13-006-676-110000 4-1

Section 4

SPECIFICATIONS

4.1 Equipment Specifications ........................................................................................................... 4-3

4.2 Furnace Equipment & Supplied Options ..................................................................................... 4-5

4.3 Computer Equipment ................................................................................................................. 4-7

4.4 Computer Certificate .................................................................................................................. 4-8

4.5 Optiplex 990 ................................................................................................................................ 4-9

4.6 Initial Flowmeter Settings-Low O2 ............................................................................................ 4-11

4.7 Initial Flowmeter Settings–Very Low O2 .................................................................................. 4-12

4.8 Pressure & Flow Characteristics ............................................................................................... 4-13

Section 4

4-2 LA-309 Owner’s Manual

Specifications

13-006-675-110000 4-3

4.1 Equipment Specifications

Section 4

4-4 LA-309 Owner’s Manual

Specifications

13-006-675-110000 4-5

4.2 Furnace Equipment & Supplied Options

Section 4

4-6 LA-309 Owner’s Manual

Specifications

13-006-675-110000 4-7

4.3 Computer Equipment

Section 4

4-8 LA-309 Owner’s Manual

4.4 Computer Certificate

Specifications

13-006-675-110000 4-9

4.5 Optiplex 990

Section 4

4-10 LA-309 Owner’s Manual

Flowmeters (10ppmv) ©LOCHABER CORNWALL, INC.

DOC NBR: 802-101460-01 R0MODEL: DWN: SLB 08/25/11

SERIAL NBR: APVL: JMC 01/25/13Customer: PRINT: PM: JMC 09/26/13

PROCESS GASGAS1 N2 NitrogenGAS2 none none

Replenish Rate is the number of times/minute that the furnace (or a section of the furnace) evacutes its gas

Replenish Rate Furnace or Section Replenishes/Hour Time to Refresh Furnace or Section1 times/minute 60 times/hour 60 seconds2 times/minute 120 times/hour 30 seconds3 times/minute 180 times/hour 20 seconds4 times/minute 240 times/hour 15 seconds

Different sections of the furnace can be replenished at different rates, if requiredFlowmeters graduated in: sL/m (lg=RMC flowmeters, sm=small RMA flowmeters) 2

BALANCE148 scfh difference => Positive pressure in furnace to purge O270 sL/m grad 62.5% incr (decr) of inflows over outflows Flowmeter

Metered SizeNo. Location Label Gas L/m sL/m grad scfh grad sL/m grad1 BESE Entrance barrier ENTRANCE BAFFLE N2 95 7 2 21 102 Z1 Heating chamber 1 ZONE 1 N2 95 55 4 155 733 Z2-4 Heating chamber 1 ZONES 2 - 4 N2 95 58 4 164 774 TTSE Transition tunnel Ed TRANSITION TUNNEL N2 95 8 2 22 105 CACT Cooling section COOLING TUNNEL N2 95 15 2 43 206 HC Heat chamber sides LAMP SEALS N2 95 30 2 84 40

EXHAUST distr % scfh grad sL/m grad7 EEBE Entrance stack ENTRANCE STACK N2 10 50% 3.5 1.78 EETT Transition tunnel TRANSITION TUNNEL STACK N2 10 50% 1.5 0.7

100%

Furnace Balance scfh sL/mGas Inflow to furnace 501.6 236.7

Gas to Eductors 5.1 2.4Total Gas Required 506.7 239.1

- Stack Exhaust Flow 81.7 38.6Net inflow 425 200.6

cu ft LFurnace internal volume 3.8 108.4

Temp PressPROCESS GAS SUPPLY REQUIREMENTS °C psi Gas scfh sL/m

1 Gas 1 All 21 70 N2 506.7 239.12 Gas 2 21 70 none 0.0 0.0

STP = 21C, 1 atm Total 506.7 239.1

SETTINGS FOR LOW O2 (<10 ppmv) THICK FILM PROFILE: SINGLE GAS

1 per Minute

Replenish Rate Flow

Setting

Desired Replenish Rate per Minute

ALL IMPEX 2001 LLC 03Oct13

Initial Flowmeter

Setting

Initial Flowmeter

Setting

FLOWMETER SETTINGS

13-006 -LA-309

1303091301

0

200

400

600

800

1000

0.0 50.0 100.0 150.0 200.0 250.0

Deg

C

LA-306 Temp Model LA-309

Flowmeters (100ppmv) ©LOCHABER CORNWALL, INC.

