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Environmental Report TOSHIBA CORPORATION Semiconductor & Storage Products Company Yokkaichi Operations 2015

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Page 1: TOSHIBA CORPORATION Semiconductor & Storage Products ...toshiba-yokkaichi.jp/environment/pdf/report2015e.pdf · Environmental Report TOSHIBA CORPORATION Semiconductor & Storage Products

Environmental Report

TOSHIBA CORPORATIONSemiconductor & Storage Products Company

Yokkaichi Operations

2015

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Introduction

Overview

January 1992

Yokkaichi Operations: 800, Yamanoisshiki-cho, Yokkaichi City, Mie Prefecture, 512-8550, Japan Asahi Test Center: 2000, Nao, Asahi-cho, Miegun, Mie Prefecture, 510-8101, Japan

Yokkaichi Operations: 666,100 m2

*including car parkAsahi Test Center: 47,862 m2

5,500(As of March,2015)

NAND-type flash memory, Multi-chip package (MCP), Solid State Drive (SSD)

Founded General

Manager

Location

Site area

Employees

Major Products

● NAND-type flash memoryA type of electrically erasable flash memory is suitable for storing high capacity data e.g. image and music.

● Multi-chip Package (“MCP”)A package stacks multiple memory chips.

● FlashAirTM

FlashAirTM is a SDHC memory card with the wireless LAN function. It is possible to send and/or receive files inFlashAirTM onboard equipment with each other, also to access the files in FlashAirTM from external devices withwireless LAN function such as a smart phones and/or PCs.

● Solid State Drive (“SSD”)A drive device using a NAND-type flash memory as memory media is widely substituted for a hard disk drive.

・Server・Video game・Industrial

equipument・Healthcare

equipument・Electronic book・Television・Onboard equipment・Car navigation system

Silicon audio

Digital Camera/Camcorder

PC

Smartphone/Tablet

microSDXC Card SDXC Card

SSD USB Flash Memory

Products

Application

NAND-type flash memory

Feature of SSD・Short access time・Lightweight・Low power consumption・Impact resistant

FlashAirTM

Tomoharu Matsushita

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ContentsIntroduction

OverviewProducts

Environmental ManagementTop Commitment

Environmental Policy

Environmental Management System

Environmental Preservation Structure

Environmental Objectives/Targets

Environmental Accounting

Compliance with Laws and Regulations

Environmental AuditMeasures against Environmental Risks

Reducing the Environmental Impactof Our Business Activities

Environmental Impact

Reducing the Environmental Impact Caused by Products

Green Procurement

CommunicationInternal Education and Raising

CSR and Regional Contribution

Dissemination of Information

Our Approaches to Biodiversity ConservationCommendations

Editorial Policy

Yokkaichi Operations (*) and Asahi Test Center, Toshiba Corporation Semiconductor & Storage Products Company (*) Including resident divisions and resident companies

The purpose of this report is to facilitate the general public’s further understanding of environmental management (environmental management and environmental consideration in business activities) at Yokkaichi Operations, Toshiba Corporation Semiconductor & Storage Products Company. The Environmental Reporting Guidelines 2012, published by the Ministry of the Environment, were used as a reference for editing.

Most of the performance data provided herein is from activities in FY 2014 (starting from April 1, 2014 to March 31, 2015) but some may contain data from previous years or FY 2015.

Organization

Reduction in Total Waste Generated

ReleasedReduction of the Total Amount of Greenhouse Gases Released

History of Yokkaichi Operations and Environmental Protection Activities

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Editorial Policy. . . . . . . . . . . . . . . . . . . . . . . . . . . . .

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Reduction of Chemical Substances

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Reducing the Environmental Impact. . . . . . . . . . . . . . . . . . . . . . .of Our Products 15

Awareness

Applicable Period

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Yokkaichi operations has been actively promoting the reduction of environmental impact. In addition, focusing on nature conservation activities.

semiconductor production. However, we relax the clean level in other parts to reduce total electric power consumption. We are also implementing "energy-saving in power supply" by improving efficiency of the power supply devices and reducing the air-conditioning systems in the plant, and making efforts for "more efficient production line." For example, we have constructed a workpiece-transport system where each workpiece in a dedicated small container is freely transported between the fabrication facilities, searching for the optimum production line. In this system, we avoid wasteful use of the energy supplied to the production line and dramatically improve productivity. Yokkaichi Operations may be called a plant where cross-departmental energy-saving technologies are proactively introduced.

Development of activities focused on environment, CSR and communication

In Yokkaichi Operations, we are actively developing the initiatives of “minimize waste”’ and “turn waste into resources,” and have achieved effective results in “3R activities.” We reduce the amount of the chemical liquid used in the lithography process and reduce new purchase of chemical liquid for cleaning. About hydrofluoric acid generated in the production process, we have introduced a recovery system where the component after decomposition is solidified as calcium fluoride. We sell it to a dealer together with highly concentrated hydrofluoric acid as valuable materials for new fluorine products.We are not only working on the environmental activities inside the plant, but also positively promoting biodiversity activities in the

Environmental Management

Tomoharu MatsushitaGeneral Manager of Yokkaichi Operations

Yokkaichi Operations, the world-leading NAND-type flash memory production base

Toshiba Semiconductor & Storage Products Company, Yokkaichi Operations is one of the largest semiconductor plants in the world. NAND-type flash memories, which are embedded in various digital products, such as rapidly spreading smartphones, are sent out to the world from here in Yokkaichi. Yokkaichi Operations is a production plant with state-of-the-art production equipment, and also development base. At the same time, it is “a plant that actively promotes efforts to reduce environmental impact,” sincerely tackling global environmental problems facing mankind. We have expanded fabrication facilities since 2005. The second phase construction of No.5 fabrication facility (Fab 5) was completed in summer 2014. At Fab 5, we aim to reduce CO₂ emissions by about 13% compared to Fab 4. Furthermore, for the mass production of three-dimensional structure NAND-type flash memories (3D memories), we started rebuilding Fab 2, and it will be completed in summer 2015. At the newly-rebuilt Fab 2, we aim to reduce CO₂ emissions by about 15% compared to Fab 5. We take various initiatives for environmental protection, including preventive measures addressing global warming, chemical substance reduction, and biodiversity activities, so that Yokkaichi Operations deserves one of the top state-of-the-art plants in the world.

