polystyrene 133

7.1. The Surface Force Apparatus......................................................................133

7.1.1. Experimental Setup ..........................................................................133

7.1.2. Polystyrene .......................................................................................135

7.2. Triboindenter: Comparison Experiments and Results ................................136

7.2.1. Tip and Sample Preparation .............................................................136

7.2.2. Experimental Results and Discussion ..............................................137

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8. Conclusions, Applications, New Equipment and Future Work...................145

8.1. Conclusions.................................................................................................145

8.2. Future Work: Advanced Equipment and Techniques .................................146

8.2.1. High Velocity Experiments – The Flexure Stage.............................146

8.2.2. Low Velocity Experiments – The Closed-loop Scanner ..................150

8.2.3. Scaling of Friction............................................................................154

8.3. Applications of Nano/Microscale Friction Testing.....................................156

8.3.1. Correcting Nano- and Micro-scale Friction Measurements .............156

8.3.2. Applications in MEMS ....................................................................157

8.3.3. Bio-Inspired Applications ................................................................161

8.3.4. Nano-tribological Applications ........................................................162

Appendix A .............................................................................................................164

Appendix B .............................................................................................................165

Appendix C .............................................................................................................169

Bibliography ...........................................................................................................171

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LIST OF TABLES

Table 3.1 Comparison of the SFA, SFFM and the Nanoindenter [1, 2] ....................26

Table 3.2 Specifications of the Transducer [3] ..........................................................32

Table 4.1 Design Parameters for Nanoindenter Tips of Radii 50 µm and 100 µm....49

Table 5.1 Parameters from Experimental Observations at Varying Normal Loads and

Input Velocities ................................................................................................103

Table 6.1 Comparison of the Nanoindenter [3], Tribo-rheometer [4] and Hess and

Soom Equipment [5] ........................................................................................110

Table 6.2 Coefficients obtained by least-square fitting a function of the form

31 2 4

p xp p e p xµ −= + + to data obtained from the Tribo-rheometer..................119

Table 8.1 Comparison of Capability Enhancement Add-ons to the Triboindenter [3,

6, 7] ..................................................................................................................147

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LIST OF FIGURES

Figure 1.1 Sketch of Two Surfaces with Interlocking Asperities [8]...........................2

Figure 2.1 True Contact Between Engineering Surfaces [9]......................................12

Figure 2.2 The Stribeck Curve – Friction as a Function of Velocity [9]....................12

Figure 2.3 Idealized Contact in Static Friction, Asperity Deformation and in Break-

Away Friction [9] ...............................................................................................13

Figure 2.4 Spring Force Profile During Stick-Slip Motion [9] ..................................15

Figure 2.5 Typical Friction-Speed Time Shift [5]......................................................15

Figure 2.6 Friction as a Function of Velocity; 0: Experimental -: Theoretical [5] ....15

Figure 2.7 Friction as Function of Steady State Velocity for Various Lubricants [9]19

Figure 2.8 Friction Interface Between Two Surfaces Modeled as Contact Between

Bristles [10] ........................................................................................................21

Figure 3.1 The Hysitron Triboindenter (Nanoindenter) [6] .......................................28

Figure 3.2 (a) TriboScanner and Optics [6] (b) Schematic of Piezo Scanner [3] ......29

Figure 3.3 (a) Triboindenter Transducer [6] (b) 1-D and 2-D Transducers [3] ......29

Figure 3.4 Cross Section Schematic of (a) 1-D and (b) 2-D Transducer [3]..............31

Figure 3.5 (a) Displacement Measurement (b) Force Measurement [3] ....................31

Figure 3.6 Schematic of Center of Transducer Showing Breakpoint [3] ...................34

Figure 3.7 The TriboView Positioning Window [3] ..................................................34

Figure 3.8 Typical Loading Function for Scratch Testing .........................................36

Figure 3.9 Typical Scratch Testing Results Window.................................................36

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Figure 3.10 Sample Normal Displacement before Tilt Correction (Top Right) ........38

Figure 3.11 Sample Normal Displacement after Tilt Correction (Top Right) ...........38

Figure 3.12 Lateral Force Profile resulting from a 50 µm diamond tip being held

stationary on a mica surface for 1000 s at 7000 µN normal load.......................39

Figure 4.1 Trace of Friction Forces at Increasing Sliding Velocities on Mica [11] .41

Figure 4.2 High Grade Mica Sheets (Src: Ted Pella, Inc.).........................................41

Figure 4.3 (a) Close-packing representation of a SiO4 tetrahedron (b) Fundamental

unit of all silicates (c) Formation of phyllosilicate [12].....................................43

Figure 4.4 (a) Schematic 3-D diagram of the structure and composition of mica (b)

Development of 2-D mica structure from phyllosilicate [12] ............................43

Figure 4.5 (a) AFM image of Mica cleavage (top view) (b) A-A profile cut along the

two adjacent apexes of K+ ions (c) B-B profile cut along the two seperate

apexes of K+ ions [12] .......................................................................................45

Figure 4.6 AFM Image of the Mica Sample using Asylum Corp’s Molecular Force

Probe 3D System................................................................................................45

Figure 4.7 Surface profile (Z) along the length of scan..............................................46

Figure 4.8 Cono-spherical Tip Geometry [3] .............................................................48

Figure 4.9 Cylindrical Tip Geometry (e.g. for 50 µm Sapphire Flat Punch) .............49

Figure 4.10 AFM Imaging of the 5 µm cono-spherical tip along perpendicular

directions ............................................................................................................50

Figure 4.11 AFM Image of the 50 µm cono-spherical tip (unclean)..........................52

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Figure 4.12 AFM Image of the 50 µm cono-spherical tip (cleaned with Acetone,

Isopropyl Alcohol and Blow Drying).................................................................52

Figure 4.13 AFM Image of the 50 µm cono-spherical tip showing Section along

which Trace is taken...........................................................................................53

Figure 4.14 AFM Image of the 50 µm cono-spherical tip – Trace (smooth light line)

and Derivative (more irregular dark line)...........................................................53

Figure 4.15 An Oscillating Scratch at 3000 µN Normal Load and 0.001 µm/s velocity

............................................................................................................................57

Figure 4.16 Friction Force vs. Normal Load plot for a 50 µm diamond tip sliding

against a mica surface at 13.5 µm/s....................................................................58

Figure 4.17 Friction Force vs. Velocity at Various Normal Loads for a 50 µm

diamond tip sliding against a mica surface ........................................................59

Figure 4.18 Multiple Execution of the Same Load Function for Repeatability .........60

Figure 4.19 Repeated Scratching of a 50 µm cono-spherical diamond tip on a mica

surface at 0.07 µm/s velocity at normal load (a) 500 µN (b) 5000 µN ..............61

Figure 4.20 Friction Spike behavior at increasing velocities for a 50 µm sapphire flat

punch scratching on a mica surface at 7000 µN normal load ............................62

Figure 4.21 Friction Spike behavior at increasing velocities for a cono-spherical

diamond tip of radius 50 µm scratching on a mica surface at 9810 µN load.....62

Figure 4.22 Friction Spike Magnitude Variation with Resting Time.........................64

Figure 4.23 A typical lateral force profile vs. time produced by a 1 µm diamond tip

on a mica sample at 5000 µN normal load and 0.2 µm/s velocity .....................64

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Figure 4.24 Typical Stick-slip type behavior observed for a sapphire 50 µm flat

punch sliding on a mica surface at (a) 5000 µN normal load and 0.1 µm/s

velocity (b) 1000 µN normal load and 0.6 µm/s velocity...................................66

Figure 4.25 Friction force vs. time plots for the 50 µm Sapphire flat punch sliding

against a mica surface at 1000 µN normal load and 0.6 µm/s velocity at various

sample orientations.............................................................................................67

Figure 4.26 Friction force vs. Sample Rotation for the 50 µm Sapphire flat punch

sliding against a mica surface at 1000 µN normal load and 0.6 µm/s velocity ..68

Figure 4.27 Friction force vs. Sample Rotation for the 50 µm Diamond tip sliding

against a mica surface at 9810 µN normal load and 1.5 µm/s velocity..............68

Figure 4.28 Friction force vs. time plots for 50 µm Diamond tip sliding against a

mica surface at 9810 µN load and 1.5 µm/s velocity at various orientations.....69

Figure 4.29 Friction Force Vs Velocity at four different angles for a 50 µm diamond

tip sliding against a mica surface at 8500 µN Normal Load ..............................70

Figure 4.30 Friction force vs. sample rotation for a 50 µm diamond tip scratching on

a Silicon Surface at 9810 µN normal load .........................................................70

Figure 4.31 Friction plots for a velocity reversal experiment for a 50 µm diamond tip

sliding against a mica surface at 9810 µN normal load and 0.7 µm/s velocity..72

Figure 4.32 Maximum depth vs. applied normal load and its comparison with Hertz

prediction for 50 µm diamond tip sliding against a mica surface ......................72

Figure 4.33 Maximum depth vs. velocity comparison at occurrence of stick-slip and

no stick-slip data for a 50 µm diamond tip sliding against a mica surface ........73

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Figure 4.34 Max Depth vs. Rotation Angle for a 50 µm diamond tip sliding against a

mica surface at 8500 µN Normal Load ..............................................................73

Figure 4.35 Max Depth vs. Velocity varation for a 50 µm diamond tip sliding against

a mica surface at 8500 µN Normal Load............................................................74

Figure 4.36 Maximum depth vs. tip radius for 1µm, 5µm, 50 µm Diamond tips and

50µm Sapphire tip sliding against a mica sample at 1000 µN normal load and

3.3 µm/s velocity................................................................................................75

Figure 4.37 Friction force vs. velocity plots at 5000 µN normal load for the 1 µm, 5

µm and 50 µm diamond tips for (a) Mica Surface, and (b) Aluminum Surface 76

Figure 4.38 SEM Micrographs of Mica Cleavage Structures ....................................78

Figure 5.1 Schematic of transducer plates showing forces and displacement ...........81

Figure 5.2 Voltage versus displacement for a parallel plate capacitive actuator .......82

Figure 5.3 A Differential Capacitor – motion of the central plate leads to a change in

individual capacitances on either side of the central plate .................................82

Figure 5.4 Theoretical output curve for a differential capacitor ................................84

Figure 5.5 Experimental X Voltage Vs Displacement curve for 9810 µN

NormalLoad and 4.0 µm/s velocity for the 50 µm diamond tip sliding on mica84

Figure 5.6 Typical Experimental Result – Lateral Force Vs Time ............................86

Figure 5.7 Schematic of Tilt in the Nanoindenter ......................................................86

Figure 5.8 Calculated Tilt of Nanoindenter Tip with a Mica Sample at 9810 µN

Normal Load at Various Orientations ................................................................87

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Figure 5.9 Schematic of Orientation Experiment with a Wedge for Computing

Sample Tilt .........................................................................................................88

Figure 5.10 Positively oriented force during tip loading as observed in friction

experiment with a wedge....................................................................................88

Figure 5.11 Friction Force & Velocity vs. Time Graphs for 9810 µN normal load (a)

Velocity = 0.2 µm/s (b) Velocity = 4.0 µm/s (c) Velocity = 18.0 µm/s (d)

Velocity = 36.4 µm/s ..........................................................................................91

Figure 5.12 Lateral Displacement (Input & Output) & Acceleration Vs Time Graphs

for 9810 µN load. Bold line indicates moving average filter of period 4.(a)

Velocity = 0.2 µm/s (b) Velocity = 4.0 µm/s (c) Velocity = 18.0 µm/s (d)

Velocity = 36.4 µm/s ..........................................................................................93

Figure 5.13 Lateral Displacement (Input & Output) & Velocity Vs Time Graphs (a)

Velocity = 0.2 µm/s (b) Velocity = 4.0 µm/s (c) Velocity = 18.0 µm/s (d)

Velocity = 36.4 µm/s ..........................................................................................95

Figure 5.14 Schematic Representation of Lateral Displacement Vs. Time Graphs ...95

Figure 5.15 Lateral Displacement Vs. Time Graphs at Various Normal Loads (a)

Velocity = 0.2 µm/s (b) Velocity = 4.0 µm/s (c) Velocity = 18.0 µm/s (d)

Velocity = 36.4 µm/s ..........................................................................................98

Figure 5.16 Friction Force Vs. Time Comparison Graphs at Various Normal Loads

(a) Velocity = 0.2 µm/s (b) Velocity = 4.0 µm/s (c) Velocity = 18.0 µm/s (d)

Velocity = 36.4 µm/s ..........................................................................................99

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Figure 5.17 Typical Normal Load Output of the Triboindenter for a 500 µN constant

Input Force Profile............................................................................................101

Figure 5.18 Typical PID Controller for the Hysitron Triboindenter ........................101

Figure 5.19 Matlab Simulation of Lateral Displacement, Friction Force, Velocity and

Friction State as a function of Time at 9810 µN Normal Load and 4 µm/s

Velocity (all units are in MKS) ........................................................................106

Figure 5.20 Matlab Simulation of Lateral Displacement Input (Dotted Line) &

Output (Dark Line) Vs Time For Normal Loads 5000 µN and 9810 µN and 18

µm/s Velocity ...................................................................................................107

Figure 6.1 AR 2000 Torsional Rheometer (Src.TA Instruments Inc.). ....................112

Figure 6.2 Schematic of Tribo-rheometer and annual text fixture with radii R1 and R2

respectively [4] .................................................................................................112

Figure 6.3 Effect of Normal force on friction coefficient plotted vs. Gumbel number.

A copper fixture is used with Pennzoil 80W-90 is the lubricant [4]................116

Figure 6.4 Friction Coefficient vs. Gumbel Number Plot of Data and Fitted Curve at

Normal Load 5 N..............................................................................................117

Figure 6.5 Friction Coefficient vs. Gumbel Number Plot of Data and Fitted Curve at

Normal Load 10 N............................................................................................117

Figure 6.6 Friction Coefficient vs. Gumbel Number Plot of Data and Fitted Curve at

Normal Load 15 N............................................................................................118

Figure 6.7 Friction Coefficient vs. Gumbel Number Plot of Data and Fitted Curve at

Normal Load 20 N............................................................................................118

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Figure 6.8 Friction Coefficient vs. Gumbel Number Plot of Data and Fitted Curve to

sample curve using a different function form2

31 2 4

p xp p e p xµ −= + + .............121

Figure 6.9 Design of a non-standard Stainless Steel tip used for comparison

experiments with the nanoindenter ..................................................................124

Figure 6.10 Friction Coefficient vs. velocity for a spherical stainless steel sliding on

a polished stainless steel plate observed with the nanoindenter.......................124

Figure 6.11 Friction force vs. time plots showing stick-slip at 5000 µN load at low

velocities and µ vs. velocity comparison with non stick-slip type data ...........125

Figure 6.12 Typical failure curve obtained when the nanoindenter fails to produce

reliable result, observed in the 4.5 µm/s to 13.5 µm/s velocity range..............126

Figure 6.13 Typical failure curve obtained when the nanoindenter fails to produce

reliable data, observed in low normal-load experiments (~ 500 µN)...............126

Figure 6.14 Friction coefficient vs. velocity plots obtained using a nanoindenter at

5000 µN load for dry friction and heavy paraffin oil as the lubricant..............128

Figure 6.15 Friction coefficient vs. velocity plots obtained using a nanoindenter at

10000 µN load for dry friction and using heavy paraffin oil as the lubricant ..128

Figure 6.16 Friction Coefficient vs. velocity for a stainless steel fixture rotating on a

stainless steel plate observed with tribo-rheometer on two different days.......130

Figure 6.17 Repeatability of the experiments conducted with the tribo-rheometer on

two different days (both plots are plotted to the same scale for comparison)..130

Figure 7.1 Schematic of the Surface Force Apparatus (SFA) [13] ..........................134

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Figure 7.2 Interferometry based measurement in the Surface Force Apparatus [14]

..........................................................................................................................135

Figure 7.3 Schematic of Mica Surfaces used in the SFA [14] .................................135

Figure 7.4 Typical Results Window for a Zero-Load Experiment Performed with the

Nanoindenter for a PS Sphere sliding against a PS Surface (MW 280,000)....138

Figure 7.5 (a) Friction Forces Between a PS Sphere and an Untreated PS Surface

(MW 280,000) as a function of Sliding Speed measured with the Triboindenter

(b) Friction Forces Between Two PS 280,000 Surfaces before and after

Crosslinking as a function of Sliding Speed measured with the SFA [15] ......139

Figure 7.6 Friction Force Between PS (MW 280,000) Deposited on a Steel Sphere of

Radius 3 mm Sliding Against a similar PS Surface deposited on Mica as a

function of Normal Load Measured by Triboindenter at 0.5 µm/s and SFA [15]

..........................................................................................................................140

Figure 7.7 Friction Force vs. Rotation Angle Plot for a PS Sphere sliding against a

PS Surface of MW 280,000 indicating the Isotropic nature of PS...................141

Fig 7.8 (a) Friction Spike vs. Stopping Time Plot for a PS (MW 280,000) Deposited

on a Steel Sphere of Radius 3 mm Sliding Against a PS Surface (MW 280,000)

deposited on Mica at 1000 µN Normal Load

(b) Height of Stiction Spike of PS 2,000,000 in stop-start experiments as a function

of Stopping Time [15]......................................................................................142

Figure 7.9 Surface Separation between PS Sphere and Surface at Zero Load vs.

Velocity ............................................................................................................143

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Figure 8.1 Flexure Stage [6].....................................................................................147

Figure 8.2 Scratch results using the Multirange Nanoprobe and flexure stage using

50 µm cono-spherical tip at 9.81 mN normal load (a) 7 µm/s (b) 225 µm/s vel

..........................................................................................................................149

Figure 8.3 Visible damage of the mica surface in scratch experiments conducted with

the 50 µm cono-spherical tip at 300 µm/s and normal load (a) 500 mN (b) 750

mN....................................................................................................................149

Figure 8.4 Closed-loop Scanner [7] .........................................................................151

Figure 8.5 Friction Force vs. Velocity Plots Obtained Using the Closed-loop Scanner

at High Velocity ...............................................................................................152

Figure 8.6 Friction Force vs. Velocity Plots Obtained Using the Closed-loop Scanner

at Low Velocities .............................................................................................152

Figure 8.7 Friction Force vs. Velocity Comparison between the Triboindenter and the

Closed-loop Scanner ........................................................................................153

Figure 8.8 Asperity Patterns with the JDX-5D11 E-Beam Lithography System .....155

Figure 8.9 MEMS (a) Multiple and (b) Linear Rack Gear Speed Reduction Drives

(Courtesy of Sandia National Laboratories, SUMMiTTM Technologies).......158

Figure 8.10 Cross-sectional View of Polysilicon Plate and Bushing of an SDA [16]

..........................................................................................................................159

Figure 8.11 Gecko Foot and Spatulae [17] ..............................................................162

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1. Introduction

1.1 Motivation for the Study

The science of friction, i.e., tribology, together with astronomy, is possibly one of

the oldest sciences. Unlike astronomy, the interest in tribology over the centuries has

been purely practical – to move mechanical pieces past each other as easily as

possible. Leonardo da Vinci first introduced the concept of friction coefficient in the

15th century [1]. The next tribologist was Amontons around the year 1700 who

proposed a simple model relating friction to the macroscopic structure of the surface

[8]. According to Amontons, surfaces are tilted on a microscopic scale [18].

Therefore, when two surfaces are pressed against each other and moved, a certain

lateral force is needed to lift the surfaces against the loading force. From purely

geometrical arguments it can be stated based on the above model

loadlat FF ).tan(α= …(1)

where α is the tilting angle on the microscopic scale as shown in Fig. 1.1.

This model is too simple to explain everyday friction and in spite of efforts and

progress made by scientists and engineers, tribology is still far from being a well-

understood subject. In contrast to many other fields in physics, a fundamental theory

of friction does not exist and determination of relevant tribological phenomenon

from first principles is a very complicated task. Also, it is difficult to find a simple

experimental system which would serve as a model system.

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Fig 1.1 Sketch of Two Surfaces with Interlocking Asperities [8]

Within tribology, experimental and theoretical understanding of friction is well

developed. Wear is the central interest of tribologists and frictional dynamics was

used as a tool to explore basic phenomenon, especially in the early years of

tribological investigation [9]. In the later years, more powerful means were

developed to explore interface physics and frictional dynamics, although not

forgotten by tribologists, has become of secondary interest. In the recent years,

tribology has been most concerned with issues of wear and machine life on one hand

and of surface chemistry and physics on the other. Great progress has been made

towards understanding the physical processes of sliding machine contacts: bearings,

transmission elements, brushes, seals etc. [19]. For the controls engineer, the

implications of the modern understanding of friction are substantial. Of the several

ways that friction affects machine performance, stick-slip poses perhaps the greatest

challenge to precise control. With the last four decades of progress in surface and

lubricant physics, interest in dynamics is rising again for predictive models of the

friction mechanism [9]. Early work has found friction to be highly repeatable and

from the standpoint of control theory, repeatability, coupled with more exact

Fload

Flat

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modeling, opens up the possibility of theoretical results that more accurately reflect

the observed phenomenon.

Friction plays a role in the simplest actions of living, such as walking, grasping

and stacking. The importance of the forces or friction are not small but when friction

is addressed, the models used are often those of Leonardo da Vinci or Charles de

Coulomb. Experimental evidence pertinent to the situation under scrutiny is rarely

sought out or presented, perhaps because of the fact that friction may vary from one

situation to another.

A model of friction is necessary for many purposes. In some cases it is desirable

to have a model which provides insight into the physical mechanisms of the friction

interface [20]. In others it is suffices with a model that can predict global, qualitative

behavior of a system with friction. The study of friction mechanism for control

applications has been driven by the desire to understand and compensate for limit

cycles observed in the mechanism motion, namely stick-slip. The limit cycles

themselves produce measurable phenomenon: slip distance, period and relative time

in stick-slip which have been the principal data guiding the choice of models for

analysis or compensation.

There are many different models for friction, ranging from purely empirical

models [19, 21] to detailed models based on material physics [22]. The

understanding of the friction mechanisms that have emerged in the past 20 years has

not yet been translated into dynamic models that are easy to use for simulation and

friction compensation. This is in part because some effects are still not well modeled.

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Current experimental data that is based on precision servos are not accurate enough

to invalidate key hypotheses. Strong experimental support in the form of careful

studies of the behavior of friction for small displacements and slow motions is

required. The Hysitron Triboindenter (nanoindenter) is an instrument primarily

designed for indentation and it can also measure lateral force, i.e. perform scratch

testing, using a 2D transducer. It is very likely that many issues can be resolved

using experiments with the nanoindenter and it could serve as an effective tool for

performing the experiments required for improved modeling of friction at the

microscale. In this thesis, we plan to test the feasibility of Hysitron Triboindenter as

a friction measurement tool and investigate such dynamic friction models at the

micro-scale for control applications as well as for applications in MEMS and other

nano-scale devices.

1.2 Objectives and Scope of the Study

An important challenge in the development of models and methods for these

types of systems has often been the lack of accurate friction data and reliable

instruments for obtaining essential data. The Atomic Force Microscope (AFM) [23,

24], Surface Force Apparatus (SFA) [25] and the Scanning Force and Friction

Microscope (SFFM) [26] have been developed and used in recent years for

tribological studies. While the AFM and the SFFM are specifically suited to very low

load (1-100 nN and 1-500 nN respectively) and very small (nearly atomic) scale

friction experiments (radii of contact ~ 20 nm and 1-300 nm respectively), devices

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including the SFA are less limited in this regard. The Hysitron Triboindenter is a

recently developed tool for measuring the hardness and elastic properties of thin

films and coatings and provides both normal and lateral force loading configurations.

