safety manual.pdf

PANalyticalSafety Manual

EDITION NOTICE: This is the Fifth Edition of this publication.

PANalytical - Safety Manual

ACKNOWLEDGMENTS

All registered and unregistered Trademarks ™, Domain Names and Copyrights ©are the property of their respective owners.

COPYRIGHT NOTICE

Copyright © PANalytical B.V. 2005. All rights reserved worldwide. This manualhas been provided pursuant to an agreement containing restrictions on its use. Thismanual is also covered by Federal Copyright Law and International CopyrightLaw. No part of this manual may be copied, distributed, transmitted, stored in aretrieval system or translated into any human or computer language, in any formor by any other means, electronic, mechanical, magnetic, manual, or otherwise ordisclosure to third parties without the express written permission of PANalyticalB.V.

DISCLAIMER

This manual is supplied by PANalytical B.V. on an as is basis, under a non-exclu-sive licence, authorizing the manual’s use solely for and in conjunction with theproducts supplied by PANalytical B.V. terms and conditions of sale, governing thecontract of sale for the products supplied. Further, PANalytical B.V. reserves theright to revise or change this manual without the obligation to notify any person ororganization of such revision or change.

This instrument complies with the requirements for CE marking and is manufac-tured by:

PANalytical B.V. Lelyweg 17602 EA, Almelo The NetherlandsTel: +31 546 534444Fax: +31 546 534577Internet http://www.PANalytical.com

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General Pages

Contents

Chapter 1: IntroductionChapter 2: General Safety Rules and ProceduresChapter 3: X-ray Spectrometry SystemsChapter 4: Semiconductor SystemsChapter 5: X-ray Diffractometry SystemsAppendix A: Definitions

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Chapter 1

Introduction

1.1 INTRODUCTION.......................................................... 1 - 31.1.1 Scope of this Manual....................................................................... 1 - 31.1.2 Objective ......................................................................................... 1 - 31.1.3 Safety Guarantee ............................................................................. 1 - 3

1.2 HOW TO USE THIS MANUAL..................................... 1 - 41.2.1 Contents of the Safety Manual ........................................................ 1 - 4

1.3 OTHER INFORMATION SOURCES .............................. 1 - 5

1.4 EXPLANATION OF WARNINGS, CAUTIONS AND NOTES1 - 6.

1.5 SYMBOLS.................................................................... 1 - 7

1.6 REDUCING THE RISKS OF ACCIDENTS ...................... 1 - 9

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Chapter 1. Introduction

1.1 INTRODUCTIONPlease take the time to read this manual before you start to use your equipment. PANalytical equipment is perfectly safe as long as it has been correctly installed and is operated according to the instructions given in the system’s User Guide or Instruction Manual.

1.1.1 Scope of this Manual“From cradle to grave” is an often heard sentence in the life cycle analysis environment. This philosophy leads to PANalytical building safety and environmental considerations into the specifications and design of our equipment allowing us to build equipment to reproducible specified levels. Instructions for installation, acceptance, use, maintenance and end-of-life removal are natural consequences of this approach. This booklet is one of the building blocks to support customers and service engineers during the different phases of a product’s life. Specific equipment details are always given in the documentation supplied with the equipment. This manual intends to “point” you in the right direction. If at any time there is a conflict between the safety information contained in this manual and any relevant local (national or regional) rules, the local rules always take precedence.

1.1.2 ObjectiveThe information in this document is designed to help PANalytical's customers to maintain their analytical equipment in accordance with the highest possible safety standards in the world. It outlines how to keep the equipment in a safe condition, and how to avoid accidents. Therefore, it is important that customers use this document to become familiar with the safety aspects of their PANalytical equipment. There are two target audiences for this manual: the customer using PANalytical equipment, and the qualified service engineer who must install (and repair) the equipment.

1.1.3 Safety GuaranteePANalytical equipment is covered by our safety guarantee when it is delivered. It remains covered throughout its life as long as the equipment is maintained and repaired by Authorized Personnel, and no unauthorized alterations and/or additions have been made to the system.

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1.2 HOW TO USE THIS MANUALThis manual describes the basic safety rules and procedures that must be followed by everybody who operates, maintains or services PANalytical equipment. Specific safety aspects and related procedures for parts of a system are given in the documentation describing that part (User’s Guide, Service Manual etc.). All readers should read Chapters 1 and 2 and then the chapter referring to their equipment line (Chapter 3, 4 or 5)

1.2.1 Contents of the Safety Manual This section lists all of the parts of this manual together with a short description of what is contained in each chapter and appendix.

Chapter 1: IntroductionThis chapter introduces you to the manual, describes the scope, objec-tive and safety Guarantee. It describes the manual contents and how to use them. It then goes on to provide information about other informa-tion sources, explains what warnings, cautions, notes and symbols are used in the manual. Finally it informs you how you can avoid accidents.

Chapter 2: General Safety Rules and ProceduresThis chapter describes PANalytical’s approach to safety matters, refers to and explains the use of international product safety standards and safety aspects and policy. These approaches, standards and aspects lead naturally to the general safety rules and procedures. Finally it provides information about what to do in case of an emergency.

