techmac co., ltd rgm-300x · analysis software profile/roughness filtering process cross-section...
TRANSCRIPT
RGM-300XGrinding System for Rotary Dressor
Specifications
TechMAC Co., LTD
◇ To make truing of Grinding Wheel ◇ 5 AXIS Mechanism
( 4 translation, 1 rotation )◇ High Frequency Spindle◇ R Machining using C Axis◇ large R Machining with XYC Axes◇ Control Panel with Hand-wheel Jog◇ Post Processing Software◇ Projector Reference ◇ PC based CNC
Controller PC-NC Tool Path GeneratorBLU : 0.0001mm
0.0001degree
Work-piece Rotary Motion C Direct Drive
Work-piece Linear Motion X (전후)Y (좌우)
Precision Ball ScrewMechanical LM Guide
Wheel Linear Motion U (좌우)V (전후)
Precision Ball ScrewMechanical LM Guide
Wheel 스핀들 (Spindle) 회전수용량
Max. 4,000 rpm1.5 kWWheel size : Ø300 x 10 (Ø60)
Work-peice 스핀들 (Spindle) 회전수용량
Max. 600 rpm0.12 kWWheel size : Ø200 x 220
Projection Instrument Screen sizeMagnificationManual XYZ
Absolute Linear Scale
30020x
Moving Range X, Y, CU, V
140, 330, +/-90170, 260
전기공급용량 (Electric) 전압용량
220 V 3상 & 380 V 3상약 20kW
Process : Loading/Unloading: Non contact Wafer Measuring, Notch Search: Wafer Centering: Round Edge Grinding : Notch Edge Grinding : Wash
Machining Range X Axis 200mm
Y Axis 200mm
Z Axis 80mm
C Axis ±180 degree
Machining Resolution
X Axis 0.0001mm
Y Axis 0.0001mm
Z Axis 0.0001mm
C Axis 0.00014 degree
Accuracy Straightness of X Axis ± 1 µm
Straightness of Y Axis ± 1 µm
Straightness of Z Axis ± 1 µm
Axial Error of C Axis 2 µm
Measuring Diameter, Thickness,Notch SearchCenter Compensation algorithm
Resolution : 0.1um
Wash DIW Wash & Spin Dry Notch positioning
Grinding Station 2set
Wash Station 2set
CNC Controller PC based Control- Parallel Control
XY InterpolationYӨ Interpolation
Specifications
TechMAC Co., LTD
12” Wafer Edge Grinding Machine
DOF : 8 AxesComposition : Linear motor, AC servo, Micro StepperSeal structure Microscope Vision 2set includedContinuous Interpolation Accuracy
Linear Straightness : below 1.0 umRun-out : below 1.0umLinear BLU : 0.1umRotational BLU : 0.0001 degree
Air-Spindle included
Ultra-Precision Grinding MachineTechMAC Co., LTD
DrillGMC-5HHybrid Drill Grinding System
TechMAC Co., LTD
◇ Hybrid Function(Grinding, EDG, CMM)◇ Easy to use Program◇ High Stiffness/Fine Resolution◇ Touch Probe◇ Tool Offset Sensor◇ PC based CNC◇ Control Panel with Hand-wheel Jog◇ Post Processing Software◇ Air Utility WC Ø0.8, H.A=30°, P.A=120°
WC Ø0.6, H.A=30°,P.A=100°
P1P
‘1 r∙
ε
r∙ε∙
cot
β
90°-β
P1
P‘1
X
Y
Z
β
Stroke
X axis 320
Y axis 440
Z axis 160
B axis(P/S Mode) ∞
C axis ±180°
ResolutionLinear Motion 0.00001mm
Rotary Motion 0.0001°
Full Close Control System Scale base
Spindle drive 2 KW
Grinding wheel diameter 80mm max.
