TEL Mechatronics – Company Presentation

Edi Bischofberger

Head of Sales TEL Mechatronics AG (former Oerlikon Mechatronics AG)

31/01/2013

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TEL Mechatronics Confidential

1946 1960 2000 2006 2010

Foundation of Geräte-bauanstalt Balzers

Strategic change to 3rd party customers in high tech industry

Start-up of manufacturing & assembly under new name of Mecanovis as subsidiary of Oerlikon Group (former vacuum plant engineering & construction of Balzers Ltd.)

Production of coating systems for Balzers

Establishment as corporate manufacturer within Unaxis group(mainly contract manufacturing)

2008

Shift from contract manufacturing to customer specific systems and assemblies

2012

TEL Mechatronics has a long history as supplier for the mid and high tech industry, especially in the field of vacuum solutions.

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TEL Mechatronics Confidential

Target Markets

Historical Markets

Solar Coating Semiconductor Mechanical Engineering

Photonics Semiconductor Research Institutes

TEL Mechatronics, with an experience of more than 50 years in vacuum technology, focuses on market segments in the high tech industry.

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TEL Mechatronics Confidential

Industrial Supplier Research Institutes

Engineering Procurement

Machining Cleaning Assembly Metrology Logistics

Project management

Quality assurance

TEL Mechatronics offers the complete range of services to its customers. Nonetheless, single services will also be offered, for example engineering, cleaning or ultra precise metrology services.

To serve the target market segments, TEL Mechatronics offers a wide range of services from engineering to logistics.

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TEL Mechatronics Confidential

• Class 10 clean room facilities (under flowboxes)

• Wet cleaning up to 4 meter parts size

• Bake out equipment with RGA documentation

For research institutes TEL Mechatronics offersspecial services in machining, cleaning, assembly and metrology.

Metrology

Assembly

Cleaning

Machining

• Ultra precision CMM with accuracy of up to 0.3 µm

• Clean room environment

• Hard turning competences with accuracy of up to 1 µm

• Ultra precise surfaces of up to 10 nm

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TEL Mechatronics Confidential

The Paul Scherrer Institute, PSI, is the largest research centre for natural and engineering sciences within Switzerland. The next large-scale facility at PSI – the X-ray laser SwissFEL – should come on-line in 2016. It will produce very short pulses of X-ray light, with laser-like properties.

The PSI project allows TEL Mechatronics to gain know how and experience in manufacturing for research institutes.

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TEL Mechatronics Confidential

For PSI TEL Mechatronics engineers, manufactures, cleans and qualifies complete LINACs for the Swiss FEL project.

Ultra precise Cu-cells

UP – metrology via Leitz Infinity

vacuum brazing

Manufacturing accuracy: 1 µm

Ultra precise surface <25 nm

104 acceleration cavities; each consists of 113 Cu-cells

measuring accuracy: 0,3 µm

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TEL Mechatronics Confidential

Vacuum brazing chamber

Ultra precisehard turning

Assembly StackingLogistics

Metrology

For the PSI project significant investments in machinery and facility have been done on site.

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UP - ultra precision fully hydrostatic turning

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Orlando Derungs

An ultra-precision surface formed in three stepsraw material / pre-turning / diamond-turning

With the diamond surfaces are processed precise, it results in a surface roughness of <15 nm Ra. The diamond is the most valuable and important tool at the UP-processing.

Measuring – Testing – OptimizeSeveral work steps are necessaryuntil a ultra precise (UP) surfaceis manufactured.

DiamondCarbide roughing Carbide finishing

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UP - ultra precision metrology

Orlando Derungs

TEL Mechatronics is presently setting up the new UP-Metrology.

The Leitz Infinity is the coordinate measuring machine that stands out with the highest accuracy on the market.

Tactile and non-contact measurement with a measuring error of 0.3 μm are realized.

Start-up takes place January 2013.

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TEL Mechatronics Confidential

Besides the manufacturing and assembly of the LINAC girders TEL Mechatronics is also under evaluation as possible supplier for wave

guides for the SwissFEL project.

Material: copper & stainless steel

Vacuum brazing

Wet cleaning

Bakeout process and RGA under vacuum:He-leak rate: QL < 2 x 10 -8 Pa l/sSpecific out gasing rate: QSP < 1 x 10-10 Pa l s-1 cm-2

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1st quarter 2013 Hexagon Leitz Infinity

Ultra precision metrology

1st quarter 2013 Hembrug Mikroturn 100Ultra precision turning

2013 2014 2015 20162012

End 2013 E-Beam welding

3rd quarter 2014 Kern Pyramid Nano

Ultra precision milling

4th quarter 2014 Ultrasonic cleaning

(in evaluation)

3rd quarter 2013 Clean Room Facility

expansion

2013/2014LT-Ultra MMC-900

Ultra precision milling(in evaluation)

3rd quarter 2014 Bakeout Tool

Several investments concerning Research Institutes are planned: E-Beam welding and ultra precision milling

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Thank you for your attention.