Scanning Probe Microscopy of Functional Materials

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Sergei V. Kalinin • Alexei GruvermanEditors

Scanning Probe Microscopy of Functional Materials

Nanoscale Imaging and Spectroscopy

EditorsSergei V. KalininThe Center for Nanophase Materials Sciences and Technology DivisionOak Ridge National Laboratory1 Bethel Valley Road37831 Oak Ridge TennesseeUSAsergei2@ornl.gov

Alexei GruvermanUniversity of Nebraska - LincolnDepartment of Materials Science and EngineeringDepartment of Physics & Astronomy202 Ferguson Hall 7 92068588 Lincoln NebraskaUSAagruverman2@unl.edu

ISBN 978-1-4419-6567-7 e-ISBN 978-1-4419-7167-8DOI 10.1007/978-1-4419-7167-8Springer New York Dordrecht Heidelberg London

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Scanning probe microscopy (SPM) has become a mainstream technique of nanoscience and nanotechnology by providing easy to use methodology for non-invasive imaging and manipulation on the nanometer and atomic scales. Beyond topographic imaging, SPM techniques have found an extremely broad range of appli-cations in probing electrical, magnetic, optical and mechanical properties – often at the level of several tens of nanometers [1, 2], opening the way to an understanding material functionality and interactions at their fundamental length scales [3].

For more than a decade after the introduction of the first commercial micro-scopes in late 1980s, SPM evolved as a primarily qualitative imaging method. The surface topographic and functional (e.g., magnetic, electrostatic, or mechanical) images were acquired in parallel and were interpreted by an observer. A common feature for these measurements was that only a single or a small number of param-eters describing the local properties were obtained; furthermore, information con-tained in complementary images was usually ignored (or interpreted solely within the limits of a cursory examination). These limitations stemmed primarily from the inherent limits of data processing electronics available at the time, the dearth of well-characterized probes, relative novelty of the field, and only a small number of available microscopic platforms. Nevertheless, even qualitative imaging capabili-ties have provided multiple opportunities in research for almost a decade. Ironically, this multitude of research opportunities has somewhat shifted the focus of research and development away from further technological advances in SPM.

In contrast, the last several years have seen tremendous progress in force-based SPMs. The emergence of digital control and field-programmable gate array elec-tronics have greatly increased the data acquisition and processing speed, allowing multiple information channels to be acquired without compromising image acquisi-tion speed or quality. Similarly, recent advances in the theoretical understanding of contrast mechanisms in SPM and increasing market competition have lead to the rapid emergence of multimodal and spectroscopic SPM methods, including dual excitation frequency SPM (Asylum) [4–6], HarmoniX (Veeco) [7, 8], and configu-rable multiple frequency lock-ins by Agilent [9] and Nanonis [10]. This progress in fast data acquisition electronics and signal processing in SPM has allowed multiple information channels to be collected in the 1–10 ms range of a single pixel. This development in turn enabled several families of rapid multimodal and spectroscopic

Preface

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imaging SPM techniques. Examples include band excitation [11] and digital lock-in [12] SPM, which allow rapid sampling of a response–frequency curve at each location on a surface, switching spectroscopy PFM [13] for mapping the fer-roelectric behavior, rapid force–volume imaging [14] modes ushered in by small (high frequency) cantilever technology, torsional resonance imaging for mechanical property characterization [7], and many others.

Advances in ultra-stable STM platforms resulted in a resurgence of STM-based spectroscopic methods, such as continuous imaging tunneling spectroscopy (CITS), dI/dV (density of states), dI/dz (work function), and d2I/dv2 (vibrational) imaging [15]. It is not an exaggeration to say that most of the recent advances in nanoscale science and condensed matter physics have been linked to the development of par-ticular spectroscopic imaging modes – including imaging high-temperature super-conductivity by Davies [16] and Yazdani [17], optically assisted SPM introduced by Ho [18], mechanical HarmoniX imaging introduced by Sahin [7, 8], and many others.

