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The top documents tagged [atomic layer epitaxy]
08 Chapter 2
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Formation of Sub-10 nm width InGaAs finFETs of 200 nm Height by Atomic Layer Epitaxy *D. Cohen-Elias 1, J.J.M. Law 1, H.W. Chiang 1, A. Sivananthan 1,
232 views
Respirocytes from Patterned Atomic Layer Epitaxy: The Most Conservative Pathway to the Simplest Medical Nanorobot Tihamer Toth-Fejel Tihamer.Toth-Fejel
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Formation of Sub-10 nm width InGaAs finFETs of 200 nm Height by Atomic Layer Epitaxy
109 views