total dose effects on devices and circuits - principles and limits of ground evaluation-

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Total Dose Effects on Devices and Circuits -Principles and Limits of Ground Evaluation-

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Page 1: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

Total Dose Effectson Devices and Circuits

-Principles and Limits of Ground Evaluation-

Page 2: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

2Total Dose Effects on Devices and Circuits

Outline

Sensitive structures and degradation processesSensitive structures and degradation processes

Rules for effective device selectionRules for effective device selection

Limits of total dose evaluations Limits of total dose evaluations

Page 3: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

3Total Dose Effects on Devices and Circuits

Problematic of total dose ground evaluation

Impossible to reproduce in-orbit device environmentImpossible to reproduce in-orbit device environment radiative environment complexityradiative environment complexity

operating conditions(bias, temperature)operating conditions(bias, temperature)

Necessary to understand the physics to establish rules to Necessary to understand the physics to establish rules to

extrapolate from ground to spaceextrapolate from ground to space

Need of realistic data for non-hardened devices Need of realistic data for non-hardened devices (COTS)

Page 4: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

4Total Dose Effects on Devices and Circuits

One answer: reasonable conservativity

Conservative conditions to assure that:Conservative conditions to assure that: a satisfying behaviour during device evaluationa satisfying behaviour during device evaluation

implies implies a satisfying in-orbit behavioura satisfying in-orbit behaviour

““Reasonable” for “not too much”Reasonable” for “not too much” These conditions must be defined regarding each experimental parameter modifying the device degradationThese conditions must be defined regarding each experimental parameter modifying the device degradation

Irradiation natureIrradiation nature Dose rate/experiment durationDose rate/experiment duration Device bias and temperatureDevice bias and temperature

Page 5: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

5Total Dose Effects on Devices and Circuits

Sensitive structures (Si technologies)

nMOS transistor

p-type Si substrate

Gate oxide

n+ n+

Interface

NPN bipolar transistor

p-type base

n-type collector

Surface passivation oxide

n+ emitter

Interface

Page 6: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

6Total Dose Effects on Devices and Circuits

MOS structure degradation mechanism

Gate (Vg)

Oxide

Interface

Silicon

E

Energy

+

+-

+-+-+-+-+-+-+-

+-

+-+-+-+-+-+-

+-

+-+-

+-+-

+-

+-+-+-

+-+-+-

+-

+-

+- +-+-+-+-+- +-

+-

+-+- +-

+-

+-+-

++ +-+++

+++ +------

Page 7: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

7Total Dose Effects on Devices and Circuits

Drain Source

Ideal nMOS transistor

Gate oxide

0

0.1

0.2

0.3

0.4

2 3 4 5Vgs (V)Id

s (A

)

p-type Si substrate

Gate (Vgs)

Vth

Page 8: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

8Total Dose Effects on Devices and Circuits

Ideal nMOS transistor: total dose D- Oxide trapped charge-induced degradation -

Drain Source

+ + + + + ++ +

0

0.1

0.2

0.3

0.4

2 3 4 5Vgs (V)Id

s (A

)

-- - --+ + ++ + + ++ ++

++

Gate (Vgs)

thV

ox

itotth C

QQV

With, fractional yield D..Qot

Page 9: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

9Total Dose Effects on Devices and Circuits

Fractional yield dependencies

Worst case regarding two parameters:

1- Nature of ionising source:

Electrons or Co60

2- Electric field in sensitive oxide:

Maximum value

After Ma T.P., Dressendorfer P.V. (1983)

Page 10: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

10Total Dose Effects on Devices and Circuits

Ideal nMOS transistor: stable state- Effect of oxide trapped charge annealing -

0

0.1

0.2

0.3

0.4

2 3 4 5Vgs (V)Id

s (A

)- Theoretical condition: infinite post irradiation time- Practical conditions: 168 hours at 100°C is a compromise for

large oxide charge annealing and slight interface traps annealing

thV

Drain Source

-- - --

Gate (Vgs)

- -

Page 11: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

11Total Dose Effects on Devices and Circuits

End of ground irradiation state

Interface states growth

nMOS ideal case: time-dependant effect (TDE)

0

Par

amet

er v

aria

tion

tir tpi

-Qot

-Qit

Vth

Possible in-orbit states Stable state

Page 12: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

12Total Dose Effects on Devices and Circuits

Selection of MOS circuitsP

aram

eter

val

ue

Dtpi

x

x x

x

xx

: Specified limits

x: Measured values

A device is selected if all the measurements are in the specified domain

PASS

Page 13: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

13Total Dose Effects on Devices and Circuits

Selection of MOS circuitsP

aram

eter

val

ue

Dtpi

x

x

x

xxx : Specified limits

x: Measured values

Failure due to oxide trapped charge

FAIL

Page 14: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

14Total Dose Effects on Devices and Circuits

Selection of MOS circuitsP

aram

eter

val

ue

Dtpi

x x

x

xx x

: Specified limits

x: Measured values

Failure due to interface traps

FAIL

Page 15: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

15Total Dose Effects on Devices and Circuits

Ideal nMOS sensitive parameters (1)

Device levelThreshold voltage (~ linear)Drive current Carrier mobility (second order)