In parallel with these instrumental developments, significant progress was achieved in development of SPM methods that combine novel experimental modali-ties, including thermal and mass-spectrometry assisted methods, novel electrical characterization modes, and combinations between SPM and beam techniques including focused X-ray and electron microscopy. Common to all of these methods is the acquisition of complex multidimensional data sets, typically comprised local spectroscopic responses of materials to external stimuli, or multiple parallel channels of information. At the same time, this allows not only the visualization of the struc-ture of surfaces on the nanometer scale, but also insight into their functionalities.

In this book, we aim to provide an overview of several notable recent develop-ments in the field of functional SPM enabled by the advances in sample preparation and platform development, ultra-high resolution imaging, novel combined imaging modes, signal detection, data interpretation, and novel dynamic modes.

In Chap. 1, Maksymovych delineates the applications of scanning tunneling microscopy and spectroscopy for probing chemical processes on a single-molecule level. While applications of STM for imaging surface structures on the molecular and atomic level has become common, he illustrates how STM can provide insight into chemical functionality of molecular systems. These range from tip-induced surface chemical reactions including long-range hot-electron induced phenomena to time spectroscopies of single molecule transformations to the minute details of the vibrational spectra probed by inelastic electron spectroscopy.

High-resolution studies of biological functionality are addressed in the contribu-tion by Malkin and Plomp (Chap. 2). Creatively combining the insights from the crystallization theory and high resolution atomic force microscopy imaging, the authors demonstrate that the molecular structure of the biological objects such as bacterial spores and viruses contains a wealth of information on their functionality and life cycle. Beyond providing a highly illuminating and often spectacular view of microscopic structure of these systems, these studies can be used to identify individual strains of bacterial systems, and establish their developmental pathways in response to changes in environment, chemical stimulants, and therapeutics.

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The recent advances in spectroscopic and multimodal SPMs enabled by novel data acquisition and analysis methods are summarized in Chaps. 3–6. Holscher et al. provide an in-depth description of dynamic force spectroscopy and microscopy in ambient conditions. Based on the precise measurements of the dynamic response of the cantilever, the complete force–distance curve and associated mechanical func-tionalities can be extracted. This topic is further developed in the contribution by Hurley (Chap. 4) who discusses probing mechanical functionality on the nanoscale, including mechanical properties and adhesive behavior, using Atomic Force Acoustic Microscopy-based methods. The signal formation mechanisms, detailed data interpretation, and multiple experimental examples are discussed.

The new paradigm in dynamic SPMs – multiple frequency methods – is discussed in Chap. 5 by Proksch. While the classical SPMs utilize purely sinusoidal excitation signals corresponding to a single frequency in the Fourier domain, the use of multiple excitation and detection frequencies allows systematic mapping of frequency disper-sion of the signal. Strategies for nanoscale mapping of dissipative interactions via multifrequency detection are discussed in detail.

Finally, in Chap. 6 Sahin describes the tensional resonance method for probing dynamic mechanical properties. Utilizing decoupling between the flexural and torsional oscillation modes and difference in the corresponding resonant frequen-cies, the dynamic probing of the force–distance curve at each spatial pixel is pos-sible. This approach is demonstrated for multiple applications, including phase transitions in polymers and high-resolution imaging of biological systems.

The contribution by Ovchinnikova in Chap. 7 discusses in depth the rapidly emerging chemical imaging methods based on the combination of SPM and mass-spectrometry. While SPM is renowned for high spatial resolution, the amount of chemical information is typically limited. At the same time, modern mass-spectrometry methods provide ultimate information on the chemical structure of complex biological and pharmaceutical systems, often using minute amounts of material. The SPM-MS approach combines local thermal or optical excitation directed by an SPM tip, with subsequent pick-up of locally emitted products by the mass spectrometer, thus allowing local chemical identification. Critical for broad implementation of this approach is mass spectrometry at atmospheric pressures, and these methods are reviewed in detail.