Energy-saving’ measures adopted everywhere in production line in plant

One characteristic example of the CO₂ emission reduction initiatives in Yokkaichi Operations is “energy-saving in production process.” We always secure the highest clean level inside storage boxes and at production devices for wafers, essential components for

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surrounding area of the plant. Using "quick assessment of biodiversity potential" adopted by Toshiba group, we quantitatively assess the green space and water system within a 2-km radius from the plant, and perform environmental conservation activities jointly with local governments and experts. We are developing new efforts for nature conservation through activities such as participation in satoyama creation led by local community, and "planting 1.5 million trees" by local Toshiba group.In addition, we devote ourselves to CSR focusing on environmental conservation, implementing various activities in cooperation with the local community. The activities include periodical liaison meetings with local residents, environmental education programs (developed in collaboration with local government) at neighboring elementary schools, and participation in exhibitions. These are good opportunities to let people know widely about the environmental activities of Yokkaichi Operations and increase communication with stakeholders. Such efforts bear fruit one by one, and deepen trust between neighboring communities and the plant..

Next generation semiconductor memories sent out from plant actively promoting environmental impact reduction

Yokkaichi Operations, where we are actively promoting the world-class project of environmental impact reduction, produces NAND-type flash memories. These memories themselves contribute to lower electric power consumption of various products. Especially, SSDs have no drive section unlike HDDs, and remarkably reduce power consumption. Therefore, SSDs are rapidly applied to data centers that are playing a major role in the era of using big data, and to the medical equipment field. The low power consumption of memories is achieved by cutting-edge process technology. As a nanofabrication technology for the reduction of memory cell area, we have adopted ultrafine 15nm process technology. With the multi-level cell technology that allows one memory cell to store two bits or more data, and the technologies of chip thin-grinding and thin multi-layer stacking, we have drastically reduced the cost and power consumption per memory capacity.Furthermore, we are working on the development of next generation semiconductor memories with greatly increased storage capacity achieved by forming the existing NAND-type flash memories into the three-dimensional structure.

We developed the worldʼs first 48-layer three dimensional stacked cell structure flash memory called BiCS in March, 2015.We are also readying for mass production in the new Fab2 at Yokkaichi Operations. The new fab2 is now under construction and will be completed in the first half of 2016.The next generation semiconductor memories with 1TB capacity, 16 times as large as that of the existing products, are planned to be put to practical use within 4 years. To achieve that, we will introduce cutting-edge production equipment and switch to the efficient BiCS memory mass production.As described above, using all sorts of technologies, we perform both the environmental and business activities at the same time in Yokkaichi Operations. The energy-saving technology and improved productivity in the plant lead to cost reduction and higher competitiveness in product price. The design and process technologies of the low-power-consumption semiconductors give birth to next market-leading products. In Yokkaichi Operations, further advance automation of the production process to increase productivity to the maximum so that our employees are shifted to higher-value-added sectors, where they can improve the ability of product development and polish technical skills. Here, “environment” is one of the most important key words. We all the members will continue to move forward so that the environmental conservation activities of Yokkaichi Operations will be recognized around the world.

World's First 48-layer BiCS (Three Dimensional Stacked Structure Flash Memory)

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Yokkaichi Operations is aiming for the creation of new value in considering the global environment, and has set its environment policy based on a philosophy of contributing to the development of a sustainable society through its environmental activities, aiming for a low-carbon, recycling-oriented and naturally symbiotic society.

Environmental Policy

Recognizing that the Earth is an irreplaceable asset and it is humankindʼs duty to hand it on to future generations in a sound state, Yokkaichi Operations (Semiconductor & Storage Products Company, Toshiba Corporation) is pursuing the creation of new value in symbiosis with the Earth, in accordance with the Toshiba Group's Environmental Vision. Yokkaichi Operations is contributing to the development of a sustainable society through its environmental activities, aiming for a low-carbon, recycling-oriented and naturally symbiotic society.

Vision

Tomoharu MatsushitaGeneral Manager of Yokkaichi Operations, Semiconductor & Storage Products Company, Toshiba CorporationRevised on October 1, 2015

Environmental Management

PolicyBased on the Environmental Philosophy of the Semiconductor & Storage Products Company of Toshiba Corporation, Yokkaichi Operations is applying sophisticated environmental measures to the development and the manufacture of flash memory, emissions from manufacturing, and other business processes such as services. In this way, Yokkaichi Operations is striving to consider environmental issues while contributing to contemporary society in which electronics plays an indispensable role. With the aim of realizing a sustainable society, everyone at Yokkaichi Operations undertakes the following:1. Compliance and Sustainability(1) Our high-tech factory is located to the east of the lush Suzuka Mountains and to the west of Ise Bay with itsabundant marine life. We position environmental preservation as one of managementʼs primary responsibilities and arecontinuously promoting environmental activities in harmony with economic activities.(2) We comply with all applicable environmental laws and regulations, ordinances, and contracts, as well as otherrequirements Yokkaichi Operations has endorsed and voluntary standards.(3) We strive to continuously improve our environmental management system through regular audits and reviews of ouractivities to enhance the quality of environmental activities.2. ExecutionWe assess environmental aspects, including biodiversity, related to our business activities. We have establishedenvironmental objectives and targets for reducing environmental impact, preventing pollution, and manufacturingenergy efficient products, and are proactively implementing environmental measures.(1) We contribute to reducing environmental impact on society through product development according to high-capacity, small-sized, or resource-saving technologies, environmental assessment of products, and provision of NANDtype flash memories by appropriate control of raw materials and reduction of their usage.(2) We aim to address global warming by promoting energy saving in manufacturing equipment and power equipmentand implementing measures to reduce greenhouse gas emissions, such as installation of PFC abatement systems.(3) We positively promote improvements in productivity and 3Rs approaches to building a recycling-oriented society,and efficient use of resources by implementing measures to reduce the total discharge of waste materials or waterintake.(4) We realize reduction of environmental risks by managing chemicals used, developing technology to reducechemicals and implementing measures to reduce both the amount handled and emissions.(5) In order to conserve biodiversity, we strive to assess and mitigate the environmental impact of our business activitieson biodiversity and seek to make a better contribution to society.(6) We strive to facilitate mutual understanding with people in the local community or society through transmission ofenvironmental information and participation in activities outside the site.(7) We organize events designed to improve environmental awareness of all employees and encourage them toparticipate.