Chapter 3: X-ray Spectrometry SystemsThis chapter provides some general information about PANalytical spectrometry equipment and the specific X-ray safety requirements for spectrometry equipment.

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1.3 OTHER INFORMATION SOURCESDeclaration of Conformity (DoC) which was shipped together with your system.Material Safety Data Sheets (MSDS) of the relevant product related parts or substances and DoCs can be supplied by your local sales office or service engineer.

Chapter 4: Semiconductor SystemsThis chapter provides some general information about PANalytical sem-iconductor equipment and the specific X-ray safety requirements for semiconductor equipment.

Chapter 5: X-ray Diffractometry SystemsThis chapter provides some general information about PANalytical dif-fractometry equipment and the specific X-ray safety requirements for diffractometry equipment.

Appendix A: DefinitionsThis appendix lists all of the abbreviations and terms used in this man-ual.

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1.4 EXPLANATION OF WARNINGS, CAUTIONS AND NOTES

Actions within PANalytical’s manuals that require special attention are indicated as follows:

DANGER THIS INDICATES AN EXTREMELY HAZARDOUS SITUATION WHICH, IF NOT AVOIDED, COULD RESULT IN DEATH OR VERY SERIOUS INJURY.

(SYMBOL DEPENDS ON PARTICULAR SITUATION.)

WARNING THIS INDICATES A HAZARDOUS SITUATION WHERE THERE IS A RISK OF SERIOUS INJURY.

(SYMBOL DEPENDS ON PARTICULAR SITUATION.)

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NOTE: This indicates information of particular importance to help the user understand or adjust the equipment.

1.5 SYMBOLSThe following symbols are displayed on PANalytical equipment:

Caution This indicates a situation where equipment or prop-erty could be damaged, or there is a risk of minor in-jury.

(Symbol depends on particular situation.)

Beware This indicates a remark with additional information for the user. The user must be aware of possible prob-lems.

(Symbol depends on particular situation.)

Electrical hazard (BLACK/YELLOW)

Read the operating instructions (BLACK/YELLOW)

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Pinch hazard (BLACK/YELLOW)

Heavy weight (BLACK/YELLOW)

Hot surface (BLACK/YELLOW)

Protective earth (ground) terminal (BLACK)

Measuring earth (ESD connection) (BLACK/WHITE)

Radiation dangerLit: Generating X-raysNot Lit: Not generating X-rays

(BLACK/YELLOW)

Equipment produces high intensity X-ray beams from an X-ray tube.Symbol is on control panel, adjacent to warn-ing labels in appropriate language/s

(BLACK/YELLOW)

>25 kg

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1.6 REDUCING THE RISKS OF ACCIDENTSRisk analyses are executed from the start of a project and must continue to be performed during the entire life of a system. The principle of risk analysis is:

Risk = Chance x EffectWhere Chance = Probability of occurrence x Averting danger.

Table 1-1 shows various risk aspects, the related effects and the methods of averting danger. This table covers a subset of all safety aspects.

Laser dangerSee also any other labels attached adjacent to this symbol(Class of laser must be mentioned)

(BLACK/YELLOW)

Poison (BLACK/YELLOW)

Recycling symbol (BLACK/WHITE)

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Table 1-1 : Risk Reduction

Aspect Effect Methods of averting danger

Electricity: Electricity from voltages above 30 V, mains supply voltages and high voltage sources are capable of causing serious injury or death

Interrupting connectors for high voltage (safety loop). Earthing (grounding) touchable parts that could become an electrical hazard under single fault conditions. ShieldingWarnings on shielding plate with respect to remaining load in capacitors. Safety class and installation category infor-mation (if applicable) in manuals.Limited leakage current (or warning of high leakage current).

Ionizing radiation:

Ionizing radiation from X-ray analysis equipment is intense and capable of causing serious injury

Vollschutz approach (par. 2.1.3-2.3). Dose limits (2.3). Safety key switch to stop unauthorized persons working with the equipment.

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Moving parts Moving parts, for example: goniometers, changers, caps, shutters, robots are capable of causing (serious) injury

Stop moving parts when doors are opened. Limited forces of cap and shutter movements

Consuming food or drink, or smoking while operating the equipment

Consuming food or drink during work, combined with touching poisonous sub-stances like X-tals (TlAP) and the probability of Beryllium oxide (tube win-dows), could cause illness. Problems that can arise are: 1. Risk to human health. 2. Dirty products cause decreasing quality/reliability/intensity/lifetime.

Do not consume anything until you have fin-ished working on the equipment and washed your hands. Use shielding lacquer on Beryllium surfaces. Use a shielding cap on X-ray tubes. Follow the instructions in manuals (how to handle X-tals) and XRA information. Pay attention to Warning labels.