SPM methods for probing thermal phase transitions locally are summarized in the contribution by Nikiforov and Proksch (Chap. 8). Recent advances in SPM tip fabrication lead to the development of heated SPM probes with high heating–cooling rates. These probes enable a broad spectrum of thermal imaging methods. In one approach, the SPM tip concentrates the thermal field within the material, while the resulting surface deformation is detected by SPM electronics. The onset of melting transition below the probe results in probe penetration in the material, allowing the transition temperature to be identified. The combination of periodic heating and dynamic driving modes allows mapping of the glass transition temperatures as well. Beyond thermomechanical effects, these methods can be extended to probing local sample temperatures and heat conductivity, suggesting broad applicability for high-energy density material sand devices.

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The applications of SPM methods to probing electrical and electromechanical functionalities are discussed at length in Chaps. 9–13. In Chap. 9, Magonov et al. extend multiple frequency SPM to in-depth quantitative studies of electrical proper-ties of semiconductors, ferroelectrics and self-assembled monolayers. Along with the overview of Kelvin Probe Force Microscopy and Electric Force Microscopy applications they discuss how frequency modulation realized in these modes can overcome uncertainties related to various mechanisms of response signal formation and improve spatial resolution in functional imaging.

The contribution by Tian et al. (Chap. 10) describes the quantitative measure-ments of ferroelectric polarization distribution on the nanoscale by piezore-sponse force microscopy (PFM). The force-based SPM signals scale linearly with tip- surface contact area resulting in a dearth of quantitative measurement capabilities in the range from molecular to mesoscopic (~100 nm) length scale. At the same time, the electromechanical signal in continuous approximation does not depend on the contact radius, enabling quantitative measurements of ferroelectric properties in the PFM mode. Using finite element simulation of the electric and elastic fields for various tip-sample interaction models, Tian et al. show that the real domain wall thickness can be extracted from experimental PFM line profiles across domain walls.

This topic of PFM characterization of ferroelectrics is further developed by Huey and Nath in Chap. 11, who systematize a broad range of experimental stud-ies of domain switching dynamics in ferroelectric thin films. By introducing high speed PFM, the rapid mapping of instantaneous domain patterns is possible at a rate of at least 100 times over standard PFM imaging. This is one of the most promising approaches in overcoming the PFM limitation in revealing the param-eters of nucleation and fast domain wall motion as the basic mechanisms of polar-ization reversal in ferroelectric-based devices (notably ferroelectric memories) and understanding the role of structural defects in the thermodynamics of ferroelectric switching.

The polar structure and polarization dynamics in relaxor ferroelectrics, one of the most mysterious classes of ferroic materials, are discussed in Chap. 12 by Shvartsman et al. The nanoscale ferroelectric ordering in relaxors presents a signifi-cant exploratory challenge but at the same time makes them the textbook example materials for demonstrating the superior capabilities of PFM in discerning the relationship between the polar structure and the unconventional dielectric proper-ties. A detailed review of the PFM studies of several important groups of relaxors is presented highlighting experimental observation of temperature-induced trans-formation between ferroelectric and relaxor states.

In Chap. 13, Ruediger reviews a complex problem of PFM image interpretation stemming from the tensorial nature of the electromechanical response, asymmetry in the local field distribution due to the sample defect structure or tip shape, surface modification and cantilever mechanics. Understanding these contributions allows one to avoid image misinterpretation and identify imaging artifacts while providing additional means for structural and electrical characterization of electronic materials.

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The novel functional SPM methods are discussed in Chaps. 14–17. In Chap. 14, Rose et al. discuss the perspectives of combined STM-focused X-ray measure-ments. The X-ray methods have evolved to provide in-depth information on the crystallographic structures and chemical identity of the surfaces, often with extremely high temporal resolution. However, spatial resolution is limited to sev-eral tens of nanometers. At the same time, STM-based methods routinely yield atomic spatial resolution, but are limited by 10–100 kHz bandwidth of amplifiers and are limited in chemical sensitivity. The potential for X-ray-STM combination and corresponding operational mechanism are discussed.

The scanning ion conductance microscopy and its application for mapping sur-face structures and biological systems are discussed in detail by Rheinlander and Schäffer in Chap. 15. This method allows mapping ionic flows through the micro-capillary and is ideally suited for studying the biological and electrochemical sys-tems. This topic is further extended by Beyder and Sachs (Chap. 16), who describe the techniques that combine classical patch-clamp and AFM methods to probe electrophysiological properties on the cellular and subcellular levels.