Although the instrument is well-suited for friction experiments through accurate

control and measurement of the normal and lateral forces through feedback, it had

not been previously characterized for friction testing. Using the scratch capability of

the nanoindenter, we aim to perform experiments to increase an understanding of

friction at the micro-scale and to aid future modeling efforts. We plan to validate the

obtained experimental results by performing comparison experiments with other

friction measurement tools such as the SFA and the Tribo-rheometer [4].

A good model is an essential element of control design. A friction model should

be of moderate complexity, work for different engineering contacts and under

various operating conditions, yet have built in as much built in friction structure as

possible [20]. The aim is to derive a model that qualitatively captures the complex

nonlinear behavior of friction and is fairly simple with as few parameters as possible

to tune. There is, of course a tradeoff between model complexity and its ability to

describe intricate friction behavior.

Apart from seeking to modify existing models such as the LuGre model, we will

also attempt to develop first-principle physics-based models. Another idea is to

model the local contact forces using materials models and to get global behavior by

averaging over the ensemble of contact points. The models will have additional

states and the nonlinearity is generated by the shape of the distribution of the contact

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surfaces. Our goal in modeling is to develop models which accurately represent the

physics phenomenon, but are simple enough to be used for control.

The main objectives of this study are

1. To perform an extensive literature review of existing friction models, both

theoretical and empirical, focusing on the LuGre model in particular.

2. To characterize the Hysitron Triboindenter for friction testing at the

nano/micro scale and understand its capabilities and current limitations.

3. To repeat classical friction experiments using the triboindenter and gather

reliable data for different material samples for accurately modeling friction

at the micro scale.

4. To perform a multitude of different kinds of friction experiments, e.g.

oscillations of increasing magnitude, variation of tip material and radius,

testing at different normal loads, altering the waiting times before

experiment commencement etc. to further understand and quantify the

behavior of friction under different conditions.

5. To estimate functions and parameters in existing models such as the

LuGre model to see how accurately they can fit the experimental data.

6. To explore new friction models that could better explain the observed

friction characteristics and to investigate a physical basis for models that

work best.

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7. To perform simulations of the friction experiments using the new friction

model based on an estimation the parameters of the measurement tool.

8. To perform comparison experiments with other tribological measurement

systems such as the SFA and the tribo-rheometer to validate the friction

results obtained from the triboindenter.

9. To investigate potential enhancements to the triboloigcal measurement

equipment and techniques and their potential applications in micro/nano-

scale devices.

1.3 Organization and Outline

In this study, we plan to explore the capabilities of the Hysitron Triboindenter to

generate precise data for friction tests. After characterizing the equipment for friction

measurement, we plan to perform friction tests and develop dynamic models of

friction that can be used for friction compensation in MEMS systems.

In Chapter 2, we present a theoretical background of the various characteristics

exhibited by friction followed by a literature review of the currently existing

empirical and theoretical models used to describe them. We explore the advantages

and drawbacks of each of these modeling approaches. This chapter highlights the

need for a thorough experimental investigation that could help better estimate the

parameters of this model as well as open the possibility of new friction models from

first principles.

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In Chapter 3, we present a historical overview of tribological measurement

equipment followed by a detailed description of the components, design and testing

methodology of the Hysitron Triboindenter, the scratch functionality of which we

intend to further explore for tribological measurements. Its currently known

limitations are highlighted along with techniques to overcome some of these

limitations.

Chapter 4 details our experimental results with the Hysitron Triboindenter. The

choice of tips and samples used in our experiments are described in detail along with

the experimental procedure. The experimental results are presented along with an

analysis of the results derived from a variation of various experimental parameters

and an investigation of their repeatability. The entire load and displacement range of

the triboindenter is utilized in these experiments and unique features such as the

depth measurement capability of the triboindenter are investigated in detail.

In Chapter 5, we study and model the actuation and sensing mechanisms of the

triboindenter and characterize some of its observed limitations such as the tilt. This is

followed by a detailed analysis of few particular experimental results with a view to

understand the finer details of the transition from the static to the kinetic regime. The

experimental parameters obtained from the above analysis are combined with an

estimation of the control-loop parameters of the triboindenter to develop a MATLAB

simulation of the friction experiments based on a modification to the LuGre model.

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In Chapter 6, a tribo-rheometer setup [4], which has a larger experimental range than

the Hysitron Triboindenter in terms of both velocity range and normal load although

at a lower resolution, is described in detail. Comparison experiments with the tribo-

rheometer using similar contacting surfaces in both systems are performed and the

results are discussed. Data fitting to the LuGre model using previously obtained

results from the tribo-rheometer is performed and the insights into the modeling

obtained from the curve fitting are discussed.

In Chapter 7, friction experiments with Polystyrene (PS), which is a common testing

material used with the surface force apparatus (SFA), are performed with the

triboindenter and the equipment modifications required to perform these experiments

are described. A comparison between the results obtained from the triboindenter and

the SFA are used to determine the validity of the triboindenter as a tribological tool

in comparison to the SFA.

Chapter 8 presents a conclusion to the research and investigates new research tools

and methods to characterize friction in load and velocity ranges not possible with the

current set up. The testing results of some of these tools are presented along with an

analysis of their usability and drawbacks in the context of the current research.

Lastly, possible application areas of the measurement tool and techniques developed

in this study for tribological investigation are described.

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2. Theoretical Background

2.1 Dynamic Regimes in Friction

Early friction models assumed that friction was intimately related to the

roughness of the opposing surfaces and the fundamental cause of friction was the

force required to lift interlocking asperities over each other in sliding motion, a view

strongly promoted by Amontons and Coulomb based on their experimental

investigations. This view had great appeal and merit since it was beautiful in its

simplicity, yet concordant with the laws of friction but many of these early models

failed because the surface topography was misunderstood to be conformal. In Fig.

2.1, part A rests on part B and the parts deform to create a nonconformal contact.

The true area of contact, an area that increases with increasing load, is much smaller

than the apparent area of contact [19]. Over a broad range of engineering materials,

the asperities have slopes ranging from 0 to 25 degrees and are concentrated in the

band from 5 to 10 degrees [27]. When asperities come into contact the local loading

will be determined by the strength of materials, which will deform as necessary to

take up the total load. As the load grows, the junction area grows; but, to first order,

the shear strength (measured per unit area) remains constant. As proposed in most

models, friction is proportional to the shear strength of the asperity junctions and in

this way friction is proportional to load.

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Traditionally, friction has been regarded as a static function of velocity. In the

presence of a lubricant, friction as a function of velocity exhibits four dynamic

regimes – static friction, boundary lubrication, partial fluid lubrication and full fluid

lubrication. These are shown in Fig. 2.2, which is called the Stribeck curve and

shows the three moving regimes. The interesting characteristics of static friction such

as presliding and break-away friction force, described in the following subsections,

are traditionally not considered to be dependent on velocity.

2.1.1 Static Friction

The asperity junctions deform elastically giving rise to motion that appears to be a

solid connection with a stiff spring as shown in Fig. 2.3. Both the boundary film and

the asperities deform plastically under the load, giving rise to increasing static

friction as the junction spends more time at zero velocity. In the presliding regime,

i.e. motion prior to fully developed slip, the force is a linear function of the

displacement, until a critical displacement (force), as in a spring. When the applied

force exceeds the level of static friction, the junctions break and true sliding occurs.

This phenomenon is called the Dahl effect and it is observed to occur for true relative

deflections of 5 µm or more.

2.1.2 Boundary Lubrication

In the second regime, the velocity is not adequate enough to build a fluid film

between the surfaces. When lubricant is added to the contact, for low velocities, the

lubricant acts as a surface film, and its lower shear strength helps in reducing the

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Fig 2.1 True Contact Between Engineering Surfaces [9]

Fig 2.2 The Stribeck Curve – Friction as a Function of Velocity [9]

friction. The friction in this regime is largely independent of velocity and strongly

dependent upon lubricant chemistry.

2.1.3. Partial Fluid Lubrication

In the third regime, the lubricant is brought into the load bearing region through

motion, either by sliding or rolling. Some of it is expelled by the pressure arising

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Fig 2.3 Idealized Contact in Static Friction, Asperity Deformation and in Break-

Away Friction [9]

from the load but viscosity prevents all the lubricant from escaping and thus a film is

formed. The greater the viscosity or motion velocity, the thicker the fluid film will

be. When the film is not thicker than the height of the asperities, some solid-to-solid

contact will result and there will be partial fluid lubrication. If the static friction is

greater than kinetic friction, the friction will decrease with increasing velocity.

2.1.4. Full Fluid Lubrication

When the film is sufficiently thick, separation is complete and the load is fully

supported by the fluid. Hydrodynamic and elastohydrodymanic (EHL) are two forms

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of full fluid lubrication. Hydrodynamic lubrication arises in conformal contacts and

EHL in nonconformal contacts. The wear is reduced by orders of magnitude and

friction is a function of velocity. The goal of lubrication engineering is often to

maintain full fluid lubrication effectively at a low cost.

Causes of stick-slip: As seen from the Stribeck curve, the relative motion between

two bodies is accompanied by a reduction in the friction force. The sliding body

accelerates until the point where the elastic restoring force and the friction force

between the sliding bodies equalize and deceleration takes place until a new period

of stick occurs [21].

The time dependent characteristics of friction are listed below –

1. Rising Static Friction with Increasing Dwell Time – The dwell time is the

time during which the surfaces are in fixed contact viz. the time intervals a-b,

c-d, e-f, g-h and i-j in Fig. 2.4 The static friction is observed to increase with

dwell time and this accounts for the larger stick-slip at lower velocities.

2. Frictional Lag – The Stribeck curve shows a dependence of friction upon

velocity. If there is a change in velocity, one might presume the

corresponding change in friction to occur simultaneously but experimental

data [5] indicates a lag in the frictional change, as shown in Fig. 2.5. This

results in hysteresis as the velocity varies as shown in Fig. 2.6. Hess and

Soom carefully measured the frictional lag and found it to range from 3 to 9

milli-seconds in a range of load and lubricant combinations for experiments

with 52100 Steel, the lag increasing with increasing lubricant viscosity and

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Fig 2.4 Spring Force Profile During Stick-Slip Motion [9]

Fig 2.5 Typical Friction-Speed Time Shift [5]

Fig 2.6 Friction as a Function of Velocity; 0: Experimental -: Theoretical [5]

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with increasing contact load. This leads to a pure delay in the onset of the

destabilizing drop in friction. Whether this process is better modeled by a

simple time delay or some other formulation is still an open question and

experimental data would be instrumental for investigating this further.

3. Time Dependence of the Stiction Force - Time dependence of the stiction

force means that the force required to start sliding depends upon how long

time the system has rested since the binding force between two bodies

increases with contact time. Further experimental evidence [28] is required

for investigation.

From the above discussion we can conclude that there is evidence that suggests

that friction can be repeatable. The derivation of an accurate friction model that

captures all of the above effects would permit analytical prediction of performance,

correct decoupling of multi-degree-of-freedom mechanisms and design of friction

compensation. If stick-slip cannot be eliminated by proper choice of lubricants, an

accurate friction model would aid in the determination of mechanism and control

performance required to achieve smooth action.

2.2 Empirical Models

2.2.1 Bo and Pavelescu Model

There have been several empirical models proposed for friction. Bo and Pavelescu

[21] reviewed several models from existing literature and adopted and linearized an

exponential model of the form

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vFeFFFvF V

vv

CSC

s

s +−+=−

δ

)()( …(2)

where, F(v) is the friction as a function of velocity

FC is the kinetic friction (Coulomb Friction)

FS is the static friction

FV is the viscous friction parameter, incorporated later [9]

v is the motion velocity

vs is an empirical parameter called the Stribeck velocity

δs is an empirical parameter whose value was suggested to be between 0.5 and 1 [9]

used a Gaussian parametrization with δs = 2.

The exponential model (2) is not a strong constraint and by appropriate

choice of parameters, curves of types (a), (b) and (c) as shown in Fig. 2.7 can be

realized. More data such as that presented in [5] over a range of materials, conditions

and lubricants is required.

2.2.2 Armstrong’s Seven Parameter Model

Another empirically motivated model was Armstrong’s seven parameter model [19]

in which the pre-sliding displacement is described by

xkxF t−=)( …(3)

And sliding is described by

)sgn()/)((1

1),(),( 22 v

vtvtFvFFtvF

sL

SVC

−+++−=

τγ …(4)

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where the rising static friction (friction level at breakaway) is given by

γγ

+−+= ∞

2

2,,,2 )(),(

t

tFFFtF aSSaSS …(5)

FS,a is the Stribeck friction at the end of the sliding friction

FS,∞ is the Stribeck friction after a long time at rest (with a slow application of force)

t2 is the dwell time

τL is the time constant of frictional memory

γ is the temporal parameter of the rising static friction

kt is the tangential stiffness of the static contact

As the name states, the model requires seven parameters – kt, FV, FC, FS,∞, vS, τL, and

γ as defined earlier. Each of the seven parameters of the model represents a different

friction phenomenon and their magnitudes depend upon the mechanism and the

lubrication. Also, since the model consists of two separate models, one for sticking

and one for sliding, a logical statement probably requiring an eighth parameter would

determine the switching [20]. The model states would have to be initialized every

time a switch occurred.

2.3 Theoretical Models

2.3.1 Dahl Model

Another approach to modeling friction is to use the simplified pictures of the

physical contact for example as the ones shown in Fig. 2.3 as the starting point. Dahl

[29] introduced two models for frictions essentially based upon a reformulation of

the stress-strain curve, thus being closely related to physics. In the first model, the

friction interface is modeled as a junction at which shearing takes place and the

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Fig 2.7 Friction as Function of Steady State Velocity for Various Lubricants [9]

resulting friction force depends on the strain caused by the external force. This

corresponds to pre-sliding displacement. If the strain is large enough, the junction

breaks and the friction force remains constant at the level at which the rupture took

place. When the external force is removed the result is a permanent deformation.

The second model introduced by Dahl [29] is based on the assumption that the

change in friction force can be described by

dt

dx

dx

dF

dt

dF= …(6)

This would imply that the friction force is only position dependent. The model

exhibits hysteresis between velocity and friction force. The hysteresis depends upon

the rate of change of velocity. A good agreement between the model and true friction

was observed and Dahl also noted that the model is a generalization of ordinary

Coulomb friction. The second model is further studied by Dahl in [30] [31] where it

is used to describe frictional damping of a wire pendulum and is also applied to

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internal friction. The position dependency of the friction force is further explored and

Dahl proposes the relation

−=

dt

dx

F

F

dt

dx

F

F

dx

dF

C

i

C

sgn1sgnsgn10σ …(7)

where σ0 is the stiffness and the exponent i is a model parameter. The second

factor is present to stabilize the differential equation for simulation purposes. In [32]

the model is used when experimentally studying friction in ball bearings and

parameters of the model are fitted to agree with the experiments. In one type of

fitting, i is estimated to 1.5 quite consistently and it is observed that the rest stiffness

σ0 is important to the fit. In the other type, i is fixed to 1 and 2 but it is observed that

the fitted data do not agree with the measured data over an as large friction force

range.

When referred in literature the Dahl model is often simplified using i = 1 to

dt

dx

dt

dx

F

F

dx

dF

C

−= sgn10σ …(8)

The Dahl model has been used extensively for simulation of systems with

friction. The model captures many properties of real friction phenomenon but not the

important stick-slip effect.

2.3.2 Lugre Model

The LuGre model is an extension of Dahl’s model which captures many

properties of the friction including stick-slip motion. The starting point of the LuGre

model’s derivation is force caused by solid-to-solid contact as visualized in Fig. 2.8.

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Fig 2.8 Friction Interface Between Two Surfaces Modeled as Contact Between

Bristles [10]

Surfaces are very irregular at the microscopic level and therefore two surfaces make

contact at a number of asperities. This can be visualized as two rigid bodies that

make contact through elastic bristles. When a tangential force is applied, the bristles

deflect like springs giving rise to the friction force. If the force is sufficiently large,

some of the bristles deflect so much that they slip off each other. New contacts are

then formed as the two surfaces continue to move and the process goes on. The

contact phenomenon is highly random due to the irregular forms of the surfaces. The

average deflection of the bristles is denoted by z and is modeled by

zvg

vv

dt

dz

)(−= …(9)

where v is the relative velocity between the two surfaces.

The first term gives a deflection that is proportional to the integral of the relative

velocity. At steady state, the deflection z approaches the steady-state value

)sgn()( vvgz ss = …(10)

when v is constant.

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The function g is positive and depends upon many factors such as material

properties, lubrication and temperature. For typical bearing friction, g(v) will

decrease monotically from g(0) when v increases, corresponding to the Stribeck

effect. A proposed parametrization of g is [20]

( )

−+=

2

0

1)( sv

v

CSC eFFFvgσ

…(11)

where FC is the Coulomb friction level, FS is the level of stiction force and vs is the

Stribeck velocity.

The friction force generated from the bending of the bristles is described as

vFdt

dzzF v++= 10 σσ …(12)

where σ0 is the stiffness, σ1 is a damping coefficient and Fv is the coefficient of

viscous friction. This is known as the LuGre Model which is characterized by six

parameters σ0, σ1, Fv, FC, FS and vs. Thus for steady-state motion, the relation

between friction force and velocity is given by

vFveFFvFvF v

v

v

CSCSSs +−+=

)sgn()()sgn()(

2

…(13)

This model reduces to the Dahl Model if g(v) = FC /σ0 and σ0 = σ1 = 0

The model is simple yet captures most friction phenomena that are of interest for

feedback control. The low velocity friction characteristics are particularly important

for high performance pointing and tracking. The model can describe arbitrary steady-

state friction characteristics. It supports hysteretic behavior due to frictional lag,

spring-like behavior in stiction and gives a varying break-away force depending on

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the rate of change of the applied force. All these phenomena are unified into a first-

order nonlinear differential equation. The model can readily be used in simulations

of systems with friction. A drawback of the LuGre model is that it does not describe

presliding and the dependence of friction on dwell time. Some of these can be

captured by modification of nonlinearities but they require an additional state. A new

class of single-state models was defined by [33] in which presliding is elastoplastic

and under loading, frictional displacement is first purely elastic and then transitions

to plastic. In [28] the origin memory effects in plasticity and ways to deal with them

are discussed. In [34] limit cycles caused by friction are treated and necessary

conditions for limit cycle and conditions for local stability are given.

The nonlinear function in the LuGre model (equation 13), which describes the

steady state friction force at constant velocities, has been measured using servo

systems. The precision of these systems do not give accurate results for very slow

sliding speeds below 0.01 m/s. This behavior is crucial to describe stick-slip

behavior and precision tracking. Strong experimental support in the form of precise

measurements at low tracking speed is critical for the development of improved

models.

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3. New Friction Measurement Instrument - The Hysitron

Triboindenter®

3.1 Historical Overview of Tribological Instrumentation

Tribology has been a part of Physics and Engineering for a long time since the

classic results of French physicists Amonton and Coulomb. There was significant

progress in this field in the 1970s [27] and greater insight was gained in the past 15-

20 years when tribologists began to work in the nanoscale [35].

Atomic Force Microscopy (AFM) is an early offspring of scanning tunneling

microscopy (STM). The force between a tip and the sample was used to image the

surface topography. The surface force apparatus (SFA) was developed by

Israelachvili [36] for measuring van der Waals forces between molecularly smooth

mica surfaces. Recently, new friction attachments have been developed suitable for

use with the SFA which allow for the two surfaces to be sheared past each other at

varying sliding speeds at varying sliding speeds while simultaneously measuring

both the transverse force and the normal force between them [11]. The Scanning

Force Microscope (SFM) was introduced in 1986 to measure the topography of

nonconducting surfaces and within a year its potential to measure forces was applied

successfully to measure the atomic scale variation of of the friction force as a sharp

tip scans over a surface [18]. The simple but clever idea of turning the SFM around

by 900 in order to measure the lateral force instead of the normal force led to the

birth of the Scanning Force and Friction Microscope (SFFM). The SFFM has the

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ability to resolve the atomic periodicity of the topography and the friction force as

the tip moves over the surface. The dynamic-SFFM, provides for increased

sensitivity through lock-in technique to small difference in friction forces and offers

enhanced scanning speeds [2].

Nanoscale experiments give a deeper understanding of the basic mechanisms that

generate friction and physical explanations for dependence of friction on contact area

velocity. The AFM does not yield a very high force range, and thus is limited to very

low load and very small (nearly atomic) scale friction experiments, more suited for

tribological purposes. The Hysitron Triboindenter is a stand-alone nanomechanical

testing system which allows users to characterize materials on nanometer length

scales. Traditionally it is used to characterize materials by making a nanoscale indent

using a precisely formed tip. This indent and resulting force vs. displacement data

can be used to extract material properties of the sample [3]. Quasistatic

nanoindentation can measure properties including Young’s modulus, hardness,

viscoelasticity and fracture toughness. Scratch testing using lateral can be used to

quantify scratch resistance, critical delamination forces, friction coefficients etc. A

comparison of the performance characteristics and ranges for the SFA, SFFM and the

Hysitron Triboindenter® (nanoindenter) are given in Table 3.1. The nanoindenter

seems to be well suited for measuring motion in the micro-load scale and in the low-

velocity regime. The tip can move laterally and vertically, and can either be position

or force controlled using feedback on the transducer. Lateral motions can be used to

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Operating Parameter

Radius of Mating

Surface/Tip

Normal Load Sliding Velocity

SFA 0.2 – 2 cm 10 - 100 mN 0.001 - 100 um/s

SFFM/dyn. SFFM 10 - 300 nm 0.1 - 500 nN 0.02 - 2 um/s

Nanoindenter 1 - 400 um 0.001 - 10 mN 0.1 - 100 um/s

Table 3.1 Comparison of the SFA, SFFM and the Nanoindenter [1, 2]

extract friction data. The instrument is well suited for our friction experiments

because it can measure displacement and normal and lateral forces simultaneously.

The normal and lateral forces can be controlled accurately using feedback and it also

has potential for experiments that bridge the gap between the macro and nano scales.

3.2 The Hysitron Triboindenter® - Components and Design

As shown in Fig. 3.1, the basic components of the nanoindenter are -

- Triboindenter base

- XYZ Staging system

- Top Down Optics

- TriboScanner

- Transducer Assembly

- Vibration Isolation Assembly

- Acoustic Enclosure

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- Electronics for transducer, stage, piezo and optics

- Computer system with Data Acquisition Boards

A brief description of the important components is as follows –

3.2.1 Stage and Optics

Triboindenter Base

The primary function of the granite base is to support the other components

which are connected to it using a special bracket. The base is designed to minimize

drift and noise transfer while maximizing the stability of the instrument.

XYZ Staging System

The coarse control of the samples and tip positions is controlled by the XYZ

staging system. The X-axis and Y-axis stages are mounted to the bottom of the base

while the Z-axis stage is mounted on the bridge. The sample stage is connected

directly to the XY stage via a dovetail mount. The TriboScanner and optics are

mounted to the Z stage which ensures that the probe tip and the optics move

together. The step resolution of the XY encoder is 50 nm while that of the Z stage is

13 nm.