Table 1-1 : Risk Reduction (Continued)

Aspect Effect Methods of averting danger

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Chapter 2

General Safety Rules and Procedures

2.1 PANALYTICAL’S APPROACH........................................ 2 - 32.1.1 International Product Safety Standard ............................................... 2 - 32.1.2 CE Directives..................................................................................... 2 - 32.1.3 Safety Aspect: Ionizing Radiation ..................................................... 2 - 42.1.4 Environmental Aspect: Environmental Policy .................................. 2 - 42.1.5 Electrical Safety Aspects ................................................................... 2 - 4

2.1.5.1 Electro Static Discharge (ESD) .......................................................2 - 42.1.5.2 Earth Leakage Current .....................................................................2 - 5

2.1.6 Safety Aspects: Lasers ....................................................................... 2 - 52.1.7 Safety Aspects: System Software ...................................................... 2 - 5

2.2 GENERAL SAFETY RULES AND PROCEDURES............. 2 - 5

2.3 WHAT TO DO IN CASE OF AN EMERGENCY............... 2 - 6

2.4 DOSIMETERS ................................................................ 2 - 7

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Chapter 2. General Safety Rules and Procedures

2.1 PANALYTICAL’S APPROACHIn order to produce systems and deliver them worldwide, PANalytical as a supplier/manufacturer deals with all kinds of responsibilities with respect to safety. Depending on the delivered product and/or service, international product regulations exist and are followed.

2.1.1 International Product Safety StandardThe international regulation IEC 1010 (International Electrical Code) is applicable to analyzing equipment. This regulation covers electrical equipment and accessories for measuring, control, and laboratory use. It covers the complete safety of electrical equipment; not only the electrical safety aspects, but all safety aspects. Therefore, the foundation of safety aspects with respect to PANalytical analyzing equipment is the IEC 1010. In Europe adopted as the EN61010. In Canada / USA / Japan adopted as respectively the CAN CSA C22.2 1010 / UL 3101 / JAIMAS 1010-2001.

2.1.2 CE Directives Within the European Community, the CE marking is required. All kind of products are included in these European Directives, such as toys, pressure vessels, and machines.The European Community treats Directives as European laws. As previously stated, PANalytical products are intended for measuring, control and laboratory use. Hazards are mainly of electrical origin, therefore the IEC 1010 international regulation is valid for this kind of equipment and its accessories.PANalytical products comply with:

EMC Directive 89/336/EECLow Voltage Directive 73/23/EEC

To deal with a second CE Directive covering Electro Magnetic Compatibility (EMC) PANalytical equipment is designed following the EMC rules. An external test house verifies the results. Most of the equipment fulfils requirements for both household (light industrial) and industrial. These certification processes are documented and archived in order to prove the CE marking. The PANalytical quality management system ISO 9001 supports this process.A “Declaration of Conformity” is drawn up per product and shipped together with the product in order to make clear how the safety related aspects have been covered.

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2.1.3 Safety Aspect: Ionizing Radiation Protection against ionizing radiation is a safety aspect that is covered in the international regulation IEC 1010. The basic principle is to continue taking action to reduce the radiation level outside the equipment as low as reasonably achievable (ALARA principle). The German regulations (Röntgenverordnung) are the most complete with regard to “built-in” safety aspects. Therefore, from the mid seventies onwards PANalytical has used the German Röntgenverordnung to implement a complete product related radiation safety profile. The Physikalisch Technische Bundesanstalt (PTB) is a certified independent body testing systems to ensure that they fulfil the highest safety standard called “Vollschutz” (highest safety level). This profile is more fully explained in the relevant chapters of this Safety Manual. Generally, worldwide legislation forbids the use of ionizing radiation. Its use is allowed only when it is justified. This means, it can only be used after special permission has been given. Over the last decade PANalytical has put a lot of effort into explaining and getting governmental acceptance of the German Vollschutz in many countries and areas, for example: USA, South America, Iberia, Holland).

2.1.4 Environmental Aspect: Environmental Policy

An environmental policy exists within PANalytical, and this policy is deployed across the entire organization. The following measures are taken:

- Information about environmental aspects of supplied products is col-lected from the suppliers

- Design rules are implemented to reduce energy, packaging materials, and weight

- More and more environmental information is supplied together with the equipment in order to inform service employees and customers.

- Most PANalytical supply centers are ISO 14001 certified, the newer supply centers will achieve that status in the next years.

2.1.5 Electrical Safety Aspects

2.1.5.1 Electro Static Discharge (ESD)

Authorized personnel should take care that all ESD precautions are taken when they are working on the electronics.

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2.1.5.2 Earth Leakage Current

The leakage current of equipment permanently connected to the mains supply voltage may, under some circumstances, exceed 10 mA. Therefore, depending on the local regulations (based on the risk of a broken earth connection), a second earth (ground) connection to the equipment may be required.

2.1.6 Safety Aspects: LasersTo use lasers safely, it is important to understand that a laser's final product safety classification is determined by three elements:

1. The laser's power.2. Wavelength. 3. Its housing.

Lasers and products using lasers must be marked. Increasing risk level indications run from Class 1 to Class 4. Class 1 lasers and laser systems do not cause danger. PANalytical products fall under the requirements of this highest safety level (intrinsically safe). Different laser wavelengths may result in laser beams outside the visible light range. These lasers carry additional risks.Service engineers executing maintenance or repair actions inside the equipment need to be aware of the following principle: as you remove the different layers of the equipment, the classification increases. Classification marking on shielding parts, laser housings and/or lasers will support this principle.

