Specialty Graphites for theSemiconductor Industry

GRAPhITE MATERIALS AnD SySTEMS

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Specialty Graphite and Process Solutions – made by SGL Group.

Advanced material, equipment, and process solutions

Engineered for customers from more than 35 industries

Tailor-made from the most comprehensive product portfolio

In-depth production and material knowledge

Consistent high quality, performance, and service

Attractive total cost of ownership

Broad Base. Best Solutions.

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Advanced solutions enable our customers to get ahead.SGL Group offers advanced solutions – even for challenging applications. We understand the specific requirements of our customers and combine in-depth production, material, and engineering knowledge with the most comprehensive specialty graphite portfolio. This makes us the partner of choice to leading companies in many different industries.

Exceptional resistance to heat and corrosion, high purity and mechanical strength are just a few of the outstanding properties which our materials offer. Specialty graphite products from SGL Group achieve optimal results where other materials fail. No matter what your specific requirements might be, we will identify the best solution from the most comprehensive range of specialty graphites.

Fine grain graphite: isostatic, vibration- molded, die-molded, extruded

Expanded natural graphite Carbon fiber-reinforced carbon (C/C) Soft and rigid graphite felts Silicon carbide-coated graphite materials

Additionally we use other materials like PTFE, silicon carbide, and specialty metals.

With our portfolio and technical know-how spanning more than 35 different industries, we engineer tailor-made solutions in close partnership with our customers.

SGL Group covers the entire value chain of specialty graphite production, including raw material processing, semi-finished product manufacture, precision machining, purification, and coating. When it comes to engineering of equipment and process solutions our service range makes the difference: We offer mechanical and process design, production, assembly, commis-sioning, and service – all from a one-stop shop.

This is how we control and ensure the consistent high quality, reliability, and performance of our products – and enable our customers to become more competitive. Challenge us. We are there for you worldwide.

Specialty graphite solutions for the semiconductor industry

Innovative specialty graphite solutions play a key role in the challenging processes of the semicon-ductor industry. With optimized plant components and high-performance materials, we are a partner of choice to leading original equipment manu-facturers (OEMs) and semiconductor producers.b Machining a wafer carrier

BUSInESS UnIT GRAPhITE MATERIALS AnD SySTEMS

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Materials made ofcarbon and graphite

Products of theSGL Group

Base material

Sapphire (Al2O3)

Silicon carbide (SiC)

Silicon (Si)

Simonocrystal pulling(CZ process)

SiCsublimation growing

Al2O3single crystal growing

SIGRAFINE® extruded, isostatic and vibration molded graphitesSIGRABOND® carbon fiber-reinforced carbon (C/C)SIGRATHERM® carbon and graphite felts SIGRAFINE® SiC Coating

SIGRAFINE® extruded, isostatic graphitesSIGRABOND®carbon fiber-reinforced carbon (C/C)SIGRATHERM® carbon and graphite feltsSIGRAFINE® SiC Coating

SIGRAFINE®isostatic graphites

PolysiliconValue chain

HeatersHeat shieldsInsulationElectrodes (polychucks)

HeatersCruciblesHeat shieldsInsulation

Growing single crystals Wafer slicing

Slicing beams

Specialty graphites – made by SGL Group.Solutions for the semiconductor and LED industries.

Converter Siemens reactor

substrate wafer

substrate wafersemiconductor wafer

substrate wafersemiconductor wafer

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For many processes in semiconductor production, compo-nents made from specialty graphites are indispensable, e.g. in crystal growing or subsequent finishing by epitaxy, ion implantation or plasma etching, and also in the production of LED chips. This is because the processes usually operate at very high temperatures and in an extremely corrosive envi-ronment: at the same time, high purity and absolute precision are required.

For the challenging processes of semiconductor production, we offer reliable solutions with specialty graphites.

MOCVD

Silicon epitaxy

SIGRAFINE®isostatic graphites SIGRAFINE® SiC Coating

SIGRAFINE®isostatic graphites

Epitaxy Further stages in wafer processing

Susceptors Components for ion implantation

Our portfolio includes heaters, support crucibles, heat shields, and insulating components for many single crystal growing processes, such as the Czochralski (CZ) process, the sublima-tion or physical vapor transport method (PVT), and the heat exchange method (HEM). We also supply susceptors for silicon epitaxy and MOCVD (metal organic chemical vapor depositi-on) reactors. Our components are normally manufactured to individual requirements. In addition, we assist our customers in planning, design, and operational optimization.