Top-Down Optics

The optics are located at the right side of the Z-stage. There is a 10X

objective on the end which sends the magnified image to the zooming optics which

magnify the image again upto 10X. The image is then sent to the CCD detector

which is then sent to a video capture board in the computer system. The maximim

field of view is 850µm X 650µm.

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Fig 3.1 The Hysitron Triboindenter (Nanoindenter) [6]

3.2.2 Triboscanner

As shown in Fig. 3.2 (a), the TriboScanner is designed to provide fine scale

positioning of the indenter tip and for imaging of the surface before and after the

tests. The final approach and positioning of the tip is provided by a 3-axis piezo

scanner that has a precision 300 times higher than the Z stage and 10 times higher

than the XY stage. The piezo-scanner, shown in Fig. 3.2 (b), has a rigid tube

configuration – the dimensions increase in one direction and decrease in another

maintaining a constant volume. The top half of the TriboScanner tube has four

seperate quarter cylinders, each controlling motion in a different direction +X, -X,

+Y and –Y. When each separate portion of the top half of the TriboScanner tip is

energized, the ceramic of that portion lengthens along the axis of the scanner while

the walls become thinner causing the tube to bend to the side. Energizing the lower

tube lengthens it providing motion along the Z axis. Thus 3D motion is achieved by

manipulating voltages sent to all five parts of the tube.

Acoustic Enclosure

Triboscanner and Optics

Electronics Rack

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Fig 3.2 (a) TriboScanner and Optics [6] (b) Schematic of Piezo Scanner [3]

Fig 3.3 (a) Triboindenter Transducer [6] (b) 1-D and 2-D Transducers [3]

3.2.3 1-D and 2-D Transducers

Transducer Assembly

The transducer assembly, as shown in Fig. 3.3 consists of the

force/displacement sensor, drive circuit board and the hardware used to mount the

TriboScanner. The transducer has a three-plate capacitive design as shown in Fig. 3.4

(a) that allows both electrostatic force actuation and capacitive displacement

measurement in a single device. It also provides for high sensitivity, large dynamic

range and a linear force or displacement output signal.

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Lateral Force Transducer

The lateral (X-Axis) forces and displacements using a 2D transducer system

are applied and measured similar to the indentation (Z-Axis) systems. The X axis is

under displacement control rather than force control and there is a control loop to

apply proper forces which has been investigated in detail in section 5.4.1. Because of

the larger range of motion along X-axis, there are large displacement corrections for

the force that are taken into account. A schematic of the lateral force transducer is

shown in Fig. 3.4 (b). The transducer has two additional force-displacement sensors

to monitor and control position in the X-direction.

3.2.4 Displacement/Force Application and Measurement

The force is applied electrostatically while the displacement is measured

simultaneously by the change in capacitance. The sensor consists of two fixed outer

electrodes (drive plates) which are driven by AC signals 1800 out of phase with each

other as shown in Fig. 3.5 (a). The electric field potential at the drive plates is

maximized (equal to the applied signal) and minimized (zero) at the exact center of

the drive plates. This results in a bipolar output signal equal in magnitude to the

drive plate at the maximum deflection, zero at the center position, and varying in a

linear manner between the maximum displacement and center position. This creates

an electrostatic attraction between the center plate and the bottom plate, pulling the

center plate down. The force can be calculated from the magnitude of the voltage

applied. The maximum force available from the 1-D transducer is approximately 30

mN. The specifications of the transducer are listed in Table 3.2.

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Fig 3.4 Cross Section Schematic of (a) 1-D and (b) 2-D Transducer [3]

Fig 3.5 (a) Displacement Measurement (b) Force Measurement [3]

3.2.5 Limitations of the Lateral Force Transducer: Nonlinearity and

Transducer ‘Breakpoint’

Nonlinearity

The spacings between the plates inside the lateral transducer are

approximately 100-150 µm. This means that the total physical travel that can be

allowed in the X-axis is limited to this amount although the linear range is much less.

The center plate of the transducer is moved by actuating one of the drive plates. The

center plate would then be electrostatically attracted towards the drive plate. When

the center plate moves, the distance between the drive plate and the center plate is

|Electric Field Potential|

1800 out of phase Linear variation

0 max

Drive Signal Plate Pulled Down Electrostatically

600 V DC Bias

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Z-Axis X-Axis

Maximum Force 10, 30 mN 2 mN

Load Resolution 1 nN 3 µN

Load Noise Floor 100 nN 10 µN

Maximum Displacement 20 µm 15 µm

Displacement Resolution 0.04 nm 4 nm

Displacement Noise Floor 0.2 nm 10nm

Thermal Drift <0.05 nm/s <0.05 nm/s

Table 3.2 Specifications of the Transducer [3]

reduced, causing an increase in the electrostatic force.

Transducer ‘Breakpoint’

‘Breakpoint’ is another issue with the operation of the lateral transducer

which further limit its range. When plates reach a critical distance apart the force

constant gets too high causing them to snap together. This typically happens well

before the maximum physical displacement of the transducer has been reached.

Another critical point in the X-axis transducer occurs when the scratch switches from

one plate to another. When center plate passes through zero, the voltage on the drive

plate moving the center plate goes to zero and the other plate begins moving the

center plate. Since voltages on both plates goes to zero for an instant, the control

loop loses control of the force and a “breakpoint” occurs as shown in Fig. 3.6. Some

key transducer constants such as the Electrostatic Force Constant and the Plate

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Spacing change, thus all scratches must be made completely on one side of the

breakpoint

3.3 The Hysitron Triboindenter® - Data Acquisition

All of the control of the nanoindenter is done through the software,

TriboScan® 5.0, which is designed to fully automate most of the tasks required from

the nanoindenter. The stage is controlled using the Positioning window as shown in

Fig. 3.7 which is also the main window of the software. The Video window enables

the user to view the stage and sample with the top down optics. The Method editor is

the control center for automated experiments.

3.3.1 Load Functions

Load Functions are set up in the Data Acquisition and Data Analysis section

of the software. The load function for lateral force analysis looks like the one shown

in the Fig. 3.8. There are two graphs that display the Normal Load versus Time and

the X-Position versus the time. The individual segments of each graph are linked

with respect to time. The user can change the beginning and end loads and the

beginning and end positions along with the time for each segment thus defining the

exact load and velocity pattern required. As seen in the figure, a typical loading

function consists of five segments. During the first segment, as seen from the top

window, the normal load is kept at zero and the tip is moved to +4 µm, which is half

the length of the desired scratch, over a period of 5 seconds. During the second

segment, the tip is held at that location and the normal load is increased to the

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Fig 3.6 Schematic of Center of Transducer Showing Breakpoint [3]

Fig. 3.7 The TriboView Positioning Window [3]

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desired value, 1000 µN in this case over a period of 3 seconds. In the third segment,

the normal load is maintained at the desired value and tip is moved from +4 µm to -4

µm over a period of 16 seconds which corresponds to a velocity of 0.5 µm/s. At

theend of the motion, the displacement is held constant at -4 µm and the normal load

is decreased to zero in the fourth segment. The tip is then moved back to the zero

displacement value in the last segment. This method ensures that the scratch made is

centered for imaging purposes. After loading the required tip and performing the

necessary calibrations, the desired load function can be executed. The resulting

Scratch Data window contains four graphs as shown in Fig. 3.9. Normal Force,

Normal Displacement, Lateral Force and Lateral Displacement are all plotted as

functions of time. The Normal Force (top-left) and the Lateral Displacement

(bottom-right) plots are the real-time results of the input load function. The Lateral

Force (bottom-left) plot yields the required friction force versus time.

3.3.2 Software-based Tilt Correction

There is always some tilt to the sample no matter how level we try to make it

and the measured Z displacement is a combination of the tip moving into the sample

and the tilt of the sample. If, during the first few seconds of a scratch, the tip is

moved to the starting position of the scratch with no normal force applied, we may

observe a slope in the result because of the tip being pushed up on account of sample

sloping up in the direction of travel. We may also observe the tip coming off the

surface completely if the sample slopes away from the tip since the sample cannot

pull the tip down with it. The tip might have to be moved in both directions first to

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Fig 3.8 Typical Loading Function for Scratch Testing

Fig 3.9 Typical Scratch Testing Results Window

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determine which way the sample is tilting because the data is only valid in one

direction. The Tilt Correction functionality in the software calculates the tilt and

adjusts the data to compensate for it so that only the displacement of the tip into the

sample is plotted on the Z Displacement graph. To correct for the tilt, the red cursors

in the normal displacement plot have to be positioned on an area of the plot where

the normal force is constant and the X-axis is displacing, as shown in Fig 3.10. This

is done preferably at the beginning of the first segment. Upon clicking ‘tilt

correction’, the software measures the slope of the sample, assuming all

displacement is from the sample slope, and removes this slope from the rest of the

data. The generated output file, as shown in Fig 3.11, displays the new tilt-corrected

normal displacement while the rest of the plots remain unchanged. This utility is

applicable only if the sample tilts upwards in the direction of travel so the

experiment might have to be repeated multiple times at different sample orientations

to accurately compensate for the sample tilt.

3.3.3 Drift

The Hysitron triboindenter employs the three-plate capacitive transducer

described earlier that is used as both the actuator and sensor of the instrument. The

force is applied electrostatically while the displacement is simultaneously measured

by the change in capacitance. Electrostatic actuation requires virtually no current,

which is expected to result in virtually no drift due to heating during actuation

compared to many other designs, such as electromagnetic devices, that realize

significant heating during actuation due to high current requirements. However, as

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Fig 3.10 Sample Normal Displacement before Tilt Correction (Top Right)

Fig 3.11 Sample Normal Displacement after Tilt Correction (Top Right)

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Fig 3.12 Lateral Force Profile resulting from a 50 µm diamond tip being held

stationary on a mica surface for 1000 s at 7000 µN normal load

seen from Fig. 3.12, a considerable amount of drift in the lateral force is observed if

the tip is held stationary on the surface for certain amount of time after the

application of a normal force. Typical magnitudes of this drift are observed to vary

between about half the value of the lateral force which would be created if the tip

were in motion, in this case between -300 and 300 µm. This may adversely effect the

friction measurements and needs to be further investigated. The new closed-loop

control for the normal displacement of the transducer combined with the

temperature-controlled stage could be aids in reducing this drift.

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4. Experiments with the Triboindenter: Design, Results and

Analysis

Tribological studies have led to substantial understanding of the friction forces

active during the steady motion of lubricated systems. The dynamic of the friction

process around zero velocity has been investigated by Israelachvili [11] reproduced

in Fig. 22. In [5, 9, 37-39] macro-scale experiments on friction are performed which

we aim to reproduce using the precise capabilities of the nanoindenter. Since we

have good control over tip velocity, tip shape and the force profile applied, we

should be able to make accurate measurements on friction. In [33], the authors create

a model which takes into account presliding displacement (the motion prior to fully

developed slip). Initially, our aim is to repeat the classical friction experiments. By

doing so the experimental setup would be verified and the scaling issues can be

worked out. The controlled nature of the experiments would then lead us to a

physical basis for model changes.

4.1 Sample Preparation and Characterization

Mica, a widespread and common rock-forming mineral, was chosen as the

primary material for our experiments. The choice of mica as one of the contacting

surfaces was based upon that fact that it provides with atomically flat planes and is

thus a common friction element in which to compare obtained friction data to

published experimental data [26, 39]. Ruby-red mica, grade #1 from S&J trading

company with asperity height smaller than ~ 10 pm and ~ 1 µm width was used for

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Fig 4.1 Trace of Friction Forces at Increasing Sliding Velocities on Mica [11]

Fig 4.2 High Grade Mica Sheets (Src: S&J Trading Co.)

our experiments. The choice of high grade ensures that the mica is optically flat,

resilient, incompressible, splits into thin films along its cleavage planes and which

remains tough and elastic, even at elevated temperatures.

4.1.1 Structure of Mica

Chemically, mica is a complex hydrous silicate of aluminum, containing

potassium, magnesium, iron, sodium fluoride and/or lithium and traces of other

elements. It is stable and inert to water, acids (except hydrofluoric and concentrated

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sulfuric acids), alkalis, conventional solvents and oil. The exact chemical formula of

mica is SiO2, Al2O3, K2O, Fe2O3, MgO, CaO, Hg2O and SiO2 (45.09%), Al2O3

(34.5%) and K2O (9.51%) form its major components.

Mica, being a silicate, its structure is based on a fundamental unit of four O2- ions

at the apexes of a regular tetrahedron surrounding and coordinated by one Si4+ ion at

the centre as shown in Fig 4.3 (a) and (b). When three of these oxygen ions are

shared with adjoining tetrahedral leading to a Si:O ratio of 2:5, infinitely extending

flat sheets of unit composition Si2O5, known as phyllosilicates, shown in Fig 4.3 (c),

are formed. Furthermore, substituting aluminum for one quarter of the silicon gives a

negatively charged layer to bind univalent cations, K+ ions, in 12-coordination to

tetrahedral-octahedral-tetrahedral (T-O-T) layers as shown in Fig 4.4. This creates

the mica structure in which the K+ ions are sandwiched between the two T-O-T

layers and occupy large holes between 12 oxygen atoms so that the K-O electrostatic

bond strength is only one twelfth of the interlayer K-O bonds. These bonds are easily

broken at the position of the K+ interlayer cation, and the mica accordingly possesses

perfect cleavage parallel to the layers [12]. Thus a simple Scotch adhesive tape can

be used to remove the top layers of the mica to form the cleavage to expose fresh

layers of mica.

4.1.2 AFM Imaging of Mica Surface

Fig 4.5 shows a top view of an AFM image of the mica cleavage reported in

literature [26], with a grayscale to indicate the range of surface heights. The nearly

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Fig. 4.3 (a) Close-packing representation of a SiO4 tetrahedron (b) Fundamental

unit of all silicates (c) Formation of phyllosilicate [12]

Fig. 4.4 (a) Schematic 3-D diagram of the structure and composition of mica (b)

Development of 2-D mica structure from phyllosilicate [12]

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hexagonal array of light spots in the image of Fig. 4.5 (a) corresponds to hexagonal

rings of K+ ions in the cleavage planes. The two-dimensional roughness was

measured by cutting along the two adjacent apexes of K+ ions (line A–A) and the two

separate apexes of K+ ions (line B–B) on the AFM image. Two profiles with

different spatial wavelengths of 5.2 and 6.2 Å were reported for two different

directions on the surface, shown in Figs. 4.5 (b) and 4.5 (c), respectively. The

arithmetic mean deviation roughness, Ra and peak-to-valley, P-V of the A-A section

are Ra = 0.25 Å and P-V = 0.91 Å. For the B–B section, Ra = 0.29 Å and P-V = 1.05

Å.

Fig 4.6 shown an AFM image of the mica sample used in our experiments taken

with Asylum Corp’s Molecular Force Probe 3D (MFP3D) system which has a noise

floor of 20 pm, a sensitivity of 42 nm/V on the mica surface and 1 kHz bandwidth.

From Fig 4.7, we can see that the peak value along this scan is about 1.1 Å, which is

in good agreement with the reported peak values in literature in the range 0.91 Å –

1.05 Å, discussed earlier. The visible asperities are of the order of tens of picometers

in height and thus the mica surface can be considered to be essentially flat.

4.1.3 Preparation of the Mica Sample

A mica sheet was glued on to a small steel plate of diameter approximately 15

mm using superglue. The sample was placed in the center position towards the rear

end of the nanoindenter. A new cleaved surface was prepared every time by placing a

piece of scotch tape on top and lifting away, removing the uppermost layers.

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Fig. 4.5 (a) AFM image of Mica cleavage (top view) (b) A-A profile cut along the

two adjacent apexes of K+ ions (c) B-B profile cut along the two seperate apexes

of K+ ions [12]

Fig. 4.6 AFM Image of the Mica Sample using Asylum Corp’s Molecular Force

Probe 3D System

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Fig 4.7 Surface profile (Z) along the length of scan

On prolonged exposure to laboratory air, a 0.3-0.4 nm fluid layer of water and

common organics adsorb to the mica surface from the time it is cleaved until it is

installed in the nanoindenter [1]. Over time, this layer could build up to 2 nm

depending upon the specific laboratory conditions and can be usually dissolved away

by immersion in pure water. Therefore, although all experiments are conducted on

dry mica surfaces under atmospheric conditions, presence of an up to 2 nm layer of

adsorbed water and organics cannot be completely avoided

4.2 Triboindenter Tips

There are many tips provided by Hysitron for use with the triboindenter,

including Berkovich, 90-degree (cube corner), cono-spherical, cylindrical, Vickers

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(four sided pyramidal), Knoop (four sided pyramidal with opposite sides parallel)

and fluid cell tips. Cono-spherical and in rare cases cylindrical tips are most useful

for friction testing purposes.

4.2.1 Cono-spherical Tips

Cono-spherical tips are usually used for indenting in very soft materials and are

also good for scratching on harder materials when no plastic deformation is desired.

We used cono-spherical tips for friction measurements because by choosing a high

radius tip (~50 µm), a relatively flat surface-to-sample contact can be achieved.

A cono-spherical tip geometry is depicted in Fig. 4.8. The parameters can be

calculated as

)−= αsin1(Rhs …(14)

22 hRha −= …(15)

where,

R = probe radius

α = ½ included angle of probe

hs = transition depth from spherical to conical

h = contact depth

a = contact radius

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Fig. 4.8 Cono-spherical Tip Geometry [3]

4.2.2 Tip Selection

Initial friction experiments were conducted with cono-spherical tips of radii 1 µm, 5

µm and 50 µm. By choosing a high radius tip (e.g. 50 µm), a relatively flat surface-

to-sample contact can be achieved and parallelism issues associated with flat tips

could be avoided. Diamond (recently proposed as an alternative material for friction-

based MEMS devices [40]) has been used as the material for the tips which act as

one of the contacting surfaces. The typical parameters of the higher radius tips can be

computed from the equations (14) and (15) and are presented in Table 4.1.

In some cases a sapphire flat punch of diameter 50 µm, shown in Fig 4.9, was

used for the experiments. Also, various non-standard tips made of Al, Stainless Steel

etc. and tips made by attaching small spheres of the desired surface to the end of a

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Fig. 4.9 Cylindrical Tip Geometry (e.g. for 50 µm Sapphire Flat Punch)

R 50 µm 100 µm

Α 90 deg 90 deg

hs 14.64 29.28

amax (at h = hs ) 35.35 µm 70.7 µm

Table 4.1 Design Parameters for Nanoindenter Tips of Radii 50 µm and 100 µm

Blank tip-holders were also used in some experiments and their designs are detailed

in the relevant sections.

4.2.3 AFM Imaging of Cono-spherical Tips

Using Asylum’s MFP3D system, AFM images of the 5 µm tip were obtained

and they are shown in Fig 4.10. Lines were observed along the scan direction and

hence the direction was changed and the scanning was performed again to determine

if the lines were true features on the tip surface or created by the scanning

mechanism. As seen in Fig. 4.10 (b), changing the scan direction caused a

corresponding shift in the orientation of those lines indicating that they were an

R

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Fig. 4.10 AFM Imaging of the 5 µm cono-spherical tip along perpendicular

directions – scan lines indicate direction of tip travel and not real features

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experimental artifact. Small depressions were observed on the surface of the 5 µm tip

but overall the tip surface appeared reasonably well-defined.

An AFM image of the 50 µm 90-degree cone angle tip, which is used most

frequently in our experiments, was then taken and it is depicted in Fig. 4.11. The tip

shows a number of flaky depositions, which are most probably mica flakes from

previous experiments. The tip surface was cleaned with acetone, isopropyl alcohol

and DI water and was blow dried and then re-imaged. The new image, depicted in

Fig. 4.12, did not contain the flaky particles seen before but a number of irregular

features remained which indicate that the tip surface cannot be assumed to be well-

rounded and smooth.

As shown in Fig 4.13, a section along the indicated line was taken and the tip

profile along that line was analyzed. These results are shown in Fig 4.14; the thinner

line shows the trace of the AFM tip while the thicker line shows the derivative

calculated at each point quantifying the slope. The figure indicates that the asperities

on the surface for the given cross-section have heights varying from 5-20 nm while

the asperities themselves are separated by an order of magnitude of 1 µm. These

numbers yield a useful estimate of the profiles of the contacting surfaces and help in

explaining some of the friction results obtained.

4.3 Experiment Design

The nanoindenter is primarily designed for nanoindentation purposes and is not

very well characterized for performing scratch testing. The first step, therefore, was

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Fig. 4.11 AFM Image of the 50 µm cono-spherical tip (unclean)

Fig. 4.12 AFM Image of the 50 µm cono-spherical tip (cleaned with Acetone,

Isopropyl Alcohol and Blow Drying)

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Fig. 4.13 AFM Image of the 50 µm cono-spherical tip showing section along

which Trace is taken

Fig. 4.14 AFM Image of the 50 µm cono-spherical tip – Trace ( ) and Derivative

(-)

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to determine the lower and upper limits within which friction data above the noise

threshold of the instrument could be obtained. The range within which the data is

repeatable and trustworthy was determined to be 0.1 µm/s to 100 µm/s and is

described in detail in the next section.

The experiments we did were to measure friction force as a function of time as

both velocity and the normal load were varied. This resulted in data that could be

used to determine variation of friction force with velocity at different normal loads.

The repeatability of the data was tested and other experiments including those to

determine the change in friction force with dwell time were conducted by varying the

amount of wait time after application of the normal load and before starting motion.

The depth of the tip during scratch experiments was studied as a function of the

normal loading along with the variation of friction behavior with tip radius.

The normal load of the indenter can be varied between 1–10,000 µN for scratch

testing for the 10 mN head. There is another 30 mN head available for higher load

indentation purposes but that does not support the scratch feature of the

nanoindenter. Experiments were conducted by an initial normal load of 500 µN and

increasing it in steps till the maximum possible load. Data points were taken at 1000

µN, 3000 µN, 5000 µN, 7000 µN and 9810 µN (1 mg) normal loads. The available

velocity range, 0.1 µm/s – 100 µm/s, was divided into approximately 50 steps. The

initial step size was chosen to be 0.2 µm/s and it was progressively increased as the

velocity increased. Data was recorded at each of these points at each of the normal

loads mentioned above. We planned to take enough readings to be able to model

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friction in the micro-range up to the macro scale. At each velocity, the nanoindenter

gives the option of recording 1024 – 131072 data points for the entire experiment. If

too high data number of data points were selected, it was observed that for lower

velocities that the resulting curve was a band of data points instead of a single line.

This could be caused due to clustering of points as the nanoindenter attempted to

gather more data within the same time interval. The highest number of points that

could be gathered for a particular experiment without causing this effect was

determined by trial and error and in most cases about 5000 data points were recorded

from the beginning to the end of the experiment.

The TriboScan® software has limited analysis features for scratch data such as tilt

correction and friction coefficient determination as a function of time. The software

gives the option of converting the generated data into text files for analysis outside

their software domain. These text files were further converted into MS Excel

spreadsheets for easier graphics and for utilizing its enhanced computing features.

Visual Basic was used to automate some of the repetitive tasks that needed to be

performed for each of these files and the codes for converting the text files to MS

Excel and drawing the graphs and computing the average friction force etc. are

presented in Appendix B. MATLAB 6.5 was used for calculations and curve fitting

purposes.

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4.4 Experimental Results and Analysis

4.4.1 Velocity Limits of the Triboindenter

The typical loading function for scratch testing and the resulting results window

for scratch data have been described earlier with reference to Fig. 3.8 and 3.9

respectively. Although the instrument is well-suited for friction experiments through

accurate control and measurement of the normal and lateral forces through feedback,

it had not been previously characterized for friction testing. The velocity of the tip is

specified by specifying both the displacement and the time and the maximum lateral

displacement is limited to about 18 µm which is determined experimentally.

