ssbg m6 system integration division - · pdf fileplc (program logic controller) ......
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![Page 1: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/1.jpg)
The Professional Technology Service Provider
Marketech International Corp.
SSBG_M6
System Integration Division
![Page 2: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/2.jpg)
The Professional Technology Service Provider
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製造執行系統
MES 製造執行系統
製程管理
Recipe
management
System
製程管理系統
電腦整合製造 CIM
設備整合
E3 EAP/APC
/FDC
RFID整合
Dry pump & Heater failure prediction 故障預知
MES 製造執行系統
![Page 3: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/3.jpg)
The Professional Technology Service Provider
Specification Management
WIP Tracing
Statistical Process Control
Tool / Container
Management
Equipment Management Advanced WIP Scheduling
Manufacturing Reporting
Equipment Automation
Inventory / WIP
Components Tracking
History
MES Messaging API
SQL Database
Products,
Procedures,
Parameters
Engineering
Data
User Interaction
Equipment
Status
Durables Data
Manufacturing Execution System
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![Page 4: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/4.jpg)
The Professional Technology Service Provider
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製造執行系統
MES 製造執行系統
製程管理
Recipe
management
System
製程管理系統
電腦整合製造 CIM
設備整合
E3 EAP/APC
/FDC
RFID整合
Dry pump & Heater failure prediction 故障預知
MES 製造執行系統
![Page 5: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/5.jpg)
The Professional Technology Service Provider
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Integrated Solution for Equipment Automation
Manufacturing Execution
Equipment Control
PLC (Program Logic Controller) 、Equipment control、
Configuration
Equipment Automation
Control、Monitor、Data
collection、Equipment
Constraint、Process control
Equipment Management
Real-time monitor、Recipe
management、Preventive
maintenance、Real-time alarm
Equipment status、Utilization
report、Engineer data analysis、Report management
PLC OPC PC
EAP EAP
Network
EDA Reporting MES
FDC PMS RMS Alarm
![Page 6: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/6.jpg)
The Professional Technology Service Provider
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AMAT E3:一個整合的解決方案
![Page 7: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/7.jpg)
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設備參數的收集是關鍵
支援SECS/GEM, Interface A, OPC, and SDK APIs,加速實施速度
即時的偵測設備異常以防止低良率的產出並節省支出
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Sensor List
DCP Definition
DCP Trigger Event
設備故障檢測
![Page 8: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/8.jpg)
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提供更強大且精確的資料分析形式,協助使用者進行趨勢和故障分析
支援不同的統計計算方式
![Page 9: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/9.jpg)
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- 定義資料收集的方式及上下界線 - 系統化的資料收集及計算
- 檢查上下界線
- 採取對應的行動
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動態且及時的系統設定
完全圖像化的系統設定,不需軟體開發,程式撰寫
加快整體問題分析及解決的速度
![Page 10: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/10.jpg)
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辨識問題 診斷原因 防止發生
智慧的資料探勘(data mining)及分析
融合了AMAT在設備及製程能力的廣泛豐富經驗
反應室的資料分析能力
自動分析不同的生產過程中間的參數,以找出與品質最有關聯的參數
圖像化的分析結果
特定時間中,不同反應室的效率分析:例如:機台CVD-V123中的反應室A和其他反應室在運行RecipeA時有何不同
相同反應室在不同時間的比較分析:例如機台CVD-V123中的反應室A在3/1的例行保養後,哪個生產參數有變化
![Page 11: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/11.jpg)
The Professional Technology Service Provider
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製造執行系統
MES 製造執行系統
製程管理
Recipe
management
System
製程管理系統
電腦整合製造 CIM
設備整合
E3 EAP/APC
/FDC
RFID整合
Dry pump & Heater failure prediction 故障預知
MES 製造執行系統
![Page 12: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/12.jpg)
The Professional Technology Service Provider
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Work-In-Process Management
WIP Rack & Stocker Management
Reticle Store Pod Management
LOT Track-in/out Management
RFID Application for Wafer Production in Semiconductor Industry
![Page 13: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/13.jpg)
The Professional Technology Service Provider
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E-rack solution
Lower cost - Initial cost - Maintenance cost
Easy Implementation Zero MO
![Page 14: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/14.jpg)
The Professional Technology Service Provider
14
製造執行系統
MES 製造執行系統
製程管理
Recipe
management
System
製程管理系統
電腦整合製造 CIM
設備整合
E3 EAP/APC
/FDC
RFID整合
Dry pump & Heater failure prediction 故障預知
MES 製造執行系統
![Page 15: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/15.jpg)
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透過故障預知系統,防止無預警故障所造成的損失
![Page 16: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/16.jpg)
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•系統提供早期預警,防止設備突然異常,造成產品報廢或影響設備使用效率。
早期預警功能
•利用10,000回/秒的高速取得信號給系統,快速發現並反應異常狀況。
高速取樣
•無論品牌及種類的 Pump & Heater,都可進行監視。 任何品牌皆支援
•按照用戶預算與實際需求進行增設擴張。 可擴充性
•能夠將Pump及Heater一起做管理,不須分開監控。 Pump& Heater統一管理
•可切換顯示1周、1個月、6個月、1年內容。並儲存成CSV檔案保存於硬碟。
歷史數據分析
預知系統的優勢
![Page 17: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/17.jpg)
The Professional Technology Service Provider
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製造執行系統
MES 製造執行系統
製程管理
Recipe
management
System
製程管理系統
電腦整合製造 CIM
設備整合
E3 EAP/APC
/FDC
RFID整合
Dry pump & Heater failure prediction 故障預知
MES 製造執行系統
![Page 18: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/18.jpg)
The Professional Technology Service Provider
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製程程式集中式管理,防止洩漏
– 版本控管,層層把關,建立良好管理模式
防止製程參數(Recipe Body)、機台參數 (EC, SV)不當的修改,確保生產品質
– 設定SPEC ,確保製程參數、機台參數的正確性
– 製程參數比較,快速找出改變之處,縮短製程改變的時間,快速上線
– 持續追蹤製程參數、機台參數的變化,提升產品品質
製程程式管控(Recipe management)
Customization
Recipe Parsing
Spec mgmt.
Approver
Comparison
Recipe Mgmt. System
Security
Control
Validation
Reporting
…
SEC
S/G
EM
Version control
![Page 19: SSBG M6 System Integration Division - · PDF filePLC (Program Logic Controller) ... 加快整體問題分析及解決 ... 可擴充性 •按照用戶預算與](https://reader034.vdocuments.site/reader034/viewer/2022051202/5a841ec17f8b9a001c8b4dff/html5/thumbnails/19.jpg)
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Achieve the manufacturing excellence