semi s22

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i SEMI S22-0706a 半导体制造设备电气设计 安全基准 i 中文化、国际化用国际技术标准提升台湾产业发展 SEMI (国际半导体设备材料产业协会)1970 年起开始推动产业国际技术标 准的制定,提供半导体与平面显示器产业的组件制造商和设备材料供货商一个交 换讯息的机制,共同讨論和制定技术规格和影响产业经济的重要标准,來克服技 术挑战、提升生产力,进而促进产业的整体发展。迄今,全球共有超过2200 來自半导体组件制造商和设备材料供应业者等产官学研的专家,志愿投入SEMI 产业国际技术标准制定的行列,在全球共有18 个标准委员会积极运作。从1970 年初统一晶圆尺寸、 1980 年初公布影响半导体制程自动化的SECS II 通讯协议 标准,到1991 年发表环境卫生安全(EHS)标准—S2SEMI 目前已协助产业累 积制 定了770 余条的技术标准和安全规范。

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  • 1. i SEMI S22-0706a i SEMI ()1970 2200 SEMI 18 1970 1980 SECS II 1991 (EHS)S2SEMI 770

2. SEMI SEMI SEMI SEMI (EHS)12 SAHTECH SEMI (Safety Guideline) (SAHTECH)SEMI SEMI SEMI4SEMI FPD SEMI 12 FPD SEMI 3. ! ! ii ///SEMI ! SEMI iii 4. SEMI SEMI SEMI (SAHTECH) SEMI ESH iv 2006 5. () SEMI Taiwan SEMI SEMI 3814 SEMI SEMI S2 SEMI Taiwan 2007 SEMI SEMI SEMI SEMI Taiwan 6. v SEMI SEMI Taiwan vi SEMI SEMI Taiwan ESH 7. SEMI 8. [email protected] SEMI Taiwan FPD SEMI Taiwan IC ctive holders. SAHTECH 1 SEMI S22-0706a SEMI 2003, 2006 SEMI S22-0706a 2006 8 24 2006 10 www.semi.org 11 2003 11 2006 7 9. 1 SEMI S22 1 1.1 1.2 2 2.1 2.2 1. 2. 3. 10. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. 15. 16. 17. SEMI S22-0706a SEMI 2003, 2006 2 18. 186W1/4 19. 20. 21. 22. 2.3 11. 2.4 3 1 2.5 2SI a) - b) c) SI SI 3. 3.1 (subassemblies)(components) 12. 3 3.2 3.3 3.4 (functional)(performance) 4. 4.1 SEMI SEMI E33 SEMI S1 SEMI S2 SEMI S3 SEMI S8 SEMI S10 3 SEMI S22-0706a SEMI 2003, 2006 13. SEMI S13 SEMI 14 4.2 IEC 1 IEC 60112 IEC 60204-1 IEC 60417 IEC 60529 IEC 60707 IEC 60950 IEC 61010-1 IEC 61346-1 4.3 2 4.3.1 CENELEC EN 65029 EN 61508 4.3.2 89/336/EEC 4.4 NFPA 3 NFPA 70 NFPA 79 4.5 UL 4 14. UL 508A UL94 UL943 UL2360 4.6 ANSI 5 ANSI/FM4910 ANSI/IPC 2221 ASNI/ISA S84.01 4.7 ISO6 ISO 13849-1 1 3, rue de Varemb, Case Postale 131, CH-1211 Geneva 20, Switzerland 4122919021141229190300 2 http://europa.eu.int 3 1 Batterymarch Park, Quincy, MA 02269-9101http://www.nfpa.org 4 Underwriters Laboratories Inc., 333 Pfingsten Rd, Northbrook, IL 60062 5 1819 L Street, NW, Washington DC 20036, USA2022938020 2022939287 11 West 42nd Street, New York, NY, 10036, USA21264249002123980023 http://www.ansi.org 6 ISO 1, rue de Varemb, Case postale 56, CH-1211 Geneva 20, 15. Switzerland 4122749011141227333430http://www.iso.ch SEMI S22-0706a SEMI 2003, 2006 4 5 5.1 5.1.1 5.1.2 5.1.3 5.1.4 (ampaicity) 5.1.5 5.1.6 5.1.7 (captive harware) 5.1.8 16. 5.1.9 comparative tracking index, CTI IEC 60112 A Material GroupCTI IIIb 5.1.10 5.1.11 5.1.12 5.1.13 5.1.14 (creeping distance) 5.1.15 5.1.16 5.1.17 17. 5.1.18 5.1.19 5.1.20 5.1.21 4 5.1.22 5 SEMI S22-0706a SEMI 2003, 2006 5.1.23 5.1.24 5.1.25 5 18. 5.1.26 fail-to-safe equipment control system, FECS ISO 13849-1EN 954-1IEC 61508ANSI SP 84 (PLC)(I/O) 6IEC61508-4 FECS PES 5.1.27 5.1.28 5.1.29 5.1.30 19. 