Although the velocity can be increased to 1mm/s, 40 µm/s is chosen as a reasonable

upper limit on the velocity to allow the friction force to develop and achieve steady-

state.

The lateral displacement noise floor of the transducer is 10 nm [3] while the

feedback on the lateral displacement is at a rate of 10Hz. Although theoretically we

can scratch very slowly, if there is no change of displacement equal to or greater than

the lateral resolution every time that the feedback loop iterates, the system may try to

overcompensate in moving the probe. Thus the minimum speed to eliminate any

possibility of errors due to the resolution and feedback is 100 nm/s i.e. 0.1 µm/s.

These resolution limitations caused very slow scratches (below 0.1 µm/s) to oscillate

as shown in Fig 4.15. At higher normal loads, this lower limit occurred more

frequently around 0.2 µm/s and certain scratches in which such oscillations occurred

only towards the end of the scratch were observed. Thus the velocity range of the

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Fig. 4.15 An Oscillating Scratch at 3000 µN Normal Load and 0.001 µm/s

velocity

instrument for friction measurements was determined to be 0.2 µm/s – 40 µm/s.

4.4.2 Friction Force Variation with Normal Load

The nanoindenter has a normal load range of 1-10,000 µN. The friction force

obtained using a 50 µm diamond tip sliding on a freshly cleaved mica surface is

plotted against the applied normal load in that range measured at a constant velocity

of 13.5 µm/s. A linear variation is observed, as shown in Fig. 4.16 and it is in

agreement with the Amontons’ law of friction, F = µN [41]. A linear fit yields a

friction coefficient, µ, of 0.0996 which is in the reported range [42]. For testing with

more commonly used materials, a similar curve was plotted using a 50 µm sapphire

flat punch sliding on a sapphire surface yielding a friction coefficient of 0.21 which

is in close agreement with the reported value in literature of 0.2 [43], thus indicating

that the nanoindenter is well calibrated for conducting accurate friction tests.

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Fig 4.16 Friction Force vs. Normal Load plot for a 50 µm diamond tip sliding

against a mica surface at 13.5 µm/s

4.4.3 Friction Force Variation with Velocity at Different Normal Loads

Fig. 4.17 shows the variation of friction force as a function of velocity for the

entire velocity range of the nanoindenter. At a given velocity, the average value of

friction force is computed from the time a positive friction force is observed till the

time the nanoindenter tip is maintained at a constant velocity. At low normal loads,

we see a mostly linear behavior with a slight increase in the friction force as the

velocity increases in addition to some non-linearity at low velocities. One possible

reason for this is that at higher velocities, the atoms that exert the largest opposing

force and thus are closest to becoming unstable now have reduced time for thermal

activation resulting in a higher friction force [44]. At higher loads the trend becomes

more irregular, possibly because surface irregularities, such as those observed on the

AFM scan of the mica tip in Fig. 4.12, play a greater role in determining the friction

500

10003000

9810

7000

0

200

400

600

800

1000

1200

0 2000 4000 6000 8000 10000 12000

Normal Load (µN)

Fri

ctio

n F

orc

e (µ

N)

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Fig 4.17 Friction Force vs. Velocity at Various Normal Loads for a 50 µm

diamond tip sliding against a mica surface

force as the load increases.

4.4.4 Repeatability of Experiments

To test the repeatability of the experiments, the 3000 µN normal load, 13.5

µm/s velocity experiment was executed five times on two different days and the

resulting scratches are shown in Fig. 4.18. For experiments conducted on the same

day, the mean friction force was 362.23 µN with a standard deviation of 4.73 µN

(1.3%). The average recorded on a different day was 373.92 µN indicating that the

standard deviation between the average values of these two days was 8.27 µN (2.2%)

which suggests high repeatability of the data obtained from the nanoindenter.

0

100

200

300

400

500

600

700

800

900

1000

0.01 0.1 1 10 100

Velocity (µm/s)

Frictio

n F

orc

e (µ

N)

1000 uN

3000 uN

5000 uN

7000 uN

8500 uN

9810 uN

Normal Load

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3000 µN Load 13.5 µm/s Vel

300

350

400

8 8.5 9

Time (s)

Fri

cti

on

Fo

rce (µ

N)

Fig 4.18 Multiple Execution of the Same Load Function for Repeatability

4.4.5 Steady State Attainment through Repeated Scratching

Friction traces were observed to change with time and as reported in [45], it

took multiple scratches for the friction traces to reach steady-state conditions. As

shown in Fig. 4.19, for a normal load of 500 µN, it took around 6 repetitions for

friction traces to no longer change with time whereas it took only 3 repetitions for a

normal load of 5000 µN to achieve the steady-state. Thus at higher normal loads the

steady state was reached in fewer repetitions.

4.4.6 Friction Spikes and Effect of Resting Time

As shown in Fig. 4.20, in friction measurement experiments using a 50 µm

sapphire flat punch sliding on a mica surface, the friction force is observed to start

from an initial negative value owing to the inherent tilt in the nanoindenter setup. If a

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Fig 4.19 Repeated Scratching of a 50 µm cono-spherical diamond tip on a mica

surface at 0.07 µm/s velocity at normal load (a) 500 µN (b) 5000 µN

constant velocity is applied, the friction force typically reaches an initial peak and

then drops, after which it rises again and fluctuates about a steady-state value. This

phenomenon, observed at the commencement of sliding for two surfaces at rest in

adhesive contact is commonly referred to as the ‘stiction spike’ [46]. As shown in

Fig. 4.21, the magnitude of the spike increases with increasing applied initial

velocity. This suggests that although traditionally friction force is assumed to be

static and independent of velocity before the actual slip occurs, the onset of the

dynamic friction regime has already begun.

(a) 500 µN Load (b) 5000 µN Load

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Fig 4.20 Friction Spike behavior at increasing velocities for a 50 µm sapphire

flat punch scratching on a mica surface at 7000 µN normal load

Fig 4.21 Friction Spike behavior at increasing velocities for a cono-spherical

diamond tip of radius 50 µm scratching on a mica surface at 9810 µN load

(a) Load - 7000 µN, Velocity – 0.6 µm/s (b) Load - 7000 µN, Velocity – 3.7 µm/s

(c) Load - 7000 µN, Velocity – 9.9 µm/s (d) Load - 7000 µN, Velocity – 15.2 µm/s

-550

-350

-150

50

250

450

650

850

1050

8 9 10 11

Time (s)

Friction F

orc

e (µN

)

0.2 µm/s

4.0 µm/s

18.0 µm/s

36.4 µm/s

Initially

Sticti

Steady-

Direction of

increasing velocity

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been observed to decrease as the velocity is increased as seen in Fig. 4.21. The

position change during this rise time had been previously reported to be roughly

constant [9] but in our experiments it is observed to be roughly linear with the

velocity. At higher loads, since the peak value itself is higher, more time is needed to

reach it at the same velocity.

As shown in Fig. 4.22, there is an increase in the observed initial peak value

of the spike the longer the system rests. One hypothesis is that the binding force

between the two surfaces increases with the contact time leading to an overall

increase in the friction force. No such spikes are observed in friction results where

stick-slip occurs, because stick-slip itself is assumed to be a continuum of such

stiction spikes [46].

4.4.7 Stick-Slip and Anisotropy

Stick-slip is an important feature of friction and in most cases it is

undesirable. When we try to move the tip across the surface at a constant velocity,

the friction force initially rises and when it reaches the break- away force, the tip

starts to slide and the friction decreases rapidly in accordance with the Stribeck

curve. The tip slows down and the friction force increases and the motion stops. The

phenomenon then repeats itself and is termed as stick-slip. On other instruments such

as the SFA, stick-slip has been reported to occur in up to half the cases at low

velocities, being very sensitive to lattice orientation with mica. caused because of

the sharp tip digging into the sample rather than true stick-slip.

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76.275.5173.5272.45

354.80340.46334.45330.62

0

100

200

300

400

0 30 100 1000

Resting Time (s)

Initia

l P

eak F

riction F

orc

e (µ

N)

500 µN

3000 µN

Fig 4.22 Friction Spike Magnitude Variation with Resting Time

Fig 4.23 A typical lateral force profile vs. time produced by a 1 µm diamond tip

on a mica sample at 5000 µN normal load and 0.2 µm/s velocity

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When friction experiments were performed with the 50 µm sapphire flat

punch on mica surface stick-slip behavior of the type shown in Fig 4.24 was

observed. In Fig 4.24 (a), the behavior resembles the behavior of the 1 µm tip shown

in Fig 4.23 probably caused because of the edge of the cylindrical punch contacting

the surface rather than the entire flat surface. Fig. 4.24 (b) seems to be true stick-slip

behavior and it was highly repeatable unlike in the case with the 50 µm cono-

spherical diamond tip. As shown in Fig.4.25, the occurrence of stick-slip in these

experiments exhibited dependence on the relative orientations of the two samples. As

shown in Fig. 4.26, the average friction force was observed to vary almost

sinusoidally w.r.t the sample rotation and the occurrence of stick-slip was observed

near the peak of the sinusoid since higher friction forces are observed when stick-slip

occurs.

Following the lead from these experiments with the sapphire flat punch,

similar orientation experiments were conducted with the 50 µm cono-spherical

diamond tip and the resulting average friction force in this case was also observed to

vary almost sinusoidally w.r.t the sample rotation as shown in Fig. 4.27. As shown in

Fig. 4.28, stick-slip was indeed observed in data points near the peak average friction

force in the previous figure. Stick-slip was more predominant and its nature was

more well-defined in case of experiments conducted with the 50 µm sapphire flat

punch. Apart from the difference in the material itself, one possible reason for this

irregularity could be accounted by the fact that the circular radius of Hertzian contact

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Fig 4.24 Stick-slip type behavior for sapphire 50 µm flat punch sliding on a

mica surface at (a) 5000 µN load at 0.1 µm/s vel (b) 1000 µN load at 0.6 µm/s vel

between the 50 µm diamond cono-spherical tip and the mica surface (parameter a in

Fig.4.8) is only 2.33 µm, substantially lower than that in the former case which can

be 50 µm . Also, the irregularity in the geometry of the 50 µm diamond tip as noted

in Fig. 4.12 could play a role in the non-uniformity of the stick-slip.

The friction force was plotted against velocity for the 50 µm diamond tip

sliding on mica for the entire velocity range available with the nanoindenter and the

results are presented in Fig. 4.29. The friction behavior overall follows the trend seen

in Fig. 4.27. A peculiar behavior observed is that the friction force is observed to be

maximum at 270 degree orientation and min at 90 degree orientation, but at a

similarly diametrically opposite pair of 0 degree and 180 degree orientations, the

friction values are in good agreement. One possible reason for this could be a

possible sample tilt along the 90-270 degree plane leading to a huge variation in

friction along that direction while the 0-180 degree friction measurements would

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Fig 4.25 Friction force vs. time plots for 50 µm sapphire flat punch sliding on a

mica surface at 1000 µN load at 0.6 µm/s velocity at various sample orientations

remain in the same horizontal direction leading to fairly similar friction force

values.

In [47], the frictional anisotropy between the mica-mica interface has been

attributed to the commensurability between the contacting lattices whereas in [48],

the authors state that in the case where the surfaces deform plastically under shear,

friction anisotropy originates with the properties of the bulk crystal lattices. In our

case since the materials in contact are different in nature, neither of the above models

0 deg 90 deg

135 deg 180 deg 225 deg

45 deg

360 deg 315 deg 270 deg

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0

50

100

150

200

250

300

350

0 50 100 150 200 250 300 350 400

Sample Rotation (deg)

Fri

ction

Fo

rce (µN

)

Stick - Slip

Fig 4.26 Friction force vs. Sample Rotation for the 50 µm Sapphire flat punch

sliding against a mica surface at 1000 µN normal load and 0.6 µm/s velocity

Fig 4.27 Friction force vs. Sample Rotation for the 50 µm Diamond tip sliding

against a mica surface at 9810 µN normal load and 1.5 µm/s velocity

Mica Sample - 50 µm Diamond Conical - Spherical Tip

9810 µN Load 1.5 µm/s Vel

400

500

600

700

800

900

1000

1100

0 100 200 300 400

Sample Rotation (deg)

Fri

cti

on

Fo

rce (µ

N)

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Fig 4.28 Friction force vs. time plots for 50 µm Diamond tip sliding against a

mica surface at 9810 µN load and 1.5 µm/s velocity at various orientations

can be directly applied. The magnitude of stick-slip in both cases decreases with an

increase in velocity similar to that reported for the mica to mica surface contact in

[11]. As shown in Fig. 4.30, no significant variation in friction force due to

anisotropy was observed in similar tests with single-crystal Silicon with a cubically

symmetric lattice structure, indicating that the crystal structure of the contacting

substrate rather than that of the diamond tip might be the determining factor for the

occurrence of anisotropy in these experiments.

0 deg 90 deg

135 deg 180 deg

225 deg 270 deg

45 deg

360 deg

Friction Force Vs Sample Rotation

Mica Sample - 50 µm Diamond Conical - Spherical Tip 9810 µN

Load 1.5 µm/s Vel

400

500

600

700

800

900

1000

1100

0 50 100 150 200 250 300 350 400

Sample Rotation (deg)

Fri

cti

on

Fo

rce (µ

N)

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Fig 4.29 Friction Force Vs Velocity at four different angles for a 50 µm diamond

tip sliding against a mica surface at 8500 µN Normal Load

Fig 4.30 Friction force vs. sample rotation for a 50 µm diamond tip scratching

on a Silicon Surface at 9810 µN normal load

4.4.8 Depth of Scratches and Orientation Effects

One advantage of the nanoindenter over other friction measuring instruments

is its ability to generate real-time depth measurements as the scratches are being

performed. As shown in Fig. 4.31, during a velocity reversal experiment both the

Friction Force Vs Sample Rotation

550

600

650

700

750

800

850

0 100 200 300 400

Sample Rotation (deg)

Fri

cti

on

Fo

rce (µ

N)

400

500

600

700

800

900

1000

1100

-30 20 70 120

V elo cit y (µm/ s)

0 deg

90 deg

180 deg

270 deg

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friction force (bottom-left) and the depth (top-right) are observed to be lower in

magnitude on the reverse path although it is traversed with the same velocity. The

reason for the depth being lower could be accounted by the debris created during the

forward scratch which could accumulate in the scratch zone, thus preventing the tip

from going as deep into the sample as during the forward path.

As the scratch begins, the maximum depth first reaches a peak value and then

typically fluctuates around that value until the tip is withdrawn from the sample. Fig.

4.32 shows a plot of the maximum depth at various normal loads for the entire

velocity range. This curve closely follows the Hertzian prediction as shown, thus

suggesting that the deformation during the scratching is purely elastic.

Another feature typical to the case of scratches where stick-slip has been

observed is that the maximum depth attained in case of stick-slip is lower than that in

the case when stick-slip is not observed as shown in Fig. 4.33. For the orientation

experiments conducted with the 50 µm tip described in Fig. 4.29, the depth analysis

shown in Fig. 4.34 suggests that the depth varies inversely with the friction force i.e.

at the 90 degree orientation, the maximum depth is observed but the friction force is

the least at that value and vice versa. This also supports the previous observation of

the depth being lower during stick-slip because typically higher friction forces are

observed during stick-slip. The velocity dependence of depth for these data points is

further explored in Fig. 4.35; at the 0 and 180-degree orientation, the maximum

depth decreases with an increase in velocity while the opposite behavior is observed

in the case of the other two orientations. One hypothesis is that these curves are a

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-10

10

30

50

70

90

110

130

150

-1000 1000 3000 5000 7000 9000 11000

Normal Load (µN)

Ma

x D

ep

th (

nm

)

Observed Max Depth

(nm)

Hertz Prediction(nm)

Fig 4.31 Friction plots for a velocity reversal experiment for a 50 µm diamond

tip sliding against a mica surface at 9810 µN normal load and 0.7 µm/s velocity

Fig 4.32 Maximum depth vs. applied normal load and its comparison with

Hertz prediction for 50 µm diamond tip sliding against a mica surface

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Fig 4.33 Maximum depth vs. velocity comparison at occurrence of stick-slip and

no stick-slip data for a 50 µm diamond tip sliding against a mica surface

Fig 4.34 Max Depth vs. Rotation Angle for a 50 µm diamond tip sliding against

a mica surface at 8500 µN Normal Load

Comparison of Maximum Depth for 9810 µN 50 µm

Conical-Spherical Tip

0

20

40

60

80

100

120

140

0 1 2 3 4

Velocity (µm/s)

Max D

ep

th (

nm

)

Max Depth (nm) -

9810 uN Previous

Max Depth (nm) -

9810 uN Stick Slip

Variation of Max Depth with Angle

0

90

180270

50

70

90

110

130

150

0 50 100 150 200 250 300

Rotation Angle (deg)

Max D

ep

th (

nm

)

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Fig 4.35 Max Depth vs. Velocity varation for a 50 µm diamond tip sliding

against a mica surface at 8500 µN Normal Load

part of a larger oscillatory trend averaging around a certain constant value and out of

phase with each other.

4.4.9 Friction Force Variation with Tip Radius and Geometry

Fig 4.36 shows the penetration depth of various tips into the mica sample at a

constant normal load. It is observed that the 1 µm tip penetrates the deepest whereas

the 50 µm tip has the least penetration among the three diamond tips which is in

accordance with the Hertzian theory. The sapphire flat punch which is also different

in material properties from the harder diamond tips, has a higher surface area leading

to lower penetration depth. The contact depth in the

Max Depth (nm) Varation With Velocity at Various

Angles

85

95

105

115

125

135

0 1 2 3 4 5

Velocity (µm/s)

Max D

ep

th (

nm

) 90 deg

270 deg

0 deg

180 deg

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Fig 4.36 Maximum depth vs. tip radius for 1µm, 5µm, 50 µm Diamond tips and

50µm Sapphire tip sliding against a mica sample at 1000 µN normal load and

3.3 µm/s velocity

case of the diamond tips predicted by the Hertzian theory is in close agreement for

the 50 µm tip while in the case of the other two tips the observed depth is about

double the value predicted by Hertz theory indicating a departure from elastic contact

between the surfaces.

Upon testing with softer materials such as aluminum, increased friction force

values are observed for the 5 µm tip over the 50 µm tip, other factors remaining the

same, as shown in Fig. 4.37. Comparing Fig. 4.37 (a) and (b), it can be concluded

that this effect is opposite to that observed in case of mica. The softness of the

aluminum sample could possibly lead to more penetration by the sharper 5 µm tip

thus producing a higher friction force than that produced by the 50 µm tip therefore

Mica - 4 Tips - Depth Analysis - 1000 µN Load,

3.3 µm/s velocity

0

50

100

150

200

250

0 20 40 60 80

Tip Radius (µm)

Max D

ep

th (

nm

)Sapphire 50 µm flat punch

Diamond Tips

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Fig 4.37 Friction force vs. velocity plots at 5000 µN normal load for the 1 µm, 5

µm and 50 µm diamond tips for (a) Mica Surface, and (b) Aluminum Surface

giving results which are more suggestive of fracture than friction. On the other hand,

being harder, mica does not allow for such deep penetration of the 5 µm tip and the

contact area is much smaller, following Hertz prediction, thus leading to a reduced

friction force. In both cases, as seen in the figure, similar friction experiments

conducted with the 1 µm cono-spherical tip yield much higher values for friction

forces than that produced by the 5 µm tip or the 50 µm tip for the same normal load

100

600

1100

1600

0 10 20 30 40

Velocity (µm/s)

Fri

ctio

n F

orc

e (µN

)

1 µm tip

5 µm tip

50 µm tip

A

0

2000

4000

6000

8000

0 10 20 30 40Velocity (µm/s)

Fri

ctio

n F

orc

e (µ

N)

1 µm tip

5 µm tip

50 µm tip

B

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and velocity profile. Depth measurements show that the sharper 1 µm tip also digs

deeper into both the samples and in the case of Aluminum it exhibits surface damage

for forces higher than 1000 µN. A typical lateral force profile produced by the 1 µm

tip in mica, for the 5000 µN normal load, shown previously in Fig. 4.23 indicates

that the tip moves across various points in the direction of motion in a stop-jump

fashion, penetrating deep into the surface at each contact. For these results, fracture

or surface damage due to tip indentation is not observed to occur as long as the

compressive normal stress at the tip is, on average, less than three times the ultimate

tensile stress of the material. Although subjective, this observation can be used with

an appropriate degree of conservatism to determine the minimum tip radius that will

ensure surface to surface contact without fracture.

4.4.10 SEM Imaging of Mica Cleavage Structure

Some SEM images of mica’s cleavage structure taken with FEI Thermal

Field Emission SEM are shown in Fig. 4.38. A clean piece of mica with no previous

scratches was chosen and a single scratch was made on the surface. Since mica

adsorbs organics quickly upon exposure to ambient atmosphere, the sample needs to

be put into the SEM immediately after the scratch is made. Imaging can be done

using the triboindenter itself using lower radii tips such as the 1 µm tip but the 50

µm tip, used in to make the scratch, is too big for the purpose of imaging. If the mica

sample is placed directly into the SEM, being non-conductive it accumulates charge

and after some time the surface becomes too bright for any scratch image to be

obtained. To resolve this issue, a 1-2 nm Au/Pd film (3:1 composition) was first

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Fig 4.38 SEM Micrographs of Mica Cleavage Structures

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deposited on to the mica surface after making the scratch using the Hummer 62

Sputtering system. Using copper clips to hold this sample inside the SEM helps

maintain the conductivity of the mica surface and thus the sample can be easily

imaged without any charge accumulation.

The SEM images show the cleavage of the mica surface in a repetitive pattern

along the direction of travel of the tip. The overall width of the scratch and the length

is higher than that predicted by Hertz, and one possibility is that these scratches are

not a result of the triboindenter experiments but other artifacts, since it is difficult to

obtain an absolutely clean mica surface. Another possibility for the scratch length not

matching the expected dimensions is that the scratch propagates automatically once

it is initiated.

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5. Further Analysis of Data and Triboindenter Control System

Modeling

5.1 Actuation and Sensing Mechanisms of the Transducer

5.1.1 Electrostatic Actuation

As discussed previously in Section 3.2.3, the transducer of the triboindenter

consists of a three-plate capacitor schematically shown in Fig. 5.1 The force

characteristics for such a system can be derived as follows:

The mechanical force due to spring action is given by

mF kx= …(16)

where k is the stiffness of the spring and x is the displacement.

The force due to electrostatic attraction by the plate is given by 20

2

12 ( )e

AF V

d x

ε=

− …(17)

where,

d = Plate Separation

ε0 = Permittivity of Free Space = 8.85*10-12 C2/N-m2

A = Plate Area

For the given configuration, d = 85 µm as provided by the manufacturer, k = 100

N/m as determined experimentally and as an approximation, A = 1 cm2 = 1*10-4 m2

Equating the forces as shown in Fig 16, from equations (16) and (17), we get

3 2 2 20( 2 ) ( )2

Ax d x d x V

k

ε+ − + = …(18)

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81

Fig 5.1 Schematic of transducer plates showing forces and displacement

Substituting the known values into equation (18), we get

3 4 2 9 18 21.7 10 7.225 10 4.425 10x x x V− − −− × + × = × …(19)

Plotting V versus x, as shown in Fig 5.2, we see the behavior is typical to a parallel

plate MEMS actuator, which shows snap-down behavior at x = d/3. Application of

the large DC bias, shown by points marked in red, allows the operation of the

instrument in a regime of more linear displacement per unit change in voltage.

