technics 800 rie operation manual - engineering...
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Technics800MicroRIEOperatingManualDescriptionReactiveIonEtchSeries800PlasmaSystem(MICRO‐RIE)(Appendix:Figure1)usesaradiofrequencysignaltogenerateplasmaofchemicallyreactivegasusedtoetchvariousmaterials.Thesystemgenerateslowpressure,lowtemperature,andgaseousplasma.Thesurfacetobeetchedisplaceddirectlyontothecathodeandmomentumtransferplaysasignificantroleintheetchingprocess.Thusbyvaryingtheprocessparameters,etchingmaybedoneeitherisotropicallyandanisotropically.TheRIEhasthreemassflowcontrollers(MFCs)toassureprecisecontroloftheprocessgases.Theexhaustvalvecontrollercontrolschamberpressure.Thepowersupplyprovidesupto300wattsat30KHz.Thesystemcansupportfour‐inchwafershoweverdifferentsizeandshapesamplescanbemounted.
Safety
1. Beforeusingthistool,usersmustbeproperlytrainedandcertifiedbyLabstaff.2. DONOTrelyontheinterlocksorvalvecontrolsonthissystemtoshutoffgas
bottles.Alwaysusethemanualshut‐offvalvesandproperpurgingprocedures(Appendix:Figure3).
3. PlasmaisasourceofUVradiation.Donotlookdirectlyintoplasmaforlongperiods.
4. Ifthemachinemalfunctionsanytimeduringtheprocess,pressemergencyshutoffbutton(Appendix:Figure2)andcallNCNCstaff.
a. LabPhone 2‐9831b. BobProhaska 2‐1094
InitialSystemCheck
1. Checkthelogbookforlatestentryandcomments.2. MakesurethesystemisON.ChecktoseethattheL.E.D.displaysareON
(Appendix:Figure1).3. ThesystemshouldbeinMANmode(Appendix:Figure4).4. Exhaustvalvecontrollersettings(Appendix:Figure5).
a. MakesuretheexhaustvalvecontrollerisON.IfthecontrollerisinOFFposition,turnitonandallowfifteenminutestowarmup.
b. ConfirmthattheINT/EXTtoggleisintheINTposition.c. Theinputtoggleshouldbein1Vposition.d. Theset‐pointdialshouldbesettozero.
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5. Makesurethegasesyouwanttouseareconnectedtothesystem.
StartupandEtchprocedure
Determineyourrecipe1. Filmtoetched(SiO2,Si3N4,PR,etc).2. Thicknessifknown3. Lookupsimilarrecipeinthelogbook.Notethe(i)typesofgasesneeded,(ii)flow
ratesinsccm,(iii)pressureinmTorr,(iv)powerinwatts,(v)timeneededifrelevant.
LoadingSample
Toloadasample/samplesputSol’ntoCLOSEpositionandOPENVent.Waitaboutoneminutetoopenthechamberandwipeanyparticlesaroundthechamber.NowCLOSEVent.Loadyoursampleandclosethechamber.PutSol’ntoOPENposition(Appendix:Figure4).Note:Ifyouareusingsmallsamplesuseslowpumpoptionfor2‐5minutes(Appendix:Figure4).
SetetchparametersandetchingNote:Beforestartingtheetchingprocess,arrangeyourownstopwatch/timerforetching.1. Gotothecylindersandopenthemanualshutoffvalvefortherequiredgases
(SF6/O2orCF4/O2orO2).DONOTADJUSTthepressureregulatorsvalvebetweenthetwodialgauges.
2. Setyourgasflowsandflipontherequiredgasswitches(Appendix:Figure6).a. Selectthegasusinggasselectionknob.
i. A:O2ii. B:CF4iii. C:SF6
b. Settheread/setdialknobtoSET.c. Usegasregulatorknobforparticulargastosettheflows.d. Turnonthetoggleswitch.
3. Waittillthechamberhaspumpdownto25mTorr(.025Torr).Thenturnon(flipup)
theGAS1switch(Appendix:Figure4).YouwillseetheLEDlightslitup
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Note:Youcouldusemorethanonegas,followthesameprocedurefroma‐d.Settheread/setdialtoREADtoreadthegasflowoftheselectedgasonthegasselectionknob.
4. Adjustthesetpointdialoftheexhaustvalvecontrollertotherequiredsettings.DoublecheckwiththepressuredisplayontheRIE.Youshouldseethepressuredisplaychangingasyouturnsetpointdial.Waituntilthepressurestabilizes.
5. TurnONthepowerswitchandsetthepowersettingdisplayontheRIE.Plasmawillignite(Appendix:Figure4).
6. Onceyouaredonewiththeetchingprocessa. TurnthepowertoOFFpositionb. TurntheGas1switchtoOFF(flipdown)position.c. TurnOFFthetoggleswitchesongasses.d. Turnthepressurevalvecontrollertozero.DONOTTOUCHANYTHINGELSE.
UnloadingtheSample
1. WaittillthepressuredisplayontheRIEshows25mTorr.StopPumpDown(Sol’n
Close),purgebyventingonandoffquickly(VentOpenthenClose),andStartPumpDown(Sol’nOpen).Repeatfor3times.
2. StopPumpDown(Sol’nClose).StartVent(VentOpen).Waitaboutoneminuteandopenthechamber.StopVent(VentClose).RemoveSample.
3. WipeandcleanchamberwithIPAifnecessary.CloseChamber.PumpDown(Sol’nOpen).
4. WaittillpressuredisplayonRIEshows25mTorr,StopPumpDown(Sol’nClose)andnotethefinaldisplayedpressurereadingafter1mininthelogbook.
5. Gotothegascylindersandclosemanualshut‐offvalves.DONOTADJUSTTHEPRESSUREREGULATORKNOBthatisbetweenthedialgauges.
6. CommentontheLogBook.
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Appendix:
Figure1:Technics800RIESystem
Figure2:EmergencyShutoffButton
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Figure3:GasCylinderRegulator
Figure4:EtchParameters
Figure4:SystemControlPanel
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Figure5:Pressure/ExhaustValveControl
Figure6:GasSelectionandRegulatorPanel