Yokkaichi Operations discloses this environmental policy internally and externally, ensures that it is thoroughly communicated to everyone at the site, and promotes its business activities in accordance with this policy, and encourage them to participate.

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Environmental Management System

Having established an environmental management system pursuant to ISO 14001:2004 (hereinafter referred to as “EMS”), Yokkaichi Operations is striving to achieve continual improvement. With the aim of enhancing environmental management activities, the former Semiconductor Company of Toshiba Corporation (the present Semiconductor & Storage Products Company of Toshiba Corporation) integrated the EMS in August 2007, and gained integrated certification for EMS, covering 13 sites including affiliated companies in Japan and 7 overseas sites, in September 2014.

We assess environmental aspects, including biodiversity, related to our operations, products and services. We have established environmental objectives and targets for reducing environmental impact, preventing pollution, and developing products that consider environmental impact, and are proactively implementing environmental measures.

Environmental Preservation Structure

To promote environmental preservation activities continually and efficiently, we have established an environmental preservation structure with the General Manager in the highest position, and have defined responsibilities and authorities clearly. An Environment Management Committee is positioned as the highest

deliberative organ on environmental preservation, for discussing the entire spectrum of environmental activities including EMS. We have established a Compliance Committee, to supervise compliance with environmental laws and ordinances, in order to ensure full compliance.

Management Review

Check

Environmental Policy

Plan

Compliance Committee

Resident-operationalcompanies

Deputy Environmental Protection Officer:Manager of Facilities Engineering & Operations Dept

Internal EnvironmentalAuditor

Department Managers

Diagram ofEnvironmentalPreservationStructure

Environmental Protection Officer : General Manager (GM)

IISO14001 Certificate

Implementation andOperation

Environmental Management System Model

Environment ManagementCommittee

Energy-saving Committee

Workplace EnvironmentMeeting

DepartmentEnvironment Meeting

Manager of PollutionPrevention

Section & Group Managers

Manager of EnvironmentalProtection Group

ISO14001 Secretariat

Continual Improvement

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AugustDecemberFebruary

NovemberJanuary

AprilFebruary

NovemberFebruary

MayOctober

October

FebruaryFebruary

AprilFebruaryFebruary

FebruaryOctober

NovemberFebruary

DecemberJuly

December

FebruaryJanuary

MayJune

AugustNovemberFebruary

AprilOctober

JulyOctober

AprilJuly

NovemberDecember

FebruaryOctober

November

FebruaryFebruaryOctober

December

OctoberOctober

Groundbreaking in line with development of "Yokkaichi Hi-Tech Complex" by Yokkaichi City Land Development Corporation.Concluded Pollution Control Agreement with Yokkaichi City, Mie PrefectureStarted construction of Manufacturing Building No.1Concluded Pollution Control Agreement with Yamanoissiki-cho, Yokkaichi City / Started holding Yamanoissiki-cho local meetingsYokkaichi Operations foundedStarted manufacturing DRAMStarted operation (of Manufacturing Building No.1)Underwent first Toshiba Comprehensive Environmental AuditCompletion of Manufacturing Building No.2Gained BS7750 Environmental Management System CertificationStarted operation (of Manufacturing Building No.2)Gained ISO14001:1996 Environmental Management System CertificationStarted manufacturing SRAMStarted manufacturing NAND-type flash memoryReceived prize of Recycling Promotion CouncilStarted manufacturing MCPStarted selling SD memory cardReceived the Chubu METI Minister's Award (heat category)Received prize of the Chairman of ECCJAchieved zero emissions, the first in Toshiba group (in fiscal year 1999)Received the Chubu METI Minister's Award (electricity category)Received the Chubu METI Minister's Award (contribution to energy management)End of DRAM manufacturingStarted selling mini SD memory cardStarted selling USB flash memoryReceived the Director-General, Agency for Natural Resources and Energy Award (heat category)Started publishing Yokkaichi Operation's Environmental ReportStarted operation of Asahi Test CenterReceived the Director-General, Agency for Natural Resources and Energy, Award (electricity category)Completion of Manufacturing Building No.3Started operation (of Manufacturing Building No.3)Gained ISO14001:2004 Environmental Management System CertificationStarted selling micro SD memory cardStarted selling SDHC memory cardReceived Energy Saving Center's Award for Outstanding performance at Conference of Successful Cases of Energy SavingStarted Kid's ISO14000 program (environmental education for children)Completion of Welfare BuildingCompletion of Manufacturing Building No.4Gained ISO14001:2004 Environmental Management System Certification of Toshiba Corporation Semiconductor Started operation (of Manufacturing Building No.4)Received PRTR Outstanding Performance Award (Jury's Special Award)End of SRAM manufacturingProductized 512MB SSDProductized embedded-type NAND-type flash memory with the greatest capacity of 64GB Started Kid's Yokkaichi CO2 Diet Program (environmental education for children)Received Gold Boiler Management Establishment AwardStarted selling the world first SDXC memory card with the greatest capacity of 64GB and the fastest transfer rate Productized embedded-type NAND-type flash memory with the greatest capacity of 128GB End of 200mm wafer manufacturing lineReceived Encouraging Prize of Kansai Eco-Office Grand AwardStarted Eco-kid's CO2 Diet Program (environmental education for children)Developed the world smallest 19nm process NAND-type flash memory with high-capacity 64Gbit (8GB)Completion of Manufacturing Building No.5 (primary period)Started operation (of Manufacturing Building No.5)Received Technology Prize in the 48th All Japan Boiler ConferenceReceived the Highest Performance Award of Toshiba Group Environmental AwardsProductized SSD for PC with the world smallest 19nm process NAND-type flash memoryProductized SSD for enterprise with the greatest capacity of 1.6TBReceived the "Prize of the Chairman of ECCJ" of Energy Conservation Group PrizeReceived the "Prize of the Chairman" of Reduce/Reuse/Recycle promoter PrizeReceived the silver prize in an international section of Green Apple AwardStarted shipping the sample of SSD for enterprise with the greatest capacity of 1.6TBReceived the Chubu METI Director's Award (energy management)Received the Prize of the Manager of Tokai branch office, ECCJReceived the "Prize of the Chairman" of Reduce/Reuse/Recycle promoter PrizeReceived 1st place at 2nd Mie Prefecture’s Environmental AwardsStarted mass production of the 19nm process NAND-type flash memoryDeveloped the World's First 48-layer BiCS (Three Dimensional Stacked Structure Flash Memory)Received the "Prize of the Chairman" of Reduce/Reuse/Recycle promoter PrizeReceived the "METI Minister’s Awards" of Awards for Resources Recirculation Technologies and Systems