5.1.2 Displacement Sensing

In case of lateral scratch experiments, the nanoindenter generates the X-Voltage

signal as a separate output. As seen previously in Fig. 3.5 (a), for displacement

measurement two complementary AC signals are applied to the outer plates and the

sensing output is an AC signal which measures the capacitance change ∆C. A typical

differential capacitor with its capacitances and displacements is depicted in Fig. 5.3

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82

0 1 2 3 4 5 6 7 8 9

x 10-5

0

100

200

300

400

500

600

700

Voltage (

V)

Displacement (m)

Fig 5.2 Voltage versus displacement for a parallel plate capacitive actuator

Fig 5.3 A Differential Capacitor – motion of the central plate leads to a change

in individual capacitances on either side of the central plate

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83

The two capacitances are in parallel and hence the differential capacitance, which is

measured by the measurement circuit, can be expressed as:

0 0 02 1 02 2 2 2

(2 )2

A A A x xC C C A

d x d x d x d x

ε ε εε∆ = − = − = =

− + − − …(22)

Assuming a circuit similar to the authors [49], this output is amplified,

synchronously demodulated and low-pass filtered to give a DC output signal. The

change in DC voltage, ∆Vsense, is proportional to the capacitance change:

0sense

f

VV C

C∆ = ∆ …(23)

where ∆Vsense is the change of output voltage, V0 is the amplitude of the applied

AC voltage and Cf is the feedback capacitor.

Combining equations (18) and (19), we get

00 2 2

( )(2 )sense

f

V xV A

C d xε∆ =

− …(24)

i.e.

2 2( .)

sense

xV Const

d x∆ =

− …(25)

For the given plates, plate separation d = 85 µm. To determine the qualitative nature

of the curve, we assume the constant of proportionality to be equal to 1 and plot

∆Vsense versus the displacement x. This is plotted in Fig. 5.4 and it shows a linear

variation around zero displacement. The experimental data is plotted in Fig. 5.5 and

it consists of a closed loop representing the complete motion of the tip from the start

to its return to the same point. The curve of interest is the lower curve during which

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-60 -40 -20 0 20 40 60-0.02

-0.015

-0.01

-0.005

0

0.005

0.01

0.015

0.02

∆ V

sense

Displacement µm

Fig 5.4 Theoretical output curve for a differential capacitor

X Voltage Vs Displacement

-700

-600

-500

-400

-300

-200

-100

0

-10 -8 -6 -4 -2 0 2 4 6 8 10

Displacement (µm)

Vo

ltag

e (

V)

Fig 5.5 Experimental X Voltage Vs Displacement curve for 9810 µN Normal

Load and 4.0 µm/s velocity for the 50 µm diamond tip sliding on mica

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85

the actual scratch takes place. We observe that a DC offset of -532V has been

applied at the point of zero displacement for the purpose of measurement using the

AC signal. The qualitative nature of the experimental curve is similar to that of the

theoretical curve, represented by equation (25), in the vicinity of its linear range.

Comparison of the two curves can be used to extract the system’s unknown

parameters.

5.2 Tilt Characterization of the Triboindenter

A small amount of lateral force (friction force) is always measured during the

loading period of the tip as shown in Fig. 1 from t = 5 s to t = 8 s. A mica sample

was rotated through 3600 and it was noted that a friction force in the same direction

as shown in Fig. 5.6 occurred in all cases although its magnitude varied at different

rotation angles. This ruled out the possibility of the friction force being caused solely

due to tilt in the sample, indicating a tilt in the nanoindenter transducer-tip system

itself. A possible tilt in the assembly had also been previously reported by other users

upon observation using the naked eye.

As shown in Fig. 5.7, let θ be the assumed tilt in the transducer-tip assembly with

respect to the horizontal. The normal force, N, will act on the tip perpendicular to the

base, assuming a perfectly flat sample. Let F be the force applied by the transducer

on the sample along the tip. Thus we have F cos θ = N, and the unbalanced F sin θ

would create a friction force which is measured as the lateral force by the indenter

during the loading. The ratio of this measured lateral force to the applied force F

yields the tilt angle of the tip.

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Fig 5.6 Typical Experimental Result – Lateral Force Vs Time

Fig 5.7 Schematic of Tilt in the Nanoindenter

To estimate the sample tilt, data from the mica sample rotated through 3600 was

used to compute the overall tilt angle at different orientations, plotted in Fig. 5.8. The

mean value of the tilt was found to be 1.50 with a standard deviation of 0.50. Thus the

mean tilt of the indenter tip itself can be assumed approximately equal to the 1.50

θ

N

F

F

F

Sample

Base

Tip

Lateral Force

Typical example of

measurement of a

lateral force

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Tilt of Tip w.r.t. Normal to the Surface (deg)

0.0

0.5

1.0

1.5

2.0

2.5

3.0

0 50 100 150 200 250 300 350 400

Rotation Angle (deg)

Til

t A

ng

le (

deg

)

Fig 5.8 Calculated Tilt of Nanoindenter Tip with a Mica Sample at 9810 µN

Normal Load at Various Orientations

although a larger number of data points would provide a better indication of this

value. The deviation from this value, as seen in Fig. 5.8, could be attributed to the

sample tilt at various locations and orientations.

Wedge-shaped samples, with known wedge-angles could provide for predefined

tilts. In cases where the slope of the sample itself is greater than the tilt in the tip-

transducer assembly, orientation experiments with them, as shown schematically in

Fig. 5.9, would yield friction force acting in a direction opposite to that observed in

current experiments. Such experiments were conducted with a 4-deg, 6-deg, 10-deg

and 30-deg wedges and although the nanoindenter failed to produce data on most

occasions upon use of a wedge-shaped sample, detecting a false surface upon

contacting the titled surface, some successful results such as one shown in Fig. 5.10,

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Fig 5.9 Schematic of Orientation Experiment with a Wedge for Computing

Sample Tilt

Fig 5.10 Positively oriented force during tip loading as observed in friction

experiment with a wedge

α

θ

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were conducted which indicated a higher lateral force in one direction and positive

lateral force in the other direction, therefore suggesting a reversal in the friction force

enforced by the tilt of the sample. This measured tilt in the nanoindenter transducer-

assembly could be the result a misalignment during production or initial system setup

and might be limited to this particular instrument used in our experiments.

5.3 Analysis of the Transition from Static to Kinetic Friction Regime

To understand a typical output behavior at the transition from static to kinetic

regime, data for 9810 µN normal load for 0.2 µm/s, 4.0 µm/s, 18.0 µm/s and 36.4

µm/s applied velocities are presented graphically for analysis in the following

sections. Various characteristics of friction force, lateral displacement, lateral

velocity and acceleration are analyzed along with the variation in friction force and

lateral displacement at varying normal loads is studied. This data is useful for

estimating the control performance of the triboindenter and further modeling based

on the Lugre model using these observed characteristics is performed in the next

section.

5.3.1 Friction Force and Velocity Characteristics

Fig. 5.11 shows the friction force and the velocity attained by the tip during the

transition from static to kinetic friction at four different velocities. As seen from the

figure, there is a ‘stiction-spike’ at the beginning of the motion and the output

velocity also reaches a peak during the same time interval. Such friction spikes are

observed every time there is a transition from static to kinetic friction. A comparison

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90

(a) Velocity = 0.2 µm/s

(b) Velocity = 4.0 µm/s

(c) Velocity = 18.0 µm/s

Applied Velocity = 18.0 µm/s

-600

-400

-200

0

200

400

600

800

1000

1200

7.5 7.7 7.9 8.1 8.3 8.5

Time (s)

Fri

cti

on F

orc

e (µ

N)

-10

0

10

20

30

40

50

60

Velo

cit

y (µ

m/s

)

Lateral Force (uN)

Velocity (um/s)

Applied Velocity = 4.0 µm/s

-600

-400

-200

0

200

400

600

800

1000

7.5 8 8.5 9 9.5 10 10.5 11

Time (s)

Fri

cti

on

Fo

rce (µ

N)

-4

-2

0

2

4

6

8

10

12

14

16

18

Velo

cit

y (µ

m/s

)

Lateral Force (uN)

Velocity (um/s)

Applied Velocity = 0.2 µm/s

-600

-400

-200

0

200

400

600

800

1000

7.5 8.5 9.5 10.5

Time (s)

Fri

cti

on

Fo

rce (µ

N)

-1.5

-1

-0.5

0

0.5

1

Velo

cit

y (µ

m/s

)

Lateral Force

(uN)Velocity

(um/s)

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91

(d) Velocity = 36.4 µm/s

Fig 5.11 Friction Force & Velocity vs. Time Graphs for 9810 µN normal load

of only the friction forces on the same plot has been presented previously in Fig. 4.21

A comparison of four different stiction spikes at different velocities suggests that the

friction spikes are higher and occur quickly as the input velocity is increased. This is

to be expected since at slower velocities there is more time for the friction value to

reach steady state and hence the rise in the friction force is more uniform. Also, the

system is seen to achieve high instantaneous velocities, roughly three times the

magnitude of the desired input velocity, at the beginning of motion caused in part

because the control system of the triboindenter is not able to compensate fast enough

during the transition. This in turn creates high acceleration of the tip during this

transition, as seen in Fig. 5.12 – it should be noted that both velocities and

accelerations for the above analysis have been computed by successive division of

the instantaneous displacement values with the difference in time. It is observed that

the acceleration values achieve higher peaks at higher input velocities with peaks as

Applied Velocity = 36.4 µm/s

-600

-400

-200

0

200

400

600

800

1000

1200

7.5 7.7 7.9 8.1 8.3 8.5

Time (s)

Fri

cti

on

Fo

rce (µ

N)

-20

0

20

40

60

80

100

120

Velo

cit

y (µ

m/s

)

Lateral Force (uN)

Velocity (um/s)

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92

(a) Velocity = 0.2 µm/s

(b) Velocity = 4.0 µm/s

(c) Velocity = 18.0 µm/s

Velocity = 18 µm/s

-8.5

-7.5

-6.5

-5.5

-4.5

-3.5

-2.5

-1.5

-0.5

0.5

1.5

7.7 7.8 7.9 8 8.1 8.2 8.3 8.4 8.5

Time (s)

Late

ral

Dis

pla

cem

en

t (µ

m)

-2000

-1000

0

1000

2000

3000

4000

5000

Accn

um

/s^

2

Lateral Displacement Output (µm)Lateral Displacement Input (µm)Accn (µm/s 2)4 per. Mov. Avg. (Accn (µm/s 2))

Velocity = 0.2 µm/s

-8.1

-8.05

-8

-7.95

-7.9

-7.85

-7.8

-7.75

-7.7

7.7 7.9 8.1 8.3 8.5 8.7

Time (s)

Late

ral

Dis

pla

cem

en

t (µ

m)

-30

-20

-10

0

10

20

30

Accn

um

/s^

2

Lateral Displacement Output (µm)Lateral Displacement Input (µm)Accn (µm/s 2)4 per. Mov. Avg. (Accn (µm/s 2))

Velocity = 4 µm/s

-8.5

-8

-7.5

-7

-6.5

-6

-5.5

-5

-4.5

7.7 7.9 8.1 8.3 8.5 8.7

Time (s)

Late

ral

Dis

pla

cem

en

t

(µm

)

-1000

-800

-600

-400

-200

0

200

400

600

800

1000

Accn

m/s

^2

Lateral Displacement Output (µm)Lateral Displacement Input (µm)Accn (µm/s 2)4 per. Mov. Avg. (Accn (µm/s 2))

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93

(d) Velocity = 36.4 µm/s

Fig 5.12 Lateral Displacement (Input & Output) & Acceleration Vs Time

Graphs for 9810 µN load. Bold line indicates moving average filter of period 4

high as 9000 µm/s2 at input velocity 36.4 µm/s as shown in the figure. The

acceleration signal is very noisy and a moving average filter with period 4 is applied

to observe the overall trend, the peak values are observed to be proportional to the

input velocity while the steady state behavior consists of a fluctuation about a mean

acceleration of zero, which is to be expected since the input velocity is constant.

These unusually high values of the observed acceleration depend up on the control

system design and this behavior could be optimized if the control parameters were

allowed to be fine tuned, which is not an available option with the current system.

5.3.2 Lateral Displacement (Input and Output) Characteristics

As seen from Fig. 5.13, the lateral displacement output closely follows the input

value, with a constant difference between the two values upon reaching steady state,

suggesting the use of PID control in the system. At the commencement of the

Velocity = 36.4 µm/s

-8.5

-6.5

-4.5

-2.5

-0.5

1.5

3.5

7.7 7.8 7.9 8 8.1 8.2 8.3

Time (s)

Late

ral

Dis

pla

cem

en

t

(µm

)-5000

-3000

-1000

1000

3000

5000

7000

9000

Accn

um

/s^

2

Lateral Displacement Output (µm)Lateral Displacement Input (µm)Accn (µm/s 2)4 per. Mov. Avg. (Accn (µm/s 2))

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94

(a) Velocity = 0.2 µm/s

(b) Velocity = 4.0 µm/s

(c) Velocity = 18.0 µm/s

Velocity = 18 µm/s

-8.5

-7.5

-6.5

-5.5

-4.5

-3.5

-2.5

-1.5

-0.5

0.5

1.5

7.7 7.8 7.9 8 8.1 8.2 8.3 8.4 8.5

Time (s)

Late

ral

Dis

pla

cem

en

t (µ

m)

-6

4

14

24

34

44

54

Velo

cit

y (µ

m/s

)

Lateral Displacement Output (µm)Lateral Displacement Input (µm)Velocity (µm/s)

Velocity = 0.2 µm/s

-8.1

-8.05

-8

-7.95

-7.9

-7.85

-7.8

-7.75

-7.7

7.7 7.9 8.1 8.3 8.5 8.7

Time (s)

Late

ral

Dis

pla

cem

en

t (µ

m)

-0.8

-0.6

-0.4

-0.2

0

0.2

0.4

0.6

0.8

Velo

cit

y (µ

m/s

)

Lateral Displacement Output (µm)Lateral Displacement Input (µm)Velocity (µm/s)

Velocity = 4 µm/s

-8.5

-8

-7.5

-7

-6.5

-6

-5.5

-5

-4.5

7.7 7.9 8.1 8.3 8.5 8.7

Time (s)

Late

ral

Dis

pla

cem

en

t

(µm

)

-6

-1

4

9

14

Velo

cit

y (µ

m/s

)Lateral Displacement Output (µm)

Lateral Displacement Input (µm)Velocity (µm/s)

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95

(d) Velocity = 36.4 µm/s

Fig 5.13 Lateral Displacement (Input & Output) & Velocity Vs Time Graphs

Fig 5.14 Schematic Representation of Lateral Displacement Vs. Time Graphs

transition from the static to the kinetic regime, the lateral displacement rises very

slowly as shown in the schematic in Fig. 5.14, by the nomenclature ts for the stretch-

Lateral Displacement

Time

Desired Input Displacement

Output Displacement

ts

ds

dl

Velocity = 36.4 µm/s

-8.5

-6.5

-4.5

-2.5

-0.5

1.5

3.5

7.7 7.8 7.9 8 8.1 8.2 8.3

Time (s)

Late

ral

Dis

pla

cem

en

t

(µm

)

-6

14

34

54

74

94

Velo

cit

y (µ

m/s

)

Lateral Displacement Output (µm)

Lateral Displacement Input (µm)Velocity (µm/s)

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96

time, indicating that the tip is still in contact with the surface and some displacement

is probably caused as a result of the deflection/bending of the tip. As the velocity

begins to rise, a sudden rise is noted in the displacement of the tip suggesting an

actual sliding of the tip on the surface. This rise in the displacement value continues

till the velocity reaches its peak and as soon as it starts reducing, the rate of increase

of displacement decreases until it achieves a steady state corresponding to the desired

input displacement curve. At this point, the velocity achieves a steady state about the

desired input velocity while the lateral displacement closely tracks the desired input

value.

5.3.3 Lateral Displacement and Friction Force Variation with Normal Load

As seen in Fig. 5.15, at any given velocity the higher the normal load,

proportionally higher is the ‘stretch-time’, ts, and the ‘stretch distance’, ds,

schematically represented in Fig. 5.14. After reaching steady-state, the displacement

profiles at different normal loads are in close agreement as expected. As the input

velocity is increased, the magnitudes of both the above parameters are found to

reduce. This is to be expected since the tip, assumed to be contact with the surface

during this period, would tend to slip quicker at higher velocities. Also, as seen from

Fig. 5.16, a higher amount of time is required for the friction force to achieve its

peak value as the normal load is increased at a given velocity. Also, the rate of

change of force for a given velocity is observed to be approximately the same at all

normal loads, i.e. the magnitudes of the slope for the three curves remain

approximately the same. This suggests that the rate of rise in the friction force in the

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97

(a) Velocity = 0.2 µm/s

(b) Velocity = 4.0 µm/s

(c) Velocity = 18.0 µm/s

Lateral Displacement Comparison at

Varying Normal Loads, vel = 0.2 µm/s

-8.2

-7.7

-7.2

-6.77.3 12.3

Time (s)

Late

ral

Dis

pla

cem

en

t (µ

m)

Normal Force

1000 µN

Normal Force

5000 µN

Normal Force

10000 µN

Lateral Displacement Comparison at

Varying Normal Loads, vel = 4.0 µm/s

-8.2

-6.2

-4.27.7 8.7

Time (s)

Late

ral

Dis

pla

cem

en

t (µ

m)

Normal Force

1000 µN

Normal Force

5000 µN

Normal Force

10000 µN

Lateral Displacement Comparison at

Varying Normal Loads, vel = 18.0 µm/s

-8.2

-6.2

-4.2

-2.2

-0.2

7.9 8.1 8.3 8.5

Time (s)

Late

ral

Dis

pla

cem

en

t (µ

m)

Normal Force

1000 µN

Normal Force

5000 µN

Normal Force

10000 µN

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98

(d) Velocity = 36.4 µm/s

Fig 5.15 Lateral Displacement Vs. Time Graphs at Various Normal Loads

(a) Velocity = 0.2 µm/s

(b) Velocity = 4.0 µm/s

Lateral Displacement Comparison at

Varying Normal Loads, vel = 36.4 µm/s

-9

-7

-5

-3

-1

1

7.9 8.1 8.3

Time (s)

Late

ral

Dis

pla

cem

en

t (µ

m)

Normal Force

1000 µN

Normal Force

5000 µN

Normal Force

10000 µN

Friction Force Comparison at Varying

Normal Loads, vel = 0.2 µm/s

-500

0

500

7.3 12.3

Time (s)

Fri

cti

on

Fo

rce (µ

N)

Normal Force

1000 µN

Normal Force

5000 µN

Normal Force

10000 µN

Friction Force Comparison at Varying

Normal Loads, vel = 4.0 µm/s

-550

-50

450

7.7 8.2 8.7 9.2

Time (s)

Fri

cti

on

Fo

rce (µ

N)

Normal Force

1000 µN

Normal Force

5000 µN

Normal Force

10000 µN

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99

(c) Velocity = 18.0 µm/s

(d) Velocity = 36.4 µm/s

Fig 5.16 Friction Force Vs. Time Comparison Graphs at Various Normal Loads

static regime for a given applied velocity is the same at different normal loads. A

detailed modeling and simulation of this behavior is performed in the next section

5.4 Modeling and Simulation

As described earlier in Chapter 3, Hysitron's testing systems employ a three-plate

capacitor design to apply a force through electrostatic actuation and measure the

Friction Force Comparison at Varying

Normal Loads, vel = 18.0 µm/s

-500

0

500

1000

7.8 8.3 8.8

Time (s)

Fri

cti

on

Fo

rce (µ

N)

Normal Force

1000 µN

Normal Force

5000 µN

Normal Force

10000 µN

Friction Force Comparison at Varying

Normal Loads, vel = 36.4 µm/s

-500

0

500

1000

7.8 8.3

Time (s)

Fri

cti

on

Fo

rce (µ

N)

Normal Force

1000 µN

Normal Force

5000 µN

Normal Force

10000 µN

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100

displacement through the change in capacitance. This transducer design is inherently

a force-controlled device that has been traditionally run open loop. The most

significant challenge presented by open loop testing is to reach or maintain the

desired load at a steady value due to a small portion of the load being absorbed by

the springs of the transducer. As a result, at low loads the transducer is unable to

maintain the tip at a constant load as shown in Fig 5.17.

The feedback control for displacement control for the 2-D transducer used in our

experiments operates in closed-loop. The PID parameters are not tunable for the

scratch experiments and thus the optimal feedback response for friction testing

cannot be generated. To gain a better understanding of the feedback control for

displacement application and measurement, the control system of the triboindenter is

modeled and simulated in this section.

5.4.1 PID Parameters for Displacement Control

A typical PID control system for the triboindenter is shown in Fig 5.18. As shown

previously in Fig. 5.14, the various parameters for a typical friction force

measurement experiment are as follows:

Fs = Stiction Force

ts = Stretch Time

ds = Stretch Distance

dl = Lag Distance

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101

Fig 5.17 Typical Normal Load Output of the Triboindenter for a 500 µN

constant Input Force Profile

Fig 5.18 Typical PID Controller for the Hysitron Triboindenter

Based on the above values, the average stiffness can be calculated as:

S

s

F

dσ = …(26)

The force generated by the controller is

20

0

0 0

( ) ( )2

s st t

i si i

mk v tF t mk r d mk v dτ τ τ τ= = =∫ ∫ …(27)

r imk

s Σ

1ms

1s

dmk mk s+

Σ

1−

X mx

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102

Hence,

20

2s

i

s

Fmk

v t= …(28)

The ramp error, neglecting friction force is:

2

1[ ( ) ( )]i

d

mkmk mk s R

ms sΧ = − + Χ + − Χ …(29)

3 2[ ]d i i

s k s ks k k R∴ + + + Χ = …(30)

Thus,

3 2

3 2

3 2

3 2

3 2

(1 )

i

d i

d

d i

d

d i

kR

s k s ks k

s k s ksR

s k s ks k

s k s ksR R

s k s ks k

Χ =+ + +

+ +∴Χ = −

+ + +

+ +⇒ Ε = Χ − = −

+ + +

…(31)

Using the Final Value Theorem, the steady state value of the error for 0( )r t v t= is:

0 0l

i i

kv kvd

k kΕ = − ⇒ = …(32)

Hence,

0 0

( )l i l i

d k d mkk mk

v v= ⇒ = …(33)

Thus, substituting known values from experimental measurements and using the

equations derived above, the values for the parameters mk and mki for the system can

be determined. For the experiments described in the previous section, these

parameters have been evaluated and are listed in Table 5.1.