5.1.31 GFCI 4 6mA UL 943 5.1.32 5.1.33 5.1.34 30V RMS42.4V 60VDC 5.1.35 240VA 5.1.36 5.1.37 5.1.38 (interrupting capacity) 7AIC 5.1.39 8 20. 5.1.40 5.1.41 5.1.42 CTI I600CTI II400CTI600 IIIa175CTI400 IIIb100CTI175 5.1.43 SEMI S22-0706a SEMI 2003, 2006 6 1 5.1.44 (multi-outlet assemblies) 5.1.45 AC 9 5.1.46 21. 5.1.47 5.1.48 5.1.49 5.1.50 5.1.51 5.1.52 5.1.53 22. 5.1.53.1 1 Class1000 10Class 1000 1 Class 1000 1 5.1.53.2 2 Class 1000 11Class 1000 2 Class 1000 2 5.1.54 5.1.55 5.1.56 5.1.57 23. 7 SEMI S22-0706a SEMI 2003, 2006 5.1.58 (raceway) 5.1.59 5.1.60 5.1.61 5.1.62 5.1.63 EMO 5.1.64 5.1.65 5.1.66 12 24. UL 508A 5.1.67 5.1.68 5.1.69 5.1.70 5.1.70.1 1 5.1.70.2 2 132 5.1.70.3 3 30V RMS42.4V 60DCV240Vamp 5.1.70.4 4 30V RMS42.4V 60DCV240Vamp SEMI S2 5.1.71 6. 25. 6.1 6.2 7 148-22 7.1 SEMI S22-0706a SEMI 2003, 2006 8 7.2 7.3 1 7.4 7.5 26. 7.6 7.7 7.8 a) b) c) d) e) 15SEMI S14 16 7.9 27. 7.10 17 8 8.1 8.2 a) b) 18 8.3 a) b) c) 9 SEMI S22-0706a SEMI 2003, 2006 28. d) 8.3.1 19SEMI S2 8.4 8.4.1 20SEMI S2 8.4.2 11 8.4.3 8.5 8.5.1 8.5.2 8.6 UPS 30 42.4 60 240 VAUPSUPS 29. UPS 8.6.1 UPS a) EMO b) EMOUPS EMO 13.3.3 8.6.2 UPS UPS UPS UPS UPS 9 UPS 8.6.3 UPS 8.6.4 UPS UPS UPS 8.7 8.8 EMC SEMI E33 EMC 89/336/EEC 30. 8.9 8.9.1 8.9.2 SEMI S22-0706a SEMI 2003, 2006 10 8.10 SEMI S2 8.11 21SEMI S2 8.12 31. 8.12 8.13 SEMI S8 8.14 8.15 9 9.1 9.1.1 1 32. [] 2 EMO 228.15 9.1.2 9.1.3 9.1.4 9.1.5 240VAC 33. 10,000 rms AIC240VAC 14,000 rms AIC 12.4kVA 5000 rms AIC AIC 22.4kVA 5000 rms AIC 11 SEMI S22-0706a SEMI 2003, 2006 9.1.6 9.1.6.1 N 9.1.6.2 IEC 60417 5019PEGND 9.1.6.3 34. 9.1.6.4 AC a) L1L2L3 b) RST c) ABC 9.2 9.2.1 9.2.2 9.2.3 1 1 A1-1 A1-5 9.2.4 9.2.5 12 9.2.6 EMC 35. 9.2.7 9.3 9.3.1 9.3.2 23 9.3.3 a) SEMI S22-0706a SEMI 2003, 2006 12 b) c) 36. 1mm0.04 1492 2HP 6 20 9.3.4 1 A1-1 A1-5 NFPA 70 9.3.5 a) b) 24 9.3.6 37. IEC 60417 5008 OffIEC 60417 5007On 9.3.7 2 9.3.8 1 2 3 49.3.8 5kVA 9.3.9 9.3.10 a) 38. 13 b) 25 13 SEMI S22-0706a SEMI 2003, 2006 9.4 9.4.1 16 9.4.2 Hard Wiring 9.4.3 9.4.4 26 a) b) 2716.3.1 10 10.1 39. 10.2 10.2.1 1) 2) 10.2.1.1 IEC61010-1 B 28IEC 60529 10.2.2 1 A1-12 A1-13 22 10.2.3 10.2.4 1) 40. 2) c) 29GFCI 10.3 10.3.1 4 12 3 4 4PPE SEMI S22-0706a SEMI 2003, 2006 14 10.3.2 10.3.3 41. 10.3.4 10.3.5 a) b) c) d) 30V rms42.4V 60DCV240Vamps 30 10.3.6 a) b) c) d) 10.3.7 50 60 Hz AC 31 42. 32 10.3.7.1 10.3.7.2 10.3.7.2 a) b) CFCI 10.3.8 22 43. 11 11.1 11.2 15 SEMI S22-0706a SEMI 2003, 2006 11.3 11.4 11.5 11 1 2009 7 EHS 11.5 125% 18 44. 11.6 125% 11.7 11.8 15 11.9 11.9.1 50/60 HzPrimary Rating600VAC A1-14 11.9.2 50/60 Hz600VAC Primary CurrentA1-14 A1-15 3312 11.10 11.10.1 a) b) 45. c) d) e) f) 11.10.2 11.10.3 34Inline 11.10.4 a) b) c) d) SEMI S22-0706a SEMI 2003, 2006 16 11.10.5 a) 46. b) c) d) e) 35 11.11 11.11.1 25.4mm1 4 5.1mm0.2 47. 9123 11.11.2 11.11.3 11.12 11.13 SEMI S3 11.14 12 12.1 36EMC 48. 12.2 12.3 12.3.1 12.1 12.3.2 17 SEMI S22-0706a SEMI 2003, 2006 12.3.2.1 A1-1 A1-5 12.3.2.2 A1-1 A1-5 12.3.3 12.3.4 12.1 49. 