Dimension 1600x1600x2000
Electrical Connection Ø3, 220V, 20KW
WC EDG 가공 상황 WC 외경 방전 특성
PCD 외경 방전면 조도 (Ra = 0.4um)PCD micro PIN
PCD micro Tool
Specifications
UPL-200Ultra Precision Machining System
: Various Machining Function such as
Milling, Turing, grinding, Shaping
: Slide/Spindle Technology
: Coreless Linear Motor Driving
: 10nm Feedback Resolution
: Precision Linear/Rotary Motion
: Tool Set-up Apparatus with Nano-stage
: Granite Machine Base mounted
Passive Air Isolation System
Machining Range X Axis 250mm
Y Axis 250mm
Z Axis 80mm
C Axis ±180 degree
Resolution X Axis 0.0001mm
Y Axis 0.00001mm
Z Axis 0.00001mm
C Axis 0.00018 degree
Accuracy Straightness of X Axis ± 0.05 µm
Straightness of Y Axis ± 0.4 µm
Straightness of Z Axis ± 0.4 µm
Axial Error of C Axis 2 µm
Overall Dimensions Width x Length x Height 700 x 800 x 1500
CNC Controller PC-NC Controller 4 Axes InterpolationExternal DIO/AIO ControlEthernet interface
Specifications
TechMAC Co., LTD
UPL-200Ultra Precision Machining System Micro Groove Machining
Mechanical Micro Machining Tools for micro-molding Lens machiningTurning Applications
Typical Application
1 방향 가공 샘플
(V Groove 가공깊이 : 0.005mm) (V Groove 가공깊이 : 0.025mm)(X2000)
Pyramid 가공 샘플
X100 X200
X100SEM
X500SEM
10 15 20 25 30 35 40 45
0
10
20
30
40
50
60
70
80
Posit
ion (n
m)
Time (sec)
Accuracy/Response
0.01㎛0.1㎛
Flight-1200XGiant 5 Axes Machining System
Specifications
TechMAC Co., LTD
◇ 5 AXES Mechanism( 3 translation, 2 rotation )
◇ High Frequency Spindle◇ Auto Tool Changer◇ Tool Offset Sensor◇ PC based CNC◇ Control Panel with Hand-wheel Jog◇ Post Processing Software◇ Oil Chiller◇ Air Utility
스트로크 (Stroke) X, Y, ZC, A
6500, 12000, 3500 mm±180, ±100 degree
최대속도 (Max. Speed) X, Y, ZC, A
500 mm/sec (30000 mm/min)50 deg/sec (3000 deg/min)
위치제어분해능 (Resolution) X, Y, ZC, A
0.001 mm0.0001 deg
구동모터용량 (Servo Motor) X, Y, ZC, A
3.5, 2x3.5, 1.5/3.5 kW
스핀들 (Spindle) 회전수용량
Max. 24,000 rpm11 kW
공구보정센서 (Tool Offset Sensor) 반복정밀도 1.0 um
자동공구교환장치 (ATC) 공구수 10 EA
컨트롤러 (CNC Controller) 8-axes PC-NC ControllerExternal DIO/AIOExternal Controller for U’Cart
전기공급용량 (Electric) 전압용량
220 V 3상 & 380 V 3상약 10kW
Flight-1200XGiant 5 Axes Machining System
TechMAC Co., LTD
System Configuration
CNC Display Post Processor
5축 몰드 가공 5축 수지 도포 5축 수지 가공
TechMAC Co., Ltd www.techmac.co.kr
5 Axis Milling Machine
Specifications
스트로크 (Stroke) X, Y, ZC, A
150, 150, 100 mm±180, ±100 degree
최대속도 (Max. Speed) X, Y, ZC, A
50 mm/sec 10 deg/sec
위치제어분해능 (Resolution) X, Y, ZC, A
0.001 mm0.0001 deg
구동모터용량 (Servo Motor) X, Y, ZC, A
400 W
스핀들 (Spindle) 회전수용량
Max. 24,000 rpm200 W
전기공급용량 (Electric) 전압용량
220 V 3상
NanoCELLNon Contact Surface Profiler
SpecificationsVertical Measuring Range Z-Axis 100 um
Vertical Resolution Z-Axis 1 nm
Lateral Resolution X-Y Plane 0.2-4um(Objective Dependent)
Objectives. Interferometric 50x (Selection)Manual Turret (Option)
FOV 0.32x0.24
Guide-way High-Precision Linear Guide
Light Source Coaxial Tungsten Lamp
X-Y Table CNC 50 x 50 mm
Scanner Fine Feeding Mechanism Piezo Actuator
Z Table Course Feeding Mechanism 50 mm
Vibration Table Desk top
Analysis Software Profile/RoughnessFiltering Process Cross-Section Display3D Surface Display
PerformanceEnvironment
