solutions of simultaneous equations for oxidation enhanced and retarded diffusions and oxidation...

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This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: IP Address: 130.102.42.98 This content was downloaded on 11/11/2014 at 23:45 Please note that terms and conditions apply. Solutions of Simultaneous Equations for Oxidation Enhanced and Retarded Diffusions and Oxidation Stacking Fault in Silicon View the table of contents for this issue, or go to the journal homepage for more 1986 Jpn. J. Appl. Phys. 25 1031 (http://iopscience.iop.org/1347-4065/25/7R/1031) Home Search Collections Journals About Contact us My IOPscience

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Page 1: Solutions of Simultaneous Equations for Oxidation Enhanced and Retarded Diffusions and Oxidation Stacking Fault in Silicon

This content has been downloaded from IOPscience. Please scroll down to see the full text.

Download details:

IP Address: 130.102.42.98

This content was downloaded on 11/11/2014 at 23:45

Please note that terms and conditions apply.

Solutions of Simultaneous Equations for Oxidation Enhanced and Retarded Diffusions and

Oxidation Stacking Fault in Silicon

View the table of contents for this issue, or go to the journal homepage for more

1986 Jpn. J. Appl. Phys. 25 1031

(http://iopscience.iop.org/1347-4065/25/7R/1031)

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Page 2: Solutions of Simultaneous Equations for Oxidation Enhanced and Retarded Diffusions and Oxidation Stacking Fault in Silicon

Page 3: Solutions of Simultaneous Equations for Oxidation Enhanced and Retarded Diffusions and Oxidation Stacking Fault in Silicon

Page 4: Solutions of Simultaneous Equations for Oxidation Enhanced and Retarded Diffusions and Oxidation Stacking Fault in Silicon

Page 5: Solutions of Simultaneous Equations for Oxidation Enhanced and Retarded Diffusions and Oxidation Stacking Fault in Silicon

Page 6: Solutions of Simultaneous Equations for Oxidation Enhanced and Retarded Diffusions and Oxidation Stacking Fault in Silicon

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