12.3.5 12.3.6 9.2.6 12.3.7 22.3 12.3.8 12.3.9 12.3.10 12.3.11 12.3.12 - 50. 12.3.13 a) b) 12.4 12.4.1 12.4.2 SEMI S22-0706a SEMI 2003, 2006 18 12.4.3 12.4.4 12.5 22 13 13.1 51. 3713.3.3 2 EMO 13.2 13.2.1 13.2.2 13.3 13.3.1 EMOEMO 1240V150V 2.4kVA 2 38 52. 13.3.2 EMO EMO EMO 13.3.3 EMO 240Vamp 1EMO 24 2 3PLC EMO 13.3.4 EMO EMO 53. a) EMO EMO b) EMO c) EMO d) EMO e) EMO 19 SEMI S22-0706a SEMI 2003, 2006 39 EMO 13.3.5 EMO EMO a) b) EMO c) EMO d) 54. 13.3.6 EMO 13.3.7 EMO 3 10 13.4 13.5 8.15 13.6 13.6.1 13.6.2 a) b) 55. 610mm24 c) d) 13.6.3 13.7 13.7.1 13.7.2 EMO 40 56. SEMI S22-0706a SEMI 2003, 2006 20 13.7.3 SEMI S10 13.7.3.1 FECS FECS IEC 61508ISO 13849-1EN 954-1 ANSI/ISA SP84.01DIN/V/VDE-0801 418.4.1 42FECS PESPES IEC 61508 57. 13.7.4 13.7.5 13.7.6 13.7.7 13.7.8 13.7.9 13.8 13.8.1 13.7 13.8.2 58. 14 14.1 14.1.1 14.1.2 14.2 14.2.1 14.2.1.1 EMO EMO 13.3 14.2.1.2 EMO EMO 14.2.1.3 59. 43NFPA 79 21 SEMI S22-0706a SEMI 2003, 2006 14.2.1.4 14.2.1.5 14.2.2 20.3 14.3 14.3.1 1 A1-8 A1-10 14.3.2 LED 14.3.3 1 A1-8 A1-10 60. 14.4 14.5 9.3.6 15 15.1 15.1.1 10 15.1.2 44 15.1.3 4515.1.1 15.1.3 15.1.4 22.14 61. 15.2 a) b) 46 15.3 15.3.1 1 2 15.3.2 15.3.3 15.3.4 SEMI S22-0706a SEMI 2003, 2006 22 62. 15.3.5 15.3.6 1 A1-12 A1-13 15.3.7 22.16 15.4 21 16 16.1 10 11 63. 16.2 47 16.2.1 a) 1 A1-1 A1-6 b) 1 A1-1 A1-6 IEC 61010 16.2.2 V-1 IEC 60707 UL 94FR-4 FR-5 ANSI/IPC 2221 16.2.3 1 A1-7 16.2.4 a) b) c) 64. 16.2.5 23 SEMI S22-0706a SEMI 2003, 2006 16.2.6 16.2.7 50V AC 120V DC 1000V 5 2000V AC 16.2.8 16.3 16.3.1 a) 65. b) c) AC AC AC AC 48 16.3.2 17. 17.1 17.1.1 17.1.2 17.1.3 66. 17.1.4 17.1.5 17.1.6 1/0 AWG 17.1.7 17.2 a) b) c) d) e) 67. SEMI S22-0706a SEMI 2003, 2006 24 49 17.3 17.3.1 17.3.2 125% 17.3.3 17.3.4 17.3.5 GFCI 50 1 17.4 (a) 68. (b) 22.14 (c) V-1IEC 60707 UL 94FM4910 UL2360 Class 1 (d) (e) 25 SEMI S22-0706a SEMI 2003, 2006 17.5 17.5.1 17.5.2 17.5.3 17.5.3.1 15mm 30%70% 69. 17.5.3.2 17.5.4 51 17.5.4.1 17.5.5 AC DC 17.6 17.6.1 17.6.2 17.6.3 17.6.4 17.7 17.7.1 70. 17.7.2 17.7.3 22.7 SEMI S22-0706a SEMI 2003, 2006 26 17.7.4 a) b) c) d) e) f) 52 17.7.5 71. 25mm1 in. 17.7.6 a) b) 17.7.7 17.7.8 1 A1-1 A1-5 NFPA 70 A1-1 A1-5 17.7.9 17.7.9.1 17.7.9.2 50% 53 17.7.9.3 72. 17.7.9.4 17.7.9.5 17.7.9.6 17.7.9.7 17.7.9.8 17.8 9.3.4 9.1.6.3 NFPA 70 9.3.4 17.9 18 186W1/4 18.1 600V 186W1/4HPAC DC 27 SEMI S22-0706a SEMI 2003, 2006 18.1.1 73. 3 10 18.1.2 547.4 10.1 18.1.3 55 18.1.4 18.1.5 18.2 18.2.1 18.2.2 74. 18.2.3 18.2.4 18.3 Entrapment 18.4 18.4.1 18.4.2 18.4.3 a) b) c) 18.4.4 75. 18.4.5 19 19.1 19.1.1 19.1.2 19.1.3 17.6.3 19.1.2 19.1.3 SEMI S22-0706a SEMI 2003, 2006 28 19.1.4 19.1.5 56 19.2 19.2.1 19.2.2 300V 19.2.3 19.2.4 AC 76. 17.3 20. ___________ 20.1 20.2 SEMI S1 20.3 14.2.2 20.4 a) b) c) d) e) f) 77. g) h) i) j) k) 20.5 20.6 20.7 9.1.5 20.8 29 SEMI S22-0706a SEMI 2003, 2006 21 78. 21.1 a) b) c) 21.2 21.3 EMO 21.4 21.5 21.6 21.7 79. 