ultra-high-precision and high speed surface structuring by ...ultra-high-precision and high speed...

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Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser system Thorsten Kramer, Beat Neuenschwander, Beat Jäggi, Stefan Remund, Markus Zimmermann Institute for Applied Laser, Photonics and Surface Technologies ALPS SWISSPHOTONICS Workshop »Photonics 4 Precision Manufacturing« June 15 th , 2016

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Page 1: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser system

Thorsten Kramer,Beat Neuenschwander, Beat Jäggi, Stefan Remund, Markus Zimmermann

▶ Institute for Applied Laser, Photonics and Surface Technologies ALPS

SWISSPHOTONICS Workshop»Photonics 4 Precision Manufacturing«June 15th, 2016

Page 2: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Outline

2

»Fast and Furious«

Summary and Outlook

Introduction

Synchronized Scanner Setup

Applications

Page 3: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Introduction

3

Page 4: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Introduction

▶ 2.5D / 3D structure is sliced▶ generation of layers▶ typical layer thickness 0.1 μm

▶ Each layer is filled with hatch pattern

Conventional Processing

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Page 5: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Introduction

Advantages

▶ flexible▶ easy to use▶ reliable▶ industry proven▶ mass-production compatible

Restrictions

▶ short vectors▶ acceleration / deceleration

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Page 6: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Synchronized Scanner Setup

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Page 7: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Standard laboratory setup

SLAVE

MASTER

PoD

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Page 8: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Synchronized scanner setup

Jaeggi B., Neuenschwander B. et al.:"Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement“Proceedings of SPIE 8243, (2012)

SLAVE

MASTERPoD

clo

ck

lin

e s

tart sy

nc

PRF

8

Page 9: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

synchronizedsynchronizedsynchronizedsky writingsky writingsky writingnormal operationnormal operationnormal operation

Synchronized scanner setup

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Jaeggi B., Neuenschwander B. et al.:"Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement“Proceedings of SPIE 8243, (2012)

Scanner Modes

“acceleration” problem

well defined borderdeep marking at borders

diffuse borderno deep marking

well defined borderno deep marking

Page 10: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Jaeggi B., Neuenschwander B. et al.:"Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement“Proceedings of SPIE 8243, (2012)

Synchronized scanner setup

▶ create black & white bitmap▶ define pitch▶ specify number of repetitions

or▶ define config file▶ distribute start points

pitch

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SYNCHRO Instruction Manual

Page 11: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

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Page 12: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

Jaeggi B., Neuenschwander B et al.High precision and high throughput surface structuring by synchronizing mechanical axes with an ultra-short pulsed lasers system in MOPA arrangementICALEO paper M1207 (2012)

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Repetition rate frep 0.3 MHzAverage Power Pave 0.1 W Pitch: 3.0 μmScan speed vscan 0.9 m/s

447 layers

http://www.swisstopo.admin.ch/internet/swisstopo/de/home.html

Page 13: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

Repetition rate frep 4.1 MHzAverage Power Pave 25.6 W Pitch: 14.5 μmScan speed vscan 59.5 m/sPolygon scanner 2233 layers Repetition Rate frep | kHz

102 103 104

0

0.20

0.15

0.10

0.05

Specific Ablation RateΔ

Δ ∙ | ∙

Copper DHP

X40Cr14 X38CrMoV 5-1

X45NiCrMo4 X153CrMoV12

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Neuenschwander B., Jaeggi B. et al.Influence of Particle Shielding and Heat Accumulation Effects onto the Removal Rate for Laser Micromachining with Ultra-Short Pulses at High Repetition RatesICALEO paper M1104 (2014)

Page 14: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

Repetition Rate frep | kHz102 103 104

0

0.20

0.15

0.10

0.05

Specific Ablation RateΔ

Δ ∙ | ∙

Copper DHP

X40Cr14 X38CrMoV 5-1

X45NiCrMo4 X153CrMoV12

Pave 12 W 42 Wfrep 2.05 MHz 6.83 MHz

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Neuenschwander B., Jaeggi B. et al.Influence of Particle Shielding and Heat Accumulation Effects onto the Removal Rate for Laser Micromachining with Ultra-Short Pulses at High Repetition RatesICALEO paper M1104 (2014)

Page 15: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

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shark skin structuresteel AISI304

Jaeggi B.Grundlagen zur Ablaufoptimierung beim Raster-Scannen mit synchronisiertem Galvo-ScannerBFH, MSE Vertiefungsarbeit 1 (2015)

Page 16: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

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Repetition rate frep 0.2 MHzAverage Power Pave 1.8 W Pitch: 40.0 μmScan speed vscan 8.0 m/sPicture size 250 x 250 pixels

Jaeggi B., Neuenschwander B. et al. High Precision Surface Structuring with ultra-short Laser Pulses and Synchronized Mechanical AxesLiM, Physics Procedia 41 (2013)

400 μm

multi-pulse drilling on the fly10 μm steel foil

Page 17: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

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Repetition rate frep 0.2 MHzAverage Power Pave 1.8 W Pitch: 40.0 μmScan speed vscan 8.0 m/sPicture size 250 x 250 pixels

Jaeggi B., Neuenschwander B. et al. High Precision Surface Structuring with ultra-short Laser Pulses and Synchronized Mechanical AxesLiM, Physics Procedia 41 (2013)

400 μm

multi-pulse drilling on the fly10 μm steel foil

Page 18: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

Microstructuring on stainless steel

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20 mm 20 mm

Page 19: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

Microstructuring on stainless steel

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40 mm 20 mm

Page 20: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

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Page 21: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

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Page 22: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Applications

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Microstructuring on copper

Page 23: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Summary and Outlook

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Page 24: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

SYNCHRO

Summary and Outlook

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▶ fast▶ intelliSCANDE > 10 m/s intelliSCANSE > 25 m/s

▶ precise < 2 microns▶ limited by single pulse picking (PoD)

▶ enabling multi-level processing▶ microstructuring ▶ matting ▶ polishing

Page 25: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Acknowledgement

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http://appolo-fp7.eu/

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Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Acknowledgement

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Page 27: Ultra-high-precision and high speed surface structuring by ...Ultra-high-precision and high speed surface structuring by synchronizing a galvo scanner with an ultrashort pulsed laser

Berner Fachhochschule | Haute école spécialisée bernoise | Bern University of Applied Sciences

Do you have any questions?We would be happy to help.

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Meet us at booth E112