sirris materials day 2011 thin film sensors - a key to intelligent production - smart coating...
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het collectief centrum van de Belgische technologische industrie
Thin film sensors: a key to intelligent production
Materials Day 2011
Why use thin film sensors?
• Measurement on every position in the system
• The integrity of the tool is not decreased
• The coating has no influence on the behavior of the system
• Fast response time due to the small mass of the sensor
• No interference with other components of the system
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Key to intelligent production?
Case: The machining industry• Machining of high-end applications
• Too expensive limiting cost is a must
Higher productivity using high quality tools
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Modern Machine Shop, 2008
Machining: Ceramic Wear- ResistantCoatings
• Widely accepted and applied• Deposited mainly using PVD and CVD• Increase in tool life up to a factor 10 compared to uncoated
tools
IFused correctly!
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Machining: Lifetime of a Tool
• Influenced by the temperature• Too high temperature for too long: degradation of the coating• For some coatings, too low working temperature: no advantage
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Machining: optimal tool usage
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in time40%
400k€
too early45%
450k€
too late15%
scrap 45k€
Machining: Tool Condition Monitoring
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Technique Principle Advantages Disadvantages Acoustic emission Measurement of
released energy from dislocation movements
• Good technique for tool breakage or fracture
• Difficult analysis of signals • Interference from cutting
condition variations • Only suitable as additional
technique for increased reliability for TCM
• Difficult to measure wear • Lack of database on AE for
different materials and machining conditions
Cutting edge temperature
The temperature has an influence on the rate and mode of wear and friction
• Ideal for wear monitoring • Temperature distribution is not uniform
• Cutting edge temperature is very difficult to monitor exactly
Cutting forces Measurement and
interpretation of force measurements
• Correlated to tool wear • Interference from tool vibrations • High degree of variability
Vibrations • Sensitive to tool wear • Only usable in combination with force measurements
Machining: Tool Condition Monitoring
Advantages of knowing the tool’s cutting edge temperature
• Prevention of excessive heating• In time feedback to machining parameters
• Prevention of sub-optimal use of the tools• Cost reduction in purchasing new tool• Minimal scrap production
• Constant product quality
• Higher productivity and efficiency
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Machining: cutting edge temperature
• „However, none of the laboratory methods for measuring temperatures reported in the literature is simple and reliable enough for routine testing” [1993].
• “However, the search for a practical method that can be used in an industrial environment continues” [2000].
• „Unfortunately, determination of cutting tool temperature distributions is technically difficult and past research has not provided sufficiently accurate temperature data” [2005].
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Machining: Temperature MeasurementMethods
Tool thermocouple Radiation techniqueBuilt-in thermocouple
Inverse heat conduction method (IHCM)Metallographic technique
Powder techniqueThermo-luminescence
OpticalTemperature Sensor Coatings:
• The integrity of the tool is not decreased• The coating has no influence on the temperature behavior and the
heat flow of the system • Fast response time due to the small mass of the sensor• No chip interference
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Temperature sensor coatings
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Thin film sensors today
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Sensor- development
Sensor coating(isolation and sensor)
StructuringLithography
Laser caving
Aerosol printing
Wireless
Concept of the sensor
RTD Thermocouple
larger measurement spot small size
Power source needed thermoelectric power
easy signal amplification more difficult signal amplification
1 layer sensor 2 layer sensor
signal can be customized signal depending on materialcomposition
4 bond pads 2 bond pads
Accurate and stable in time extreme temperatures
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Concept of the sensor
RTD Thermocouple
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substrateisolatorsensorisolator
Wear resistant layer
substrateisolator
sensor
isolatorWear resistant layer
sensor isolatorisolatorisolisol
Concept of the sensor
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• Multilayer stack • The different layers have to be compatible. • Important parameters are the linear coefficient of
expansion and hardness
• High temperature stability• High oxidation resistance and structural stability at high
temperature
• Economically• Can the sensor coating stack be deposited in a limited
number of steps.
The dielectric layer
• Required properties• Electric isolation• High break down voltage
• Influenced by defects and porosities in the layer• High temperature stability• Compatible with substrate and coating• As thin as possible• Low cost
• Some possible coatings
• Al2O3, AlN, Si3N4, SiO2,…
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• Effect on deposition rate
The dielectric layer
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(Glockner et al. 2000)
(Chiba et al 2007)
Al2O3
Requirements for structuring of a sensor
Structuring a sensor coating on a 3D-shape
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• 2D 3D• High resolution• Conformal• Reproducible• Scalable• Flexible• Low cost
Structuring Techniques
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• Investigation on possible techniques for structuring a sensor coating on a 3D surface
• Cost, time, accuracy, degree of difficulty, compatibility with PVD
• Methods for thin film structuring described in literature• Masking, • Laser ablation• Photolithography
• Aerosol• Ink jetting • Screen printing a chemical etching
Well known techniques
Development stage
Laser ablation
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• Locally remove coating by sublimation using a laser beam• Flexible design adaptation (CAD drawing)• Non-contact, non-chemical• Maskless• Low cost
• Contour laser ablation• Efficiency process depends on thermal and optical properties of material• Ablation rate and depth influenced by
• Absorption properties material• Laser parameters
• Laser energy• Pulse duration• Pulse repetition rate
Laser ablation
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Substrate: steel
Coating: ceramic
Ablation time: 5 seconds!
Laser ablation TiAlN
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Melting edgeSmall cracks
Laser ablation
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• Optimisation of parameters
Photolithography versus laser ablation
Photolithography: 6 steps Laser ablation: 1 stepLong throughput times 40 seconds complete wafer
Laser ablation
• High resolution• Contourscan
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Photolithography versus laser ablation
Building a proof of concept for a wirelessconnection
Basis = CC2520 development kit TI (Texas Instruments)• Complete platform to test advanced prototype RF systems
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Proof- of- concept wireless system
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R-meas.
Sensor
Heating element
Solid state relais
PT100
Interface
Master
Slave
Sensor interface specifications
• Wireless Communication: Zigbee (2.4 GHz)• Sensor sample rate: 1600 Hz• Accuracy: 0,5 °C • # sensors: 2• Dimensions: ± 5cm x 3cm
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Measurement set- up
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Electrical characterization
• Positioning of components important• No hysteresis when Pt 100 reference is
positioned on sample
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Electrical characterization
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If a thin temperature sensor is available
• development of thin film pressure sensorsis possible
Outlook
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Thank you for your attention!
Questions?