The contribution by Rodriguez et al. (Chap. 17) discusses in detail the novel problems that appear in the context of analysis of the multicomponent spectral data, and illustrates their applications for the voltage and time spectroscopies in PFM. The direct functional fits methods are discussed and compared with multivariate statistical methods including principal component analysis and correlation function analysis. Finally, the contribution by Gruverman (Chap. 18) reviews recent advances in probing and understanding polarization dynamics in ferroelectric capacitors. Although the PFM capability to detect the polarization state through the top electrode allows for direct studies of the dynamics of domain structure under the uniform field conditions, a major limitation was low time resolution. Discussion of the approach to extend the PFM studies into the 100 ns range is presented. The role of inhomogeneous domain nucleation and measurements of the switching parameters in conjunction with microstructural and scaling effects is discussed.

Taken together, this book aims to give a prospective of new directions in func-tional SPM imaging. Many of the applications described in the book have appeared only in the last several years, and the future will undoubtedly see the emergence of a number of SPM modes for addressing materials functionality at the nanoscale.

Sergei V. Kalinin Alexei Gruverman

References

1. E. Meyer, H.J. Hug, R. Bennewitz, Scanning Probe Microscopy: The Lab on a Tip (Springer, 2003)

2. S.V. Kalinin, A. Gruverman (eds.), Scanning Probe Microscopy: Electrical and Electromechanical Phenomena at the Nanoscale (Springer, 2006)

3. C. Gerber, H.P. Lang, Nat. Nanotechnol. 1, 3 (2006)

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4. R. Proksch, Appl. Phys. Lett. 89, 113121 (2006) 5. B.J. Rodriguez, C. Callahan, S.V. Kalinin, R. Proksch, Nanotechnol. 18, 475504 (2007) 6. http://www.asylumresearch.com 7. O. Sahin, S. Magonov, C. Su, C.F. Quate, O. Solgaard, Nat. Nanotechnol. 2, 507 (2007) 8. http://www.veeco.com 9. http://nano.tm.agilent.com/index.cgi?CONTENT_ID=253 10. http://www.nanonis.com 11. S. Jesse, S.V. Kalinin, R. Proksch, A.P. Baddorf, B.J. Rodriguez, Nanotechnol. 18, 435503 (2007) 12. A.B. Kos, D.C. Hurley, Meas. Sci. Technol. 19, 015504 (2008) 13. S. Jesse, B.J. Rodriguez, S. Choudhury, A.P. Baddorf, I. Vrejoiu, D. Hesse, M. Alexe, E.A.

Eliseev, A.N. Morozovska, J. Zhang, L.Q. Chen, S.V. Kalinin, Nat. Mater. 7, 209 (2008) 14. D.A. Bonnell (ed.), Scanning Probe Microscopy and Spectroscopy: Theory, Techniques, and

Applications (Wiley-VCH, 2008) 15. J.A. Stroscio, W.J. Kaiser (eds.), Scanning Tunneling Microscopy (Academic, Boston, 1993) 16. K. McElroy, R.W. Simmonds, J.E. Hoffman, D.H. Lee, J. Orenstein, H. Eisaki, S. Uchida, J.C.

Davis, Nat. 422, 592 (2003) 17. K.K. Gomes, A.N. Pasupathy, A. Pushp, S. Ono, Y. Ando, A. Yazdani, Nature 447, 569 (2007) 18. S.W. Wu, N. Ogawa, W. Ho, Sci. 312, 1362 (2006)

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Contents

Part I Spectroscopic SPM at the Resolution Limits

1 Excitation and Mechanisms of Single Molecule Reactions in Scanning Tunneling Microscopy ......................................................... 3Peter Maksymovych

2 High-Resolution Architecture and Structural Dynamics of Microbial and Cellular Systems: Insights from in Vitro Atomic Force Microscopy ......................................................................... 39Alexander J. Malkin and Marco Plomp

Part II Dynamic Spectroscopic SPM

3 Dynamic Force Microscopy and Spectroscopy in Ambient Conditions: Theory and Applications ................................. 71Hendrik Hölscher, Jan-Erik Schmutz, and Udo D. Schwarz