DOC NBR: 802-101460-02 R0MODEL: DWN: SLB 08/25/11

SERIAL NBR: APVL: JMC 01/25/13Customer: PRINT: PM: JMC 09/26/13

PROCESS GASGAS1 N2 NitrogenGAS2 none none

Replenish Rate is the number of times/minute that the furnace (or a section of the furnace) evacutes its gas

Replenish Rate Furnace or Section Replenishes/Hour Time to Refresh Furnace or Section1 times/minute 60 times/hour 60 seconds2 times/minute 120 times/hour 30 seconds3 times/minute 180 times/hour 20 seconds4 times/minute 240 times/hour 15 seconds

Different sections of the furnace can be replenished at different rates, if requiredFlowmeters graduated in: sL/m (lg=RMC flowmeters, sm=small RMA flowmeters) 2

BALANCE425 scfh difference => Positive pressure in furnace to purge O2201 sL/m grad 179.5% incr (decr) of inflows over outflows Flowmeter

Metered SizeNo. Location Label Gas L/m sL/m grad scfh grad sL/m grad1 BESE Entrance barrier ENTRANCE BAFFLE N2 95 7 1.5 21 102 Z1 Heating chamber 1 ZONE 1 N2 95 55 24 155 733 Z2-4 Heating chamber 1 ZONES 2 - 4 N2 95 58 8 164 774 TTSE Transition tunnel Ed TRANSITION TUNNEL N2 95 8 1.8 22 105 CACT Cooling section COOLING TUNNEL N2 95 15 1.6 43 206 HC Heat chamber sides LAMP SEALS N2 95 30 3.3 84 40

EXHAUST distr % scfh grad sL/m grad7 EEBE Entrance stack ENTRANCE STACK N2 10 70% 3.5 1.78 EETT Transition tunnel TRANSITION TUNNEL STACK N2 10 30% 1.5 0.7

100%

Furnace Balance scfh sL/mGas Inflow to furnace 501.6 236.7

Gas to Eductors 5.1 2.4Total Gas Required 506.7 239.1

- Stack Exhaust Flow 81.7 38.6Net inflow 425 200.6

cu ft LFurnace internal volume 3.8 108.4

Temp PressPROCESS GAS SUPPLY REQUIREMENTS °C psi Gas scfh sL/m

1 Gas 1 All 21 70 N2 506.7 239.12 Gas 2 21 70 none 0.0 0.0

STP = 21C, 1 atm Total 506.7 239.1

SETTINGS FOR VERY LOW O2 (<100 ppmv): SINGLE GAS MODEL

1 per Minute

Replenish Rate Flow

Setting

Desired Replenish Rate per Minute

ALL IMPEX 2001 LLC 03Oct13

Initial Flowmeter

Setting

Initial Flowmeter

Setting

FLOWMETER SETTINGS

13-006 -LA-309

1303091301

0

200

400

600

800

1000

0.0 50.0 100.0 150.0 200.0 250.0

Deg

C

LA-306 Temp Model LA-309

NOTES:PROCESS GAS TO PLENUMS, EDUCTORS, CHAMBERS, BAFFLES & CAWCFor each gas element tested, the flow was varied and the pressure drop determined by temporary installation of a test pressure gage. Pressures were recorded at each flow.

CAWC COOLING WATERFor the water cooling section, all 6 water flowmeters were opened full and the pressure varied from 2-20 psig. Flows were recorded for each flow meter at each pressure setting and then summed for total water flow through the CAWC as a function of inlet pressure.Tests on the CAWC were run as follows:

1) Furnace operating with last zone at approx. 450-460C. CAWC COOLING AIR turned off. Cooling water set to 8 psig. CAWC cooling water varied from 0 to 60 gph (1 gpm). Temperature profiles of the furnace were run at each of 5 Total Water Flow settings. Inlet & outlet water temp recorded

2) Furnace operating with last zone at approx. 450-460C. Cooling water set to 8 psig, Total Water Flow set to 48 gph (8 gph in each of 6 CAWC chambers). CAWC COOLING AIR increased from 0 to 400 scfh. Temperature profiles of the furnace were run at each of 6 water flow settings.

Data suggests the furnace cooling system be operated with 40 to 60 gph Total Water Flow through the CAWC and improve cooling performance by running the CAWC cooling gas at 200-300 SCFH.

APPROVALS DATE TITLE

DWN JMC 6/11/11CHK'D SBARBER 6/15/11 JOB DOCUMENT NUMBER REV

ENGR JMC 6/22/11 STD 802-101470 0REV DESCRIPTION BY DATE PM JMC 7/28/11 SIZE: B PRNT: 11/28/12 SN: ALL SHEET 1 OF 1

IR FURNACEPRESSURE AND FLOW CHARACTERISTICS

675 N ECKHOFF STREET STE DORANGE, CALIFORNIA 92868 USA

(714) 935-0302 www.furnacepros.com

25, 4

0.0

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sure

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9"x 30"L 1-Zone

9"x 30"L 2-Zone

31, 1.6

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Cooling System Gas Pressure

3-30" Modules

1-30" Module

0.0

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4-Chamber

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Tota

l Wat

er F

low

, gph

Water Supply Pressure, psi

CAWC Water Flow with Varied Supply Pressure

3-30" Module1-30" Module

Section 4

4-14 LA-309 Owner’s Manual