semi networking day italy group semi networkin… · semi networking day italy ... led │mems...
TRANSCRIPT
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
Systems │Upgrades │ Services │ Spares │ Foundry
LED │MEMS │Wireless │Energy Harvesting │WLP │ Data Storage │Logic
Who we are
OEM Group Today
OEM Group is a global company that serves both traditional
semiconductor fabs, as well as emerging technologies with
focus on MEMS and LED applications. Fully-integrated
solutions, world-class service, and applications development–
–from one cost-effective partner.
2
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
OEM Today - A Global Company
Gilbert, AZ
OEM Group Headquarters
Salzburg, Germany
Yokohama, Japan
OEM Group Japan KK
Hsinchu, Taiwan
OEM Group Taiwan
Sales Software engineering Field Service Parts Distribution
EUROPE
Sales Field Service Parts Distribution Assembly Repair Service System remanufacturing
ASIA
Sales Tool Manufacturing/remanufacturing Foundry Services Design Engineering Applications Lab Field Service Parts Distribution R&D
NORTH AMERICA
Coopersburg. PA
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
OEM Group Today Global Manufacturing Global Service Global Spare Part Distribution Global Procurement Proven Technology
― LEGENDS™: 11 “best-in-class” product lines ― Install base of 33,000+ supported systems
Proprietary IP – Patent portfolio from eight game-changing
companies ― 30+ years experience in each
Organization – 250 employees in 10 countries – Combined team of the brightest, most
dedicated experts from each acquisition – The faces you remember, with new resources
4
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
LEGENDS™: A proven and game-changing portfolio
5
LEGENDS™ intellectual property owned
exclusively by OEM Group
Serving both mature and emerging-
markets
Custom equipment design
Software licensing, application
development
Productivity enhancements
Process and field support
Global service infrastructure
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
Etch, PVD
900-Series Etch
6500-Series Etch
SFI Endeavor™ PVD
AMS™ PVD
AGHeatpulse
4100
8108
8800
RTP Etch
AutoEtch
490 Oxide
590 Poly
690 Metal
790 Tungsten
PVD
Eclipse
Star
Mark II
Mark IV
Ion implant
120XP
160XP
350D
E-Series
6
Product Options
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
Semitool manual-batch process equipment is now part of our Chemical Process Technology™ (CPT) group.
7
Product Options (Cont.ed)
Capable of meeting any wet
application demand, CAD-
designed Cintillio™ products
break new technological
ground in 25/50 wafer batch
process. – Convenient side access
– Innovative and proprietary
Enhanced Spray Technology™
Up to six rows of nozzles ensures
high throughput reliable wafer surface
wetting
Our Newest
From left: Cintillio™ Spray Solvent Tool (SST), SST Dual Chamber, Spray Ozone Tool (SOT),
and Spray Acid Tool (SAT)
First time in North America and Asia
Semitool was the world leader in wet-chemical applications for 30+ years
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
8
Classics™: recognized equipment, sustained and optimized
for today’s applications and productivity demands
Leveraging our own OEM experience to help customers with their equipment needs
For 12+ years, OEM Group has been the world leader in remanufactured equipment
≤ 200mm, repurposed for new applications
Customer-driven innovation
Sustaining support and development
Commercially-creative solutions
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
Etch
Rainbow
TCP
Alliance
CVD
Concept One
Concept Two
9
Strip, Lite Etch, CVD
Aspen II Diode
Aspen II Triode
Aspen II ICP
CVD, PVD, Etch, RTP, Epi
P5000
Centura 5200
Endura 5500
Mirra
Product Options
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
Global Manufacturing Facilities
Headquarters: Phoenix, Arizona
Coopersburg, Pennsylvania
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
Eclipse Mark IV PVD
Endeavor AT PVD
Tegal 6500 etch
AG Heatpulse
Tegal 980
Foundry services / applications development
Application Lab Capabilities
Cross-platform capable
Extended Capabilities AMAT P5000 SiO2 and Si3N4 CVD (2 percent SiH4/H2)
Cintillio™ SST/SAT
Applications Development Results-oriented solutions Fully integrated across all our systems/platforms
Demonstrated in our global Apps Labs
Academic and government R&D partnerships
A complete collaborative network
Field-proven technology DNA from world-class pedigrees
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
Global Service and Support
On-Site Technical Support
Man On-Site Contracts
Telephone Support
Platform Training
System Repurposing, De-installation,
and Reinstallation
Upgrades Services
System Size Conversions
Preventative Maintenance
Audit Services with diagnostic reports
to assess overall system health
© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.
Systems │Upgrades │ Services │ Spares │ Foundry
LED │MEMS │Wireless │Energy Harvesting │WLP │ Data Storage │Logic
Mission
OEM Group Today
By acquiring branded “best-in-class” equipment / IP, and
offering it globally from a centralized source, OEM Group will
continue to serve both traditional semiconductor fabs, as well
as emerging technologies. Enhanced fully-integrated
solutions, world-class service, and applications development–
–from one cost-effective partner.
13