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The top documents tagged [electrode pzt]
Pressure sensor 2.008-spring-2003. Surface Micromachining 2.008-spring-2003 Deposit sacrificial layer Pattern anchors Deposit/pattern structural layerEtch
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Piezoelectric Micromachined Ultrasound Transducers (pMUTs) Muhammet İpekçi 505612003 Electrical Electronics Engineering
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Piezoelectric Micromachined Ultrasound Transducers ( pMUTs )
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