21.8 21.9 IEC 61346-1 Reference Key 57SEMI S2 SEMI S13 22. 22.1 22.1.1 (NIST) 22.1.2 22.1.3 a) b) 80. c) d) e) 58 SEMI S22-0706a SEMI 2003, 2006 30 22.1.4 a) 120/240V b) 208-240V 591205% 60IEC 61010-1 IEC 60950 90% 110% 22.1.5 50Hz 60Hz 50/60Hz 61500.5 Hz 22.1.6 22.2 22.3 22.2 81. 22.2.1 0.15F 1500 ohm 1.0% RMS 22.2.2 RMS 1500 ohms Voltage I measured leakage= 22.2.3 3.5mA 62 22.3 82. 22.3.1 0.10 ohm1%Low Range 10amp 10amp1% 0.01V1% 22.3.2 22.3.2.1 22.3.2.2 10 amp 83. 31 SEMI S22-0706a SEMI 2003, 2006 63IEC 60204-1 IEC 61010-110amp 22.3.3 0.1ohm 22.4 22.4.1 22.4.2 22.4.3 64 22.5 22.5.1 3%RMS 22.5.2 84. 22.5.3 110% 22.6 22.6.1 5 500VA 22.6.2 1500VAC 2121VDC a) b) c) 22.6.2.1 1 85. 65 22.6.3 66 22.7 1 2 22.7.1 - 5 156N 35lbs.1.56N 0.35lbs. SEMI S22-0706a SEMI 2003, 2006 32 22.7.2 1 22.7.2.1 156N35lbs. 86. 1 22.7.2.2 1 22.7.3 2 22.7.3.1 156N 35 lbs. 1 22.7.3.2 2 22.8 22.8.1 - 5 22.8.2 67 1 125% 2 87. 22.8.3 8 22.9 22.9.1 - 5 22.9.2 - 68 22.9.3 - 8 22.10 22.10.1 22.10.2 22.10.3 a) EMO 13.3.3 240Vamp 88. 33 SEMI S22-0706a SEMI 2003, 2006 b) c) 69 22.11 22.11.1 22.11.2 EMO 22.11.3 22.11.3.1 22.11.3.2 22.12 22.12.1 - 1 1%DC 22.12.2 20 10 89. 22.12.3 10 20 70 J = 1/2V2 J C V 20 5 22.13 22.13.1 - 5 0.1C 22.13.2 8 1 A1-11 711C 90. 22.13.3 40C 1 A1-11 22.14 22.14.1 30N 22.14.1.1 22.14.1.2 30N3N 5 22.14.1.3 SEMI S22-0706a SEMI 2003, 2006 34 22.14.2 250N 22.14.2.1 22.14.2.2 30mm 250N10N 55.55 lbs.2.22lbs.5 91. 22.14.2.3 22.15 22.15.1 IEC IEC 61010 22.15.2 22.15.3 22.16 22.16.1.1 500 22.6 22.16.2 22.17 a) b) c) 92. d) e) f) 22.17.1 35 SEMI S22-0706a SEMI 2003, 2006 1 SEMI S22 2003 9 3 A1-1 TBSSASISFEP___________FEPBMIRHH RHW-2THHNTHHW THW-2THWN-2USE-2XHHXHHWXHHW-2ZW-2 COPPER0-2000V30C AWG 30-40%1-3 0%1-3 93. #1 Metric AWG Sq. mm 60C 75C 90C 105C mm Inches Metric AWG Sq. mm 30 0.050 - 0.5 0.8 1 6.4 0.25 30 0.050 28 0.079 - 0.8 1 2 6.4 0.25 28 0.079 26 0.126 - 1 2 3 6.4 0.25 26 0.126 24 0.201 2 2 3 4 6.4 0.25 24 0.201 22 0.318 3 3 5 7 13 0.5 22 0.318 0.50 0.500 5 5 9 11 13 0.5 0.50 0.500 20 0.509 5 5 9 11 13 0.5 20 0.509 0.75 0.75 6 6 12 16 13 0.5 0.75 0.75 18 0.823 7 7 14 18 13 0.5 18 0.823 1.00 1.0 8 8 15 19 19 0.75 1.00 1.0 16 1.31 10 10 18 22 20 0.75 16 1.31 94. 1.50 1.5 11 11 20 24 19 0.75 1.50 1.5 14 2.08 15 15 25 30 20 0.75 14 2.08 2.50 2.5 17 17 27 32 25 1.0 2.50 2.5 12 3.31 20 20 30 35 26 1.0 12 3.31 4.00 4.0 24 24 34 39 25 1.0 4.00 4.0 10 5.26 30 30 40 45 26 1.0 10 5.26 6.00 6.0 32 35 44 49 38 1.5 6.00 6.0 8 8.37 40 50 55 60 39 1.5 10 5.26 10.00 10.0 45 55 62 68 51 2 6.00 6.0 6 13.30 55 65 75 85 51 2 10 5.26 16.00 16.0 60 72 82 92 76 3 10.00 10.0 4 21.15 70 85 95 105 76 3 8 8.37 #1 SEMI S22-0706a SEMI 2003, 2006 36 A1-2 TBSSASISFEPFEPBMIRHHRHW-2THHN THHW THW-2THWN-2USE-2XHHXHHWXHHW-2ZW-2 COPPER0-2000V30C 25.00 Metric 600 Kcmil0%1-3 0%1-3 95. #1 Metric AWG Sq. mm 60C 75C 90C 105C mm Inches Metric AWG Sq. mm 25.00 25.0 80 95 105 115 76 3 10.00 10.00 3 26.67 85 100 110 120 76 3 8 8.37 2 33.62 95 115 130 145 89 3.5 6 13.30 35.00 35.0 97 117 133 149 115 4.5 16.00 16.00 1 42.41 110 130 150 170 115 4.5 6 13.30 50.00 50.0 120 144 164 180 140 5.5 16.00 16.00 1/0 53.49 125 150 170 185 140 5.5 6 13.30 2/0 67.43 145 175 195 205 152.4 6 6 13.30 70.00 70.0 148 179 199 210 165 6.5 16.00 16.00 96. 