�+�SIGRAFINE® is the new brand name for our fine -grain  graphites, previously known under the names RINGSDORFF®, SIGRAFORM®, SIGRAMENT® and CRYSTA-SIL®.

SPECIALTy GRAPhITE SOLUTIOnS FOR ThE SEMICOnDUCTOR InDUSTRy

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Products for the semiconductor industryAs a reliable supplier and partner to our customers, we offer optimum solutions and process reliability for every application. What differentiates us:

Most comprehensive selection of high-purity specialty graphites

Consistently high material and product quality

Long-standing experience and material know-how

Individualized production tailored exactly to customer requirements

Application-specific finishing by cleaning, mechanical processing or coating

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c Electrodes (polychucks) for Siemens reactors

b Meander heater for CZ units

c Graphite rigid felt cylinder for insulation of converters

In Siemens reactors and STC-TCS converters for recycling process gases, temperatures up to 1000 °C (1800 °F) and a highly corrosive environment prevail. Our graphite components perform impressively well here because they are extremely resistant to heat and corrosion.

For many years now, we have been supplying polysilicon manufacturers with a range of plant components.These include purified electrodes for polysilicon deposition, heaters, gas ducts for STC-TCS converters, heat shields and thermal insulation components.

Our experts select the best materials for the specific require-ments and operating conditions and manufacture tailored products from them. With our newly developed shaping and connecting solutions, for example, we can supply converter insulation in virtually any length and diameter. To increase the service life of highly stressed components – like those in converters – we offer special silicon carbide (SiC) coatings.

Specialty graphites for polysilicon production

SPECIALTy GRAPhITES FOR ThE SEMICOnDUCTOR InDUSTRy

Application-specific specialty graphites for polysilicon production

Applications ProductsGraphite

Soft felt Rigid felt C/C SiC coatedisostatic extruded vibration-

molded Fluidized-bed reactors (FBR) Reactors   ○Siemens CVD process Polychucks ○ ○

Converters (STC-TCS)

Gas distributors ○ ○ ○Heating elements ○ ○ ○ ○

Heat shields ○ ○ ○ ○Insulating cylinders ○

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Specialty graphites for growing semiconductor and sapphire single crystals

c Graphite components for CZ units c Support crucible made from C/C c Rigid felt cylinder for insulation

Whichever process is used for growing single crystals (HEM for sapphire, CZ for silicon or PVT for SiC), it always operates at very high temperatures in an aggressive environment. To meet these challenges, the high-temperature zone (“hot zone”) in the furnace consists almost entirely of heat- and corrosion- resistant graphite components.

SGL Group produces all the graphite components for crystal growing units of every kind – either individually or as a set.

These include heaters, crucibles, reflectors, and heat shields made from high-strength, homogeneous fine-grain graph-ite or carbon fiber-reinforced carbon, as well as insulating components produced from graphite felts. We select the best materials in the highest purity (ash value < 5 ppm) to suit the particular type of crystal growing unit. To extend the service life of highly stressed components, we supply special SiC coatings. For these, we use the specially suitable isostatic graphites R6510 and R6810.

Application-specific specialty graphites for crystal growing units

Applications ProductsGraphite

Soft felt Rigid felt C/C SiC coatedisostatic extruded vibration-

molded

Monocrystal pulling

Crucibles ○ ○Heaters ○

Heat shields ○ ○Reflectors ○ ○ ○Insulation ○ ○

Sapphire monocrystal growing

Heaters ○ ○Heat shields ○ ○

Insulation ○ ○

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Before becoming a finished semiconductor product, a wafer passes through numerous steps. One increasingly important process is silicon epitaxy, in which the wafers are carried on graphite susceptors. The properties and quality of the suscep-tors have a crucial effect on the quality of the end product.

Our SiC-coated graphite susceptors offer the particular advantages of extremely high purity, homogeneous coating, and an excellent service life.In addition, they have high chemical resistance and thermal stability. The SiC coating is applied homogeneously to very close tolerances. High-precision machining ensures a uniform susceptor profile. For inductively heated systems, we also produce material with optimum electrical resistance. The fin-ished components are supplied with a purity and dimensional compliance certificate.

