sensor actuator 08
TRANSCRIPT
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MEMS: Invention to Market
• Invention->Market – Creation of a new market is slow.
• Market->Invention (easier)
– What is the existing cometition! – Imact " will it take over the market!
• Man#fact#ring
• Sales
• Mo$eling as in this co#rse: %nal&sis of otions'erformance' rice. lanning of *+' ,#sinesslan.
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+evice Categories
• echnolog& +emonstrations – est $evice concet
– est fa,rication technolog&
– Small of $evices/low &iel$ ok
• esearch ools – Small of $evices' often c#stom.
• Commercial ro$#cts – 0arge of $evices' high &iel$' low cost'
ackaging all critical.
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rans$#cers' Sensors' an$%ct#ators
• rans$#cers: 1enerall& convert oneform of energ& to another. (2otgenerall& conserving energ&.)
– Co#l$ ,e a sensor or an act#ator.• Sensors meas#re something an$
rovi$e an o#t#t signal. 3s#all&electrical' ,#t sometimes otical or
mechanical.• %ct#ators move something. (4#t what
wo#l$ an 0E+ ,e!)
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+omains
• hermal (temerat#re' heat' heat 5ow)• Mechanical (force' ress#re' velocit&'
acceleration' osition)
• Chemical (concentration' comosition'reaction rate)• Magnetic (magnetic 6el$ intensit&'
magneti7ation)
• a$ient (intensit&' wavelength'olari7ation' hase)• Electrical (voltage' c#rrent' charge'
resistance)
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Examles of Sensors an$%ct#ators
• osition Sensors
– esistive strain sensor. ($imensions change'8ρl/%)
– ie7oresistive strain sensor. ($imensions an$ ρ change)
Sensitivit& meas#re$ ,& the ga#ge factor
198relative resistance change/strain8(∆/)/
(∆0/0)8∆/ε198; for metals (mostl& geometr&' someie7oresistance)
198
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– ie7oelectric materials (C#ries' strain ($eformation)
• olari7ation ?-> stress• Sensor/%ct#ator
• In &o#r watch' @#art7 (,#t this is changingAA(Si ime))
• %lso &roelectric materials have
temerat#re?->olari7ation.
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• Magnetostrictive %ct#ators
– Materials exan$/contract with magnetic6el$
– Similar to ie7oelectric eBect
– erfenol-+ ,=.;C+&=.CD9e strain of ;F
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• 9 MEMS " Switching or changing
caacitance or ,#il$ing
micromachine$ 9 comonents.
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Also ink jets!
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• 4iological %ct#ators " 9#t#re' nano'research stage.
• 4iome$ical Sensors an$ %ct#ators – 2e#ral ro,es
– %rti6cial retinas
– Hearing rosthetics (in #se) – 0iving cells as sensors (chis for
c#lt#ring an$ meas#ring cell roerties(see ovaks' for examle)
• Chemical %ct#ators " Electrochemicalact#ators #sing ol&&rrole.
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• Chemical Sensors " man& t&esA
– Chemireisistors (organic an$ inorganic)
– Chemicaacitors – Micromachine$ Calorimeter (com,#sti,le
gasses or exlosive articles)
– Micro hot late (() for several materials.
– Chem 9Es
• Can $o the same thing with man& ion sensitivemem,ranes.
Pd – Sensitive to hydrogen at 10 ppm
Problem: Drift
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• #ms
– Mechanical
– Electrohoretic/Electroosmotic' #se$ insearations of +2% an$ rotein fragments.
" " " " " " "
#e$trals dragged along by
mobile ions% &lo' nearly
(onstant velo(ity a(ross
(hannel%
immobile ions
mobile "ions
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• Jtical rans$#cers
– M%2K t&esA
– Jverla ,etween commercial electronics an$ MEMS.
– hermal (4olometers)• 0ight heats element' ca#ses resistance change.
– 9a,r& erot etalon t&e $evices (interference) forchanging re5ection. 0ike microsectrometer shownrevio#sl&.
– E-ink $isla&s (MEMS!)
– hermoco#le
– 1ola& cell• 0ight -> heat -> exan$ing gas -> moves something -> signal.
– Sectrometers
– +iBractive sensors.
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roLect).
Caacitive %ccelerometer' . '
Sent#ria.• 9a,rication echnolog& " sets limits onstr#ct#res.
• 0#me$ element mo$eling in $iBerent $omains.
• Caacitive trans$#cer/act#ator• Elasticit&' contact mechanics' stiction
• Str#ct#res " srings/,eams.
• 9l#i$s " sN#ee7e 6lm $aming
• Electronics' fee$,ack
• S&stem $&namics
• 2oise