4 Measuring Mechanical Properties on the Nanoscale with Contact Resonance Force Microscopy Methods ............................ 95D.C. Hurley

5 Multi-Frequency Atomic Force Microscopy .......................................... 125Roger Proksch

6 Dynamic Nanomechanical Characterization Using Multiple-Frequency Method ......................................................... 153Ozgar Sahin

Part III Thermal Characterization by SPM

7 Toward Nanoscale Chemical Imaging: The Intersection of Scanning Probe Microscopy and Mass Spectrometry ....................... 181Olga S. Ovchinnikova

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8 Dynamic SPM Methods for Local Analysis of Thermo-Mechanical Properties ......................................................... 199M.P. Nikiforov and R. Proksch

Part IV Electrical and Electromechanical SPM

9 Advancing Characterization of Materials with Atomic Force Microscopy-Based Electric Techniques ................................................. 233Sergei Magonov, John Alexander, and Shijie Wu

10 Quantitative Piezoresponse Force Microscopy: Calibrated Experiments, Analytical Theory and Finite Element Modeling ......... 301Lili Tian, Vasudeva Rao Aravind, and Venkatraman Gopalan

11 High-Speed Piezo Force Microscopy: Novel Observations of Ferroelectric Domain Poling, Nucleation, and Growth .................. 329Bryan D. Huey and Ramesh Nath

12 Polar Structures in Relaxors by Piezoresponse Force Microscopy .... 345V.V. Shvartsman, W. Kleemann, D.A. Kiselev, I.K. Bdikin, and A.L. Kholkin

13 Symmetries in Piezoresponse Force Microscopy .................................. 385Andreas Ruediger

Part V Novel SPM Concepts

14 New Capabilities at the Interface of X-Rays and Scanning Tunneling Microscopy .................................................... 405Volker Rose, John W. Freeland, and Stephen K. Streiffer

15 Scanning Ion Conductance Microscopy ................................................ 433Johannes Rheinlaender and Tilman E. Schäffer

16 Combined Voltage-Clamp and Atomic Force Microscope for the Study of Membrane Electromechanics ..................................... 461Arthur Beyder and Frederick Sachs

17 Dynamic and Spectroscopic Modes and Multivariate Data Analysis in Piezoresponse Force Microscopy .............................. 491B.J. Rodriguez, S.Jesse, K. Seal, N. Balke, S.V. Kalinin, and R. Proksch

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18 Polarization Behavior in Thin Film Ferroelectric Capacitors at the Nanoscale ................................................................... 529A. Gruverman

Index ................................................................................................................. 541

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Contributors

John AlexanderAgilent Technologies, 4330 W. Chandler Blvd., Chandler, AZ 85226, USA

Vasudeva Rao AravindMaterials Science and Engineering, Pennsylvania State University, University Park, PA 16803, USA; Clarion University of Pennsylvania, Clarion, PA 16214, USA

N. BalkeOak Ridge National Laboratory, Oak Ridge, TN 37831, USA

I.K. BdikinDepto de Engenharia Cerâmica e do Vidro, CICECO, Universidade de Aveiro, 3810-193 Aveiro, Portugal

Arthur BeyderDepartment of Medicine, Mayo Clinic, 200 First Street SW, Rochester, MN 55905, USAbeyder.arthur@mayo.edu

John W. FreelandAdvanced Photon Source Argonne National Laboratory, Argonne, IL 60439, USA

Venkatraman GopalanMaterials Science and Engineering, Pennsylvania State University, University Park, PA 16803, USAvgopalan@psu.edu

A. GruvermanDepartment of Physics and Astronomy, University of Nebraska, Lincoln, NE 68588-0111, USAagruverman2@unlnotes.unl.edu

Hendrik HölscherInstitute for Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany Hendrik.Hoelscher@kit.edu

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Bryan D. HueyMaterials Science and Engineering Program and Institute of Materials Science, University of Connecticut, Storrs, CT 06269, USAbhuey@ims.uconn.edu