SGL Group supplies susceptors and graphite components for all current epitaxy reactors.Our portfolio includes barrel susceptors for Applied Materials, Moore and LPE reactors, pancake susceptors for LPE, CSD, and Gemini units, and single-wafer susceptors for Applied Materials and ASM units. All our susceptors are produced from high-strength, isosatic graphite. In addition, we manu-facture components for ion implantation from specially suitable high-purity isostatic graphite. Thanks to our exhaustive quality controls, we offer our custo-mers top-quality products that are fully traceable. We are also continually developing our materials and products further in close collaboration with manufacturers and operators of epitaxy units.

c Susceptors for epitaxy reactors

Specialty graphites for silicon epitaxy

SPECIALTy GRAPhITES FOR ThE SEMICOnDUCTOR InDUSTRy

Application-specific specialty graphites for silicon epitaxy

Application ProductsGraphite

Soft felt Rigid felt C/C SiC coatedisostatic extruded vibration-

molded

Silicon epitaxyBarrel susceptors ○ ○

Pancake susceptors ○ ○Single Wafer susceptors ○ ○

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During the extensive coating process in the MOCVD reactor, the substrate wafers are supported by rotating susceptors or carriers. The properties of the susceptor material have a key in-fluence on coating quality and therefore on the chip reject rate.

Our SiC-coated susceptors help ensure efficient manufacture of high-quality LED wafers with low wavelength deviation.Many important factors contribute to this, such as the very high purity and uniform thermal conductivity of both our iso-static graphite and the SiC coating. We use specially selected graphite grades for our susceptors and carriers. High-precision machining and homogeneous coating ensure that the wafer carrier pockets have a uniform profile and minimum flatness deviation. Thanks to our exhaustive quality controls, we offer our customers top-quality products that are fully traceable.

We are also continually developing our materials and compo-nents further in close collaboration with manufacturers and operators of MOCVD units.Together we want to increase chip yield in the production of LED wafers and further minimize wavelength deviation. In addition to susceptors and carriers, we also supply other graphite components for all current MOCVD reactors. Nearly every component can be SiC-coated, even with diameters exeeding 1 m (3').

c Wafer carrier for LED chip production in MOCVD reactors

a Pre-assembly of a high-temperature furnace at SGL Group

Specialty graphites for LED chip production in MOCVD reactors

Application-specific specialty graphites for MOCVD reactors

Application ProductsGraphite

Soft felt Rigid felt C/C SiC coatedisostatic extruded vibration-

molded

MOCVD (metalorganic chemical vapor phase deposition)

Susceptors/carriers ○ ○

Lids, rings, satellites ○ ○

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Full service partner to manufacturers of furnace equipment A furnace manufacturer previously used to buy “hot zone” components individually, assemble them at his factory, then deliver the finished product. This process extended beyond core competencies, was complex, and delayed lead times. Together we have optimized this process. Today, we manufacture the required products, assemble them, and often supply direct to end customers all over the world This saves our customer time and money.

This is just one example of an application-specific optimized solution from the SGL Group.

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Fine-grain graphites for the semiconductor industryMany applications in the semiconductor production benefit from our wide range of isostatic, extruded, and vibration-molded fine-grain graphites and their outstanding properties:

High mechanical strength

Consistently high quality

High purity

Large range of dimensions

High corrosion resistance

Excellent heat resistance

13FInE-GRAIn GRAPhITES

Our SIGRAFINE materials span the complete range of fine-grain graphites from isostatic and extruded to vibration-molded graphites.For the many different applications in the semiconductor indu stry, we supply the optimum material in the usual market sizes.For heater systems, certain of our isostatic and extruded graphite grades are suitable. Very long tubes can be produced in one piece with excellent results from extruded graphite. For extra-large components, we offer special vibration-molded and isostatic graphite grades.

All components produced from the above-mentioned materials can be supplied, if necessary, in extremely high purity and generally also with a SiC coating. We generally use isostatic graphites with a suitable thermal expansion coefficient as a substrate for SiC coating, but can use other graphites or carbon/carbon materials as well to satisfy specific customer requirements.

SIGRAFINE® fine-grain graphites Isostatic, extruded, vibration-molded.

