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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

TEM Sample Preparation with the FIB/SEM

Ben MyersNUANCE Center

Northwestern University

Evanston, IL

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

TEM Sample Prep with FIB

Pt Deposition

Bulk-Out

U-Cut

Lift Out

Mounting

Thinning

Cleaning Step-by-step instructions with recipe information and 3-D rendering of each process

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

TEM Sample Preparation

Sample

(100) Si

Goal

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

E-beam Pt

0

Tilt

Application: Pt e-Dep

Shape: Rectangle

15m (X) x 1.5m (Y) x 200nm (Z)

2-5kV, >1.4nA

E-beam dep

at 0

Tilt (SEM)E-beam dep

at 52

Tilt (SEM)

SEM

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Pt Dep

(Ion Beam)

52

Tilt

Application: Pt Dep

Shape: Rectangle

15m (X) x 1.5m (Y) x 1.5m (Z)

30kV, 93pA-0.28nA

I-beam dep

at 52

Tilt (FIB)I-beam dep

at 52

Tilt (SEM)

FIB

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Bulk-Out (1 of 2)

52

Tilt

Application: Si

Shape: Regular Cross Section

20m (X) x 12m (Y) x 6m* (Z)

30kV, 6.5-21nA

* Actual depth is material dependent

Bulk-Out (1/2) at 52

Tilt

SEM

FIB

FIB

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Bulk-Out (2 of 2)

52

Tilt

Application: Si

Shape: Cleaning Cross Section

20m (X) x 1.5m (Y) x 6m* (Z)

30kV, 2.8-6.5nA

* Actual depth is material dependent

Bulk-Out (2/2) at 52

Tilt

SEM

FIB

FIB FIB

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

U-Cut

7

Tilt

Application: Si

Shape: Rectangles

1.5m wide, overlapping

30kV, 0.92-6.5nA

FIB

FIBSEM

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Lift-Out (1 of 4)

0

Tilt

Insert Omniprobe

at Park

Drive to Eucentric

High

Lower to ~10m from sample

Insert Pt GIS needle

Position tip within ~200nm of sample

180

scan rotation is helpful

FIB FIB

-

180

scan rotation

FIB

Z Position SEM

X/Y Position

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Lift-Out (2 of 4)

0

Tilt

Application: Pt Dep

Shape: Rectangle

Size:

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Lift-Out (3 of 4)

0

Tilt

Application: Si

Shape: Rectangle

Size: 1.5m (X) x 2-4m (Y) x ~2m (Z)

30kV, 2.8nA

FIB

FIB SEM

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Lift-Out (4 of 4)

0

Tilt

Raise Omniprobe

~10m

Retract Pt GIS needle

Send Omniprobe

to Eucentric

High

Retract Omniprobe

FIB

FIB

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Mounting (1 of 3)

0

Tilt

Reset eucentric

height on grid

Insert Omniprobe

at Eucentric

High

Lower to within ~10m of grid

Insert GIS

Position sample within ~200nm of grid

FIB

SEM SEM

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Mounting (2 of 3)

0

Tilt

Application: Pt Dep

Shape: Rectangle

Size: ~1m (X) x 3-5m (Y) x 0.5m (Z)

30kV, 28-93pA

FIB

FIB

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Mounting (3 of 3)

0

Tilt

Application: Si

Shape: Rectangle

Size: ~2m (X) x ~200nm (Y) x ~1m (Z)

30kV, 93pA-2.8nA

FIB

FIB

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Thinning (1 of 3)

53-54

Tilt

Tilt into sample 1-2

Application: Si

Shape: Cleaning Cross Section

Size: ~10m (X) x ~500nm (Y) x ~3m (Z)

30kV, 0.46-2.8nA

+

FIB

FIBSEM

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Thinning (2 of 3)

50-51

Tilt

Tilt into sample 1-2

Application: Si

Shape: Cleaning Cross Section

Size: ~10m (X) x ~500nm (Y) x ~3m (Z)

30kV, 0.46-2.8nA

-

FIB

FIBSEM

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Thinning (3 of 3)

Repeat thinning steps 1 and 2

Target final sample thickness +60nm

Application: Si

Shape: Cleaning Cross Section

Size: ~10m (X) x ~200nm (Y) x ~3m (Z)

30kV, 93pA-0.46nA

+/-

FIB

Step 1

FIB

Step 2FIB

thinned sample

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Cleaning (1 of 2)

Tilt into sample +/-

3-5

Application: Si

Shape: Rectangle

Size: ~10m (X) x ~2m (Y)

5kV, ~46pA

~2-5min per side

+/-

FIB -

~52+5

tilt FIB -

~52-5

tilt

SEM

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Cleaning (2 of 2)+/-

Repeat Step 1 with +/-

5-7

Application: Si

Shape: Rectangle

Size: ~10m (X) x ~3m (Y)

2kV, ~28pA

~1-3min per side

SEM

FIB -

~52+/-7

tilt

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

(S)TEM Results (HD2300)

Pt Dep

Pt e-Dep

Ga

damage

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Bright Field STEM

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NUANCE Centerexploring the inner space

TEM Sample Preparation with FIB Ben Myers - 2009

Z-Contrast STEM

TEM Sample Preparation with the FIB/SEMTEM Sample Prep with FIB TEM Sample PreparationE-beam PtPt Dep (Ion Beam)Bulk-Out (1 of 2)Bulk-Out (2 of 2)U-CutLift-Out (1 of 4)Lift-Out (2 of 4)Lift-Out (3 of 4)Lift-Out (4 of 4)Mounting (1 of 3)Mounting (2 of 3)Mounting (3 of 3)Thinning (1 of 3)Thinning (2 of 3)Thinning (3 of 3)Cleaning (1 of 2)Cleaning (2 of 2)(S)TEM Results (HD2300)Bright Field STEMZ-Contrast STEM