2014

2013

2012

2011

2010

2009

2007

2003

2006

1996

2005

2000

2004

2001

2008

1999

1993

2002

1998

1992

1995

1991

1990

1994

History of Yokkaichi Operations and Environmental Protection Activities

Environmental Management

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Every year, we set our environmental objectives/targets, by reflecting the achievements of the previous fiscal year, performance, requirements of Yokkaichi Operations and changes in environmental conditions in the results of our environmental assessment. In FY 2014, we set and realized environmental targets through various activities.

Environmental Targets and Performance in FY 2014

Environmental Objective

Addressing global warming

Development of products that consider environmental impact

Promotion of environmentalcommunication

Promotion of biodiversity conservation activities

Environmental Target Target Value Performance Evaluation

Reduction of CO2 emissions

Efficient use of resources

Reduction of environmental risks

Reduction of at least 21,840 tons-CO2

Not more than66,250 tons

Not more than27,361 tons

Not more than13,368 thousand m3

Not more than529 tons

Not more than45,000 tons

Contributing to3 measures

1 company

1 activity

5 cases

23,508 tons-CO2 Achieved

Enhancement of environmentalawareness

Implementation of measuresto enhance awareness

Enhance environmental awareness months

- Environmental Month: June- 3Rs Promotion Month: October- Energy-saving Month: February

27,275 tons

Reduction of water intake12,622

thousand m3

Reduction in the total amount of waste generated

56,721 tons

3 schools

Twice

Once

496 tons

3 measures

1 company

38,955 tons

Promotion of Toshiba Group Global Environmental Action 2014 1 activity

-Japanese edition to beissued in August

-English edition to beissued in December

Implemented as planned

Environmental education for children

Publication of Environmental Report

3 schools

Exhibitors to the external environment events 5 cases

Twice

OnceReuse promotion due to Charity eco

bazaar recovery*Donation to Yokkaichi Greening Fund

Reuse promotion due to unnecessary calendar notebook recovery

*Donation to the Council of Social Welfare

Development of ecosystem network construction proposed by local

companies cooperation(Expansion of participant companies)

Reducing resource usage of products by promoting nanofabrication process

Reduction in the total amount of treatments of chemical substances specified in Toshiba’s action plan

Reduction of emissions of chemical substances specified in Toshiba

Corporation’s action plan

Reduction in waste volumes(excluding the volume of objects with value)

Environmental Objectives/Targets

Achieved

Achieved

Achieved

Achieved

Achieved

Achieved

Achieved

Achieved

Achieved

Achieved

Achieved

Achieved

Achieved

AchievedImplemented as planned

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Vibration (dB)

We have introduced environmental accounting to quantify costs related to environmental preservation and their benefits and to utilize the data as guidelines for environmental preservation activities. Classification and calculation of environmental preservation costs are based on the “Environmental Accounting Guidelines 2005” specified by the Ministry of the Environment as well as Toshiba Group’s own specifications. The costs totaled approximately 14 billion Japanese yen in fiscal 2014.

Cost of green procurement

Wastewater measurements

Regulatory environmental standards Voluntary standards Actual value Frequency of measurement

NOx (ppm)SOx (Nm3/h)

Soot (mg/Nm3)

Not exceeding 130Not exceeding 1.2Not exceeding 50

Not exceeding 72Not exceeding 0.099

Not exceeding 35

31 to 58<0.01<1.0

Once/Year

Sound noise (dB)

Regulatory environ-mental standards

not applicableNot exceeding 65Not exceeding 55Not exceeding 50

43 to 5444 to 5444 to 53

<30<30

Four times/YearFour times/Year

Once/Year

Once/Year

Not exceeding 4.0Not exceeding 4.0Not exceeding 3

Not exceeding 6.0Not exceeding 5.0

7.60.62.90.52.72.8

Once/MonthOnce/WeekOnce/MonthOnce/WeekOnce/Week

pHBOD (mg/L)COD (Mg/L)SS (Mg/L)

Nitrogen (mg/L)Fluorine (mg/L)

5.8 to 8.6 *1

Not exceeding 20 *1

Not exceeding 20 *1

Not exceeding 70 *1

Not exceeding 60 *2

Not exceeding 8 *2

Location: time

Environmental Accounting

Compliance with Laws and Regulations

0

2

4

6

8

10

12

14

16

18

20

2005 2006 2007 2008 2009 2010 2011 2012 2013 2014

Environmental Management

Environmental Preservation Cost [billion yen]

22

Cost of pollution such as air and gas protection

Cost of ISO14001 operations and environmental education

Cost of resource utilization

Cost of global warming prevention

We have set our voluntary standards at stricter levels than regulatory environmental standards for substances discharged to the air or into water, and are aiming for thorough compliance with these. As a result of these efforts, all the actual values in FY 2014 met our voluntary standards as before.