Circuit levelLogic levelsPropagation delaysHigh speed performances

0

0.1

0.2

0.3

0.4

2 3 4 5Vgs (V)

Ids

(A)

Initial

100 Gy(Si)

200 Gy(Si)

168h at 100°C

Page 16: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

16Total Dose Effects on Devices and Circuits

Ideal nMOS sensitive parameters (2)

Device levelLeakage current (superlinear)

Circuit levelSupply current (superlinear)Design-dependant parametric degradation

10-12

0 1 2 3 4 5Vgs (V)

Ids

(A)

Initial

100 Gy(Si)

200 Gy(Si)

168h at 100°C

10-10

10-8

10-6

10-4

10-2

1

Leakage current

Page 17: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

17Total Dose Effects on Devices and Circuits

Bipolar transistors degradation (1)

++ + +- - - - --

Base

Emitter

Surface passivation oxide

++ ++ + ++ +

Recombination rate in the emitter-base junction is modified:

1- In Si: surface potential shift induces change in the carrier densities

2- At the SiO2/Si interface: by the interface traps density increase and change in carrier densities

The global resulting degradation strongly depends the transistor structure (design and type) and of the experimental conditions

Page 18: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

18Total Dose Effects on Devices and Circuits

Bipolar transistors degradation (2)

The recombination fraction of the base-emitter current do not participate to the current amplification:

- The current gain (IC/IB) decreases

- The current gain degradation depends on VBE (non-linear effect)

- Device level: Gain degradation has important impact in linear circuits- Circuit level: Leakage currents are induced in all circuit types

0

20

40

60

80

100

0.4 0.5 0.6 0.7 0.8VBE (V)

Cu

rren

t ga

in (

A/A

) -

Initial

100 Gy(Si)

200 Gy(Si)

500 Gy(Si)

Page 19: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

19Total Dose Effects on Devices and Circuits

Enhanced Low Dose Rate Sensitivity (ELDRS)

- True dose rate effect -

* Specific to bipolar technologies

* Fractional yield dependence to dose rate (# from TDE)

* No satisfying experimental method to bound its magnitude

After Johnston et al. IEEE TNS (1994)

Page 20: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

20Total Dose Effects on Devices and Circuits

Selection of bipolar devices

tpi

x

A device is selected if all the measurements are in the specified domainDesign margins are recommendedHigh dose rate at room temperature prohibited

D

: Specified limits

x: Measured values

Par

amet

er v

alue x

x x

xx

PASS

No signification:May be omitted

Page 21: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

21Total Dose Effects on Devices and Circuits

Main I.C. degradation mechanism- Leakage currents in isolating structures -

Z

X

Drain

Gate

Sourc

e Calculated current density at the silicon surface

X

Z

Drain SourceGate

Page 22: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

22Total Dose Effects on Devices and Circuits

Standards for ground evaluation:Irradiation conditions

- Worst-case conditions to test oxide charge-related failures -

Method Source Dose rate BiasSCC 22900.4 Co60 or electron

acceleratorStandard: 36 to 360 Gy/hLow rate: 0.36 to 3.6 Gy/h

Worst case

MIL 1019.6 Co60 50 to 300 rad/s(1800 to 10800 Gy/h)

Worst case

Higher fractional yield

Compromise between:- benefit of TDE (annealing during irradiation)- cost of time consuming experiments

-Maximum electric field in sensitive zones(fractional yield)-Avoid chip heating (thermal annealing)

Page 23: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

23Total Dose Effects on Devices and Circuits

Standards for ground evaluation:Post-irradiation conditions

- Worst-case conditions to test interface traps-related failures -

SCC: time for Nit to reach maximumMIL: time less then irradiation time to anneal in the intended use

MIL: +50% of design margin(compensates possible Nit annealing)

One bias board only

Method Roomtemperature

Over test Accelerated annealing Bias

SCC 22900.4 24 h None 168 h at 100°C Worst caseMIL 1019.6 Time<D/Rmax 0.5xD (default) 168 h at 100°C Worst case

Something simple !

Page 24: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

24Total Dose Effects on Devices and Circuits

Displacements/ionisation cumulative effect - Dark current in Active Pixel Sensor -

Protons create ionisation (in SiO2) and displacements (in Si)Both interaction type can induce dark current

1010 protons/cm²

Page 25: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

25Total Dose Effects on Devices and Circuits

Displacements/ionisation combined effects:Bipolar circuits

A really extreme example of proton-induced failure, but

- a smaller effect can reduce bipolar technologies hardness,

- RH means “PTDH” (Pure Total Dose Hard)

After Rax et al. IEEE TNS (1998)

Page 26: Total Dose Effects on Devices and Circuits - Principles and Limits of Ground Evaluation-

26Total Dose Effects on Devices and Circuits

Summary

Ground evaluation of total dose effects are well Ground evaluation of total dose effects are well defined and can assure devices hardness for most of defined and can assure devices hardness for most of device technologiesdevice technologies device typesdevice types mission profilesmission profiles

Some specific devices or applications need particular Some specific devices or applications need particular attentionattention

Necessary to study effect of device scalingNecessary to study effect of device scaling