2.1.7 Safety Aspects: System SoftwareWhen the system is used normally as described in the system’s User Guide safety rules are automatically followed.

2.2 GENERAL SAFETY RULES ANDPROCEDURES

1. The customer must ensure that the equipment is correctly installed. The customer’s site facilities must meet the specifications in the pre-installation/installation information. Additionally, the facilities must meet the applicable safety requirements.

Remember that: - A suitable ground (earth) must be available.

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- The floor must be adequate for the floor loading of the equipment. 2. Installation and maintenance must be carried out by personnel authorized by

PANalytical (see Appendix A to this manual). 3. Safety devices must NEVER be made inoperative. 4. The End-user (customer) must ensure that the operators of the system are fully

instructed in the safety procedures. 5. The End-user (customer) must ensure that the system is operated according to the

locally applicable safety regulations. 6. All X-ray analysis systems must be monitored regularly (based on a local risk

assessment) using a suitable radiation monitor. 7. If the equipment is left unattended in an unsafe condition, remove the safety key,

disconnect the mains and attach a “DO NOT OPERATE” warning notice to the front panel.

8. When generating X-rays, the fail-safe warning lamp “X-RAYS ON” must be lit. This lamp must be clearly visible to everyone in the area.

9. In some countries, a warning lamp must be mounted outside the room, and the international warning sign (see section 1.4 in Chapter 1 of this Manual) must be displayed.

10. After installation or any maintenance/repair procedure, the operator and the service engineer must verify that the safety interlocks function correctly.

2.3 WHAT TO DO IN CASE OF AN EMERGENCYIf an emergency, or a suspected exposure to radiation from X-ray analysis equipment occurs, the following must be done:

1. Switch the equipment OFF (for semiconductor equipment press the Emergency OFF switch).

2. Take any medical/remedial first aid steps required if anybody is injured. 3. Do not take any remedial action to cure the fault that caused the accident and/or

exposure. NOTE: In the case of an X-ray exposure incident, assessment of the absorbed

dose is more difficult if the fault is corrected. 4. Put a sign on the unit to indicate that the unit must not be used or altered in any

way. 5. You must notify the following about the occurrence:

The User

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The (Radiation) Safety OfficerThe local PANalytical Organization

NOTE: If it is an X-ray exposure accident, and it exceeded the level set in local regulations, refer the exposed person for medical examination.

2.4 DOSIMETERSThere are differences between older equipment and the current products. These differences result mainly from the new radiation safety profile and approach as shown below:

This means that PANalytical equipment complies with the worldwide lowest radiation level combined with Vollschutz equipment (intrinsic safety) and organizational requirements like ISO 9001, CSA category certification, Radiation Safety Board (SBD) and following the rules of the Röntgenverordnung (RöV) about equipment design, production control and documentation. Specification of the worldwide lowest radiation level: Less than 1 microSv/hour at 10 cm distance from the outside surface of the equipment. Risk calculations and assessments with respect to the use of the equipment show that the absorbed dose stays easily within the ICRP level for public. This level is 1 milliSv/year. Based on these risk assessments, PANalytical declares that there is no legal requirement to wear a dosimeter while using the equipment. However, local rules always take precedence.

USA & The Netherlands:

1 microSv/h at 10cmJapan:

2 microSv/h at 5cm

Rontgenverordnung

Vollschutz &

other Requirements

Equipment

Requirements

ISO 9001/PBE

CSA/RoV/SBD

Organizational

Requirements

USER SAFETY

Dose Limits

World WideLowest Level

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Chapter 3

X-ray Spectrometry Systems

3.1 PANALYTICAL EQUIPMENT ......................................... 3 - 3

3.2 SPECTROMETERS ......................................................... 3 - 3

3.3 GENERATION OF X-RAYS ............................................ 3 - 4

3.4 X-RAY SAFETY REQUIREMENTS FOR SPECTROMETRY EQUIPMENT .................................................................. 3 - 4

3.4.1 X-ray Safety Aspects/Equipment 3 - 43.4.1.1 Safety Key Switch............................................................................3 - 43.4.1.2 Warning Texts, Symbols, and Lamp................................................3 - 53.4.1.3 Double Independent Safety Loops...................................................3 - 53.4.1.4 Maintenance.....................................................................................3 - 5

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Chapter 3. X-ray Spectrometry Systems

3.1 PANALYTICAL EQUIPMENTSpectrometry systems produce high intensity ionizing X-rays. These systems are intrinsically safe when they are operated and maintained correctly, they incorp-orate several safety devices to prevent radiation escaping from the enclosure. Alignment, adjustments, repairs and replacement of X-ray tubes must be performed by AUTHORIZED PERSONNEL, operating according to an approved scheme of work as given in the relevant manual. Always follow the procedures and instructions given in the User and Service Manuals! This will increase the safety of the operator and decrease the risk of injury. You must always strictly comply with all applicable local safety regulations. If you are unsure what they entail, request written instructions from your safety officer or local safety authorities.