D.C. HurleyNational Institute of Standards & Technology, 325 Broadway, Boulder, CO 80305, USAhurley@boulder.nist.gov

S. JesseOak Ridge National Laboratory, Oak Ridge, TN 37831, USA

S.V. KalininThe Center for Nanophase Materials Sciences and Technology Division, Oak Ridge National Laboratory, 1 Bethel Valley Road, 37831 Oak Ridge, Tennessee USA

A.L. KholkinCenter for Research in Ceramic and Composite Materias (CICECO) & DECV, University of Aveiro, 3810-193, Aveiro, Portugal kholkin@ua.ptt

D.A. KiselevDepto de Engenharia Cerâmica e do Vidro, CICECO, Universidade de Aveiro, 3810-193 Aveiro, Portugal

W. KleemannAngewandte Physik, Universität Duisburg-Essen, D-47048 Duisburg, Germany

Sergei MagonovAgilent Technologies, 4330 W. Chandler Blvd., Chandler, AZ 85226, USAsergei_magonov@agilent.com

Peter MaksymovychCenter for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USAmaksymovychp@ornl.gov

Alexander J. MalkinPhysical and Life Sciences Directorate, Lawrence Livermore National Laboratory, Livermore, CA, USAmalkin1@llnl.gov

Ramesh NathMaterials Science and Engineering Program and Institute of Materials Science, University of Connecticut, Storrs, CT 06269, USA

M.P. NikiforovOak Ridge National Laboratory (ORNL), Oak Ridge, TN 37831, USAnikiforovm@ornl.gov

xviiContributors

Olga S. OvchinnikovaDepartment of Physics and Astronomy, University of Tennessee, Knoxville 401 Nielsen Physics Building, 1408 Circle Drive, Knoxville, TN 37996-1200ovchinnikovo@ornl.gov

Marco PlompPhysical and Life Sciences Directorate, Lawrence Livermore National Laboratory, Livermore, CA, USAmalkin1@llnl.gov

Roger ProkschAsylum Research, Santa Barbara, CA 93117, USAroger@asylumresearch.com

Johannes RheinlaenderInstitute of Applied Physics, University of Erlangen-Nuremberg, Staudtstr. 7, Bldg. A3, 91058 Erlangen, Germany

B.J. RodriguezUniversity College Dublin, Belfield, Dublin 4, Irelandbrian.rodriguez@ucd.ie

Volker RoseAdvanced Photon Source Argonne National Laboratory, Argonne, IL 60439, USAvrose@anl.gov

Andreas RuedigerLaboratory of Ferroelectric Nanoelectronics, Institut National de la Recherche Scientifique, Université du Québec, 1650, Blvd. Lionel-Boulet, Varennes, Canada J3X 1S2Andreas.Ruediger@emt.inrs.ca

Frederick SachsCenter for Single Molecule Biophysics, Physiology and Biophysical Sciences, 301 Cary Hall, University at Buffalo, State University of New York, Buffalo, NY 14214, USA

Ozgur SahinThe Rowland Institute at Harvard, Cambridge, MA, USAsahin@rowland.harvard.edu

Tilman E. SchäfferInstitute of Applied Physics, University of Erlangen-Nuremberg, Staudtstr. 7, Bldg. A3, 91058 Erlangen, Germanyschaeffer@physik.uni-erlangen.de

Jan-Erik SchmutzCenter for Nanotechnology (CeNTech) and Physikalisches Institut, University of Münster, Heisenbergstr. 11, 48149 Münster, Germany

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Udo D. SchwarzDepartment of Mechanical Engineering, Yale University, New Haven, CT, USA

K. SealOak Ridge National Laboratory, Oak Ridge, TN 37831, USA

V.V. ShvartsmanAngewandte Physik, Universität Duisburg-Essen, D-47048 Duisburg, Germany

Stephen K. StreifferArgonne National Laboratory, Center for Nanoscale Materials, Argonne, IL 60439, USA

Lili TianMaterials Science and Engineering, Pennsylvania State University, University Park, PA, 16803, USA

Shijie WuAgilent Technologies, 4330 W. Chandler Blvd., Chandler, AZ 85226, USA