A P A S S I O N F O R P E R F E C T I O N

Turbopumps from Theory to Practice

Florian Henß

Pfeiffer Vacuum GmbH

35614 Asslar / Germany

Florian.Henss@pfeiffer-vacuum.de

A P A S S I O N F O R P E R F E C T I O N

■ 2© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Pfeiffer Vacuum - History

� In 1890 Arthur Pfeiffer founds the company in Wetzlar

� First product: Remote control system for gas street lamps

A P A S S I O N F O R P E R F E C T I O N

■ 3© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Pfeiffer Vacuum - First Vacuum Pump

� Electrical light replaces more and more the gas street lamps

� Demand of vacuum

� In 1908 First vacuum pump was developed

A P A S S I O N F O R P E R F E C T I O N

■ 4© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

History of High Vacuum

� It was possible to create high- and ultrahigh vacuum with diffusion pumps only

� High energy consumption

� Problem of oil contamination of the vacuum

A P A S S I O N F O R P E R F E C T I O N

■ 5© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Pfeiffer Vacuum – Invention of the Turbopump

� In 1958 Pfeiffer Vacuum invents the worlds first Turbopump

� Invention was done by fortune

TVF 400

Pumping speed 140 l/s for N2

Weight: approx. 60 Kg

A P A S S I O N F O R P E R F E C T I O N

■ 6© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Pfeiffer Vacuum – Turbopumps today

HiPace 300

Pumping speed 260 l/s for N2

Weight: 6.2 Kg

A P A S S I O N F O R P E R F E C T I O N

■ 7© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Pfeiffer Turbopump Design

Classical Design Modern Design

Single flow designDouble flow design

A P A S S I O N F O R P E R F E C T I O N

■ 8© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Pfeiffer Vacuum Turbopump Design

Permanent magnetic bearing

Holweck stage

Turbo blades

High vacuum flange

Ceramic ball bearing

Motor stator (BLDC)

Fore vacuum flange

Purge gas connection

Oil Lubricator

A P A S S I O N F O R P E R F E C T I O N

■ 9© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Pfeiffer Vacuum Maglev Turbopump Design

High vacuum flange

Turbo blades

Holweck stage

Drive- and levitation unit

Maglev electronic

Purge Gas

Cooling WaterFore Vacuum Flange

A P A S S I O N F O R P E R F E C T I O N

■ 10© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Bearing Types and Rotor Design

HiPace™ HiPace™M

Hybrid Bearing

Disk Rotor Hybrid Rotor

Maglev Bearing

High Vacuum

Roughing Vacuum

A P A S S I O N F O R P E R F E C T I O N

■ 11© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Bearing Types and Rotor Design

A P A S S I O N F O R P E R F E C T I O N

■ 12© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

15,4mm 15,4mm 15,4mm

Theory of the Pumping Effect

stator

rotor

1

2P1→2 P2→1

P1→2 > P2→1

u

u = 300 - 400 m/s

u

A P A S S I O N F O R P E R F E C T I O N

■ 13© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

15,4mm 15,4mm 15,4mm

Theory of Turbo Pumping Effect

Stator

Rotor

u c

1

2P1→2 P2→1

P1→2 > P2→1

u

u = 300 - 400 m/s

A P A S S I O N F O R P E R F E C T I O N

■ 14© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

10-5 10-4 10-3 10-2 10-1 100 101 102 103

Different Flow Areas

1

10

100

Viscous flow

Molecular

flow

Pressure [mbar]

Dia

me

ter

[cm

]

A P A S S I O N F O R P E R F E C T I O N

■ 15© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Different Flow Areas

0

50

100

150

200

250

300

1E-06 1E-05 1E-04 1E-03 1E-02 1E-01 1E+00 1E+01

High vacuum pressure [mbar, 10² Pa]

Pu

mp

ing

sp

ee

d [

l/s

]

HiPace 300; N2

Molecular flow

Kn > 10

Knudsen flow

Kn = 0,1…10

Viscous flow

Kn < 0,1

A P A S S I O N F O R P E R F E C T I O N

■ 16© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Important Technical Data

� Pumping speed S [l/s]

� Compression ratio (Q=0) : K0 = pVV / pHV

� Max. backing pressure: pFV max.[mbar]

� Max. gasload: Qmax. [mbar l / s]

(according to ISO 5302: Vacuum Technology TMP-Measurement and Performance)

A P A S S I O N F O R P E R F E C T I O N

■ 17© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Gas Type dependant Pumping Speed

0

50

100

150

200

250

300

1E-06 1E-05 1E-04 1E-03 1E-02 1E-01 1E+00 1E+01

High vacuum pressure [mbar, 10² Pa]

Pu

mp

ing

sp

ee

d [

l/s

]