3.2 SPECTROMETERSIn a spectrometer, the system’s X-ray tube is partially inserted into the sample chamber. The part outside the chamber is shielded to absorb X-rays. X-rays from the tube travel to the sample surface. The fluorescent radiation is then reflected by a crystal to a detector that measures the radiation at a specific angle of reflection. Primary and secondary collimators are used in the radiation optical path. Sample analysis is usually performed with the X-ray path under a vacuum. Double safety circuits in the spectrometer sense the difference in pressure between the outside ambient and the vacuum level in the radiation optical path. If any shielding is damaged or removed (for instance: a channel is removed), no pressure difference will be detected (or exist) and X-rays are immediately switched off. Replacement or adjustment of components in the spectrometer chamber and the crystal chamber may only be performed as described in the relevant documentation using the special cover plate and tools provided.

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3.3 GENERATION OF X-RAYSThe X-ray tube in a spectrometry system is powered by a high voltage power supply. The high voltage generator circuits automatically ensure that the high voltage and X-rays are immediately switched off if the equipment becomes unsafe. Double safety circuits are used in all PANalytical’s equipment in order to comply with the Vollschutz (intrinsic safety) regulations. These safety circuits are fail-safe and independent of each other. Only when the system senses that all conditions are safe will the “X-RAYS ON” lamp be lit and high tension applied to the X-ray tube. If the “X-RAYS ON” lamp fails the HT generator is switched off.

3.4 X-RAY SAFETY REQUIREMENTS FOR SPECTROMETRY EQUIPMENT

3.4.1 X-ray Safety Aspects/EquipmentThe following sections explain several X-ray safety requirements and their incorporation into the spectrometry equipment.

3.4.1.1 Safety Key Switch

All systems are equipped with a removable key (HT ON) on the control panel, because certain countries require this safety switch function. It helps the local radiation safety officer to control who uses the system. The safety key-switch key must be removed to prevent unauthorized use of the system. However, normal mains power remains available for other functions. NOTE: High voltages are present in the generator and on the high voltage cable.

The warnings given in the generator’s service manual and other applicable manuals must be followed carefully. Ensure that the high

WARNING IF THE EQUIPMENT IS LEFT UNATTENDED IN AN UNSAFE CONDITION; DISCONNECT IT FROM THE MAINS SUPPLY, LEAVE A WARNING NOTICE AND REMOVE THE SAFETY KEY.

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Chapter 3. X-ray Spectrometry Systems

voltage capacitors are fully discharged before servicing the high voltage circuits.

3.4.1.2 Warning Texts, Symbols, and Lamp

All over the world, local requirements are obliging manufacturers and users to fulfil certain requirements. It is not possible to cover all the details of these requirements, however, the vital ones are implemented in the equipment.

3.4.1.3 Double Independent Safety Loops

Double Independent Safety Loops are required by the German Rontgenverordnung classification Vollschutz. It is important to check these loops (vital for X-ray safety) regularly and adequately, and to document the results of the checks. The PANalytical safety approach is intended to cover the safety of the optical path using information from the pressure difference system. The information is transferred to both independent safety loops via a double design safety bellow switch. The advantage of this system is that it avoids having two switches per removable item (such as channels and filters) in the optical system.

3.4.1.4 Maintenance

Although the equipment is designed and tested to be safe, maintenance is of vital importance. Information about any customer level maintenance will be provided in the user documentation; any further maintenance must be performed by the authorized service engineer. Part of this maintenance procedure is testing the radiation level at the outside surface of the equipment. If activities must be performed inside the enclosure while the X-rays are switched on, it is very important to act according to an approved scheme of work as described in the applicable manual. Always check the radiation level inside before and after executing the service activities.

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Chapter 4

Semiconductor Analysis Systems


4.2 SEMICONDUCTOR SYSTEMS ....................................... 4 - 3


4.4 X-RAY SAFETY REQUIREMENTS FOR SEMICONDUCTOR EQUIPMENT .................................................................. 4 - 4

4.4.1 Emergency Stop................................................................................. 4 - 44.4.2 Safety Key Switch ............................................................................. 4 - 44.4.3 Warning Texts, Symbols, and Lamp ................................................. 4 - 54.4.4 Double Independent Safety Loops..................................................... 4 - 54.4.5 Maintenance....................................................................................... 4 - 5

4.5 LASER SAFETY.............................................................. 4 - 54.5.1 General Aspects ................................................................................. 4 - 54.5.2 Electrical Aspects .............................................................................. 4 - 8

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Chapter 4. Semiconductor Analysis Systems

4.1 PANALYTICAL EQUIPMENTSemiconductor systems use laser radiation and in some types, high intensity ionizing X-ray radiation. These systems are intrinsically safe when they are operated and maintained correctly, they incorporate several safety devices to prevent radiation escaping from the enclosure. Alignment, adjustments, repairs and replacement of X-ray tubes and/or laser sources must be performed by AUTHORIZED PERSONNEL, operating according to an approved scheme of work as given in the relevant manual. Always follow the procedures and instructions given in the User and Service Manuals! This will increase the safety of the operator and decrease the risk of injury. You must always strictly comply with all applicable local safety regulations. If you are unsure what they entail, request written instructions from your safety officer or local safety authorities.

