sputtering apparatus

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Outside Diameter Finishing Tool U.S. Patent 5564,972. Oct. 15, 1996 R. Marvin et a/., assignors to Engis Corp., Wheeling,111. A precision surface finishing tool for unifotm micron-tolerance polishing of an outer diameter of a workpiece. Abrasive Particle U.S. Patent 5,565,011.Oct. 15, 1996 G.J. Folleff et al., assignors to 3M Co., St Paul, Minn. An abrasive article comprising a loop backing material having a front and back surface,wherein the loop backing material is untreated and unsealed, a make coat layer laminated onto the front surface of the loop backing material; and a plurality of abrasive grains adhered to the make coat, wherein the make coat seals the front surface of the loop backing material. Black Chromate Solution U.S. Patent 5,565,042.Oct. 15, 1996 H. Sakurai et al., assignors to Dipsol Chemicals co. Ltd., Tokyo A black chromate solution, which com- prises l-50 g/L of hexavalent chromium; l-50 g/L of sulfate; 0.05-l .O g/L of soluble silver; OS-100 g/L of a sulfonated car- boxy1 acid selected from the group consist- ing of sulfo-aromatic carboxylic acids hav- ing 7-15 carbon atoms, sulfonated aliphatic dicarboxylic acids having 3-10 carbon atoms and salts thereof; and a bal- ance of water, the solution having a pH of 0.5-2.5. Integrated Sputtering Target Assembly U.S. Patent 5,565,071. Oct. 15, 1996 R.E. Demaray et a/., assignors to Applied Materials Inc., Santa Clara, Calif. A sputtering process comprising placing a target assembly on a top surface of a processingchamber such that when a vac- uum is provided, the chamber is sealed by the target assembly. Sputtering Apparatus U.S. Patent 5,565,074. Oct. 15, 1996 X. Y. Qian and A.H. Safe, assignors to Applied Materials Inc., Santa Clara, Calif. A plasma reactor with a segmented bal- anced electrode for sputtering processma- terials from a target surface. Electropolishing Method U.S. Patent 5,565,064.Oct. 15, 1996 H.J. Lee et a/., assignors to Qnix Computer Co. Ltd., Seoul, Rep. of Korea An electropolishing method for etching a substrate in self alignment, comprising establishing an insulation film pattern by forming an insulation film on a substrate and selectively etching the insulation film. Electroless Plating Process U.S. Pafenf 5,565,235. Oct. 15, 1996 D. IV. Baudrand et al, Lincolnshire, 111. A process for selectively depositing a nickel-boron coating over a metallurgy pat- tern on a dielectric substrate. Apparatus for Coating Strip U.S. Patent 5565,260. Ott 15, 1996 ID. Hawk,assignor to Aluminum Co. of America, Piffsburgh A method and approaches for coating strip material having striations in the sur- face of the coating. Finishing Composition U.S. Patent 5,565,516. Oct. 75, 1996 R.L. Fausnighf et al, assignors to Blue Coral Inc., C/eve/and A finishing compositionfor restoring the appearance of an aged,painted surface of an automobile or other vehicle, comprising a sol- vent system comprising a solutionof a major amount of a low-boiling organic solvent, and a minor amount of a high-boiling organic solvent and an acrylic resin containing at least 20% by weight polymerized butyl methacrylate. Automotive Topcoat U.S. Patent 5,565,531.Oct. 15, 1996 WJ. Blank, assignor to King IndustriesInc., Norwalk,Conn. An acid etch-resistant automotive top- coat. Circle 192 on reader information card pH fm Barnant mpH/ORPKEMP ‘HIGH ACCURACY mALtTO COMPENSATtON BARNANT COMPANY ‘1-8004337-3739 FAX l-709-381-7053 Circle 013 on reader information card 172 METAL FINISHING . JUNE 1997

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Page 1: Sputtering apparatus

Outside Diameter Finishing Tool U.S. Patent 5564,972. Oct. 15, 1996 R. Marvin et a/., assignors to Engis Corp., Wheeling, 111.

A precision surface finishing tool for unifotm micron-tolerance polishing of an outer diameter of a workpiece.

Abrasive Particle U.S. Patent 5,565,011. Oct. 15, 1996 G.J. Folleff et al., assignors to 3M Co., St Paul, Minn.

An abrasive article comprising a loop backing material having a front and back surface, wherein the loop backing material is untreated and unsealed, a make coat layer laminated onto the front surface of the loop backing material; and a plurality of abrasive grains adhered to the make coat, wherein the make coat seals the front surface of the loop backing material.

Black Chromate Solution U.S. Patent 5,565,042. Oct. 15, 1996 H. Sakurai et al., assignors to Dipsol Chemicals co. Ltd., Tokyo

A black chromate solution, which com- prises l-50 g/L of hexavalent chromium; l-50 g/L of sulfate; 0.05-l .O g/L of soluble silver; OS-100 g/L of a sulfonated car- boxy1 acid selected from the group consist- ing of sulfo-aromatic carboxylic acids hav- ing 7-15 carbon atoms, sulfonated aliphatic dicarboxylic acids having 3-10

carbon atoms and salts thereof; and a bal- ance of water, the solution having a pH of 0.5-2.5.

Integrated Sputtering Target Assembly U.S. Patent 5,565,071. Oct. 15, 1996 R.E. Demaray et a/., assignors to Applied Materials Inc., Santa Clara, Calif.

A sputtering process comprising placing a target assembly on a top surface of a processing chamber such that when a vac- uum is provided, the chamber is sealed by the target assembly.

Sputtering Apparatus U.S. Patent 5,565,074. Oct. 15, 1996 X. Y. Qian and A.H. Safe, assignors to Applied Materials Inc., Santa Clara, Calif.

A plasma reactor with a segmented bal- anced electrode for sputtering process ma- terials from a target surface.

Electropolishing Method U.S. Patent 5,565,064. Oct. 15, 1996 H.J. Lee et a/., assignors to Qnix Computer Co. Ltd., Seoul, Rep. of Korea

An electropolishing method for etching a substrate in self alignment, comprising establishing an insulation film pattern by forming an insulation film on a substrate and selectively etching the insulation film.

Electroless Plating Process U.S. Pafenf 5,565,235. Oct. 15, 1996 D. IV. Baudrand et al, Lincolnshire, 111.

A process for selectively depositing a nickel-boron coating over a metallurgy pat- tern on a dielectric substrate.

Apparatus for Coating Strip U.S. Patent 5565,260. Ott 15, 1996 ID. Hawk, assignor to Aluminum Co. of America, Piffsburgh

A method and approaches for coating strip material having striations in the sur- face of the coating.

Finishing Composition U.S. Patent 5,565,516. Oct. 75, 1996 R.L. Fausnighf et al, assignors to Blue Coral Inc., C/eve/and

A finishing composition for restoring the appearance of an aged, painted surface of an automobile or other vehicle, comprising a sol- vent system comprising a solution of a major amount of a low-boiling organic solvent, and a minor amount of a high-boiling organic solvent and an acrylic resin containing at least 20% by weight polymerized butyl methacrylate.

Automotive Topcoat U.S. Patent 5,565,531. Oct. 15, 1996 WJ. Blank, assignor to King Industries Inc., Norwalk, Conn.

An acid etch-resistant automotive top- coat.

Circle 192 on reader information card

pH fm Barnant mpH/ORPKEMP

‘HIGH ACCURACY

mALtTO COMPENSATtON

BARNANT COMPANY ‘1-8004337-3739

FAX l-709-381-7053

Circle 013 on reader information card

172 METAL FINISHING . JUNE 1997