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Test of mass flow controller Jiaming Yu

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Test of mass flow controller. Jiaming Yu. Gas: 7%CO 2 93%Ar. * : There is a leak of 17.1 SCCM. - PowerPoint PPT Presentation

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Page 1: Test of mass flow controller

Test of mass flow controller

Jiaming Yu

Page 2: Test of mass flow controller

Gas: 7%CO2

93%Ar

Page 3: Test of mass flow controller

Range: 10SCCM

Calculated flow (SCCM) 2.0 4.0 6.0 8.0 10.0

Measured flow (SCCM) 1.9 3.9 6.4 8.6 10.5

Range: 20SCCM

Calculated flow (SCCM) 4.0 8.0 12.0 16.0 20.0

Measured flow (SCCM) 4.1 7.7 12.5 17.3 21.4

Range: 200SCCM

Calculated flow (SCCM) 40.0 80.0 120.0 160.0 200.0

Measured flow (SCCM) 43.9 86.9 129.0 171.4 214.3

Range: 2SLM*

Calculated flow (SLM) 0.4 0.8 1.2 1.6 2.0

Measured flow (SLM) 0.4 0.9 1.4 1.9 2.4

* : There is a leak of 17.1 SCCM.

Page 4: Test of mass flow controller

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