student: wenjheng lin adviser: liren tsai
DESCRIPTION
Precise grinding & polishing. Student: wenjheng Lin Adviser: Liren Tsai. Outline. Introduction-----------------------------------------------(5) 超精密拋光方法 介紹 -----------------------------------(6) 各種材料之拋光盤及研磨粒子比較表 Free Abrasive Machining - PowerPoint PPT PresentationTRANSCRIPT
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Student: wenjheng LinAdviser: Liren TsaiPrecise grinding & polishing
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OutlineIntroduction-----------------------------------------------(5)-----------------------------------(6) Free Abrasive Machining--------------------------------------------(9)--------------------------------------------(10)()-----------------------------(11) () ()-----------------------------------------------(14) --------------------------------------------------(16)
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OutlineUltrasonic polishing--------------------------------------(18) --------------------------------------------(20)-----------------------------------(21) -----------------------------------------------(23)--------------------------------------------------(24) (CVM)-----------------------------------------------(28)----------------------------(29) ---------------------------------------------------(31)
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Outline-------------------------------------(32)----------------------------------------(33) References------------------------------------------------(36)
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Introduction0.01mRa0.025m (Lapping or Polishing)
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# : (Polisher)()(mechano-chemical polishing)(dry process):
CVM
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Free Abrasive Machining
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CaAsInP
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() (mechano-chemical polishing)
&266370 18KB JPGsun-way.com.tw
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()(mechano-chemical polishing)CMP100
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() (mechano-chemical polishing)
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http://www.majoroptics.com/
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Electrolytic Polishing
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(1) (2) /LCDIGS(3) Ra=0.2~0.5m(4)
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Ultrasonic polishingPolishing toolAbrasive particles Work-piecelatitudinal machininglongitudinal machiningoblique machining
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Polishing A robotic polishing system. 1.RV-M1 robot. 2.Ultrasonic transducer. 3.Tool tong. 4.Elastic tool. 5.Work-piece. 6.Force sensor. 7. Work table. 8.Ultrasonic generator. 9.Computer. 10.Serial interface.
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Magnetic powders and fibers1980M. Fox8nm
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(1) (2) (3) ( )(4) : http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf
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: http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf
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: http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf
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(Plasma Spray)20,000K() (Ar N2): http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf
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(Plasma Spray): http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf
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(Plasma Spray): http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf
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(Plasma Spray)(): http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf
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(CVM)CVM(Chemical Vaporization Machining)(halogen)
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-2-3800-1200 m/sec .: http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf
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-: http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf
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, , 7200 , , : http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf
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45042025 10 10 4 Schematic diagram of ASPN facility
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EtchPatternDry EtchingPlasma EtchingReactive Ion Etching:NCKU Micro-Nano Technology Center/Southern Region MEMS Center
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:NCKU Micro-Nano Technology Center/Southern Region MEMS Center
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:NCKU Micro-Nano Technology Center/Southern Region MEMS Center
Type: OMNI-RIEVoltage: 220 V
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References 2005 2 B93104019 (Precision Grinding) http://blog.sina.com.tw/lifung/article.php?pbgid=24968&entryid=591384 NCKU Micro-Nano Technology Center/Southern Region MEMS Center: http://me.csu.edu.tw/swl/non/pluasma/pluasma.pdf