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103

Normal Load Velocity ts ds Fs mki dl mk

(µN) (µm/s) (s) (µm) (µN) (1/s) (µm) (1/s)

0.2 1.46 0.13 414 1942 0.054 524

4 0.23 0.23 487 4603 0.385 443

18 0.114 0.31 617 5275 1.272 373

5000

36 0.09 0.30 656 4499 2.21 276

0.2 2.26 0.27 742 1453 0.27 1961

4 0.3 0.35 1273 7074 0.657 1162

18 0.147 0.41 1394 7167 1.53 609

9810

36 0.109 0.46 1520 7108 2.353 465

Table 5.1 Parameters from Experimental Observations

5.4.2 Modeling of the Experiment

Modeling of the friction data is based on the Lugre model which was

described previously in section 2.3. The experiment can be modeled by:

0 1

0

( )( )

( ) ( )

( )

( )( )

,

s

d

d d i

v

v

c s c

dxv

dt

dvm F F

dt

F mkx mk v mk I

vdzv z v h v z

dt g v

g v l l l e

dzF z f v

dt

vh v

g v

dI drx r v

dt dt

σ σ

=

= −

= − − −

= − = −

= + −

= + +

=

= − =

…(34)

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104

Introducing the state variables

1

2

3

4

5

x x

x v

x z

x I

x r

=

=

=

=

=

the equations can be rewritten as

12

0 3 1 2 2 3 2 221 2 4

32 2 3

41 5

50

( ( ) )

( )

d i

dxx

dt

x x h x x xdxkx k x k x

dt m

dxx h x x

dt

dxx x

dt

dxv

dt

σ σ σ

=

+ − += − − − −

= −

= −

=

…(35)

where

2

( ) ( )

( )sgn( )'( )

( )( )

'( )sgn( )'( )

( ) ( )

s

s

x

v

c s c

x

vs c

s

g x l l l e

l l xg x e

v

xh x

g x

x g xxh x

g x g x

= + −

−=

=

= −

…(36)

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105

The Jacobian of (35) is

1 2 1 2 3 0 1 2

2 3 2

0 1 0 0 0

'( ) ( )0

0 1 '( ) ( ) 0 0

1 0 0 0 1

0 0 0 0 0

d i

h x x h xk k k

m mJ

h x x h x

σ σ σ σ σ

+ − − − − − − −

= − −

…(37)

5.4.3 Matlab Simulations

Using the equations described in the previous section and the parameters of

PID control-loop determined from experimental data, we can perform simulations of

the friction experiments and compare them with real experimental results. An

iterative process would help in the understanding of the control system implemented

by Hysitron and help optimize its parameters for closed-loop control at the same time

help in improving the friction model itself.

The Matlab programs used for the simulation are described in Appendix C. In

these simulations, the lateral displacement, friction force, velocity and friction state

are computed as a function of time. As seen from Fig. 5.19, the actual position of the

tip follows the desired input with a steady-state error as observed in the experimental

results. The friction force achieves a peak and then settles to its steady state value

according to experimental observations. The velocity first rises and then drops and

attains its steady-state value as seen in the analysis done in the previous section. The

velocity signal is noisy in nature and needs to be further modified to correctly match

experimental observations.

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106

Fig 5.19 Matlab Simulation of Lateral Displacement, Friction Force, Velocity

and Friction State as a function of Time at 9810 µN Normal Load and 4 µm/s

Velocity (all units are in MKS)

As shown in Fig. 5.20, if the lateral displacements of two different

experiments are plotted on the same graph, a ‘kink’ in the lateral displacement

profile is observed and similar to the behavior observed in Fig. 5.15; the higher the

load, the more the duration for which the tip seems to stay in contact with the sample

before slipping. Most of the other observations noted in the previous section can also

be similarly verified using this modeling approach.

0 0.5 10

1

2

3

4x 10

-6

Positio

n

0 0.5 10

0.5

1

1.5x 10

-7

Friction S

tate

0 0.5 1-2

0

2

4

6x 10

-6

Velo

city

t

0 0.5 10

0.5

1

1.5x 10

-3

Friction F

orc

e

t

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107

0 0.2 0.4 0.6 0.8 1 1.2 1.4-0.5

0

0.5

1

1.5

2

2.5

3x 10

-5

Late

ral D

ispla

cem

ent

(N)

Time (s)

5000 uN Output

5000 uN Input

9810 uN Output

9810 uN Input

Fig 5.20 Matlab Simulation of Lateral Displacement Input (Dotted Line) &

Output (Dark Line) Vs Time For Normal Loads 5000 µN and 9810 µN and 18

µm/s Velocity

As seen from table 5.1, the parameters mk and mki vary as the normal load or the

velocity are changed. Such large variations are not desirable since these are the

system parameters and are expected to be constant or at least in a similar range for all

experiments. The real values for these parameters need to be obtained from Hysitron

and then these simulations need to be performed again to be able to iteratively

determine the parameters in the Lugre model, although the current approximations of

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108

system parameters combined with the modified version of the LuGre model seem to

reconstruct the current experimental data to with high accuracy.

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109

6. Tribo-rheometer: Data Fitting to the Lugre Model and

Comparison Experiments

6.1 Rheology and Tribology

The field of rheology is concerned with the description of flow behavior of all

types of matter, especially those with properties intermediate between those of ideal

solids and liquids e.g. non-Newtonian fluids such as mayonnaise, paint, molten

plastics and foams. Although tribology and rheology are typically regarded as distinct

scientific disciplines, in many modern technological applications, for example in

those involving micromachined structures, microfluidic flow channels or

microstructured fluids, both the tribological and rheological properties become

dominant in controlling the frictional dynamics of the system. A self-centering and

self-leveling tribo-rheometry test fixture designed by H. Pirouz Kavehpour (UCLA)

and G.H. McKinley [4] can be used with a standard torsional rheometer to generate

both tribological and rheological data.

As can be seen from table 6.1, the tribo-rheometer offers a higher range of

measurement for both velocity and normal load and than that available from

nano/micro-scale friction measurement devices, although it has a higher noise-floor

than them as well. It can vary the normal stress by changing not only the normal

force but also the area of contact and thus the friction force can be modeled based on

normal stress rather than normal load. It can be used to test almost any kind of

material (metallic or nonmetallic) both for dry friction and the lubricated case.

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Min

Normal

Force

Max

Normal

Force

Z Force

Noise

Floor

Max Lateral

Displacement

(Scratch

Length)

Min

Velocity

Max

Velocity

Hysitron

Nanoindenter 10 µN 10 mN 0.1 µN 16 µm 0.1 µm/s 50 µm/s

Tribo-rheometer 0.5 N 50 N 100 mN ∞ 0.5 µm/s 1.5 m/s

Hess and Soom

Equipment 46 N 360 N ? ∞ 0.01 m/s 1 m/s

Table 6.1 Comparison of the Nanoindenter [3], Tribo-rheometer [4] and Hess

and Soom Equipment [5]

When a lubricant is used, Stribeck curves similar to those observed by Hess and

Soom [5] are obtained and it would be useful to fit the LuGre model [10] to their

data. With that aim in mind, an active collaboration was pursued with them and not

only curve-fitting but also a comparison between the tribo-rheometer and the

nanoindenter measurements was conducted by making the experiments as similar as

possible in terms of material and overlapping velocity ranges. Apart from helping

improve the LuGre model and providing a physical basis for it, such an extended

measurement range would also help bridge the gap in quantifying friction from the

micro to the macro scale.

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6.2 The Tribo-rheometer

6.2.1 Experimental Setup

Rheometers are viscometers which are able to measure visco-elastic properties of

materials other than only viscosity. The common types of rheometers are either

rotational, capillary or extensional, rotational being most common. The AR 2000

torsional rheometer shown in Fig. 6.1 has been used for tribological measurements in

combination with a tribo-rheometry fixture [4]. It can make controlled rate and stress

relaxation measurements over torque range of 0.1 micro N-m to 200 mN-m, with

strain detection of 0.04 micro rad, and a normal force of 0.01 to 50 N with

resolution 0.1 N. It has a stainless steel parallel-plate configuration which offers the

advantage of varying the gap size, H, which is not possible in conical systems which

have a fixed cone angle for a specified conical fixture. Decreasing the gap H enables

higher shear rates to be attained for the same fluids, which is not possible with a cone

and plate system. The lower bounding surface is a Peltier plate assembly which is

used not only to control the temperature of the fluid sample, but also to measure the

normal force acting on the surface using a force transducer that is mounted below the

surface. To obtain tribological properties using a torsional rheometer, a new tribo-

rheometry fixture, shown in Fig 6.2 is designed and installed on the surface of the

Peltier plate. The enables the user to interchange different hard or soft materials as

the lower fixture in place of using the surface of the Peltier plate, thus eliminating

the possibility of damaging the sensitive Peltier plate through wear.

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Fig 6.1 AR 2000 Torsional Rheometer (Src.TA Instruments Inc.)

Fig 6.2 Schematic of Tribo-rheometer and annual text fixture with radii R1 and

R2 respectively [4]

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6.2.2 Alignment

To ensure parallelism of the lower fixture with the upper rotating plate, a self-

aligning method is employed. A small amount of wax is deposited on the Peltier

element and the temperature of the Peltier plate is increased to the melting point of

the wax. The circular disk that forms the lower fixture is placed on the top of the wax

layer. The top plate is brought down and a small normal force is applied to the

fixture. The fixture surface is then forced to be in full contact with the top plate. By

decreasing the temperature of the Peltier plate back to room temperature, the wax is

solidified and the lower fixture remains rigidly attached to the substrate and in

alignment with the top plate. The top plate is then retracted using the rheometer drive

system and a small amount of the test fluid (typically between 10 and 50 µL) is then

deposited on the lower fixture and the top plate is lowered to the desired gap setting.

The gap size is measured using an optical encoder built into the AR-2000 and disk–

disk contact (corresponding to a gap separation of zero) is detected automatically by

the appearance of a finite torque signal. Alignment and concentricity of the new test

fixture can be confirmed by calibration tests in the hydrodynamic regime using

standard fluids of known viscosity.

6.2.3 Experimental Measurements

When a torque, T, is applied to the top plate, the fixture reaches a certain

constant angular velocity, X, which is measured by an optical encoder on the shaft.

Through a feedback system available in the AR-2000 rheometer, one can design a

test procedure that then varies the angular velocity over several orders of magnitude

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at either constant gap or constant normal force and measures the corresponding

torque required for a specified velocity. The range of velocity is from 0.0001-300

rad/sec. Since it is a rotational system, the linear velocity can be correspondingly

varied by changing the radius of the fixture.

6.3 Tribo-rheometer Data Fitting to the Lugre Model

6.3.1 Model Description

As discussed previously in Chapter 2, the LuGre model is a dynamic friction

model which captures many phenomena such as stick-slip motion. It has been used

successfully to model ball-bearing friction and to make friction compensation for

mechanical systems. The model is described by

zvg

vv

dt

dz

)(−= …(38)

0 1 ( )dz

F z f vdt

σ σ= + + …(39)

where the f represents viscid friction. The function g(v) can have different forms, one

possibility, which is a slight variation of the previously discussed form of the

equation and offers more flexibility is

( )0

1( ) s

v

v

C S Cg v F F F eσ

= + −

…(40)

The state variable z has dimension length and can be interpreted physically as the

average deflection of asperities.

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At steady state,

( ) ( )sgn( )v

z g v g v vv

= = …(41)

which gives a Stribeck function of the form

( ) sgn( ) ( ) sgn( ) ( )s

v

v

SS C S CF v F v F F e v f v

− = + − + …(42)

The function f is given by viscosity. Kavehpour’s data [4] measured friction

coefficient as a function of Gumbel number which is defined as:

2

N

RGu

F

η η π

σ

Ω Ω= = …(43)

where,

η = Shear Viscosity

σ = FN/πR2 = Average or nominal stress acting on the rotating plate

Ω = angular velocity

6.3.2 Curve Fitting

Typical plot of friction coefficients vs. the Gumbel number at varying normal

loads is presented in Fig 6.3. In terms of the friction coefficient obtained by dividing

throughout by the steady state friction force, equation (42) can be re-written in the

following form:

31 2 4

p xp p e p xµ −= + + …(44)

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Fig 6.3 Effect of Normal force on friction coefficient plotted vs. Gumbel

number. A copper fixture is used with Pennzoil 80W-90 is the lubricant [4]

Since the Gumbel number is proportional to velocity, we simply fit a function of

the form in equation (44) to the measured friction coefficients. The results of a mean

square fit to logarithmic data for a sample data are shown in figures 6.4-6.7.

The simulation includes the Matlab regression routine "lsqcurvefit" which is a

nonlinear curve fitting algorithm that minimizes mean square errors. The routine

needs to be supplied with an initial set of model parameters, which it refines using an

iterative performance to maximize fit. The code for the Matlab simulation used for

the curve fitting can be found in Appendix A. Table 6.2 lists the values for the

parameters in the equation (44) obtained using the least square curve fitting

algorithm. Good fits were obtained upon removing data points at high and low

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Fig 6.4 Friction Coefficient vs. Gumbel Number Plot of Data and Fitted Curve

at Normal Load 5 N

Fig 6.5 Friction Coefficient vs. Gumbel Number Plot of Data and Fitted Curve

at Normal Load 10 N

10-9

10-8

10-7

10-6

10-5

10-4

10-3

10-2

10-1

Actual and Fitted Curves 10N

Gumbel Number

Friction C

oeff

ecie

nt

(u)

Data Plot

Fitted Curve

y = 0.004765 + 0.07637*exp(-(4.9E+5*x)) + 455.7*x

10-8

10-7

10-6

10-5

10-4

10-3

10-2

10-1

100

Actual and Fitted Curves 5N

Gumbel Number

Friction C

oeff

ecie

nt

(u)

Data Plot

Fitted Curve

y = 0.0159 + (0.0937)*exp(-(3.067E+5*x)) + 388.91*x

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Fig 6.6 Friction Coefficient vs. Gumbel Number Plot of Data and Fitted

Curve at Normal Load 15 N

Fig 6.7 Friction Coefficient vs. Gumbel Number Plot of Data and Fitted

Curve at Normal Load 20 N

10-8

10-7

10-6

10-5

10-4

10-3

10-2

10-1

100

Actual and Fitted Curves 20N

Gumbel Number

Friction C

oeff

ecie

nt

(u)

Data Plot

Fitted Curve

y = 0.0061 + 0.0572*exp(-(3.15E+5*x)) + 482.75*x

10-9

10-8

10-7

10-6

10-5

10-4

10-3

10-2

10-1

Actual and Fitted Curves 15N

Gumbel Number

Friction C

oeff

ecie

nt

(u)

Data Plot

Fitted Curve

y = 0.00668 + 0.04765*exp(-(1.73E+6*x)) + 391.4*x

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p1 p2 p3 p4 p1+p2

5N 0.0159 0.0937 3.07E+5 388.9 0.1096

10N 0.0048 0.0764 4.90E+5 455.7 0.0812

15N 0.0067 0.0477 1.73E+6 391.4 0.0544

20N 0.0061 0.0572 3.15E+5 482.8 0.0633

Table 6.2 Coefficients obtained by least-square fitting a function of the form

31 2 4

p xp p e p xµ −= + + to data obtained from the Tribo-rheometer

velocities. Substantial variation is observed in the friction data because of the

inherent randomness in the system, along with substantial fluctuations in the low

frequency measurements. At lower speeds/frequencies, the oscillations are due to the

lack of averaging since at such low speeds (e.g. 10-4 rad/s) it takes hours for a full

rotation of the disk. Increasing the averaging time would help get rid of these

‘random’ oscillations. At higher velocities, nonlinear changes in the nature of the

curve are observed due to non-Newtonian effects. Since a liquid lubricant is used in

the system, in the high speed regime the fluid is pushed out by centrifugal force

causing large variations in the friction coefficient. The last few data points are not

considered for the fitting to avoid giving too much emphasis to viscid friction.

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The final parameters of the curve fitting are highly sensitive to the initially

supplied parameters. In other words, the final fit is often based on parameters that

converge to a local minimum. As a result, achieving a good fit often involves trial

and error with respect to the initial parameter estimates. Another issue is the

‘unbiasedness’ of the least-squares fit with respect to region of curve where fit is

critical. Certain points in the regions of the curves towards the ends have to be

omitted to improve the fit in the dip region. An ideal curve would weigh the dip data

differently as compared to data in the flat region, and might offer more flexibility of

fit in the dip region. There are also some difficulties with the fits caused due to

occurrence of local minima.

Other function forms were also tested to investigate if there are functions that

fit the data even better. For example, a function of the form

23

1 2 4p x

p p e p xµ −= + + …(45)

similar to those previously discussed in equations (2) and (13) was used for curve

fitting and the resulting fit is shown in Fig. 6.8. This form of the function is more

strictly limited because of the e2 term. In context of the current fitting, the function

form in equation (44) which gives a reasonably good fit, is preserved.

The obtained parameters p1 and p2 show a decreasing trend while p4 shows a

slight increase with the normal load but stays fairly constant around 400. Also, the

variation of these three parameters is roughly linear with normal load for the first

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Fig 6.8 Friction Coefficient vs. Gumbel Number Plot of Data and Fitted Curve

to sample curve using a different function form 2

31 2 4

p xp p e p xµ −= + +

three data points. The parameter ‘p1+p2’, which represents the coefficient of friction

at zero velocity, is in good agreement with the static friction values observed

between the two surfaces. As a first approximation, the parameter p4 corresponds to

R/delta where R is the radius of the disc (~2 cm) and delta is the gap size (< 300

µm). Varying the experimental conditions and performing further curve fitting could

help relate the function g to physics.

6.4 Experimental Comparison of the Nanoindenter and Tribo-rheometer

The range of load in the tribo-rheometer is from 0-50 +/-0.1 N and at the lower

end, reliable data can be obtained for a normal load of 0.5 N and higher. Its radial

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velocity range is 0.0001-300 rad/sec. Since it is a rotational system, the linear

velocity depends on the radius of the fixture used. For a 2 cm mean radius fixture,

this translates into a linear velocity range of 2 µm/s - 6 m/s which overlaps with the

nanoindenter’s velocity range of 0.1 µm/s - 40 µm/s. Although the maximum normal

load capacity of the nanoindenter is 10 mN which is substantially lower than the

lowest normal load at which the tribo-rheometer generates reliable data, it would still

be interesting to compare the results of tribo-rheometer measurements with those of

the nanoindenter in terms of the dimensionless friction coefficient, especially in the

overlapping velocity range by making the experiments as similar as possible in terms

of substrate material. A comparative study of the friction coefficients between the

two surfaces at substantially different normal load and stress would also help

determine if the nanoindenter is an effective tool for bridging the gap in quantifying

friction from the micro to the macro scale.

6.4.1 Experimental Setup

Most of the experiments with the nanoindenter so far have been conducted with a

standard diamond tip sliding on a mica surface. Since it is difficult to use diamond as

one of the substrates in the tribo-rheometer on account of the system’s design, other

materials need to be investigated. Stainless steel is a typical engineering material

which is also a common test material for the tribo-rheometer was chosen as the

material to be used in these experiments. Experiments on the tribo-rheometer were

conducted with an annular stainless steel fixture of inner diameter 19.26 mm and

outer diameter 23.86 mm in contact with a bottom flat plate made of the same

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material. Since Hysitron, the manufacturer of the nanoindenter, does not manufacture

standard tips made with stainless steel, we designed and fabricated a few tips in-

house for the testing purpose. The stainless steel tip design is as shown in Fig. 6.9

while the contacting bottom surface consists of a polished stainless steel surface of

radius 1 cm. Dry experiments were conducted at first followed by lubricated

experiments employing heavy paraffin oil as the lubricant.

6.4.2 Nanoindenter – Experimental Results and Discussion

Fig 6.10 shows the results of friction coefficient vs. velocity for the entire load-

velocity range of the nanoindenter using the stainless steel tip sliding on a polished

stainless steel surface. The friction coefficients obtained from the nanoindenter lie in

the range 0.07-0.14, with an inverse relationship between the applied normal load

and the observed coefficient of friction. As shown in Fig 6.11, stick-slip was

observed at low velocities for the 5000 µN normal loading case, although it could

not be repeated on subsequent runs of the same experiment thus indicating that the

occurrence of stick-slip is highly sensitive to the experimental conditions. A

comparison between the friction results for these two cases in Fig 6.11 shows that the

coefficient of friction is higher in the case where stick-slip is observed, consistent

with the results obtained for the mica-diamond interface.

An interesting feature observed from these plots is the absence of any data for the

mid-range of velocities, typically from 4.5 µm/s to 13.5 µm/s. In this velocity range,

the nanoindenter either applies a very small normal load and measures a negative

lateral force as shown in Fig. 6.12, or at low normal loads (~ 500 µN) it applies a

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Fig 6.9 Design of a non-standard Stainless Steel tip used for comparison

experiments with the nanoindenter

Fig 6.10 Friction Coefficient vs. velocity for a spherical stainless steel sliding on

a polished stainless steel plate observed with the nanoindenter

Nanoindenter - Dry Friction Coeff Variation with

Velocity, SS, LogScale

0.08

0.09

0.1

0.11

0.12

0.13

0.14

0.15

0.01 0.1 1 10 100

Velocity (µm/s)

Fri

cti

on

Co

eff

ecie

nt

(µ)

5000 µN Dry

7000 µN Dry

8500 µN dry

10000 µN Dry

1.75 Φ2

Φ1 Thread Type: 000-120

(1/16th-1/8th) length variable

All units in millimeters

Material: Stainless Steel

2

3

Φ1

Φ1

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Fig 6.11 Friction force vs. time plots showing stick-slip at 5000 µN load at low

velocities and µ vs. velocity comparison with non stick-slip type data

negative normal load as shown in Fig 6.13. The former failure mechanism seems to

occur more frequently, also causing the nanoindenter to intermittently skip through

certain methods, thus generating no data. Both these failure mechanisms seem to

stem from the use of a non-standard tip, which weighs 65.2 mg compared to the

standard diamond tip which weighs 16.9 mg. Although Hysitron suggests the use of

tips which weigh lower than ~80 mg, failure in our case seems to set in as we

approach that limit. Another issue could be the threading of the non-standard tip,

which, being non-standard cannot be secured firmly in place using the tip-mounting

Stick-slip and No stick-slip comparison, 5000

µN Load, SS

0.05

0.1

0.15

0.2

0.25

0.3

0 1 2 3 4 5

Velocity (µm/s)

Fri

cti

on

Co

eff

ecie

nt

(µ)

5000 µN - Dry Stick-

Slip

5000 µN Dry

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Fig 6.12 Typical failure curve obtained when the nanoindenter fails to produce

reliable result, observed in the 4.5 µm/s to 13.5 µm/s velocity range

Fig 6.13 Typical failure curve obtained when the nanoindenter fails to produce

reliable data, observed in low normal-load experiments (~ 500 µN)

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tool provided by Hysitron, possibly allowing for a play or a slip. A possible solution

to this issue could be to either get a standard tip custom-made from Hysitron or

lower the weight of the tip and redesign it so as to accurately fit the tip-mounting

tool. For example, by combining the stainless steel spherical contacting part with

another material for the top part, such as aluminum, the tip weight could be reduced

by a factor of three. Another solution would be to use an Al sphere glued to the end

of a standard blank tip holder.

Lubrication experiments with heavy paraffin oil, a common lubrication element used

with the tribo-rheometer, were conducted with the nanoindenter and the results are

shown in Fig 6.14 and Fig 6.15. The friction results in the lubricated case are in close

range with those observed for the dry-friction case as seen in the case of both the

5000 µN and 10000 µN normal load cases, the coefficient of friction in the

lubricated case for the 10000 µN and at higher velocities for the 5000 µN case being

slightly higher than that in their respective dry case experiments. Possible causes for

this could be because the lubricant itself causes enhanced adhesion or because the tip

remains fully submerged in the fluid without contacting with the surface, detecting a

false surface. 'Full-fluid lubrication' zone in which the coefficient of friction depends

on the viscosity effects is ruled out because the entire experimentation is conducted

at very low velocities. For the 10000 µN normal load case with lubrication, the

friction coefficient is seen to achieve higher value for data points which are in close

vicinity to the velocity range where the failure occurs.

