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Page 1: smart.science.go.kr · 2016-01-18 · 01 2 1.1m < NE-MS > MEMS 3D MEMS sol —r- NEMS(Nano Electro-Mechanical System) £.EË_F, NEMS wuw.sc.encemag.org

Page 2: smart.science.go.kr · 2016-01-18 · 01 2 1.1m < NE-MS > MEMS 3D MEMS sol —r- NEMS(Nano Electro-Mechanical System) £.EË_F, NEMS wuw.sc.encemag.org

Page 3: smart.science.go.kr · 2016-01-18 · 01 2 1.1m < NE-MS > MEMS 3D MEMS sol —r- NEMS(Nano Electro-Mechanical System) £.EË_F, NEMS wuw.sc.encemag.org

Page 4: smart.science.go.kr · 2016-01-18 · 01 2 1.1m < NE-MS > MEMS 3D MEMS sol —r- NEMS(Nano Electro-Mechanical System) £.EË_F, NEMS wuw.sc.encemag.org

Page 5: smart.science.go.kr · 2016-01-18 · 01 2 1.1m < NE-MS > MEMS 3D MEMS sol —r- NEMS(Nano Electro-Mechanical System) £.EË_F, NEMS wuw.sc.encemag.org

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Nanomembrane: A New MEMS/NEMS Building Block · 2018-09-25 · 5 Nanomembrane: A New MEMS/NEMS Building Block Jovan Matovic 1 and Zoran Jak i þ2 1Vienna University of Technology

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NEMS/MEMS Technology and Devices - MRSmrs.org.sg/icmat2009/files/SYML.pdf · NEMS/MEMS Technology and Devices Chairs Ai-Qun LIU, Nanyang Technological University, Singapore Tarik

MEMS and NEMS applications - Rice Universityphys534/notes/week07_lectures.pdf · MEMS and NEMS applications There are a number of current and proposed applications for MEMS and NEMS

Wafer-Level Heterogeneous 3D Integration for MEMS and NEMS550631/FULLTEXT01.pdf · suitable for MEMS and NEMS devices. Most MEMS and NEMS transducers require electric interfacing

MEMS and NEMS applications - Rice University

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