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The top documents tagged [resist thickness]
Mems technology
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X-ray lithography (XRL) 1.Overview and resolution limit. 2.X-ray source ( electron impact and synchrotron radiation). 3.X-ray absorption and scattering
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Nano-Electronics S. Mohajerzadeh University of Tehran
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MEMS Class 5 Micromachining Technologies Mohammad Kilani
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