20°C ~ 25 °CNo external vibration
Utility Requirement VoltageFrequencyCurrent
220 VAC±10%, Single Phase50/60 Hz5A
• Non Contact Measurement
• Nanometer Vertical Resolution
• WSI Measuring Method
• Easy To Use
• High Performance
TechMAC Co., LTD
NanoCELLNon Contact Surface Profiler
• Application
• Sample Measurement
• Principle
Micro Lens Micro Tool Thin film thickness
CCD
Piezo Scanner
Close LoopController
-Inspection of LCD Defect-Measurement of MEMS Structure-Roughness of Patterns-Inspection of Machined Surface-Dimension Analysis/Quality Control
TechMAC Co., LTD
Intensity Analysis
Work-piece
Raw data of fringe pattern
Specifications
TechMAC Co., LTD
• Non Contact Measurement
• Nanometer Vertical Resolution
• WSI/PSI Measuring Method
• Easy To Use
• Low Cost
• High Performance Algorithms
• Manual Stage
NanoCELLNon Contact Surface Profiler
Items Specification
ControllerSerial CommunicationPower supplier(CCD & LED)
CCD Camera Image size: 640*480
PZT & SG Stroke : 100um, Strain gauge sensor
Objective Lens 50x or 10x
Light Source High-power LED(White warm)
X-Y-Z StageStroke : 15mmManual stage
Inclination Stage Manual stage
WSI Algorithms PSI Algorithms
TechMAC Co., LTD NanoCELLNon Contact Surface Profiler
Measuring Sample
TechMAC Co., LTD NanoCELLNon Contact Surface Profiler
Unwrapping Process
Micro lens measurement by PSI Algorithms
Linear Scale Grating measurement by WSI Algorithms
Interferometric Measuring Module
Specifications
TechMAC Co., LTD
• Non Contact Measurement
• Nanometer Vertical Resolution
• WSI/PSI Measuring Method
• Easy To Use
• Low Cost
• High Performance Algorithms
• Motorized Stage
NanoCELL-plus Non Contact Surface Profiler
Items Specification
ControllerSerial CommunicationPower supplier (HV amplifier & LED)
CCD CameraImage size: 640*480USB protocol
PZT & SG Stroke : 100um, 20um, Strain gauge sensor
Objective Lens 50x, 10x turret method
Light Source High-power LED(White warm)
X-Y-Z StageStroke : 20mmMotorized stage
Inclination Stage Manual stage
WSI Algorithms PSI Algorithms
TechMAC Co., LTD NanoCELLNon Contact Surface Profiler
TechMAC Co., LTD NanoCELL-plusNon Contact Surface Profiler
Unwrapping Process
Unwrapping Procedure
ç Surface Roughness of Wafer Back Grinding
ç LCD Pattern 1
LCD Pattern 2 è
Thin Film Thickness è
SpecificationsMeasuring Range X-Axis
Y-AxisZ-Axis
100 mm100 mm50 mm
Resolution 0.00005 mm
Accuracy RepeatabilityLinear Displacement Accuracy
+/- 1 µm3.0 µm for each axis
Overall Dimensions WidthLengthHeight
700 mm700 mm1200 mm
Weight 90 kg
Max. Positioning Velocity 25 mm/sec
Max. Acceleration 300 mm/sec²
Utility Requirement VoltageFrequencyCurrent
220 VAC±10%, Single Phase50/60 Hz3A
FOV 0.12x 0.08
Objective Telecentric 20x, 10x
CCD (standard) 640x480, ¼”
* The objective lens can be changed by user requirements (resolution, FOV,…)
VMM-liteVision based Inspection System
• Easy To Use
• Simple Control by Serial Communication
• 2D Measurement for Enhanced Accuracy
• Cross-Section Profile Measurement
• Various Analysis
TechMAC Co., LTD
Turret Mechanism for Objective Lens 2D Measuring sample
MicroCELLCNC Coordinate Measuring Machine
Measuring Range X-AxisY-AxisZ-Axis
600 mm700 mm500 mm
Resolution 0.0005 mm
ISO 10360-2Performance Spec.