4.2 SEMICONDUCTOR SYSTEMSIn addition to the basic IEC 1010 Regulations the Semiconductor Industry introduced special requirements. In order to fulfill these requirements, the applicable semiconductor regulations are specified and verified during the product release phase.

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4.3 GENERATION OF X-RAYSThe X-ray tube in a semiconductor system is powered by a high voltage power supply. The high voltage generator circuits automatically ensure that the high voltage and X-rays are immediately switched off if the equipment becomes unsafe. Double safety circuits are used in all PANalytical’s equipment in order to comply with the Vollschutz (intrinsic safety) regulations. These safety circuits are fail-safe and independent of each other. Only when the system senses that all conditions are safe will the “X-RAYS ON” lamp be lit and high tension applied to the X-ray tube. If the “X-RAYS ON” lamp fails the HT generator is switched off.

4.4 X-RAY SAFETY REQUIREMENTS FORSEMICONDUCTOR EQUIPMENT

The following sections explain several X-ray safety requirements and their incorporation into the semiconductor analysis equipment.

4.4.1 Emergency StopPressing this emergency stop button switches the equipment’s primary supply voltage off immediately in an emergency (unsafe) condition. Relevant details are provided in the equipment manuals.

4.4.2 Safety Key SwitchAll systems are equipped with a removable key (HT ON) on the control panel, because certain countries require this safety switch function. It helps the local radiation safety officer to control who uses the system. The safety key-switch key must be removed to prevent unauthorized use of the system. However, normal mains power remains available for other functions.

WARNING IF THE EQUIPMENT IS LEFT UNATTENDED IN AN UNSAFE CONDITION; DISCONNECT IT FROM THE MAINS SUPPLY, LEAVE A WARNING NOTICE AND REMOVE THE SAFETY KEY.

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NOTE: High voltages are present in the generator and on the high voltage cable. The warnings given in the generator’s service manual and other applicable manuals must be followed carefully. Ensure that the high voltage capacitors are fully discharged before servicing the high voltage circuits.

4.4.3 Warning Texts, Symbols, and LampAll over the world, local requirements are obliging manufacturers and users to fulfil certain requirements. It is not possible to cover all the details of these requirements; however, the vital ones are implemented in the equipment.

4.4.4 Double Independent Safety Loops Double Independent Safety Loops are required by the German Rontgenverordnung classification Vollschutz. It is important to check these loops (vital for X-ray safety) regularly and adequately, and to document the results of the checks. The PANalytical safety approach is intended to cover the safety of the optical path using information from the pressure difference system. The information is transferred to both independent safety loops via a double design safety bellow switch. The advantage of this system is that it avoids having two switches per removable item (such as channels and filters) in the optical system.

4.4.5 MaintenanceAlthough the equipment is designed and tested to be safe, maintenance is of vital importance. Information about any customer level maintenance will be provided in the user documentation; any further maintenance must be performed by the authorized service engineer. Part of this maintenance procedure is testing the radiation level at the outside surface of the equipment. If activities must be performed inside the enclosure while the X-rays are switched on, it is very important to act according to an approved scheme of work as described in the applicable manual. Always check the radiation level inside before and after executing the service activities.

4.5 LASER SAFETY

4.5.1 General AspectsLasers are high intensity light sources producing visible or invisible light at specific wavelengths. This concentrated energy in a narrow laser beam may cause damage

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to biological tissues, specially eyes. To use lasers safely, it is important to understand that a laser's required final product safety classification is determined by three elements: the laser's power (or energy), wavelength, and its housing. Laser power and wavelength are recorded in the product safety data sheets. Housing is an important factor; lasers used in, for instance, CD players to read signals use less power than lasers in CD writing products. So the internal laser and laser class is different. Although these differ, the final recorder product is safety class 1. Products using lasers must be marked. For instance: the outside layer of the product is marked as safety class 1. After removing cover plates, safety class 2 is shown inside the equipment. The laser body is marked class 3 (be aware that the laser must switch off immediately when protective shielding is removed from a laser class higher than 3A). Specific laser types used in the equipment are described in the relevant Service Manual. The international standard IEC825 “Safety of laser products” was used as a guide on which to base our safety precautions. Definition of laser classes and labelling:

1. Class 1: lasers and laser systems are not dangerous (intrinsically safe) even when used in most unfavorable circumstances. Under no circumstances can the eye be hit by laser radiation above the Maximum Allowed Exposure level.

2. Class 2: not completely safe. Visible laser sources 400 - 700 nm and an energy level below the level described in the paragraph following point 4 below. The natural eye reflex (<0.25 second) for visible light forms adequate prevention to unwanted exposure. In this situation,: “Do not stare into beam”, is printed on labels.

3. Class 3: visible and/or invisible lasers. Subdivided into:

3A Slightly higher power but larger beam size than class 2 visible light. Only causes damage as a result of staring into the beam or, in case of class 2, using optical means to increase the intensity.