3/0 85.01 165 200 225 240 166 6.5 6 13.30 95.0 95.0 179 214 241 260 178 7 16.00 16.00 4/0 107.2 195 230 260 285 178 7 4 21.15 120.0 120.0 208 246 280 308 216 8.5 25.00 25.00 (250) 126.7 215 255 290 320 216 8.5 4 21.15 150.0 150.0 238 282 317 347 254 10 25.00 25.00 (300) 152.0 240 285 320 350 254 10 4 21.15 (350) 177.4 260 310 350 385 305 12 3 26.67 185.0 185.0 266 317 359 395 305 12 35.00 35.00 (400) 202.7 280 335 380 420 331 13 3 26.67 240.0 240.0 309 367 416 456 331 13 35.00 35.00 (500) 253.4 320 380 430 470 356 14 3 26.67 300.0 300.0 352 416 471 516 381 15 35.00 35.00 (600) 304.0 355 420 475 520 381 15 2 33.62 #1 37 SEMI S22-0706a SEMI 2003, 2006 A1-3A1-1 2 TBSSASISFEPFEPBMIRHHRHW-2THHNTHHW THW-2 THWN-2USE-2XHHXHHWXHHW-2ZW-2 COPPER0-2000V 97. 75C.050mm230 AWG.126mm226 AWG 60C .201mm224AWG4mm2 90105C30C% 90C 105C 90C 105C 90C 105C 90C 105C 90C 105C 90C 105C 90C 105C -0% -20% -30% -50% -55% -60% -65% 98. Metric AWG Sq. mm 13 46 79 1020 2130 3140 > 40 mm inches Metric AWG Sq. mm 30 0.050 0.5 0.5 0.5 0.25 0.25 0.25 0.25 6.4 0.25 30 0.050 0.5 0.5 0.5 0.5 0.25 0.25 0.25 28 0.079 0.8 0.8 0.5 0.5 0.25 0.25 0.25 6.4 0.25 28 0.079 0.8 0.8 0.8 0.8 0.8 0.8 0.5 26 0.126 1 1 1 1 1 1 0.5 6.4 0.25 26 0.126 1 1 1 1 1 1 1 24 0.201 2 2 2 1 1 1 1 6.4 0.25 24 0.201 2 2 2 2 1 1 1 22 0.318 3 3 3 2 2 2 1 13 0.5 22 0.318 3 3 3 3 3 2 2 0.50 0.500 5 5 3 2 2 2 1 13 0.5 0.50 0.500 5 5 3 3 3 2 2 20 0.509 5 5 5 4 4 3 3 13 0.5 20 0.509 99. 5 5 5 5 5 4 3 0.75 0.75 6 6 6 6 5 5 4 13 0.5 0.75 0.75 6 6 6 6 6 6 6 18 0.823 7 7 7 7 6 6 5 13 0.5 18 0.823 7 7 7 7 7 7 6 1.00 1.00 8 8 8 8 7 6 5 19 0.75 1.0 1.0 8 8 8 8 8 8 7 16 1.31 10 10 10 9 8 7 6 20 0.75 16 1.3 10 10 10 10 10 9 8 1.50 1.50 11 11 11 10 9 8 7 19 0.75 1.5 1.5 11 11 11 11 11 10 8 14 2.08 15 15 15 13 11 10 9 20 0.75 14 2.08 15 15 15 15 14 12 11 2.50 2.50 17 17 17 13 12 11 9 25 1.0 2.5 2.5 17 17 17 16 14 13 11 12 3.31 20 20 20 15 14 12 11 26 1.0 12 3.31 20 20 20 18 16 14 12 4.00 4.00 24 24 23 17 15 13 12 25 1.0 4.0 4.0 24 24 24 19 17 15 13 SEMI S22-0706a SEMI 2003, 2006 38 A1-4A1-1 2 TBSSASISFEPFEPBMIRHHRHW-2THHNTHHW 100. THW-2 THWN-2USE-2XHHXHHWXHHW-2ZW-2 COPPER0-2000V 60C5.26mm242.41mm21 AWG75C 50.00mm2 70.00mm2 90105C30C% 90C 105C 90C 105C 90C 105C 90C 105C 90C 105C 90C 105C 90C 105C 101. -0% -20% -30% -50% -55% -60% -65% Metric AWG Sq. mm 13 46 79 1020 2130 3140 > 40 mm inches Metric AWG Sq. mm 10 5.26 30 30 28 20 18 16 14 26 1.0 10 5.26 30 30 30 23 20 18 16 6.00 6.00 32 32 31 22 20 17 15 38 1.5 6.00 6.00 32 32 32 24 22 19 17 8 40 40 39 28 25 22 19 39 1.5 10 5.26 40 40 40 30 27 24 21 10.00 10.00 45 45 43 31 28 25 22 51 2 6.00 6.00 45 45 45 34 31 27 24 6 55 55 53 38 34 30 26 51 2 8 8.37 55 55 55 43 38 34 30 102. 