3) Ø 400 ... 780 mm (Ø 16 ... 31 in); ¨ 500 x 500, ... 610 x 760 mm (¨ 20 x 20, ... 24 x 30 in) 4) Ø 760 ... 1360 mm (Ø 30 ... 54 in); ¨ 630 x 1300 x 1420 mm (¨ 25 x 51 x 56 in)

1) Specifiction limit for ash values: < 30 ppm 2) Specifiction limit for ash values: < 5 ppm

�+�More information under: www.sglgoup.com/ProductionprocessFine-graingraphites

Material data of our isostatic SIGRAFINE® fine-grain graphite

Typical properties UnitsIsostatic graphite

R6300 R6340 R6500 R6510 R6650Average grain size µm (µin) 20 (800) 15 (600) 10 (400) 10 (400) 7 (300)Bulk density g/cm3 1.73 1.72 1.77 1.83 1.84Resistivity µΩm 16 12 14 13 14Flexural strength MPa 40 45 50 60 65Compressive strength MPa 85 90 110 130 150Thermal expansion 20 – 200 °C (68 – 392 °F) 10-6 K-1 2.7 3.2 4.2 4.2 4.1Ash content ppm ≤ 200 ≤ 200 ≤ 200 ≤ 200 ≤ 200Ash content (purified, P30) 1) ppm ≤ 10 ≤ 10 ≤ 10 ≤ 10 ≤ 10Ash content (high-purity, P5) 2) ppm ≤ 2 ≤ 2 ≤ 2 ≤ 2 ≤ 2

Material data of our extruded and vibration-molded SIGRAFINE® fine-grain graphite

Typical properties UnitsExtruded graphite Vibration-molded graphite

HLM3) SDR MKUN MKUS4)Average grain size mm (in) 0.8 (0.03) 0.2 (0.008) 0.8 (0.03) 0.8 (0.03)Bulk density g/cm3 1.72 1.75 1.67 1.79Resistivity µΩm 7.8/9.5 9.0 10/12 8/9Flexural strength MPa 19/19 33 10/10 18/17Compressive strength MPa 40/39 - 25/25 41/39Thermal expansion 20 – 200 °C (68 – 392 °F) 10-6 K-1 3.0/3.5 2.2 2.3/3.2 2.7/3.3Ash content ppm ≤ 800 ≤ 500 ≤ 700 ≤ 700Ash content (purified, P30) 1) ppm ≤ 10 ≤ 10 ≤ 10 ≤ 10Ash content (high-purity, P5) 2) ppm ≤ 2 ≤ 2 ≤ 2 ≤ 2

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Our soft felts offer a unique combination of thermal, chemical and textile properties. This makes them highly suitable for insulation of Czochralski crystal growing units.

Thanks to their special manufacturing process, our SIGRATHERM graphite soft felts have very low thermal conductivity.They also have the unique advantage of an extremely homo-geneous thickness and density distribution throughout the roll length. As a result, our soft felts guarantee a uniform and consistently high insulating effect. Our SIGRATHERM graphite soft felts are also supplied in ultra-high purity and special customer-tailored dimensions.

SIGRATHERM® graphite soft felts For optimum thermal insulation.

c SIGRATHERM soft felt

Ther

mal

con

duct

ivity

[Wm

-1K-1]

Temperature [°C/°F]

0.1

0.2

0.3

0.4

0.5

0.6

0

Thermal conductivity of SIGRATHERM GFA as a function oftemperature (vacuum/inert gas atmosphere)

Inert gas

Vakuum

200/390 2000/36001000/1800

Material data of our SIGRATHERM® graphite soft felt

Typical properties Units GFA5 GFA10Thickness mm (in) 6 (1/4) 11.5 (1/2)Area weight g /m2 500 1000Width mm (in) 1220 (48) 1270 (50)Length m (ft) 25 – 30 (82 – 98) 25 – 30 (82 – 98)Ash content ppm ≤ 400 ≤ 400Ash content (purified) ppm ≤ 20 ≤ 20Maximum application temperature °C (°F) 2000 (3600) in vacuum or inert gas

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SIGRATHERM® graphite rigid felts For mechanically stable thermal insulation.

Sheets and cylinders produced from SIGRATHERM graphite rigid felts are particularly valued for their consistently good thermal insulating properties. In addition, they are corrosion- resistant, easy to process, and allow self-supporting structures for insulating even relatively large components.