3B Laser beams and reflecting beams could be dangerous. Diffused reflected beams in most cases does not cause a problem. Globally these lasers form the border-line between middle and high intensity lasers.

4. Class 4: High energy lasers. Direct beam and all kinds of reflected beams may cause eye damage. The beams may cause burning of the skin or start a fire.

The power levels which determine the laser class can be seen in the following example, which is for a current visible laser type He-Ne(632,8nm):

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Class 1 : P < 0,4 µW (P=laser power)Class 2 : P < 1 mW Class 3A : P < 5 mWClass 3B : P < 500 mWClass 4 : P > 500 mW

Personal injury and other hazards which can be inflicted by class 3B and 4 lasers are as follows:

Eye damage: retinal damage from light and IR-A (wavelength 400-1400 nm) intensity increases as result of focussing through the eye lens with a factor 105 and results in a 20 µm spot. (Be aware that wavelengths of 400 nm - 700 nm are visible). As a consequence of this phenomena, burning of the retina will take place on that spot. Outside this wavelength area the cornea eye lens, iris or water inside the eye will absorb energy resulting in damage at higher intensities.

Secondary effects (risks): a. Fire hazards in case of flammable materials, liquids, vapors.b. Unexpected reflections, rings, watches and so on. c. Maintenance: working with temporarily open systems. Preventive

measures must be organized by the qualified service engineer. d. Changing the adjustments of laser sources may cause an increase in the

risk factor (higher power, higher class). Never over-rule sealed pre-adjustments.

In some very special situations working under open laser beam conditions is unavoidable (shielding removed or safety precautions have been overruled). Generally this will mean increased risk and the applicable safety measures must be taken:

• Use signs to warn outsiders.

• Install barriers to keep unauthorized people at a safe distance.

• Reduce the range of the laser beam.

• Use the required safety tools as described in the Safety Manual.

• Never connect or disconnect any component or external equipment - such as Voltmeters - to or from the drive circuit while power is on.

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4.5.2 Electrical Aspects

4.5.2.1 Electro Static Discharge (ESD)

Take the following precautions when working near or with the Laser equipment:• Avoid touching glass surfaces

• Store laser diodes in static free containers

• Engineers must be earthed (grounded) according to approved standards in an ESD protected work place when handling and working with laser diodes

• All equipment, including power supplies, soldering irons, and so on, must be earthed (grounded) to a common stable earth

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Chapter 5

X-ray Diffraction Systems


5.2 DIFFRACTION SYSTEMS............................................... 5 - 3


5.5 X-RAY SAFETY REQUIREMENTS FOR DIFFRACTOMETRY EQUIPMENT .................................................................. 5 - 4

5.5.1 Safety Key Switch ............................................................................. 5 - 45.5.2 Warning Texts, Symbols, and Lamp ................................................. 5 - 55.5.3 Double Independent Safety Loops..................................................... 5 - 55.5.4 Maintenance....................................................................................... 5 - 5

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Chapter 5. X-ray Diffraction Systems

5.1 PANALYTICAL EQUIPMENTDiffraction systems produce high intensity ionizing X-rays. These systems are intrinsically safe when they are operated and maintained correctly, they incorp-orate several safety devices to prevent radiation escaping from the enclosure. Alignment, adjustments, repairs and replacement of X-ray tubes must be performed by AUTHORIZED PERSONNEL, operating according to an approved scheme of work as given in the relevant manual. Always follow the procedures and instructions given in the User and Service Manuals! This will increase the safety of the operator and decrease the risk of injury. You must always strictly comply with all applicable local safety regulations. If you are unsure what they entail, request written instructions from your safety officer or local safety authorities.

5.2 DIFFRACTION SYSTEMSDiffraction systems are fully enclosed in a shielding cabinet made of steel plates and lead glass doors. All configurations made by PANalytical have specified tube positions and these configurations have been released (approved) by the PTB. Windows in the front doors are made of lead glass. Be aware that a broken window means that the shielding is no longer intact and the system must be immediately switched off. The doors must not be opened while a measurement is being performed. If they are opened during a measurement the high voltage is immediately switched off and the shutter is closed. All doors are protected by double independent safety circuits. The X-ray tube is fully enclosed in a tube shield that provides the second level of shielding. Even if high voltage is applied to the X-ray tube, the enclosure doors can only be opened if all the shutters on this shield are closed.

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5.3 STAND-ALONE GENERATORThe PANalytical stand-alone generator and the tube tower that is included with it are built to an intrinsically safe standard. When they are used together with other products, the safety aspects must be locally covered.

5.4 GENERATION OF X-RAYSThe X-ray tube in a diffractometry system is powered by a high voltage power supply. The high voltage generator circuits automatically ensure that the high voltage and X-rays are immediately switched off if the equipment becomes unsafe. Double safety circuits are used in all PANalytical equipment in order to comply with the Vollschutz (intrinsic safety) regulations. These safety circuits are fail-safe and independent of each other. Only when the system senses that all conditions are safe will the “X-RAYS ON” lamp be lit and high tension applied to the X-ray tube. If the “X-RAYS ON” lamp fails the HT generator is switched off.