16.00 16.00 60 60 57 41 37 33 29 76 3 10.00 10.00 60 60 60 46 41 37 32 4 70 70 67 48 43 38 33 77 3 8 8.367 70 70 70 53 47 42 37 25.00 25.00 80 80 74 53 47 42 37 76 3 10.00 10.00 80 80 80 58 52 46 40 3 26.67 85 85 77 55 50 44 39 77 3 8 8.37 85 85 84 60 54 48 42 2 33.62 95 95 91 65 59 52 46 89 3.5 6 13.30 95 95 95 73 65 58 51 35.00 35.00 97 97 93 67 60 53 47 114 4.5 16.00 16.00 97 97 97 74 67 60 52 1 42.41 110 110 105 75 68 60 53 115 4.5 6 13.30 110 110 110 85 77 68 60 50.00 50.00 120 131 115 82 74 65 57 140 5.5 16.00 16.00 120 144 126 90 81 72 63 1/0 53.49 150 136 119 85 77 68 60 140 5.5 6 13.30 150 148 130 93 83 74 65 2/0 67.43 175 156 137 98 88 78 68 152.4 6 6 13.30 175 164 144 103 92 82 72 70.0 70.0 179 160 140 100 90 80 70 165 6.5 16.00 16.00 179 168 147 105 95 84 74 103. 39 SEMI S22-0706a SEMI 2003, 2006 A1-5A1-1 2 TBSSASISFEPFEPBMIRHHRHW-2THHNTHHW THW-2 THWN-2USE-2XHHXHHW XHHW-2ZW-2 COPPER0-2000V 75C 90105C30C% 90C 105C 90C 105C 90C 105C 90C 105C 90C 105C 90C 105C 90C 104. 105C -0% -20% -30% -50% -55% -60% -65% Metric AWG Sq. mm 13 46 79 1020 2130 3140 > 40 mm inches Metric AWG Sq. mm 3/0 85.01 200 180 158 113 101 90 79 166 6.5 6 13.30 200 192 168 120 108 96 84 95.0 95.0 214 193 169 120 108 96 84 178 7 16.00 214 208 182 130 117 104 91 4/0 107.2 230 208 182 130 117 104 91 178 7 4 21.15 230 228 200 143 128 114 100 120.0 120.0 246 224 196 140 126 112 98 216 8.5 25.00 246 246 215 154 138 123 107 Kcmil 105. 250 126.7 255 232 203 145 131 116 102 216 8.5 4 21.15 255 255 224 160 144 128 112 150.0 150.0 282 253 222 158 142 126 111 254 10 25.00 282 277 242 173 156 138 121 300 152.0 285 256 224 160 144 128 112 254 10 4 21.15 285 280 245 175 158 140 123 350 177.4 310 280 245 175 158 140 123 305 12 3 26.67 310 308 270 193 173 154 135 185.0 317 287 251 179 161 143 125 305 12 35.00 317 316 276 197 177 158 138 400 202.7 335 304 266 190 171 152 133 331 13 3 26.67 335 335 294 210 189 168 147 240.0 367 332 291 208 187 166 145 331 13 35.00 367 364 319 228 205 182 159 500 253.4 380 344 301 215 194 172 151 356 14 3 26.67 380 376 329 235 212 188 165 300.0 416 376 329 235 212 188 164 381 15 35.00 416 412 361 258 232 206 198 600 304.0 420 380 333 238 214 190 166 381 15 2 33.62 420 416 364 260 234 208 182 SEMI S22-0706a SEMI 2003, 2006 40 A1-6A1-1 A1-5 106. C 60C 75C 90105C 2125 1.08 1.05 1.04 2630 1.00 1.00 1.00 3135 0.91 0.94 0.96 3640 0.82 0.88 0.91 4145 0.71 0.82 0.87 4650 0.58 0.75 0.82 5155 0.41 0.67 0.76 5660 - 0.58 0.71 6170 - 0.33 0.58 7180 - - 0.41 41 SEMI S22-0706a SEMI 2003, 2006 A1-7 mm Inches mm Inches mm2 Inches2 A 107. 1.59 0.063 12.7 19.1 25.4 38.1 50.8 76.2 0.50 0.75 1.00 1.50 2.00 3.00 20.0 30.3 40.6 60.6 80.6 121.3 0.031 0.047 0.063 0.094 108. 0.125 0.188 31 47 63 94 125 188 3.18 0.125 12.7 19.1 25.4 38.1 50.8 63.5 76.2 101.6 0.50 0.75 1.00 1.50 2.00 2.50 109. 