• atomic force microscopes (AFMs)• scanning tunneling microscopes (STMs)• most other types of scanning probe microscopes (MFM, CS-AFM, SNOM,

etc.)

Dedicated features for

Real-time 3D multi-channel imaging with overlays

Correction of measurement anomalies and artifacts

Intelligent filters for achieving highest image quality

State of the art analysis of nanosurface geometry and roughness

Smart user interface guides you from idea to action with minimum effort

Easy integration into lab environments with powerful automation features

MountainsMap® SEMSPM Extension Module for MountainsMap+

High quality multi-channel imagingThe SPM extension module inputs multi-channel imagelayers. You can manipulate all layers simultaneously,zooming in on them, rotating them to any angle, andextracting profiles between the same points on eachlayer. You can even define a flight path over a surface,taking in features of interest, and output a video of yourflight.

Images of the highest quality are obtained usingcomprehensive image enhancement tools including: image brightness, contrast, gamma and saturation, optimal lighting conditions, different renderings and gloss, height amplification, standard or user-defined color-coded palettes for the vertical scale, optimized to take into account surface data point distribution, and resampling to increase image resolution.

In addition, configurable contour diagrams and photosimulations can be displayed.

Overlays on 3D surface topographyCorrelations, for example between phase and topographyor between current and topography, can be studied byoverlaying any non-topography image layer on the 3Dsurface topography.

See everything that you measure

Real time visualization of 3D surface topography and multi-channel image overlays

Overcome instrument limitations

Automatic surface stitching

When the field of view of an SPM is too limited to measure the whole surface under study the SPM extension module automatically stitches or assembles multiple measurements together into a single surface that is ready for analysis.

Automatic surface stitching of overlapping measurements on the horizontal plane. (Images courtesy of Agilent Technologies.)

Miniature icons are used to select topography, deflection, phase, current, etc., layers obtained by multi-channel scanning probe microscopes.

PhaseTopography

Phase overlay on topography

AFM: organic material

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The SPM extension module provides tools for correctingmeasurement artifacts and reducing the effects of noise.

Correction of anomalous scan lines andmeasurement artifactsData correction tools include: Automatic line-by-line correction followed by leveling -which can be set up to ignore structures above thesurface (bumps) and below the surface (holes). Individual line correction by interpolation. Tip deconvolution. Retouching to remove isolated artifacts. Thresholding. Surface subtraction.

NormalizationSurfaces can be leveled, flipped in the horizontal orvertical axis and rotated in one degree increments priorto analysis. Zones on surfaces can also be extracted forindependent study.

Denoising filtersTools for denoising images include: Spatial filters with configurable matrices. FFT plot editor*.(*In the 3D Fourier and Wavelets optional module).

Data correction, normalization, denoising

Getting surface data ready for analysis

The SPM extension module assures the fast and accurateanalysis of surface geometry with tools for measuringdistances, angles, areas of peaks and valleys, volumes ofbumps and holes, step heights on surfaces and profiles,and coplanarity.

Analyze surface geometry

Distances, areas, step heights and volumes

Before filtering:raw STM image.

Left: Exfoliated graphene on silicon oxide: step height(courtesy LNE, French National Metrology Institute).

After filtering:atomic step heights in 3D.

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Surface texture characterization in accordance with international standards

Advanced ISO 16610 filtering techniques and ISO 25178 3D parameters

From Gaussian to advanced ISO 16610filtering techniquesThe roughness and waviness components of surfaces areseparated using the latest ISO 16610 advanced filteringtechniques, including robust Gaussian and spline filters.Older filtering techniques are also supported.

From Ra to ISO 25178 3D parametersThe SPM extension module includes a basic set of ISOparameters: ISO 25178 height (Sa, Sq, Ssk, Sku, Sz, etc.,)and functional (Smr, Smc, Sxp) parameters, ISO 4287primary and roughness parameters (Ra, Rq, Rsk, Rmr,Rdc, Rdq, RPc, etc.). More parameters are available withother optional modules.

The right standards, wherever you areIn addition to ISO parameters the SPM extension modulecalculates ASME B46.1 2D and 3D parameters (USA),displays GB/T (China), DIN (Germany), JIS (Japan), NF(France), BSI (UK), UNE (Spain) and UNI (Italy) equivalentsof ISO parameters when they are available, and calculatesthe older EUR 15178 3D parameters.

Functional analysisFunctional studies include the Abbott-Firestone bearingratio curve and depth distribution histogram, thesubtraction of one surface from another (wear), and thecalculation of the material/void volume ratio andthickness of up to three vertical slices of a surface.

Latex particles: measured surface

3D parameters Bearing ratio curve and depth distribution histogram

Material/void ratio and thickness of three vertical slices

Waviness

Roughness

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SPM Extension Module for MountainsMap®

CompatibilityScanning probe microscopes (atomic force microscopes (AFMs), scanning tunneling microscopes(STMs) and most other types of scanning probe microscopes (MFM, CS-AFM, SNOM, etc.) - withoptional extension: hyperspectral (Raman, FT-IR, etc.) instruments

Surface visualization

Real time imaging of 3D surface topography in real time - visualization and manipulation of multi-channel SPM data files with overlays of non-topographical layers (phase, current, etc.) on 3Dsurface topography - selectable rendering, lighting and height amplification – color coded Z-axispalettes with data point distribution histogram – surface flyovers with video export - contourdiagrams - photo-simulations - 2D profile extraction

Data preparationand correction

Tip deconvolution - scan line correction - scan line removal – stitching of overlappingmeasurements on the horizontal plane into a single surface - patching of measurements atdifferent heights into a single surface - leveling - XY or Z inversion - rotation – zone extraction -thresholding - filling in missing points - retouching – resampling

FiltersForm removal (surfaces) - roughness/waviness filters (Gaussian to ISO 16610) - spatial filters with configurable matrices

AnalysisDistance, angle, area, volume, step heights measurement – bearing ratio curve and depth histogram - material/void volume and thickness of vertical slices - surface subtraction

ParametersISO 25178 3D height and functional bearing ratio - ISO 4287 2D primary and roughness – ASME B46.1 3D and 2D - EUR 15178 amplitude, area, volume – national equivalents of ISO parameters

SPM Extension Module for MountainsMap+

© 1996-2016 Digital Surf. All rights reserved. Specifications subject to change without prior notice.

Digital Surf Head Office & R&D CenterDigital Surf, 16 rue Lavoisier,

25000 Besançon, FranceTel +33 3 81 50 48 00 contact@digitalsurf.com www.digitalsurf.com

Doc Revision: 20150627

Selected features