Besides SIGRATHERM insulating sheets as semi-finished products, we also supply ready-to-use components to customer-specific requirements.

Thermal conductivity of SIGRATHERM MFA as a function oftemperature (inert gas atmosphere)

Temperature [°C/°F]

00

0.2

0.4

0.6

0.8

1.0

1000/1830 2000/3600

Ther

mal

con

duct

ivity

[Wm

-1K-1]

With our innovative connection solutions, we can, for example, supply tailor-made cylinders in virtually any size, which is particularly beneficial to polysilicon manufacturers. We also supply rigid felts in ultrapure quality for semiconductor applications.

One or more layers of graphite foil inseparably attached to the insulating felt can be applied as a convection barrier and re-flective coating. For mechanical surface protection, we supply an insulating composite comprising felt covered on both sides with C/C fabric.

Material data of our SIGRATHERM® graphite rigid felt

Typical properties UnitsBoards Cylinder

MFA RFA MFA RFABulk density g/cm3 0.2 0.2 0.2 0.2Compressive strength MPa 1 1 1 1Flexural strength MPa 1 1 1 1Moisture absorption % < 1.0 < 1.0 < 1.0 < 1.0Ash content ppm ≤ 1000 ≤ 1000 ≤ 1000 ≤ 1000Ash content (purified) ppm < 20 < 20 < 20 < 20

Length/Width Diameter max /Length max mm (in) 1524/1219 (60/48) 1524/1219 (60/48)

unlimited

2000/2500 (79/98)

Thickness Wall thickness max mm (in) 20 – 400 (3/4 – 16) 20 – 400 (3/4 – 16)

150 (6)

300 (12)

Maximum application temperature °C (°F) 2000 (3600) in an inert gas atmosphere or vacuum

CARBOn AnD GRAPhITE FELTS

c SIGRATHERM rigid felt with different surface layers

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SIGRABOND® carbon fiber-reinforced carbon (C/C) For lightweight, rigid, durable carrier structures.

c SIGRABOND Performance

Material data of our SIGRABOND® carbon-fiber reinforced carbon

Typical properties UnitsPlates Rotationally symmetric parts

Performance Standard FilWoundBulk density g/ cm3 1.5 1.5 1.4Flexural strength MPa 200 150

depending on the structure of the lay-upElastic modulus GPa 70 60

Interlaminar shear strength MPa 8 8Ash content ppm ≤ 1000 ≤ 1000 ≤ 1000Ash content (purified) ppm ≤ 10 ≤ 10 ≤ 10

Length/Width 1)

Diameter max /Length maxmm (in)

1220 x 1220/2450 x 1220 (48 x 48/96 x 48)

special dimensions on request

1220 x 1220/2450 x 1220 (48 x 48/96 x 48)

special dimensions on request

2000/2500 (79/98)

Thickness Wall thickness max mm (in)

1.8 – 15 (0.07 – 0.6) 0.7 – 30 (0.03 – 1.2) 100 (4)

Maximum application temperature °C (°F) 2000 (3600) in vacuum or inert gas

High mechanical loadbearing capacity, light weight, low thermal expansion, extremely good corrosion resistance and thermal stability, high purity: these are the properties of our SIGRABOND composites.

Besides plates and profiles, we also produce rotationally symmetrical components such as crucibles and cylinders from SIGRABOND.Our SIGRABOND Performance is a newly developed C/C plate with improved rigidity for even lighter-weight compo-nents such as wafer carrier systems for PEVCD units or cover plates for DSS units. SIGRABOND FilWound products are used mainly as C/C support crucibles in CZ units. Our C/C semi-finished products can be machined or finished with an SiC coating according to customer requirements.

α =

x × 10

-6/K

Temperature [°C/°F]

Coefficient of thermal expansion

-2

0

0

2

4

6

8

10

12

400/750 1200/2200 2000/3600

parallel to direction of fiber alignment

vertical to direction of fiber alignment

1) Standard dimensions

CARBOn FIBER-REInFORCED CARBOn

17SIC COATInG

SIGRAFINE SiC Coating is a dense, wear-resistant silicon carbide coating with high corrosion and heat resistance and an excellent thermal conductivity. We apply SiC in thin layers onto the graphite using the chemical vapor deposition (CVD) process.

The coating Improves product quality, increases process efficiency, and so reduces the overall operating costs of our customers.