3.00 4.00 40.6 60.6 80.6 121.3 161.3 201.9 241.9 322.6 0.063 0.094 0.125 0.188 0.250 0.313 0.375 0.500 63 94 125 188 110. 250 313 375 500 6.35 0.250 12.7 19.1 25.4 38.1 50.8 63.5 76.2 88.9 101.6 127.0 152.4 0.50 0.75 1.00 1.50 2.00 2.50 3.00 111. 3.50 4.00 5.00 6.00 80.6 121.3 161.3 241.9 322.6 403.2 483.9 564.5 645.2 806.5 967.7 0.125 0.188 0.250 0.375 0.500 0.625 0.750 112. 0.875 1.00 1.25 1.50 125 188 250 375 500 625 750 875 1000 1250 1500 9.53 0.375 12.7 19.1 25.4 38.1 50.8 63.5 76.2 113. 88.9 101.6 0.50 0.75 1.00 1.50 2.00 2.50 3.00 3.50 4.00 121.3 181.3 241.9 363.2 483.9 605.2 725.8 847.1 967.7 0.188 0.281 114. 0.375 0.563 0.750 0.938 1.125 1.313 1.500 188 281 375 563 750 938 1125 1313 1500 12.7 0.500 19.1 25.4 38.1 50.8 76.2 101.6 115. 0.75 1.00 1.50 2.00 3.00 4.00 241.9 322.6 483.9 645.2 967.7 1290.3 0.375 0.500 0.750 1.00 1.50 2.00 375 500 750 1000 116. 1500 2000 #1 A1-12 SEMI S22-0706a SEMI 2003, 2006 42 A1-8 #1 - - - - - - 117. - #1 A1-9 - EMO - 118. - - - - - - - - - - - 119. - - - - 43 SEMI S22-0706a SEMI 2003, 2006 A1-10 - EMO - 120. - - - - - - - - - 121. - - --- --- - - - A1-11 C 55 110 #1 -- 60C 6070C 75 75C 90 125 C #2 #3 #4 122. #5 #1 #2 #3 #4 #5 IEC 61010-1 SEMI S22-0706a SEMI 2003, 2006 44 A1-12Class 1000 mmmm Vrms Vrms3 50 0.1 0.18 230 0.10 0.35 400 100 0.1 0.25 350 0.12 0.50 510 150 0.1 0.30 490 0.40 0.60 740 300 0.5 0.70 820 1.60 1.60 1400 123. 600 1.5 1.70 1350 3.30 3.40 2300 1 1000 3.0 3.20 2200 6.50 6.50 3700 50 0.1 0.18 350 0.12 0.35 510 100 0.1 0.25 490 0.40 0.50 740 150 0.5 0.50 820 1.60 1.60 1400 300 1.5 1.50 1350 3.30 3.30 2300 600 3.0 3.00 2200 6.50 6.50 3700 2 1000 5.5 5.50 3250 11.50 11.50 5550 50 0.1 0.18 490 0.4 0.4 740 100 0.5 0.50 820 1.6 1.6 1400 150 1.5 1.50 1350 3.3 3.3 2300 300 3.0 3.00 2200 6.5 6.5 3700 600 5.5 5.50 3250 11.5 11.5 5550 3 1000 8.0 8.00 4350 16.0 16.0 7400 #1 0.70mm PCB #2 Class 1000 1 Class 1000 1 124. PWB mm 1 2 3 0.18 0.1 0.25 0.1 0.30 0.2 0.35 0.10 0.12 0.50 0.5 0.20 0.40 0.60 0.45 #1 DC 42% 45 SEMI S22-0706a SEMI 2003, 2006 A-13Class 1000 CTI > 125. 600 CTI > 400 CTI > 100 PWB CTI > 175 CTI > 600 CTI > 400 CTI > 100 126. PWB CTI > 175 50 0.2 0.6 0.85 1.2 0.20 230 0.2 1.2 1.7 2.4 0.4 400 100 0.2 0.7 1.00 1.4 0.20 350 0.2 1.4 2.0 2.8 0.4 510 150 0.2 0.8 1.10 1.6 0.35 490 0.4 1.6 2.2 3.2 0.7 740 300 0.5 1.5 2.10 3.0 1.40 820 1.6 3.0 4.2 6.0 2.8 1400 600 1.5 3.0 4.30 6.0 3.00 1350 3.3 6.0 8.5 12.0 6.0 2300 1 1000 3.0 5.0 7.00 7.0 5.00 2200 6.5 10.0 14.0 20.0 10.0 3700 50 0.2 0.6 0.85 1.2 0.2 350 0.2 1.2 1.7 2.4 0.4 510 100 0.2 0.7 1.00 1.4 0.2 490 0.2 1.4 2.0 2.8 0.4 740 150 0.5 0.8 1.10 1.6 0.5 820 1.6 1.6 2.2 3.2 1.6 1950 300 1.5 1.5 2.10 3.0 1.5 1350 3.3 3.3 4.2 6.0 3.3 3250 600 3.0 3.0 4.30 6.0 3.0 2200 6.5 6.5 8.5 12.0 6.5 5250 2 1000 5.5 5.5 7.00 10.0 5.5 3250 11.5 11.5 14.0 24.0 11.5 7850 50 0.2 0.6 0.85 1.2 0.2 490 0.4 1.2 1.7 2.4 0.4 740 100 0.5 0.7 1.00 1.4 0.5 820 1.6 1.6 2.0 2.8 1.6 1950 150 1.5 1.5 1.50 1.6 1.5 1350 3.3 3.3 3.3 3.3 3.3 3250 127. 