5.5 X-RAY SAFETY REQUIREMENTS FOR DIFFRACTOMETRY EQUIPMENT

The following sections explain several X-ray safety requirements and their incorporation into the diffractometry equipment.

5.5.1 Safety Key SwitchAll systems are equipped with a removable key (HT ON) on the control panel, because certain countries require this safety switch function. It helps the local radiation safety officer to control who uses the system. The safety key switch key must be removed to prevent unauthorized use of the system. However, normal mains power remains available for other functions.

WARNING IF THE EQUIPMENT IS LEFT UNATTENDED IN AN UNSAFE CONDITION DISCONNECT IT FROM THE MAINS SUPPLY. LEAVE A WARNING NOTICE AND REMOVE THE SAFETY KEY.

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Chapter 5. X-ray Diffraction Systems

NOTE: High voltages are present in the generator and on the high voltage cable. The warnings given in the generator’s service manual and other applicable manuals must be followed carefully. Ensure that the high voltage capacitors are fully discharged before servicing the high voltage circuits.

5.5.2 Warning Texts, Symbols, and LampAll over the world, local requirements are obliging manufacturers and users to fulfil certain requirements. It is not possible to cover all the details of these requirements; however, the vital ones are implemented in the equipment.

5.5.3 Double Independent Safety Loops Double Independent Safety Loops are required by the German Röntgenverordnung classification Vollschutz. It is important to check these loops (vital for X-ray safety) regularly and adequately, and to document the results of the checks. The PANalytical safety approach is intended to cover the safety by transferring the information to both independent safety loops. Radiation is protected first by placing the X-ray tube inside a tube tower, and then by enclosing the complete system inside a metal and lead glass enclosure.

5.5.4 Maintenance Although the equipment is designed and tested to be safe, maintenance is of vital importance. Information about any customer level maintenance will be provided in the user documentation; any further maintenance must be performed by the authorized service engineer. Part of this maintenance procedure is testing the radiation level at the outside surface of the equipment. If activities must be performed inside the enclosure while the X-rays are switched on, it is very important to act according to an approved scheme of work as described in the appropriate manual. Always check the radiation level inside before and after executing the service activities.

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Page 5 - 6

Appendix A

Definitions

A.1 INTRODUCTION............................................................A - 3

A.2 DEFINITIONS AND ABBREVIATIONS ...........................A - 3

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Page A - 2

Appendix A : Definitions

A.1 INTRODUCTIONCertain terms and abbreviations have been used throughout this manual, they are described in this chapter.

A.2 DEFINITIONS AND ABBREVIATIONSAuthorized Personnel Person who is trained, educated and authorized by

the PANalytical organization to execute service work to a specified level and product area.

CE Conformité Européenne. The CE mark shows that the product conforms to the applicable European Directive(s). Compliance with the applicable European Directives is stated In the Declaration of Conformity.

Declaration of Conformity Written declaration from PANalytical stating that the product/system as mentioned in the declaration, has been tested and released according to the product related regulations. (for example: IEC 1010). The product or system herewith fulfils with the requirements of the required European Directives (as showed by the CE mark).

Environmental aspect Specific environmental item related to the equipment

EFQM European Foundation of Quality ManagementEMO Emergency Off (button)Equipment In general we have used the word equipment to

describe a PANalytical product or system. ESD Electro Static DischargeInstallation category These levels are assigned to four different

installation categories (over voltage categories) in IEC1010. Our systems are all categorized level II, Local level, appliances.

PANalytical Service Engineer Person who is trained, educated and authorized by the PANalytical organization to execute service work to a specified level and product area.

PTB Physikalisch Technische Bundesanstalt. An independent test house (notified body) executing type tests at supply center locations. German

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government must be informed by these test reports and they issue a so-called “Zulassung” (permission number). This permission number is written into the Declaration of Conformity and can be seen on the instrument type plate. In most cases the classification of PANalytical equipment is “Vollschutz”

Qualified Service Engineer Person who is trained, educated and authorized by the PANalytical organization to execute service work to a specified level and product area.

Radiation level Dose rate in Sievert/hour. The dose rate of 1 Sievert/hour (Sv/h) is equal at the dose rate of 100 Röntgen/hour (R/h). In practice this will result in the following similarity: 1 micro Sievert/hour = 0,1 milli Röntgen/hour.

Röntgenverordnung German legislation to cover radiation safety, specially on equipment design, production control and documentation. Release tests are executed by the PTB (Physikalisch Technische Bundesanstalt).

Safety aspect Specific safety item related to the equipment. Safety class Classification of electrical equipment with regard

to protection against electric shock. These are described in detail in IEC1010.

System The PANalytical equipment combined with a computer and other products such as software to make a working analytical system.

Vollschutz Highest classification in radiation safety. This means for instance: Double independent safety loops will switch off X-ray generation in case of an incident or failure, in order to work safely all X-ray generating components are contained in a secure way with special screws inside the enclosure, shielding is designed and tested under worst case conditions.

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safety manual.pdf

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