silicon-organic hybrid fabrication platform for integrated circuits kick-off meeting 01/08/2010...
TRANSCRIPT
SOFI Silicon-Organic hybrid Fabrication platform for Integrated circuits
Kick-off Meeting 01/08/2010
Partner Presentations - UKA
Silicon-Organic hybrid Fabrication platform for Integrated circuits2
SOFIUKA Contribution
Main focus on
• Design of waveguide (WG) structures• Optical properties• Electrode design• From single WG to complex structures
• Poling of certain nonlinear materials• Characterizing, benchmarking
Supporting• Search for novel applications• Waveguide roughness optimization• RF issues• …
Silicon-Organic hybrid Fabrication platform for Integrated circuits3
SOFIWP 2 – Value Analysis andEmerging Applications Development
Task 2.1 Contribute to definition of application and device specifications
Task 2.2 Contribute to modeling of devices and system for communications applications
Focus on Task 2.4 Look into possibilities for light amplification and sensor
applications- Light emission- Find application of sensors
Technical challenge!
6 person months (PMs)
Silicon-Organic hybrid Fabrication platform for Integrated circuits4
SOFIWP 3,Task 3.1
Lead Optical Chip Design and the corresponding deliverables and milestones (18 PMs)
M3.1, M3.3, M3.4 mark design decisions (months 7, 16, 18)
D3.1, D3.3, D3.5 lead by UKA, to report on design and fabrication of active waveguides / modulators (months 12, 21, 32)
Met
al
Si Si
Met
al
EO
SiO2
Si
~U
(a)
1μm
EO
xy z
Si SiEO
SiO2
Met
al
Met
al
~ U
Met
al
Si SiSi
Met
al
EO
SiO2
Si
~U(b)
xz1μm
(c)
xy
xy
Silicon-Organic hybrid Fabrication platform for Integrated circuits5
SOFIWP3, Synchronization with Task 3.7Device Fabrication
MPW shuttle Technology Sign-in Mask Delivery
IMEC6 IMEC STD Passive
15 April 2010 15 May July 2010
IMEC7 IMEC STD Passive+
15 October 2010
15 November 2010
Jan-Feb 2011
Silicon-Organic hybrid Fabrication platform for Integrated circuits6
SOFIWP3, Task 3.2 – Passive waveguide process optimization
Waveguide fabrication determines sidewall roughness losses
(4 PMs)
Post-processing using Preferential Wet Etching
(anisotopic etching)
Silicon-Organic hybrid Fabrication platform for Integrated circuits7
SOFIWP 3 – Silicon Photonic Chips
Task 3.3 Provide input for the doping process
Task 3.4 Provide input for the contacting process
Task 3.5 Electrical design: Perform the theoretical calculations and work on impedance matching designs for the electrical design (3 PMs)
Silicon-Organic hybrid Fabrication platform for Integrated circuits8
SOFIWP 4 – Organic Material
Task 4.1 Design, synthesis, deposition and optimization of electro-optic polymers (1 PM)
perform in-device poling
Task 4.4 Deposition of electro-optic chalcogenide glasses contribute to find a way to use electro-optic
effect (1 PM)
These poling efforts go along with simultaneous optical characterization Task 4.5 Characterization of poled and self-assembled materials (2
PMs)
+
-
++
-- +
-
++
--
+
-
++
--
+
-
++
--
+
-
++
--
+
-
++
--
+
-
++
--
-
+
++
--
Silicon-Organic hybrid Fabrication platform for Integrated circuits9
SOFIWP 5 - Testing, Packaging and Reliability
Task 5.1 Testing and characterization of the chip lead by UKA (2 PMs) perform chip level testing measurement of the power consumption
M5.1 [6/30/11] Identification of optimal phase modulator structure
D5.1 [6/30/11] Report on electro-optical characterization of SOH waveguide structures with RF probes
D5.4 [10/31/12] Report on electro-optical characterization of more complex modulator structures with RF probes
Task 5.2 Design and development of the RF package (1 PM) UKA will perform prototype RF package testing
Task 5.4 Characterization and benchmarking of packaged devices and integrated circuits against specifications and reference devices, lead by UKA (3 PMs) UKA will perform electro-optic characterization
Silicon-Organic hybrid Fabrication platform for Integrated circuits10
SOFIWP 6 – Dissemination, Exploitation and Promotion
Contributions toTask 6.1 Dissemination of resultsTask 6.2 Exploitation of resultsTask 6.3 Promotion of Results
In particular M6.1 [1/31/10], M6.6 [12/31/12] Dissemination of activities on the
project’s websiteM6.2 [2/28/10], M6.7 [12/31/12] Press releases on start and finish
of the projectM6.5 [before 10/31/12] Organization of workshop by integrating it
into a larger convention on silicon polymer hybrid technology shared effort
(2 PMs)
Silicon-Organic hybrid Fabrication platform for Integrated circuits11
SOFIContacts
See contact list on webpage!
Coordinator: Juerg Leuthold
[email protected] [email protected]
WP1..WP4,WP6: Dietmar Korn
WP5: David Hillerkuß
Thank you!
SOFI Silicon-Organic hybrid Fabrication platform for Integrated circuits
Kick-off Meeting 01/08/2010
Partner Presentations
SOFI Silicon-Organic hybrid Fabrication platform for Integrated circuits
Kick-off Meeting 01/08/2010
Lunch!
SOFI Silicon-Organic hybrid Fabrication platform for Integrated circuits
Kick-off Meeting 01/08/2010
Work Package Discussion
SOFI Silicon-Organic hybrid Fabrication platform for Integrated circuits
Kick-off Meeting 01/08/2010
Summary & Action Items
Silicon-Organic hybrid Fabrication platform for Integrated circuits16
SOFIAction Items
• Send in Accession Form, Financial Identification • Agree on Consortium Agreement
• Send in logos• Complete contact list
• Keep the Quarterly Management Report in mind
• Enjoy Zurich!