SIGRAFINE® SiC CoatingTo extend the service life of graphite components.

With this coating, we extend the service life of graphite components and achieve the high-purity surface structures required in processing semiconductor materials. SGL Group supplies SiC-coated products made from high-strength isostatic graphite and carbon fiber-reinforced carbon. These include components for fluidized-bed reactors and STC-TCS converters as well as reflectors for CZ units and wafer carriers for PECVD, Si epitaxy, and MOCVD units.

c Micrograph of SiC surface

Material data of SIGRAFINE® SiC Coating

Typical properties Units Values Analysis techniqueStructure beta (cubic) 3C polytype XRDOrientation Fraction [%] 111 preferred XRDBulk density g/cm3 3.2 XRDStoichiometry 1:1 Si/C XPSHardness GPa 40 NanoindentationFracture toughness MPa m1/2 3.0 Vickers identerThermal expansion 100 – 600 °C (212 – 1112 °F) 10-6 K-1 4.3 DilatometerE-modulus GPa 435 NanoindentationTypical film thickness µm 100 Beta backscatterSurface roughness µm 2.5 Profilometer

Purity data of SIGRAFINE® SiC Coating (glow discharge mass spectroscopy)

Element ppm Element ppmSodium < 0.05 Copper < 0.01Magnesium < 0.01 Zinc < 0.05Aluminum < 0.04 Gallium < 0.05Phosphorus < 0.01 Germanium < 0.05Sulfur < 0.04 Arsenic < 0.005Potassium < 0.05 Indium < 0.01Calcium < 0.05 Tin < 0.01Titanium < 0.005 Antimony < 0.01Vanadium < 0.001 Tungsten < 0.01Chromium < 0.05 Tellurium < 0.01Manganese < 0.005 Lead < 0.01Iron < 0.01 Bismuth < 0.01Nickel < 0.005

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We will find the best solution – in partnership with you.The fascinating potential of carbon as a material excites us and inspires us to develop optimum solutions in partnership with our customers.

With our comprehensive material portfolio and valuable specialist know-how, we can manufacture tailored products – even for the most challenging applications.

Consistently high quality, a global presence, innovative strength, and the extensive experience of our employees make us a reliable partner to our customers.

Whatever challenges you face, together we will find the best solution.

19SGL GROUP – ThE CARBOn COMPAny

b Machining of a SIGRAFINE meander heater at SGL Group

SGL Group – The Carbon Company. A leading global manufacturer of carbon-based products.

Unique product portfolio Innovative technologies and solutions Production sites close to sales markets Technology & Innovation Center in Germany with international networks

We have wide-ranging expertise in raw materials, advanced manufacturing processes, and long-standing application and engineering know-how. We have a comprehensive portfolio of carbon, graphite, and carbon fiber products and our integrated value chain covers everything from carbon fibers to composites. With a global sales and distribution network and modern production sites in Europe, North America, and Asia, we are close to our customers throughout the world.

We use this broad base to offer our customers the best solutions possible. That’s how we live up our claim: Broad Base. Best Solutions. This claim is also upheld by our corporate SGL Excellence philosophy of continuous improvement.

�+�More information can be found by visiting: www.sglgroup.com

sglgroup sglgroup

® registered trademarks of SGL CARBON SE 07 2015/0 2NÄ Printed in GermanyThis information is based on our present state of knowledge and is intended to provide general notes on our products and their uses. It should therefore not be construed as guaranteeing specific properties of the prod-ucts described or their suitability for a particular application. Any existing industrial property rights must be observed. The quality of our products is guaranteed under our “General Conditions of Sale”.

Graphite Materials & SystemsSGL CARBON GmbH Soehnleinstrasse 8 | 65201 Wiesbaden/Germanywww.sglgroup.com/gms

Contact

EUROPE/MIDDLE EAST/AFRICASGL CARBON GmbHDrachenburgstrasse 153170 Bonn/Germanygms-europe@sglgroup.com

ASIA/PACIFICSGL CARBON Far East Ltd.12 Fl, Shanghai Oriental Plaza,31 Wujiang Road Shanghai 200041/PR Chinagms-asia@sglgroup.com

AMERICASSGL CARBON LLC900 Theresia StreetPA 15857 St. Marys/USAgms-americas@sglgroup.com