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Fig 6.14 Friction coefficient vs. velocity plots obtained using a nanoindenter at

5000 µN load for dry friction and using heavy paraffin oil as the lubricant

Fig 6.15 Friction coefficient vs. velocity plots obtained using a nanoindenter at

10000 µN load for dry friction and heavy paraffin oil as the lubricant

Nanoindenter - Dry and Lubricated Friction Comparison,

5000 µN Normal Load, SS, Loglog Scale

-1.15

-1.1

-1.05

-1

-0.95

-0.9

-0.85

-0.8

-0.75

-0.7

-1.5 -1 -0.5 0 0.5 1 1.5 2

Log[Velocity (µm/s)]

Lo

g[F

ricti

on

Co

eff

icie

nt

(µN

)]

Nanoindenter - Dry and Lubricated Friction Comparison,

10000 µN Normal Load, SS, Loglog Scale

-1.1

-1.05

-1

-0.95

-0.9

-0.85

-0.8

-0.75

-0.7

-0.65

-0.6

-1.5 -1 -0.5 0 0.5 1 1.5 2

Log[Velocity (µm/s)]

Lo

g[F

ricti

on

Co

eff

icie

nt

(µN

)]

5000 µN Dry 5000 µN Lubricated

10000 µN Dry 10000 µN Lub

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6.4.3 Tribo-rheometer – Experimental Results and Discussion

The friction coefficient vs. velocity plots obtained from the tribo-rheometer

for an annular stainless steel fixture sliding on a stainless steel plate are depicted in

Fig. 6.16, the velocity being plotted in µm/s for easier comparison with the results

obtained from the nanoindenter. The coefficient of friction, computed by averaging

the shear stress with at least 1 revolution of data sampling rate of ~10 Hz, is found to

vary between 0.24-1.56 for the entire data-set and follows an inverse relationship

with the normal load, similar to that observed in case of the nanoindenter. At higher

rotation rates, the system is not able to compensate fast enough to be able to maintain

a constant normal force and hence an increase in the coefficient of friction is

observed. Stick-slip is observed for normal loads higher than 2 N and for radial

velocities lower than 0.01 rad/s.

As seen from Fig 6.17, the repeatability for experiments conducted on the

same day is higher than those conducted on different days. One possible reason for

this is the alignment of the top plate with the bottom plate. As described earlier, a

wax-based alignment method is followed which ensures a good initial contact area,

but since there is an indeterminable inherent tilt in the system, the area of contact

could be substantially different upon a 180-degree rotation. This could substantially

alter the friction force, computed from the contact area-dependent shear stress, thus

causing the observed variability in the friction coefficient. In the actual

experimentation, very little ring contact has been observed between the two surfaces

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Fig 6.16 Friction Coefficient vs. velocity for a stainless steel fixture rotating on a

stainless steel plate observed with tribo-rheometer on two different days

Fig 6.17 Repeatability of the experiments conducted with the tribo-rheometer

on two different days (both plots are plotted to the same scale for comparison)

Tribo-Rheometer - Same Day

Experiment Repeatibility

0.2

0.4

0.6

0.8

1

1.2

1.4

0 500 1000 1500 2000

Velocity (µm/s)

Fri

cti

on

Co

eff

)

F=2N

F=2N (Repeat

Same Day)

Tribo-Rheometer - Different Day

Experiment Repeatibility

0.2

0.4

0.6

0.8

1

1.2

1.4

0 500 1000 1500 2000

Velocity (µm/s)

Fri

ctio

n C

oe

ff (µ

)

F = 4N

F = 4N (RepeatDifferent Day)

Tribo-Rheometer Friction Coeff Vs

Velocity, SS, LogScale

0.2

0.4

0.6

0.8

1

1.2

1.4

1.6

10 100 1000 10000 100000

Velocity (µm/s)

Fri

c C

oeff

)F= 1N (Day 1)

F= 1N (Day 2 -

Repeat)

F=2N (Day 1)

F=2N (Day 1 -Repeat)

F = 4N (Day 1)

F = 4N (Day 2 -Repeat)

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even for a full revolution. Also, there are multiple circular scratches on the bottom

plate used in these experiments from over a year's usage which could affect the

friction measurements. In general, the older plates have been observed to have higher

friction coefficient than the newer ones.

The friction coefficients obtained from the nanoindenter lie in the range 0.07-

0.14, which does not overlap with the range observed in the tribo-rheometer (0.24-

1.56), although at low velocities they agree more closely, especially for the data

observed on the second day of experimentation which exhibits a higher overall

coefficient of friction possibly due to greater misalignment on that day. This

variation is to be expected since one is a linear displacement based system whereas

the other is a rotational system and there is a three orders of magnitude difference in

the applied normal loads and contact areas. Also, the normal stress in the case of the

tribo-rheometer is 20 KPa at 4 N normal load, which is substantially lower than that

for the nanoindenter, which is 0.15 GPa for the 5000 µN normal load. If the 1mm

spherical stainless steel tip used for the experiments with the nanoindenter can be

redesigned into a 1mm cylindrical flat surface, a normal stress similar to that of the

tribo-rheometer could be achieved. This could possibly lead into alignment accuracy

issues similar to those of the tribo-rheometer since there is an inherent tilt in the

nanoindenter setup which could cause the edge of the flat tip to contact the bottom

surface rather than the surface of the tip.

Small particles produced during the experimentation with the tribo-rheometer

also have a direct effect on the friction coefficient. This effect would be reduced if

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experiments are conducted with a lubricant such as heavy paraffin oil and they would

also serve as a good comparison with the friction results reported earlier with the

nanoindenter.

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7. SFA Comparison Experiments: Friction Measurements with

Polystyrene

7.1 The Surface Force Apparatus

7.1.1 Experimental Setup

The surface force apparatus (SFA) was developed by Israelachvili [36] for

measuring van der Waals forces between molecularly smooth mica surfaces.

Recently, new friction attachments have been developed suitable for use with the

SFA which allow for the two surfaces to be sheared past each other at varying sliding

speeds while simultaneously measuring both the transverse force and the normal

force between them [11]. The basic instrument, shown in Fig. 7.1, has a simple

single-cantilever spring to which the lower silica disk is attached. This lower mica

sheet is brought near the upper mica sheet by a piezoelectric device. If there is some

interaction between them, the distance between the mica sheets will not be the same

as that given by the piezoelectric device. Therefore, the force is measured by the gap

distance difference given by the piezoelectric device and that measured directly by

interferometry, attractive forces make the mica surfaces come closer while repulsive

forces try to move the surfaces away. Interferometry, which allows measurement of

distances down to 1/1000 of a wavelength, is used in the surface forces apparatus to

measure the distance between the two surfaces with high accuracy. Multiple beam

interferometry uses intense white light which is sent normally through the surfaces in

the surface forces apparatus. Each mica surface has a highly reflecting silver coating

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Fig 7.1 Schematic of the Surface Force Apparatus (SFA) [13]

on one side; therefore, both surfaces form an optical cavity. The white light is

reflected multiple times on these mirrors before it leaves the interferometer, each

time interfering with the previously reflected beams. Some particular wavelengths fit

exactly an entire number of times inside the interferometer and lead to constructive

interference.

Fig. 7.2 shows a schematic of the multiple beam interferometer at work in the

instrument. A source of white light is focused between two silver-coated surfaces.

The light emerging from the interferometer is sent to a spectrograph, and it consists

of well defined wavelengths which fit exactly an entire number of times into the

optical resonator in the form of curved fringes. The fringes are called Fringes of

Equal Chromatic Order (FECO).

As shown in Fig. 7.3, the crossed cylinder geometry of mica sheets used in SFA

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Fig 7.2 Interferometry based measurement in the Surface Force Apparatus [14]

Fig 7.3 Schematic of Mica Surfaces used in the SFA [14]

is mathematically equivalent to sphere on flat surface contact. Measurement of

adhesion forces and interfacial energy can further be analyzed by JKR (Johnson,

Kendal, Roberts) theory for large soft objects, or DMT (Derjaguin, Muller, Toporov)

for small hard objects.

7.1.2 Polystyrene

Polystyrene (PS) is a nonpolar polymer which is glassy at room temperature. It is

highly adhesive and jumps into contact immediately even upon the application of

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zero load. It is a relatively softer material, with tensile modulus ~ 3 GPa. It is an

isotropic material and shows no orientations dependence in friction experiments.

Friction measurements using PS of various molecular weights (MW) were performed

using the SFA [15]. In the following sections, we present materials and methods used

to reproduce some of these experiments using the nanoindenter for purposes of

comparison.

7.2 Triboindenter: Comparison Experiments and Results

7.2.1 Tip and Sample Preparation

1/8” diameter polystyrene (PS) balls were purchased from Polysciences, Inc.

They were glued on to a triboindenter tip holder obtained from Hysitron using

superglue. Higher viscosity superglue is preferred since it does not slide down the

sphere causing contamination of the surface which would be contacting in the

friction testing. Adhesion accelerators were also used for quick adhesion and a

constant pressure was maintained between the tip and the sphere during the process

of adhesion.

PS of average molecular weight 280,000 was purchased from Aldrich Chemical

Co. About 5 g of a dilute 5 % solution of toluene was added to 0.25 g of PS blocks

and filtered through a 200 nm mesh size PTFE filter. A larger force on the syringe

has to be applied for filtering solutions containing higher molecular weight of PS.

The sample was produced by the ‘casting method’ in which a droplet of the

toluene solution is cast on the top of a mica surface using a syringe or is spin coated.

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Subsequent drying leads to the deposition of a 30-200 nm of PS coating on the top of

the mica surface.

7.2.2 Experimental Results and Discussion

Most of the friction force experiments are conducted with the SFA at zero load

given the highly adhesive nature of SFA. The normal loading functionality of the

nanoindenter, being under open-loop control, is unable to apply a constant zero

normal load as shown in Fig. 7.4. It applies an increasing load which averages

around zero instead and hence the experimental results in this section depict the

average friction force measured during the entire time interval for which the zero

load is applied.

The friction force vs. velocity results obtained from the nanoindenter are plotted

in Fig. 7.5 (a) and they are and compared to the results from the SFA in Fig. 7.5 (b).

The qualitative nature of the curves shows high similarity although the friction force

at zero load between the two systems is different by an order of magnitude. The

primary reason for this behavior is that the adhesive forces in the latter case are much

higher because of a higher contact area between the mica surfaces in the SFA as

compared to that between the tip and the sample in the former case. Since the MW of

the PS sphere used in the above experiments is unknown, another set of experiments

was conducted using PS of MW 280,000 deposited on a 3 mm steel sphere attached

to a tip holder and sliding against PS of MW 280,000 deposited on a mica surface.

The friction force for this system is plotted as a function of normal load at constant

velocity in Fig. 7.6 (a) along with the values obtained for the same material using the

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Fig 7.4 Typical Results Window for a Zero-Load Experiment Performed with

the Nanoindenter for a PS Sphere sliding against a PS Surface (MW 280,000)

SFA. A linear fit indicates a friction coefficient of 0.22 from the triboindenter which

is in good agreement with the 0.15 value obtained from the SFA. The difference

between the measured values between the two systems is higher at low loads and the

values are in better agreement as the load is increased. Possible reasons for this

behavior could be attributed to the contact area difference. The friction force between

two highly adhesive surfaces such as these has been reported to vary as [35]:

k cF S A Lµ= + …(46)

where Fk is the kinetic friction, Sc is the critical shear stress, A is the contact area

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Friction Force Vs Velocity for Polystyrene Ball

Sliding on Polystyrene Sample (MW 280,000)

0

500

1000

1500

2000

2500

3000

0.01 0.1 1 10 100

Velocity (µm/s)

Fri

cti

on

Fo

rce (µ

N)

0 µN

1000 µN

3000 µN

5000 µN

8500 µN

7.5 (a) Friction Forces Between a PS Sphere and an Untreated PS Surface (MW

280,000) as a function of Sliding Speed measured with the Triboindenter

Fig 7.5 (b) Friction Forces Between Two PS 280,000 Surfaces before and after

Crosslinking as a function of Sliding Speed measured with the SFA [15]

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Fig 7.6 Friction Force Between PS (MW 280,000) Deposited on a Steel Sphere of

Radius 3 mm Sliding Against a similar PS Surface deposited on Mica as a

function of Normal Load Measured by Triboindenter at 0.5 µm/s and SFA [15]

and L is the normal load. The adhesive force is proportional to the area of contact, a

typical value for which is 1980 µm2 at L=0 for SFA in experiments using PS

(MW=280,000) whereas that for the triboindenter varies between 0.2 µm2 at L=10

µN to 1110 µm2 at L=10,000 µN using Hertzian approximation. The contact areas

for the two systems at higher normal loads are of the same order or magnitude and

hence there is a better agreement in the observed friction values as expected.

Polystyrene has been reported to exhibit isotropic behavior and in Fig. 7.7

this is verified by rotating the PS sample by 3600 and measuring friction force for a

particular loading function at 450 rotation increment. Unlike the anisotropic behavior

Friction Force Vs Normal Load at v = 0.5 µm/s for PS

(MW 280,000)

µ = 0.15

µ = 0.22

0

500

1000

1500

2000

2500

3000

0 5000 10000 15000

Normal Load uN

Fri

cti

on

Fo

rce u

N

Triboindenter

SFA

Linear (SFA)

Linear

(Triboindenter)

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Orientation Dependence of Friction Force

0

500

1000

1500

2000

2500

3000

3500

0 100 200 300 400

Rotation (Deg)

Fri

cti

on

Fo

rce

N)

Fig 7.7 Friction Force vs. Rotation Angle Plot for a PS Sphere sliding against a

PS Surface of MW 280,000 indicating the Isotropic nature of PS

reported earlier between the mica-diamond and mica-sapphire experiments, no

anisotropy is observed in this case as expected.

Results of stopping time experiments at zero load are presented in Fig. 7.8 (a)

and are compared with those reported earlier with the SFA in Fig. 7.8 (b). Since the

nanoindenter cannot apply a constant zero normal load as described earlier, the

experiments with the triboindenter are conducted at a higher normal load of 1000 µN

and the friction spike value is plotted as a function of waiting time. The results are

similar to that for the untreated PS shown in Fig. 7.8 (b) with both showing an

increase in friction spike as the waiting time is increased although qualitatively the

triboindenter data suggests an approach towards a steady state value as the waiting

period is increased whereas the SFA data indicates a steady increase in friction spike

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Height of Friction Spike in Stop Start Experiments at

1000 µN Normal Load vs. Stopping Time

320

330

340

350

360

370

380

390

400

1 10 100 1000 10000

Stopping Time (s)

Fri

cti

on

Sp

ike

N)

Fig 7.8 (a) Friction Spike vs. Stopping Time Plot for a PS (MW 280,000)

Deposited on a Steel Sphere of Radius 3 mm Sliding Against a PS Surface (MW

280,000) deposited on Mica at 1000 µN Normal Load

Fig 7.8 (b) Height of Stiction Spike of PS 2,000,000 in stop-start experiments as

a function of Stopping Time [15]

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Surface Seperation between two PS Surfaces at

Zero Load vs. Velocity

0

50

100

150

200

0 20 40 60 80

Velocity (µm/s)

Su

rfa

ce

Se

pe

rati

on

(n

m)

Fig 7.9 Surface Separation between PS Sphere and Surface at Zero Load vs.

Velocity

value as the waiting period is increased. This difference could be caused possibly

because the experiments with the SFA are conducted at L=0 whereas those with the

triboindenter are conducted at L=1,000 µN and the contact areas between the two

surfaces are at these loads are quite different, ~1980 µm2 at L=0 for SFA and ~240

µm2 at L=1,000 µN for the triboindenter.

The nanoindenter is capable of measuring the separation between the two PS

surfaces and the maximum separation at zero load is plotted as a function of velocity

in Fig. 7.9. An overall decreasing trend is observed as the velocity is increased

indicating that the adhesive force in the case of higher velocities occurs at lower

separation between the two surfaces since lesser amount of time is available to reach

steady state.

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Overall, the friction measurements with the nanoindenter and the SFA for PS

show high correspondence in their qualitative nature and agree well on the measured

friction coefficient value in the two cases. As discussed previously, experiments at

zero load could be performed with better accuracy if the nanoindenter is able to

implement a close-loop control during the normal loading. The nanoindenter offers

the additional capability of accurately measuring real-time depth of the tip in the

surface during friction measurements. The nanoindenter can add imaging capability

to the experiments if tips of lower radii e.g. 1 µm are used. The SFA can perform

friction measurements on the PS samples up to 50-600 C whereas using the available

heating stage, the triboindenter can extend this capacity to temperatures as high as

1000 C. Further comparison results between the SFA and the triboindenter, similar to

that previously published for the SFA and the AFM [23], can be obtained by

performing more experiments using similar material; sapphire is an example of

another material which can be easily used for experimentation with both SFA and the

nanoindenter.

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8. Conclusions, Applications, New Equipment and Future

Work

8.1 Conclusions

The nanoindenter is determined to be a reliable device for performing friction

experiments at the micro-scale for small displacements and at low velocities (when a

tip of significant radius is utilized). The velocity limits of the nanoindenter within

which reliable data can be obtained was determined and new ways to increase this

limit using the traditional triboindenter were tested and are described in the next

section. Many issues with the device, such as the inherent tilt in the nanoindenter and

software based methods to compensate for it etc. were sorted out. High repeatability

is observed in reproduction of the classical experiments and high precision friction

data is obtained using the nanoindenter. Friction spikes achieve higher peak values in

reduced rise times as the velocity is increased. Their magnitude is also found to

increase in proportion to the time the system rests in contact before the

commencement of the experiement. Anisotropy is observed between asymmetric

surfaces with stick-slip occurring only at specific relative orientations. Depth

measurements closely correspond to values predicted by Hertzian contact theory.

Comparison experiments with other tribological measurement systems, such as the

tribo-rheometer and the SFA, have proved the validity of the triboindenter’s scratch

utility for micro-scale friction measurements within reasonable limits. The X axis is

displacement controlled and not force controlled so simple experiments which

require force control such as the amount of force needed to “break-away” cannot be

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currently conducted. On the other hand, experiments involving friction lag and

hysteresis, which require a larger displacement range, can only be performed with the

aid of new instrumentation attachments to the triboindenter and are described in the

following section. These observed effects and associated insights are important in

using the triboindenter for modeling friction at the micro-scale and also in extending

its range of measurement from the nano to the macro scale.

8.2 Future Work: Advanced Equipment and Techniques

Although the maximum displacement range of nanoindenter is limited to 16

µm, new instrumentation, in the form of extensions to the current setup that can

apply normal loads up to 5 N and provide a extended velocity range of 4 Å/s – 1

mm/s, have been explored. Such an extended measurement range could bridge the

gap in quantifying friction from the atomic to the macro scale. It would also help

perform experiments that measure friction lag and hysteresis which require a larger

displacement range than that currently available. A comparison of the load and

velocity ranges possible with the new equipment that were tested at Hysitron is given

in Table 8.1.

8.2.1 High Velocity Experiments – The Flexure Stage

A 2D flexure stage, shown in Fig. 8.1, can be added to the XYZ staging

system of the triboindenter and combined with the high load head to give 3D force

sensing for scratch testing. In this technique, the stage is used for lateral translation,

while the indenter head applies a controlled normal load either under load or

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Normal Load Velocity Lateral Displace-ment

Tribological Expts 5-35 mN 0.001-10 µm/s NA

Triboindenter with Closed Loop Scanner

30 mN Few nm/s 200 µm

Tribo-indenter (Current Configuration)

0.001 – 10 mN 0.1-100 µm/s 15 µm

Triboindenter with 2-D Flexure Stage

30 mN 200 µm/s 25 mm

Triboindenter with 3-D Omniprobe

5 N 30 mm/s 150 mm

Classical Experiments

40-400 N 0.01 - 1 m/s NA

Table 8.1 Comparison of Capability Enhancement Add-ons to the

Triboindenter [3, 6, 7]

Fig 8.1 Flexure Stage [6]

displacement control. The flexure stage allows for measurement of longer scratches,

up to 25 mm. There is also another similar option offered by Hysitron in which the

flexure is a part of the normal force head, which allows scratches up to 150 mm. The

maximum normal load possible is limited by the nanoprobe used – Hysitron

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currently provides one which can apply normal load up to 5 N whereas the one

currently available to us in UCSB has 1.2 N maximum load with 7 µN resolution.

Design

The design of the flexure stage consists of springs of measured stiffness. As the

scratching is performed, the lateral force causes a deflection of the springs which is

measured with displacement sensors. From the measured displacement and the

known lateral stiffness, the lateral force can be computed. The design also allows the

flexure stage to simultaneously monitor the forces in both X and Y directions. Since

it is not under the same feedback for motion as the triboindenter, the lateral force and

displacement signal are also expected be cleaner.

Experimental Investigation and Results

The flexure stage is fully controlled by software although additional hardware is

required for its operation. The range of velocity it can provide is from 0.05 µm/s up

to potentially 1000 µm/s and high velocity experiments ranging from 1 µm/s to 300

µm/s were performed using the flexure stage. A typical scratch result is shown in

Fig. 8.2. As seen from the figure, large fluctuations in the scratch results are

observed for both slow and fast motions. At loads typically higher than 250 mN, as

shown in Fig. 8.3, the 50 µm cono-spherical tip seems to dig into the sample causing

visible scratches due to surface deformation, the higher the load the greater being the

deformation. To avoid this issue, spherical surfaces with higher radii that do not dig

into the surface at those normal loads need to be fabricated. The tips that incorporate

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Fig 8.2 Scratch results using the Multirange Nanoprobe and flexure stage using

50 µm cono-spherical tip at 9.81 mN normal load (a) 7 µm/s (b) 225 µm/s vel

(a) 500 mN (b) 750 mN

Fig 8.3 Visible damage of the mica surface in scratch experiments conducted

with the 50 µm cono-spherical tip at 300 µm/s and normal load

9.81 mN Normal load, 7 µm/s velocity

0

100

200

300

1 3 5 7 9Time (s)

Fri

cti

on

Fo

rce (µ

N)

9.81 mN Normal Load, 225 µm/s velocity

700

900

1100

1300

2.8 3.3 3.8 4.3 4.8

Time (s)

Fri

cti

on

Fo

rce

(µN

)

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these surfaces also would need to conform to the weight limitation for the transducer

or the nanoprobe being used, which in the case of the transducer is 100 mg. Also, for

load and velocity ranges overlapping with those of the triboindenter, the preliminary

friction values obtained using the flexure stage are roughly half of that obtained

using the triboindenter. Thus, although the flexure stage helps expand the load and

velocity range on the higher side, drawbacks such as high fluctuations in lateral force

data and consistency in friction results with those of the nanoindenter need to be

resolved.

8.2.2 Low Velocity Experiments – The Closed-loop Scanner

The closed-loop scanner tested at Hysitron was nPoint’s XY200Z25A

nanopositioner [7] shown in Fig. 8.4. Its scan range in the X and Y directions is 200

µm while that in the Z direction is 25 µm. It has subnanometer resolution and closed-

loop capacitive feedback for position control. Unlike the flexure stage, the scanner

itself does not measure force and hence the force sensing is limited to that of the

triboindenter. The velocity range was from few nm/s up to 200 µm/s.