Regulatory environmental standards Voluntary standards

6.5 to 8.0

Actual value Frequency of measurement

Voluntary standards Actual value Frequency of measurement

Once/YearTwice/Year

Property line: morning and evening

Property line: daytimeProperty line: eveningProperty line: daytimeProperty line: evening

*1: Mie Prefecture’s Ordinance for Living Environment Conservation *2: Water Pollution Prevention Law

not applicablenot applicable

not applicable

not applicable

Not exceeding 60

Not exceeding 50

Four times/Year

Once/Week

Atmospheric measurements

Sound noise and vibration measurements

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Every year, we conduct a Toshiba Comprehensive Environmental Audit. With an emphasis on workplace management, the auditors examine achievement levels of the Toshiba Group’s Environmental Action Plan for energy saving, reduction of chemical substance emissions, reduction of waste, etc.

workplace management at 19 facilities e.g. checks of wastewater treatment equipment, recycling, and chemicals warehouses and facilities that use chemicals, effectiveness of emergency drills, compliance, measurement control of legally controlled substances, 4S (sorting, straightening-up, sanitation, and sweeping) approach, implementation status of employee education, etc.Having structured an EMS in accordance with ISO14001, Yokkaichi Operations annually conducts internal environmental audits of the EMS to improve our environmental performance. Additionally, we are also subject to an annual ISO 14001 external examination, where we can ensure compliance of the EMS with ISO14001 standards and continually improve our environmental management activities.

Since 1993, the Toshiba Group has been conducting regular environmental audits covering its sites including Yokkaichi Operations annually, through the Toshiba Comprehensive Environmental Audit system established by the Toshiba Corporation.An audit team consisting of qualified internal members conducts this audit for 2 days, based on the following principles: “3 Zen (all) approach," “3 Gen (actual) approach," and Visual control (management to watch and show) approach. The “3 Zen (all) approach" is to promote management of all facilities in all areas by all employees, and the “3 Gen (actual) approach" is to emphasize measurement of the actual situation of actual items at actual plants. The audit items cover 1) environmental management, 2) legal compliance and 3) plant management, or more specifically,

Toshiba’s Comprehensive Environmental Audit

We conduct internal environmental audits covering all the departments at Yokkaichi Operations. The auditors are certified by an external organization.To identify an issue to be improved, they check that activities in each department meet our environmental policy, or that each department is proactively promoting its activities to achieve environmental objectives and targets. We actively publicize excellent activities to other departments in order to raise the standard of our activities as a whole.

Environmental Audit

On-site Audit

Internal Environmental Audit

ISO 14001 External Examinations

Internal Environmental Audit

ISO14001 External ExaminationAn external certification organization conducts the audits, of which there are two types. In the surveillance audit, conducted annually, checks are made on the validity of the EMS and its maintenance. In the recertification audit, implemented once every three years, the continual effectiveness of the overall EMS is comprehensively verified.In fiscal 2014, the Toshiba Corporation Semiconductor & Storage Products Company underwent a surveillance audit and we, Yokkaichi Operations, had no matters pointed out.

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We implement various structural measures to prevent chemicals and gases from leaking during storage or handling, a large amount of which we use for semiconductor manufacturing. We also perform automatic around-the-clock monitoring of wastewater or waste gas discharged by Yokkaichi Operations.

Measures against Environmental Risks

Wastewater Treatment Facilities

Dike*Shown in red dash lines

Double Piping at the Joints

24-hour Monitoring on Automatic Wastewater Analyzer

Environmental Risk Assessment

Emergency Drills

Environmental Management

Examples of Measures to Prevent Environmental Pollution

Emergency DrillsIn readiness for emergencies, we have standardized response procedures for selected facilities and operations with high environmental risks assumed. Emergency drills are periodically carried out to maintain readiness so that swift action can be taken in the event of an emergency, and we can ensure their effectiveness and review our response procedures.

We have introduced environmental accounting to quantify costs related to environmental protection and their benefits and to utilize the data as guidelines for environmental protection activities. Classification and calculation of environmental protection costs are based on the “Environmental Accounting Guidelines 2005” specified by the Ministry of the Environment as well as Toshiba Group’s own specifications. The costs totaled approximately 14 billion Japanese yen in fiscal 2014.

Environmental Risk AssessmentWe verify that no environmental impact has been detected, by assessing the long-term environmental risks of the surrounding area through ecosystem surveys, odor surveys, chemical substance surveys, etc. of the nearby river whenever environmental impacts of Yokkaichi Operations are likely to change significantly, for example, when a manufacturing building is established.

Wastewater Treatment FacilitiesAcid and alkali discharged from Yokkaichi Operations are collected with wastewater treatment facilities and released into the river through the abatement process.

Overhead Pipes/Double Piping at the JointsPipes are arranged on racks instead of being laid underground, in order to prevent any chemical leakage polluting the soil. Piping at the joints is doubled to enable monitoring of liquid leakage.

Dike for tankThe underground relay tank in the clean room building, by providing in the basement and not outdoors, we are committed to preventing the spread. Even if leaking drainage in the tank, we will be able to prevent the spread of the spill by placing the dike.

Water and Air

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Chemicals

Water

Industrial Water

FY2012

71,542

21

10,015

FY2013 FY2014

tons

FY2012 FY2013 FY2014

Greenhouse gas

Chemicals

Waste materials

Wastewater

NOx

SOx

753

410

55,282

8,626

17.1

0

76,937

27

11,998

80,695

31

12,590

823

395

57,659

10,017

15.3

0

926

496

56,721

10,767

17.2

0

Input

Output

Total Waste Generated Ratio of GB basic unit(*)

Reduction in Total Waste Generated

Environmental Impact

2014

20%

40%

60%

80%

100%

0

10,000

20,000

30,000

40,000

50,000

60,000

70,000 [Ratio of GB basic unit][tons]

2005 2006 2007 2008 2009 2010 2011 2012 2013

Reducing Environmental Impact Caused by B Business Activities

0%

We use various chemical substances in the semiconductor manufacturing process. As these chemical substances largely influence environmental risk, we positively promote reducing usage and emissions, and switching to substitutes.

Reduction of Chemical Substances Released

0

100

200

300

400

500

600

2005 2006 2007 2008 2009 2010 2011 2012 2013 20140%

20%

40%

60%

80%

100%[Ratio of GB basic unit][tons]

Chemical substances released Ratio of GB basic unit(*)

thousand m3

thousand m3

thousand m3

thousand t-CO2

tons

tons

tons

tons

The total waste generated in fiscal 2014 (including valuable waste that could be sold) was 56,721 tons. In spite of the upward trend in the total waste generated, we are working to reduce the amount of chemicals and gases used, and promote recycling or selling of waste generated. Compared with last year, we reduced the total waste generated per memory capacity (GB basic unit).

