7/24/2019 Ultra Sensitive Optical MEMS Sensor

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Ultra sensitive optical MEMS sensor

Basic Principle of working:

Fabry Perot interference placed on a micro machined rectangular silicon membrane as pressure

sensitive element

isadvantages of previous methods:

ifficulty in dealing with e!ternally mounted pie"o electric transducer : EM# degrades signal to

noise ratio and multipath interference introduces difficulty in locating P$

%haracteristics of sensor to be mounted inside:

&$ Electrically and chemically neutral

'$ (ow EM#)$ Small in si"e

*perating Principle

P generates acoustic waves which are mechanical waves when these waves incident upon the

diaphragm of sensor