MPEEMPEP (with TP20)
3.0 + 5L/1000 µm5.0 µm
Guide-way High-Precision Air Guide
Overall Dimensions WidthLengthHeight
1300 mm1800 mm2500 mm
Work Capacity X-AxisY-AxisZ-Axis
850 mm1200 mm500 mm
Weight 1200 kg
Max. Positioning Velocity 100 mm/sec
Max. Acceleration 300 mm/sec²
PerformanceEnvironment
20°C ~ 25 °CNo external vibration
Utility Requirement VoltageFrequencyCurrent
220 VAC±10%, Single Phase50/60 Hz10A
Specifications
• Easy To Use
• High Performance
• Low Cost
• Various Measuring Functions
• Compact Design
TechMAC Co., LTD
MicroCELLControl & Measuring Software
Calipers• height/width/gap• angle/diameter
Profile SCAN• DXF export• compare with design data
Auto-MeasureProgramming
3D Elements• manual/auto
ElementCalculator
Smart UCS Setting• programming available
Surface SCAN• DXF, IGS export• contour extract
Various Analysis• straightness• flatness• circularity• roundness• error analysis• soft-measure• best-fit
TechMAC Co., LTD
SpecificationsMeasuring Range X-Axis
Y-AxisZ-Axis
150 mm150 mm150 mm
Resolution 0.00005 mm
Accuracy RepeatabilityLinear Displacement Accuracy
3.0 µm5.0 µm for each axis
Overall Dimensions WidthLengthHeight
400 mm470 mm420 mm
Weight 20 kg
Max. Positioning Velocity 25 mm/sec
Max. Acceleration 300 mm/sec²
Utility Requirement VoltageFrequencyCurrent
220 VAC±10%, Single Phase50/60 Hz3A
Laser Sensor (standard) ResolutionMeasuring Range
3 µm20 mm
* The laser sensor can be changed by user requirements (resolution, range,…)
Scan3D-S3D Surface Digitizing Machine
• Easy To Use
• Low Cost
• Simple Design
(all control units included in machine)
• Simple Control by RS232C
• Auto-Tracing Measurement for Enhanced Accuracy
• Various Surface Digitizing Shapes : rectangle, circle, polygon
• Cross-Section Profile Measurement
• Various Display and Analysis
• Height Gage Function
TechMAC Co., LTD
Scan3D-SControl & Measuring Software
• Easy To Use
• Various Surface Digitizing Shapes : rectangle, circle, polygon
• Cross-Section Profile Measurement
• Height Gage
TechMAC Co., LTD
UPL-200Ultra Precision Guide-way
• Application
• Features - Non Contact Motion - Zero Friction/Zero Wear - Straight Motion- Silent Smooth Operation
• Specification Working Range Max 1500mm
Straightness 1um/300mm
Payment Load 30kg
Stiffness 1um/30kg
Driving Optional Linear MotorBelt Driving
PerformanceEnvironment
20°C ~ 25 °C4-6bar(Dry Air)
- Coordinate Measuring Machine - Ultra Precision Grooving Machine - Semiconductor Lithography- AOI System- Slicing/Dicing System
TechMAC Co., LTD