(*) Ratio calculated, regarding total amount of total waste generated per memory capacity: 1GB (gigabyte) in FY 2005 as 100 %

(*) Ratio calculated, regarding total amount of chemical substances released per memory capacity: 1GB (gigabyte) in FY 2005 as 100 %

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Reducing Environmental Impact Caused by Business Activities

Transportation bytanktruck

Crean roomWet process

Flow of wastedsulfuric acid

Wastes

Non-feee sales(sellout)

Facility for dilutingsulfuric acid

Diluted hydrochloric acid(Procurement)

Reduction in usedamount

Chemical solutiontank

Facility for treating fluorine-containing

water

released and transferred if the amount handled of a Class I Designated Chemical Substance per year is 1 ton or more (0.5 ton or more for a Specified Class I Designated Chemical Substance). The Toshiba Group voluntarily discloses the amounts handled, consumed, removed and recycled in addition to the amounts released and transferred for each Class I Designated Chemical Substance, of which 0.1 ton or more per year is handled.

Chemical Substance Control System

PRTR (Pollutant Release and Transfer Register)

The PRTR Law of Japan mandates a system to monitor the amounts of chemical substances released to the environment (air, water area or soil), the amounts transferred, etc., and to aggregate the results and disclose data to the public. This law, the Act on Confirmation, etc. of Release Amounts of Specific Chemical Substances in the Environment and Promotion of Improvements to the Management Thereof, requires reporting of the amounts

PRTR Data for Fiscal 2014

Substance number

272

374

395

405

453

Chemical substnce name

Copper salts (Water-soluble, except complex salts)

Hydrogen fluoride and its water solible salts

Peroxydisulfate water-soluble salts

Boron compounds

Molybdenum and its compounds

Amount handled

Amount released

IntoAir

0

0.80

0

0

0

Into Water Area

0

0

0

0

0

Intosoil

0

0

0

0

0

IntoLandfill

0

0

0

0

0

TotalAmount

0

0.80

0

0

0

AsWaste

Amountcon-

sumed

6.28

0

1.96

0.62

0

Intosewage

0

0

0

0

0

TotalAmount

6.28

0

1.96

0.62

0

0

0

0

0

0

0

3738.63

89.47

0

0.44

0

0

0

0

0

Amount transfered

6.28

3,739.42

91.42

0.62

0.44

Management of Usage and Emissions of Chemical Substances

Chemical substances may cause serious environmental pollution and, as a result, adversely affect human health and the ecosystem if inappropriately managed. Our basic policy on chemical substances is:-to minimize the use of hazardous chemical substances,-to reduce the use of chemical substances and switch tosubstitutes with less environmental impact, and-to ensure the appropriate management of chemicalsubstances.We aggregate the amount of chemicals handled monthly bymeans of a Chemical Substance Control System. Using thisdata, we aim to monitor the amount of chemical substancesreleased into the air and water area, and the amounttransferred as waste.

*1 *2 *3Amountremoved

Amountrecycled

*1 Amount consumed is the amount of a substance used in or associated with a product and shipped out of the Operations.*2 Amount removed is the amount of a substance transformed into other substances by neutralization, decomposition or reaction treatment performed at the Operations.*3 Difference between the amount of waste transferred and the amount recycled depends on whether waste is processed with charge or without charge. For example, when waste disposal is outsourced with charge even for recycling purposes, the amount is considered as the amount of waste transferred.

Example of reducing usage of chemical substances

Yokkaichi Operations uses a large amount of sulfuric acid in the semiconductor manufacturing processes. Meanwhile, there are many problems in the recycling of sulfuric acid. So, we reduced consumption by changing the manufacturing process, and introduced the technology to recycle sulfuric acid.Moreover, we reduced a large amount of diluted hydrochloric acid by reusing sulfuric acid discharged from the manufacturing process instead of hydrochloric acid as a pH adjuster for chemically treating discharged water in the factory. As a result, we reduced the consumption of the chemical solution about 4,000 tons/year by these measures, we will promote the technical development to reduce the environmental impact in the future.

Facility for treating nitrogen-containing

water

unit : tons/year

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In the semiconductor manufacturing process, we use greenhouse gases such as perfluorocarbons (PFCs), as well as a large amount of energy.To address global warming, we have been developing various energy-saving measures for manufacturing equipment and power facilities, and reducing our greenhouse gas emissions.

A large amount and various kinds of greenhouse gases are used in the production processes: the P-CVD (plasma CVD) process where insulating films are formed on wafers, and the DRY (dry-etching) process where wirings and contact holes are formed by nanofabrication technology.We regard “emission reduction from the source” as the key to the reduction of greenhouse gas emissions, and have implemented many measures shown in the table below: Measure 1 is installing a detoxifying device to the production equipment that uses greenhouse gases. The device decomposes greenhouse gases into ones with small warming decomposes greenhouse gases into ones with small warming potential and emit them.

This measure decomposed almost all the greenhouse gases, and was highly effective in reducing them. Measures 2 through 7 are shortening the cleaning time of the reaction chamber in the production device by device modification and other improvements. These measures suppressed the amount itself of the greenhouse gases used. Measure 8 is omitting wasteful parts of the wafer processing conditions. The measure reduced the amount of the greenhouse gases used. Although the reduction effect of Measures 2 through 8 is rather small, they lead to product cost reduction. We will continue to promote measures linked to such product cost reduction.

Example of reducing total GHG emissions:Efforts to reduce GHG emissions in manufacturing equipments

precisely by installing the air intake near the manufacturing area (in the figure: Upper floor). Based on this examination result, we realized big energy saving per one manufacturing equipment by downsizing the air conditioner.We are working to save the energy by supplying power appropriate to the ability of the manufacturing equipments, while facilities section cooperates with a manufacturing section.

