TruPlasma ArcSeries 3000

Taming the power of arcs.

Excelling in though environments.TruPlasma Arc Series 3000.

The TruPlasma Arc Series 3000 power supplies are specially designed for cathodic arc sputtering applications such as hard and decorative coatings. Their high dynamic current regulation has been optimized for these processes. And applications with similar requirements (such as ion implantation), adding the benefit of superior performance. The DSP based regulation circuits used in the TruPlasma Arc Series 3000 represent superior control technology. Set-point accuracy is as high as ± 0.5 % and a repeatability of ± 0.2 % ensures consistent and reproducible results. Digital feedback and advanced analysis routines provide continuous recognition and monitoring of actual plasma status. Allowing for the enhanced management of various hard coating pro-cesses.

E x p e r i e n c e t h e e s s e n c e o f p r o d u c t i v i t y .T R U M P F H ü t t i n g e r D C p o w e r f o r e x c e p t i o n a l h a r d c o a t i n g s .

TruPlasma Arc Series 3000 provides an output current range from 150 amperes (A) up to 200 A. Individual units can be operated in par-allel to increase current or to achieve redundancy. This feature allows future system upgrades to higher power levels, effortlessly and with a minimum amount of setup time. A small footprint and an excellent power density save valuable floor space. The TruPlasma Arc Series 3000 is equipped with all standard data inter-faces. Utilizing state-of-art, switch-mode power conversion technology, the generators operate at high efficiency. Resulting in less heat dissi-pation and lower operation costs. Due to their small size and air cooling, these generators can be easily integrated into new or existing systems.

Benefits

Ensuring consistent process conditions Facilitates arc ignition control and shortens initialization time Time savings through stable operation and reduced need

for interaction Single source approach reduces training and setup time

when expanding process range Cross parameter control capability minimizes adjustment time

Features

Special power and control design for superior current stability Built-in ignition circuit and separate ignition output Fast DSP control for stable arcs at all current levels

Wide current range off ering, for a variety of applications

Simultaneous voltage, current and power regulation

TruPlasma Arc Series 3000

Output Parameters

Output Current 150 A, 200 A

Output Voltage 60 V

Output Power 9 kW, 12 kW

Regulation Modes Current

Efficiency 90 % – 92 %1

Operation Duty Cycle 100 %

RegulationLine ±10 %Load 10 % – 90 %

Accuracy ± 0.5 %

Repeatability ± 0.2 %

Ignition (Capability) 550 V

Output Polarity Negative

Input Parameters

Line Voltage 3 x 400 V ± 10 %

Line Frequency 50 Hz / 60 Hz ± 5 %

1) Depending on model.

V/I Diagram

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Output Voltage in %U

TruPlasma Arc Series 3000

TruPlasma Arc Series 3000

Cooling Specifications

Cooling System Forced Air Cooling / Fan Control

Max. Inlet Air Temperature +35 °C

Environmental Specifications

Ambient Temperature +5 °C to +35 °C operating-25 °C to +55 °C storage

Max. Humidity 80 % non condensing

Max. Operating Altitude 2 000 m above sea level2

Interfaces

Analog / Digital 25-pin Sub-D

RS 232 / RS 485 9-pin Sub-D

PROFIBUS3 9-pin Sub-D

Connection Type Rear

Dimensions (W x H x D)

TruPlasma Arc 3150 / 3200 483 mm x 178 mm x 584 mm

Weight

TruPlasma Arc 3150 / 3200 33 kg

2) Special high altitude versions available upon request.

3) Optionally available.

TruPlasma Arc 3200

ARM15/6ARM15/6

ARM15/6

483 mm 505 mm

584 mm

465 mm

178

mm

442 mm

TRUMPF Hüttinger GmbH + Co. KGBötzinger Straße 80 · 79111 Freiburg · Phone +49 761 8971-0Fax +49 761 8971-1150 · E-Mail Info.Electronic@de.trumpf.comHomepage www.trumpf-huettinger.com

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