300 3.0 3.0 3.00 3.0 3.0 2200 6.5 6.5 6.5 6.5 6.5 5250 600 5.5 5.5 5.50 6.0 5.5 3250 11.5 11.5 11.5 12.0 11.5 7850 3 1000 8.0 8.0 8.00 10.0 8.0 4350 16.0 16.0 16.0 20.0 16.0 10450 #1 DC 42% #2 Class 1000 2 Class 1000 2 SEMI S22-0706a SEMI 2003, 2006 46 A1-14 #1 1 9250 125 9 250 167 9A 125 9A 2A 167 2A 300 #1 A1-15 128. #1 1 6%600 125 6%10%400 125 #1 47 SEMI S22-0706a SEMI 2003, 2006 1 EHS SEMI S22 R1-1KVA A KVA 200 V 208 V 240 V 380 V 480 V 3 8.7 8.3 7.2 4.6 3.6 4 12 11 9.6 6.1 4.8 5 14 14 12 7.6 6.0 129. 6 17 17 14 9.1 7.2 9 26 25 22 14 11 15 43 42 36 23 18 20 58 56 48 30 24 22 64 61 53 33 27 25 72 69 60 38 30 30 87 83 72 46 36 38 108 104 90 57 45 45 130 125 108 68 54 50 144 139 120 76 60 60 173 167 144 91 72 75 217 208 180 114 90 100 289 278 241 152 120 112.5 325 313 272 171 135 150 433 416 361 228 180 225 650 625 542 342 271 300 866 833 722 456 361 500 1443 1388 1203 760 601 R1-1 R1-1.1 KVA 130. Line_Voltage 1.732 Three - Phase_Line_Current KVA 1000 = R1-1.2 125% SEMI S22-0706a SEMI 2003, 2006 48 R1-2KVA A KVA 24 V 100 V 120 V 200 V 208 V 240 V 277 380 V 480 V 0.05 2.1 0.5 0.4 0.3 0.2 0.2 0.2 0.1 0.1 0.1 4.2 1.0 0.8 0.5 0.5 0.4 0.4 0.3 0.2 0.2 6.3 1.5 1.3 0.8 0.7 0.6 0.5 0.4 0.3 0.3 10 2.5 2.1 1.3 1.2 1.0 0.9 0.7 0.5 0.5 21 5.0 4.2 2.5 2.4 2.1 1.8 1.3 1.0 0.8 31 7.5 6.3 3.8 3.6 3.1 2.7 2.0 1.6 1 42 10 8.3 5.0 4.8 4.2 3.6 2.6 2.1 1.5 63 15 13 7.5 7.2 6.3 5.5 3.9 3.1 2 20 17 10 9.6 8.3 7.2 5.3 4.2 3 30 25 15 14 13 11 7.9 6.3 131. 5 50 42 25 24 21 18 13 10 7.5 75 63 38 36 31 27 20 16 9 90 75 45 43 38 33 24 19 10 100 83 50 48 42 36 26 21 15 150 125 75 72 63 54 40 31 20 200 167 100 96 83 72 53 42 25 250 208 125 120 104 90 66 52 30 300 250 150 144 125 108 79 63 38 375 313 188 180 156 135 99 78 45 450 375 225 216 188 163 118 94 50 500 417 250 240 208 181 132 104 60 600 500 300 289 250 217 158 125 75 750 625 375 361 313 271 197 156 100 1000 833 500 481 417 361 263 208 167 1670 1392 835 803 696 603 439 348 250 2500 2083 1250 1202 1042 903 658 521 333 3330 2775 1665 1601 1388 1202 876 694 500 5000 4167 2500 2404 2083 1805 1316 1042 R1-2 R1-2.1 KVA 132. Line_Voltage Single - Phase_Line_Current KVA 1000 = R1-1.2 125% 49 SEMI S22-0706a SEMI 2003, 2006 12009 7 1 SEMI EHS SEMI S22 D1-1 11 D1-1.1 11.5 11 11.5 11.5 133. 2 11.5.1 3 10 a. b. c. 11.5.2 3 7.5 25 a. b. 3 10 c. d. D1-2 2 D1-2.1 2 2 SEMI S22 2006 8 24 A2-1 11.5 134. A2-2 A2-3 2-1 OCPDWIRE-A SEMI S22-0706a SEMI 2003, 2006 50 A A C A B A2-1 SEMI 135. SEMI SEMI 113 | Copyright 2007. Semiconductor Equipment and Materials International (SEMI). All rights reserved. SEMI and semi.org are trademarks or registered trademarks of SEMI in the United States and other countries. All other company and product names are trademarks of their respective holders. SHAPING THE FUTURE TOGETHER__