Energy conservation in manufacturing equipments

(*1) 6 greenhouse gases to be reduced under Kyoto Protocol: carbon dioxide (CO2), methane (CH4), nitrous oxide (N2O) (= nitrous monoxide), hydrofluorocarbons (HFCs), perfluorocarbons (PFCs), sulfur hexafluoride (SF6)(*2) Ratio calculated, regarding total amount of greenhouse gases released per memory capacity: 1GB (gigabyte) in FY 2005 as 100 %

Reducing power consumption by downsizing

Lithographydevice 吸気Intake

吸気Intake

Atmospherewith more highquality

After improvement

Precisionairconditioner

Before improvement

Air baed on specification of decice

Lithographydevice

Upperfloor

Lowerfloor

Atmospherewith highquality

吸気Intake

Reduction of the Total Amount of Greenhouse Gases Released

12345678

MeasuresInstallation of abatement equipment

Shortning of cleaning time in reaction chanber (1)Shortning of cleaning time in reaction chanber (2)Shortning of cleaning time in reaction chanber (3)Shortning of cleaning time in reaction chanber (4)Shortning of cleaning time in reaction chanber (5)Shortning of cleaning time in reaction chanber (6)

Rationalization of process condition

ProcessP-CVD、DRYP-CVDP-CVDP-CVDP-CVDP-CVDDRYDRY

GasesCF4、C4F8、CHF3、SF6、NF3

NF3NF3NF3NF3NF3CF4

CF4、CHF3

RemarksInstallation at the time of

introduction the new

Contnuation in FY2015

Completion in FY2014

Ratio for total amount f reduction FY201498.77%0.04%0.74%0.06%0.04%0.32%0.01%0.03%

200

400

600

800

1000

0%

20%

40%

60%

80%

100%

0 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014

Total Amount of Greenhouse Gas Released(*1) Ratio of GB basic unit(*2)

[Ratio of GB basic unit][Thousand tons-CO2]

Contnuation in FY2015

Contnuation in FY2015

Contnuation in FY2015

Completion in FY2014

Completion in FY2014

Upperfloor

Lowerfloor

Precisionairconditioner

Air based on specification of device

We introduce many manufacturing equipments in the Yokkaichi Operations and produce semiconductor products. Each semiconductor device operates day and night while consuming electricity, gas and water. With the micronization and the advancement of products, it is required to control the power of the manufacturing equipments more precisely year by year.Manufacturing equipments may have air conditioners to satisfy this demand level. We worked on reducing energy in the manufacturing equipments of the lithography process by downsizing an air conditioner incorporated in manufacturing equipments.Until now, air controlled temperature-humidity was sent into manufacturing equipments by inspiring the atmosphere of the facilities area (in the figure: Lower floor) where an air conditioner installed in. It was able to inspire an atmosphere controlled temperature-humidity more

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Green Procurement

Reducing the Environmental Impact of Our Product

Reduction of environmental impacts per capacity■ The product of the year 2014 boasts 4,000 times the

memory capacity of our similar product of 18 years ago, while maintaining about the same size and performance, thus significantly reducing the environmental impacts per capacity.

To facilitate efficient green procurement activities and close communication with our suppliers, in 2009 we established the Green Procurement Updating System (GPUS) allowing us to collect information or materials through the internet.

Environmental improvement by the memory mounting technology■ Toshiba implements the small-size package and large capacity

of memory products using the technologies to thin the chip and to stack the multi-layered chips, as well as advanced nanofabrication technology.

Reducing Environmental Impact Caused byPP roducts

32MbitNAND type Flash

memory

450nmprocess technology

Package size18.8mm×11.8mm(TSOP)

1996 2014

128GbitNAND type Flash

memory

15nmprocess technology

Package size20.0mm×12.4mm(TSOP)

32GbitNAND type flash memory

128GbyteNAND type flash memory(eMMCTM)

Package size20.0mm×12.0mm×1.2mm

(TSOP)

Package size17.0mm×22.0mm×1.4mm

(FBGA)

64GbitNAND type Flash chip (30μm thickness)

×16 chips+

Controller chip

32GbitNAND type Flash chip (200μm thickness)

×1 chip

32times thememory capacity

Achieve Significant・Miniaturization・Space saving・Material saving

per capacity

Shipping

Access toinformation

Product information

YokkaichiOperations

ToshibaSales

Customers

Responses

Inquiries

Parts andmaterials DB

Productenvironment DB

Shipping labelindicating RoHS

compliance

Parts andmaterials

information

The Toshiba Corporation Semiconductor & Storage Products Company revised its Green Procurement Guidelines on Sept. 1, 2014, in which it asks its suppliers to submit information on specific “environment-controlled substances,” its suppliers’ systems and other requested materials.

Green Procurement Updating System (GPUS)

Input

Input

Survey on parts and materials information

(1) Certification for EU RoHS-controlled substances

(2) Certification for environment-controlled substances

(3) Analysis data(4) Safety data sheets (SDS)(5) Composition list for products and

parts(6) Certification for Halogen-free

substances

Inquiries Responses

Reference

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Internal Education and Raising Awareness

Eco-kids’ CO2 Diet ProgramThis is one of our environmental education programs developed in collaboration with Mie Prefecture. With this program, we provide environmental education for children in Asahi-cho, Mie Prefecture, where our branch is located. The program requires each school child to contemplate how to reduce the use of electricity as a leader at home.Thus, we make efforts to provide them with opportunities to be aware of the environment. At the end of the class, "Ahmin and Ameri," Asahi Town's mascot, gives each school child a certificate.

CSR and Regional Contribution

Communication

Charity eco bazaar(3Rs Promotion Month)

Clean-up activities

Scene of education

Category Name of course Person to be trained Theme

Environmental EducationWe provide all our employees with environmental education to upgrade the level of our environmental activities. The e-learning program for general employees aims to deepen their understanding of the environmental management system at Yokkaichi Operations. Education programs are prepared depending on the employees’ position and function to improve their operations, as well as environmental awareness and job knowledge. We constantly update all these programs. We also provide education for internal environmental auditors annually to further advance their competence.