Since the closed-loop scanner is not integrated with Hysitron’s software,

scratches had to be performed by feeding a function generator signal into the stage

controller. By changing the voltage and frequency of the triangle wave created by

the function generator the length and velocity of the scratch were controlled.

Inputting a sinusoidal function into stage controller would allow testing at varying

velocities during a single scratch, although this was not thoroughly investigated.

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Fig 8.4 Closed-loop Scanner [7]

Experimental Investigation and Results

Results of a high-velocity scratch are shown in Fig. 8.5. Substantial fluctuations

in the friction force similar to those observed in the case of the flexure stage are

consistently observed in experiments with the closed-loop scanner as well. Scratch

experiments in which the tip was held stationary on the mica surface exhibited a

considerable amount of drift. Low velocity results with the closed-loop scanner are

shown in Fig. 8.6 - the closed loop scanner was able to generate data accurately for

velocities as low as 4 Angstroms/s. The scanner is currently limited by the

capabilities of the function generator being used and thus the instrument has the

potential for scratching at even lower velocities. A comparison of the results

obtained from the closed-loop scanner and the triboindenter is presented in Fig. 8.7.

The scanner certainly increases the velocity range of the triboindenter at both the

lower and higher ends and friction force curves obtained using both instruments

exhibit more or less similar trend although the magnitudes differ by about a factor of

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Fig 8.5 Friction Force vs. Velocity Plots Obtained Using the Closed-loop

Scanner at High Velocity

Fig 8.6 Friction Force vs. Velocity Plots Obtained Using the Closed-loop

Scanner at Low Velocities

3 mN Normal Load, 100 µm/s Velocity

325

425

525

625

725

25.75 26.25 26.75 27.25 27.75

Time (s)

Fri

cti

on

Fo

rce

(µN

)

3 mN Normal Load, 0.012 µm/s Velocity

250

300

350

400

45 55 65 75Time (s)

Fri

cti

on

Fo

rce

(µN

)

3 mN Normal Load, 4 Ang/s Velocity

200

220

240

260

280

300

175 225 275 325

Time (s)

Fri

cti

on

Fo

rce

(µN

)

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Comparison of Closed Loop Scanner and Triboindenter

0

100

200

300

400

500

600

700

0.0001 0.001 0.01 0.1 1 10 100 1000

Velocity (µm/s)

Fri

cti

on

Fo

rce (µ

N)

Closed-loop Scanner

Triboindenter

Fig 8.7 Friction Force vs. Velocity Comparison between the Triboindenter and

the Closed-loop Scanner

2. Since different triboindenters were used for experimentation in the two cases, that

could be in part responsible for the observed difference.

Although the closed-loop scanner increases the capacity of scratch length to be as

high as 200 µm as compared to current limitation of 16 µm, it suffers from the same

limitation as that of the triboindenter in the reduction of scratch time as the velocity

is increased. Since function generators were being used for actuation, the exact time

of the start of the experiment cannot be accurately recorded hence friction lag

experiments cannot be performed unless the closed loop scanner is integrated with

the triboindenter’s software. This, in turn, would also permit Hysteresis experiments

at low velocities to be conducted by allowing the desired velocity profile to be input

into the software.

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The results obtained by flexure stage, scanner and triboindenter for the exact

same scratches do not match well in numbers and pattern. One reason for this could

be that a 50 µm tip 60 deg cone angle tip was used for testing with the closed loop

scanner and flexure stage whereas the 50 µm tip 90 deg cone angle tip was used with

the triboindenter. Although this difference in cone angle does not alter the surface

curvature of the tip in contact with the surface, the other properties of the tip such as

surface roughness could be substantially different resulting in this observed

difference.

While the closed-loop scanner seems to be a good choice for extending the range

of velocity in the lower end and slightly on the higher end, the flexure stage could

prove effective in extending it substantially on the higher end. Further

experimentation could help resolve the current inconsistency in the results obtained

from the new instruments with the existing results from the triboindenter in

overlapping range of normal load and velocities.

8.2.3 Scaling of Friction

Studies in scale-dependence of friction have indicated that adhesion and

friction are scale-dependent and material behavior on one scale cannot be assumed to

hold on another scale [50]. Using E-Beam lithography technique, surfaces with

known asperity heights and asperity spacings can be produced on the nanometer

scale. If the spacing distance is reduced and the surfaces are overexposed after

spinning on negative resist, the neighboring asperities would merge providing a

surface of known corrugation with even finer features. As shown in Fig. 8.8, the

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Fig 8.8 Asperity Patterns with the JDX-5D11 E-Beam Lithography System

currently available E-Beam lithography system using the JEOL JBX-5D11 machine

can create circular 80 nm features and a corrugated surface with minimum feature

size 50 nm. A new system, 6300 FS, is being currently installed which extends the

minimum feature size capability to as low as 8 nm. The choice of the deposition

substrate would depend on its adhesion behavior with the sample material. Polished

Silicon can help provide a truly flat sample material while an organic photoresist

such as Man2403 could be a possible deposition material although its shear modulus

is currently unknown. This method could help create controlled surfaces for friction

measurements. For surfaces with micro-level features i.e. feature sizes larger than

500 nm diameter and 100 nm height, optical lithography can be used. The capability

to design surfaces with known roughness using E-beam lithography and optical

80 nm 80 nm

50

nm

50

nm

100 nm

100 nm

80 nm

Negative Resist

Sample Surface

Sample

Top View

Side View

Created Asperities

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lithography could serve to be instrumental in studying the effects of surface scaling

on friction behavior.

8.3 Applications of Nano/Microscale Friction Testing

8.3.1 Correcting Nano- and Micro-scale Friction Measurements

Friction measurements made at the micro- and nano-scale can differ

substantially due to changes in applied load. Some of these measured differences

have been attributed to the unintended scratching of the surface by the sharp tips

used in making the measurements themselves [51]. Researchers at NIST used a

specially designed friction tester developed jointly by NIST and Hysitron. A

carefully calibrated force was applied to diamond tips having a range of sizes and

friction forces were measured as each tip was slid across a very smooth surface of

silicon. Images of the test surface made with an atomic force microscope indicated

unintentional scratching to be the cause of the extra friction. To correct for this

effect, NIST researchers developed a way to measure precisely the size, shape and

orientation of the diamond tips so that friction forces caused by "plowing" can be

subtracted to produce a more accurate final measurement. This approach could help

develop a better method for correcting nano- and microscale friction measurements

should help designers produce more durable micro- and nanodevices with moving

parts, such as tiny motors, positioning devices, or encoders.

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8.3.2 Applications in MEMS

To date most of the microelectromechanical system (MEMS) devices have been

based on Silicon. This is due to the technological knowledge accumulated on

manipulating, machining, manufacturing of Silicon. The MEMS field has developed

sufficiently to produce micromechanisms as complex as gear boxes capable of two

and three levels of speed reduction [52] as shown in Fig. 8.9, but tribological issues

are holding back their development and that of a myriad of other MEMS devices -

such as microturbines and relay switches - from entering commercial applications. At

the micro scale, friction and stiction can be catastrophic to MEMS rotary motors [53]

and flexible cantilevers [54]. Due to the brittle nature of Silicon, one of the core

MEMS materials, friction causes significant wear leading to the failure of most

rotating MEMS devices. Traditional lubricants such as oil cannot be used in these

devices because these microfabricated structures succumb rapidly to capillary forces

in the presence of liquids.

The Scratch Drive Actuator

Stiction forces in MEMS devices often degrade or prevent system performance.

Sliding frictional contacts contribute to the force transfer between actuators and

objects and influence their speed [55]. However, friction can also be useful for some

MEMS devices [56, 57]. Friction drives or ‘scratch-type’ drives utilize friction to

enable free-standing pieces to be moved with micro actuators [16] and their design is

described next.

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Fig 8.9 MEMS (a) Multiple and (b) Linear Rack Gear Speed Reduction Drives

(Courtesy of Sandia National Laboratories, SUMMiTTM

Technologies)

Scratch drive actuators (SDAs) use electrostatic attraction to snap down a

polysilicon plate to the substrate. A bushing structure is incorporated in the front of

the plate that causes the actuator to step forward when the electrostatic attraction is

released. These devices can then be used to pull a structure, such a reflective surface,

out of the substrate plane.

An SDA consists of three parts - a plate, bushing and substrate electrode [58].

The plate rests at a small angle to the substrate and an AC signal (~100 V, 100 Hz-

100 kHz) powers the device such that the driver plate is alternately attracted to and

released from the substrate. The result is step-wise motion of the SDA with each step

providing nanometer scale displacement.

Fig. 8.10 illustrates a model of the step motion of a polysilicon microstructure

designed, fabricated and tested by Akiyama and Shono [16]. In Fig. 8.10 (a) a cross-

sectional view of the polysilicon plate and bushing on an insulator film (Si3N4) of an

Si wafer is shown. At the rise of an applied pulse, the plate is pulled down. Since one

a b

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Fig 8.10 Cross-sectional View of Polysilicon Plate and Bushing of an SDA [16]

end of the plate, supported by the bushing, cannot move, the other part is pulled

down to come in contact with the surface of the insulator. The warp of the plate

causes the bushing to shift, as shown in Fig. 8.10 (b). Distortion energy is

temporarily stored in the plate. At the fall of the pulse, the distortion is released and

the plate snaps back to its original shape, as shown in Fig. 8.10 (c).

The SDAs offer many advantages for actuation purposes. They can move in

extremely fine steps ~ 10 nm and high velocities ~ 4.4 mm/s [59]. Their motion can

be accurately controlled by tuning the number of applied pulses and thus their

velocity is linearly related to electrical drive frequency. There is no fundamental

limit of travel and displacements upto 1 mm are possible. They occupy very small

area 100 Х 100 µm2 and are capable of producing over 100 µN of force. One huge

advantage is that they do not require stand-by power and they do not operate in a

resonant mode. They have the capability of providing untethered locomotion at the

MEMS scale [56]. Also, they can be easily integrated with other elements (e.g.

microoptical elements) through the same fabrication process.

However, some of the drawbacks that currently exist are that the exact details of

the actuation mechanism have not been exactly understood or modeled and that these

devices require high actuation voltages up to 200 V. CAD Modeling has been done

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using IntelliSuiteTM [60]. They achieved a step size of 0.1 µm for their device

geometry which is in good agreement with experimental results. Their modeling was

done completely based on elastic deformation whereas plastic deformation is

assumed to be actually occurring. More work needs to be done to enable plastic

deformation and modeling friction for better visualization of the scratch drive.

During the first phase, the bushing end must move more forward than the plate

end moves backward while during the relaxation phase, the bushing end must slide

backward less than the other end slides forward. As a result, it is possible that most

of the energy being delivered to the device could be cancelled internally because of

the friction forces acting against each other [61]. Analyzing the role of friction

would give us an insight into optimizing the device geometry. The triboindenter can

accurately mimic the normal forces that are experienced in some of the current

devices and hence it can serve to be a useful tool in further studying the behavior of

the SDA.

Sandia’s “Inchworm” actuator based on an SDA was used as a test structure to

model friction at the microscale [62]. Existing theories predict a slip distance of 2

nm but in reality a slip as large as 200 nm – 100 times the expected value - was

observed. This indicates a gross slip mechanism occurring before the static friction

limit is reached. This gross sliding would be very important in MEMS, where

positioning of objects to nanometer accuracy is required for optical applications.

Other friction instruments have not yet indicated such behavior and a further study

would enable predicting friction-related motion in MEMS to a higher degree of

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accuracy. This could help open a whole new market for micromachines such as

motors, pumps, actuators, communications devices and miniature mechanical

combination locks with sliding parts, which has not been possible so far since no

currently existing theory of friction is directly applicable to MEMS devices.

8.3.3 Bio-Inspired Applications

Biological surfaces represent the interface between living organisms and the

environment. Because of the broad diversity of functions, biological surfaces are

multifunctional and being a part of the physical world, the rules of mechanics also

apply to the living world [63]. Living creatures move on land, in air, and in water

and one always needs friction to generate force to move on a substrate or to

overcome the drag caused by friction elsewhere. A living motion system becomes

optimized when it is capable of minimizing friction at one end of the system while

maximizing it at the other end. Because of their structural and chemical complexity,

exact working mechanisms have been clarified for only a few systems. However,

biological surfaces hide a virtually endless potential of technological ideas for the

development of new materials and systems.

Gecko – Biological Solutions to Sticking to Surfaces

Gecko lizards do not have little suction cups on their feet but are able to climb up

walls and stick to ceilings. The feet of these animals, shown in Fig. 8.11, have toe

pads consisting of tiny hair-like structures called setae, made of keratin. The setae are

arranged in lamellar patterns and each seta has 400 to 1000 microhair structures,

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Fig 8.11 Gecko Foot and Spatulae [17]

called spatulae. These tiny structures allow geckos to climb vertical walls across

ceilings. Using massively parallel MEMS processing technology, 20-150 µm

platforms, supported by single slender pillars and coated with ~2 µm long, ~200 nm

diameter, organic-looking polymer nanorods ‘organorods’ were batch fabricated to

mimic the gecko foot [64]. Adhesion testing was performed using the triboindenter

and it was concluded that in the real world, friction forces cannot be decoupled from

adhesion and testing methods developed in this work could be utilized for the

purpose of lateral testing of the ‘organorods’.

8.3.4 Nano-tribological Applications

Nano-scale devices based on moving molecular components have the potential to

radically alter technologies such as energy storage, drug delivery, computing,

communications and chemical manufacture. These nano-scale structures need to be

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made mechanically and chemically resistant enough to withstand the extreme

conditions that can exist inside the human body or in any of the other hostile

environments where nanomachines might be expected to operate [65]. The shearing-

off or melting of even a single layer of atoms can easily spell death for a

nanomachine, The chemical and mechanical stability of moving nanostructures

underlie the field of nanotribology and the tribological considerations of these

systems have to be an integral aspect of the system design.

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Appendix A

Matlab Programs

Least Square Curve Fitting:

polyj.m

function aa=polyj(x,xdata) [m,n]=size(xdata); c1=x(1); c2=x(2); c3=x(3); c4=x(4); for i=1:m aa(i) = (c1)+ (c2)*exp(((-1)*c3)*(xdata(i)^2))+(c4)*(xdata(i)); end aa=aa'; return regre.m % This is the main program calling the regression subroutine. load xdata.txt; load ydata.txt; x0=[0.0105;0.09;5.2E+10;350]; % Set initial parameter vectors % Run the regression routine x=lsqcurvefit('polyj',x0,xdata,ydata); yplot=polyj(x,xdata); loglog(xdata,yplot) % Plot The Fitted Curve hold on % Plot the Original Data [a,b]=xlsread('Kavehpour2.xls'); loglog(a(:,1),a(:,2),'bo'); title('Actual and Fitted Curves '); xlabel('Gumbel Number'); ylabel('Friction Coeffecient (u)'); legend('Data Plot','Fitted Curve');

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Appendix B

Visual Basic Programs

Iteratively takes txt files generated by the Triboindenter and converts them to xls, draws graphs and computes average friction force:

Sub OpenAllFoldersAndReadTextFile() mypath = "C:\50 um tip\Data 4 3000 uN Load\" ' Set the path. ChDir mypath MyName = Dir(mypath, vbDirectory) ' Retrieve the first entry. Do While MyName <> "" ' Start the loop. If MyName <> "." And MyName <> ".." Then ChDir CurDir & "\" & MyName 'Read text file Call OpenAndReadTextFile 'Change back to root Workbooks.Open (CurDir & "\Results 0000.xls") 'Change back to root Call FindAverage ActiveWorkbook.Save ActiveWorkbook.Close ChDir mypath End If MyName = Dir Loop End Sub Sub OpenAndReadTextFile() Dim spath As String spath = CurDir Workbooks.OpenText Filename:= _ "Results 0000.txt" _ , Origin:=xlWindows, StartRow:=1, DataType:=xlDelimited, TextQualifier

_ :=xlDoubleQuote, ConsecutiveDelimiter:=False, Tab:=True, Semicolon:= _ False, Comma:=False, Space:=False, Other:=False, FieldInfo:=Array(Array

_ (1, 1), Array(2, 1), Array(3, 1), Array(4, 1), Array(5, 1), Array(6, 1),

Array(7, 1)) Range("D:D,F:F").Select

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Range("F1").Activate Selection.Copy Sheets.Add ActiveSheet.Paste Columns("A:A").Select Application.CutCopyMode = False Selection.Cut Columns("C:C").Select ActiveSheet.Paste Columns("A:A").Select Selection.Delete Shift:=xlToLeft Rows("1:4").Select Selection.Delete Shift:=xlUp Columns("A:B").Select Charts.Add ActiveChart.ChartType = xlXYScatterSmoothNoMarkers ActiveChart.SetSourceData Source:=Sheets("Sheet1").Range("A1:B8010"),

PlotBy _ :=xlColumns ActiveChart.Location Where:=xlLocationAsObject, Name:="Sheet1" With ActiveChart .HasTitle = True .ChartTitle.Characters.Text = "Friction Force Vs Time" .Axes(xlCategory, xlPrimary).HasTitle = True .Axes(xlCategory, xlPrimary).AxisTitle.Characters.Text = "Time (s)" .Axes(xlValue, xlPrimary).HasTitle = True .Axes(xlValue, xlPrimary).AxisTitle.Characters.Text = "Friction Force

(uN)" End With ActiveSheet.Shapes("Chart 1").ScaleWidth 1.09, msoFalse,

msoScaleFromTopLeft ActiveSheet.Shapes("Chart 1").ScaleHeight 1.25, msoFalse,

msoScaleFromTopLeft ActiveChart.Legend.Select Selection.Delete ActiveSheet.ChartObjects("Chart 1").Activate ActiveWorkbook.SaveAs Filename:= _ "Results 0000.xls" _ , FileFormat:=xlNormal, Password:="", WriteResPassword:="", _ ReadOnlyRecommended:=False, CreateBackup:=False ActiveSheet.ChartObjects("Chart 1").Activate ActiveWorkbook.Close End Sub

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Public Function GetArrayFromRange(rngARange As Excel.Range, intRows As Integer, intCols As Integer) As Variant

If intRows < 1 Or intCols < 1 Then Call Err.Raise(1, , "Negative arguments passed to GetArrayFromRange.

Contact ZS Developer.") ElseIf intRows = 1 And intCols = 1 Then Dim vntReturn(1 To 1, 1 To 1) As Variant vntReturn(1, 1) = rngARange.Value GetArrayFromRange = vntReturn Else GetArrayFromRange = Range(rngARange, rngARange.Offset(intRows - 1,

intCols - 1)).Value End If End Function Sub FindAverage() Dim vntData As Variant Dim intRow As Integer Dim dblSum1 As Double, dblSum2 As Double Dim dblAvg1 As Double, dblAvg2 As Double Dim intCount1 As Integer, intCount2 As Integer vntData = GetArrayFromRange(Workbooks("Results

0000.xls").Worksheets("Sheet1").Range("A1"), 9000, 2) For intRow = 1 To 9000 If vntData(intRow, 1) > 8 Then 'Found the section having values greater than 8 intCount1 = intCount1 + 1 dblSum1 = dblSum1 + vntData(intRow, 2) If vntData(intRow, 2) > 0 Then intCount2 = intCount2 + 1 dblSum2 = dblSum2 + vntData(intRow, 2) End If 'if > 0 If vntData(intRow + 1, 1) = "" Then Exit For End If End If 'if > 8 Next intRow 'Find averages dblAvg1 = dblSum1 / intCount1 dblAvg2 = dblSum2 / intCount2 Workbooks("Results 0000.xls").Worksheets("Sheet1").Range("D3").Value =

dblAvg1

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Workbooks("Results 0000.xls").Worksheets("Sheet1").Range("E3").Value = dblAvg2

End Sub

Iteratively reads average friction force from different files and copies them into a single spreadsheet:

Sub OpenAllFoldersAndReadTextFile() Dim intFilesSoFar As Integer mypath = "C:\ Dry Friction\9 10000 uN Load\" ' Set the path. ChDir mypath MyName = Dir(mypath, vbDirectory) ' Retrieve the first entry. Do While MyName <> "" ' Start the loop. If MyName <> "." And MyName <> ".." Then ChDir CurDir & "\" & MyName intFilesSoFar = intFilesSoFar + 1 Call OpenAndReadTextFile_New(intFilesSoFar) ChDir mypath End If MyName = Dir Loop ThisWorkbook.Save End Sub Sub OpenAndReadTextFile_New(intFilesSoFar As Integer) 'Reads the average and pastes it in this workbook. Dim spath As String Dim wkbResults As Workbook spath = CurDir Set wkbResults = Workbooks.Open("Results 0000.xls") ThisWorkbook.Worksheets("Sheet1").Range("E3").Offset(intFilesSoFar,

0).Value = wkbResults.Worksheets("Sheet1").Range("E3").Value wkbResults.Close False Set wkbResults = Nothing End Sub

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Appendix C

Matlab Programs for Hysitron Experiment Simulation

hyssim04.m

%Simulation or stick slip experiment with the Hysitron %Define initial simulation paramters tmax=1;str='b'; %Initial conditions x0=[0;0;0;0;0]; % x1 - position % x2 - velocity % x3 - state in friction model % x4 - integrator % x5 - ramp generator % Fd - driving force [t,x]=ode45('hysitronmod04',tmax,x0); %--------------------------- subplot(221) pl=plot(t,x(:,1),str,t,x(:,5),'r--'); set(pl,'LineWidth',2); axis([0 tmax 0 8e-6]); ylabel('Lateral Displacement');xlabel('Time');hold on %--------------------------- subplot(224) pl=plot(t,x(:,3),str); set(pl,'LineWidth',2); axis([0 tmax 0 15e-8]); ylabel('Friction State');xlabel('Time');hold on %--------------------------- subplot(223) pl=plot(t,x(:,2),str); set(pl,'LineWidth',2); %axis([0 tmax -1e-6 10e-6]); ylabel('Velocity');xlabel('Time');hold on %--------------------------- subplot(222) %Computing friction force [F,dzdt,m]=hysfricfcn(x(:,2),x(:,3)); pl=plot(t,F,str);%,t,F1,'r',t,Fss,'g--'); set(pl,'LineWidth',2);

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axis([0 tmax 0 15e-4]); ylabel('Friction Force'); xlabel('Time');hold on

hysitronmod04.m

function dxdt=hysitronmod04(t,x) %LuGre friction model %Controller parameters %mk=1260;mki=7200;mkd=50; mk=1394;mki=7167;mkd=50; Fd=(x(4)-mk*x(1)-mkd*x(2));vpull=18e-6; [F,dzdt,m]=hysfricfcn04(x(2),x(3)); dxdt=[x(2);(Fd-F)/m;dzdt;mki*(x(5)-x(1));vpull]; hysfricfcn04.m

function [F,dzdt,m]=hysfricfcn(v,z) %Parameters %This is a round about way to estimate s0 and s1 can be improved %m=1e-3;z0=1e-7;zs=3*z0;s0=1e4;s1=2*sqrt(m*s0);s2=0.001;vs=1.4e-6; m=1e-3; zs=0.41e-6; z0=zs/3.1; % height of friction peak Fs=1400e-6; s0=Fs/zs; s1=3*sqrt(m*s0);s2=0.001; vs=1.2e-6; %kink factor %Function in friction model g=z0+(zs-z0).*exp(-abs(v)/vs);%+s2*v; %State equation for friction dzdt=v-abs(v).*z./g; F=s0*z+s1*dzdt+s2*v;

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