HiPace 300; N2

HiPace 300; He

HiPace 300; Ar

HiPace 300; H2

A P A S S I O N F O R P E R F E C T I O N

■ 18© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Gas Type dependant Compression Ratio

A P A S S I O N F O R P E R F E C T I O N

■ 19© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Chamber Pressure Calculation

Gas

QP

QL

QDes

pFV

turbopump

backingpump

pHV

QP = Process gas flowQDes = Desorption gas flow QL = Gas flow caused by leaks

Gas Load Applications

⋅⋅⋅+++++

=

20

2FV

0

FV

effTMP,

LDesPHV

K

p

K

p

S

QQQp

2

2

G

G

H

H

A P A S S I O N F O R P E R F E C T I O N

■ 20© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Chamber Pressure Calculation

⋅⋅⋅++++

=

20

2FV

0

FV

effTMP,

LDesHV

K

p

K

p

S

QQp

2

2

G

G

H

HQL

QDes

pFV

turbopump

backingpump

pHV

QDes = Desorption gas flow QL = Gas flow caused by leaks

K0 = Compression ratiopFV = Fore vacuum pressure

UHV Applications

A P A S S I O N F O R P E R F E C T I O N

■ 21© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Backing Pump Selection for UHV

TMPRVP

H

HHV

mbarp

46

3

101101

1052

2⋅∗⋅

⋅

=

−

TMPioBPio

iAtm

iHVkk

pp

⋅

=

22

13105 HHVH mbarp −

⋅=

(w/o desorption effects)

(U)HV - partial pressure H2 in mbar

10 80 300 400_700 300C 12_1500 18_2300 2400M 3400M

Rotary Vane Pump

OnTool Booster

Multistage Roots Pump

Diaphragm Pump

1E-14

1E-13

1E-12

1E-11

1E-10

1E-09

1E-08

1E-07

1E-06

1E-05

HiPace

A P A S S I O N F O R P E R F E C T I O N

■ 22© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

The HiPaceTM Turbopumps

A P A S S I O N F O R P E R F E C T I O N

■ 23© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Turbo controller

High vacuum flange

Higher foreline pressure

Pumping Speed 10 to 700 l/s

Rotor with drag stage

Onsite bearing exchange possible. Cartridge!

Cooling water connection

Venting connection

Purge gas connection

A P A S S I O N F O R P E R F E C T I O N

■ 24© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Fore vacuum flange

Pumping Speed 1200 to 2300 l/s

Onsite bearing exchange possible. Cartridge!

Turbo rotor without holweck stage

Oil pump

High vacuum flange

AC- supply, integrated power supply

Turbo controller

A P A S S I O N F O R P E R F E C T I O N

■ 25© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Easy on Side Service

� Bearing installed in a cartridge

� Easy to exchange

� Exchange possible on side

� No adjustment of the bearing

� No rotor rebalancing required

� Service interval 4 years in

clean applications

A P A S S I O N F O R P E R F E C T I O N

■ 26© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Turbopump Controller (TC)

� Includes the drive electronic

� Controls the sensor system

� Informs the user of the status of

the pump

� Ensures a safe operation of the

turbo

� Provides different fieldbus

systems

A P A S S I O N F O R P E R F E C T I O N

■ 27© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

TCP 350 - Controller for radiation environment

� Turbo controller for

rack mounting

� For applications in radiation

environment

� No semiconductor elements

on the pump

A P A S S I O N F O R P E R F E C T I O N

■ 28© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Turbopumps with external Controller

TurbopumpElektronic TCP 350

Up to 1000m

A P A S S I O N F O R P E R F E C T I O N

■ 29© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

� Turbo rotors store an enormous amount of mech. energy!

� Comparable to the energy of a 1000 feet free falling turbopump!

� Rotor-crash-torque

� Sandwich-type rotors (like Pfeiffer HiPace family)

� Only 25% of the bell shaped type torque!

� Pump safety has to be verified

� Containment-Analysis and crash tests

� The chamber flange has to withstand the crash torque!

� Chamber design � user!

� Torque values to be found in the operating instructions

Safety of Turbopumps

A P A S S I O N F O R P E R F E C T I O N

■ 30© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Safety Tests at Pfeiffer Vacuum

A P A S S I O N F O R P E R F E C T I O N

■ 31© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06

Application Limits

� Gas friction

� Magnetic fields

� Heat radiation

� Vibration

BP < 5mT

Rotor Temperature < 120°C

A P A S S I O N F O R P E R F E C T I O N

Turbopumps from Theory to Practice

Florian Henß

Pfeiffer Vacuum GmbH

35614 Asslar / Germany

Florian.Henss@pfeiffer-vacuum.de