Education programs

according to positions

Education programs

according to functions

Education for managers

Education for general employees

Education for new or transferred personnel

Education for specific employees

Education for environmental auditors

General Manager/Senior ManagerAll employees (including employees of other

companies at Yokkaichi Operations)

New recruit/Transferred personnel

Operator engaged in specific work

Internal environmental auditor

Responsibilities and authority of senior manager

Revisions to environmental management system, environmental policy, objectives and targets

Global environmental issues, environmental management system, environmental policy

Compliance rules with environmental laws and ordinances, environmental impact incurred by non-conformance with operation standards and procedures for specific work

Roles and responsibilities of internal environmental auditor, revisions to environmental laws and ordinances

Special EventsEvery year, Yokkaichi Operations implements various activities to raise employees’ awareness about the environment: June is designated as Environment Month; October is the 3Rs Promotion Month (3Rs: reduce, reuse, recycle); and February is the Enhance Energy-saving Month in Japan. October 2014, we held charity eco bazaar from 2012 annually in our factory. We sold disused articles in our house, and donated proceeds to Yokkaichi greening fund.

Clean-up ActivitiesYokkaichi Operations works on regular clean-ups within the site and the surrounding roads. Plastic, wastepaper, scraps of metal, glass and wood waste, etc. are separated from the collected trash.

Kids’ Yokkaichi CO2 Diet ProgramThis is one of environmental education programs established by Yokkaichi City Environmental Forum that was set up by Yokkaichi City and seven neighboring companies. Yokkaichi Operations has also participated in the launch of this program.We explain the current situation of environmental issues to elementary school children near Yokkaichi City, and encourage them to implement energy-saving activities at home. At the end of the class, “Konyudou-kun,” Yokkaichi City’s mascot, gives each school child a certificate.

Scene of education

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Corporate AccountabilityEnvironmental Meetings with the CommunityFor the purpose of local environmental protection, we hold periodic meetings with the local residents’ association to report on our environmental protection activities including environmental measurement data on water and air, and provide tours of environmental facilities. We are continuing to promote communication aiming for harmonious business activities with the local community.

Environmental ReportSince 2003, we have published an Environmental Report (a Site Report) to inform the general public about our environmental activities. This is our 13th Environmental Report. We will continue to issue this report, striving to make the contents more accessible.

Participation in Environmental EventMie Children’s Eco-fairTo provide children in Mie Prefecture with opportunities to enjoy learning about the environment, we support and participate in the “Mie Children’s Eco-fair” hosted by Mie Prefecture. Approximately 4,100 people visited the fair over two days in total in 2014.

Environmental Symposium ExhibitionParticipating in the Exhibition hosted by the Yokkaichi Environmental Forum provides us with an opportunity to explain our activities, such as energy saving and resource saving in Yokkaichi Operations.

Donation of Calendar / NotebookAround the turn of the year, we collect calendars and notebooks at Yokkaichi Operations that were surplus to requirements and donate them to Yokkaichi City Social Welfare Council. The donated calendars and notebooks are also utilized as rehabilitation materials or notebooks for written conversation.

Dissemination of Information

Duvet Down Jacket

Donated calendars and notebooks

Collected miswritten postcard

Mie Children’s Eco-fair

Environmental Meetings with the Community

Environmental Symposium Exhibition

Communication

Miswritten Postcard with Stamp Collection ActivitytyWe have been part of the "World TERAKOYA Movement", an international cooperation program for non-formal education launched by NFUAJ (National Federation of UNESCO Associations in Japan ), through the collection of miswritten postcards with stamps since 2014. By the end of March 2015, we collected over 1,200 postcards, and donated stamps to the value of 55,000 yen.

Used Feather Products Collection ActivityWe have collected feather products, and donated them to "UMOU PROJECT". This activity has been help to contribute to society in the region.

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Ecosystem networks in collaboration with other companiesAs its biodiversity conservation goal in FY 2015, one of the activity items of the Fifth Environmental Action Plan for Toshiba group, we have set “building an ecosystem network with regional cooperation from the business sites (Complex).” The Yokkaichi Operations investigates a green tract of land belt and the association of the habitat of birds gathering around Yokkaichi Operations in collaboration with other companies. We will actively promote the Biodiversity Conservation.

Our Approaches to Biodiversity Conservation

Commendations

METI Minister’s Awards

Preservation of ”Satoyama”

Awarding of Reduce, Reuse, Recycle

Planting 1.5 Million Trees

Concept of ecosystem networks Toshiba aims to build

Preservation of ”Satoyama*”Toshiba volunteers in Yokkaichi operations participate in activities to develop “Mie Kita Satoyama”, which is promoted by communities, every month. This activity was proposed by communities, but Yokkaichi Operations participated in the setup of the activity organization. We deepen the mutual understanding with communities through activities such as logging, thinning and improvement of the promenade.

*Undeveloped woodland near populated area

Planting 1.5 Million TreesToshiba sealed the declaration of Toshiba Planting between Mie Prefecture, Yokkaichi City and Toshiba in October, 2012, and started the activities "Planting 1.5 Million Trees" in Mie as one part of CSR activity. The third activity was carried out in October, 2014. Employees of Yokkaichi Operations, Mie Operations and Chubu Branch and the families participated in the activities with Mie Prefecture, Yokkaichi City and communities.

Awards for Resources Recirculation Technologies and Systems

Toshiba received METI Minister's Award for Resources Recirculation Technologies and Systems in collaboration with Asahi Glass Co., Ltd., and Organo Corporation. Activities of the recycling calcium fluoride recovery in waste water, that three companies collaborated, are appreciated.* This awards program was launched in 1975, with the aim of extensively calling for andrecognizing outstanding projects and efforts by companies and other industrial groups with excellenttechnologies that contribute to waste reduction, reuse and recycling, thereby encouraging andfostering such efforts and creating new business. The program is organized by the Japan EnvironmentalManagement Association for Industry (JEMAI), with the support of METI.

Reduce/Reuse/Recycle promotion AwardWe received Reduce, Reuse, Recycle Promotion Association Chairman’s Award for Achievement in Promoting Reduce, Reuse, Recycle Activities consecutively for three years from 2012. Activities of the reduction in total waste generated, such as reduction in chemical material used and calcium fluoride recovery in waste water, are appreciated.

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Environmental Protection GroupFacilities Engineering & Operations DepartmentYokkaichi OperationsSemiconductor & Storage Products Company800, Yamanoisshiki-cho, Yokkaichi City, Mie Prefecture 512-8550, JapanTEL: +81-59-330-1025 FAX: +81-59-330-1134URL http://toshiba-yokkaichi.jp/