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TRANSCRIPT
RF-SOI – A Secured Substrate Supply
Kerui Wang, Simgui Technology
September 27, 2017 - Shanghai
SOI In RF Supply Chain
Bulk Silicon SOI Device Application
2
RFSOI – Mainstream from 3G to LTE Advanced and
Beyond
SOI Substrate Value Proposition
Enhanced RF performance
Integration including switch, LNA,
PA, passive
Lowest cost vs. GaAs and MEMS
technologies
Available 200mm and 300mm
Source : Yole Development, 2017
2,014 M$
CAGR
12%
2016 2022
1,026 M$
3
So How To Satisfy the Increasing Demand ?
4
Simgui Entered Into RF-SOI Supply Chain
5
• Spec
• Performance
• Metrology
• Control
• Facilities
• Toolset
• Technology
• Process
Simgui Partnership with Soitec
Simgui and Soitec strategic partnership since 2014
Technology transfer of Smart-Cut from Soitec to Simgui
6
Simgui + Soitec – 200mm SOI Capacity
Total capacity Simgui + Soitec – 1 million of 200mm wafers/year by 2018
850K
100K
Soitec Simgui
200mm SOI Capacity in K wafers/year
Soitec Bernin, France
850 kw/y
Simgui Shanghai, China
100 kw/y 2017
150 kw/y 2018
7
Simgui Technology
- Company founded in 2001, specialized in SOI
manufacturing and in Epi
- 4 Technologies available for SOI development and
manufacturing: Simox, BESOI, Simbond and Smart-Cut
- Wafer sizes : 150mm & 200mm
- Top silicon thickness range: 100nm - 100µm
- Applications : digital, analog power, RF, photonics and
MEMS
8
Smart-Cut Technology
• Wafer Size
• 200mm
• Thickness Range
• Up to 1.5µm
• Applications
• Digital
• Analog Power
• RF
• Photonics
9
Simgui Achievements 2016-2017
• P1 in High Volume Mode
• P2 starts to ramp-up
• Customer qualifications ongoing on P2, P3 and P4
2016.06 2017.09
VDA
Certification
P1 1st Customer
Qualification
P2 1st Customer
Audit
2017.01
P1 2nd Customer
Audit P1 HVM
P2 Ramp-Up
10
Si Thickness Mean Si Thickness Range
RF-SOI Product – Thickness Performance
• Top Silicon Thickness
• Ellipsometer
• Stable thickness
performance
• Above Cpk target 1.33
• Continuous improvement
Si Thickness Cpk Trend
1.677 1.544
0
0.5
1
1.5
2
2.5
Jul Aug
Si Thickness Range Cpk Trend
polarizer analyzer
detectorlight source
iB
wafer
polarizer analyzer
detectorlight source
iB
wafer
11
Sum of Defect Area Count
RF-SOI Product – Surface Particle Performance
• Surface Particle
• Surfscan SP1
• Meet specification
• Acceptable capability
• Continuous improvement
SOD Cpk Trend AC Cpk Trend
12
Harmonic Quality Factor
RF-SOI Product – RF Performance
• RF performance
• SRP + CPW
• Harmonic Quality Factor meet LTE requirement
• Performance mainly determined by substrate which is aligned with Soitec
13
RF-SOI – RF Validation
• RF performance
• In-house SRP
measurement that
allows HQF validation
within 2 days
• Close partnership with
local institutes
• CPW pattern +
measurement within ~1
week
0 2 4 6 8 1012141618202224Resis
tivity(o
hm
-cm
)
Depth(um)
14
TrapRich SOI – Product Yield Achieved High Volume
Manufacturing Target
Jan Feb Mar Apr May Jun Jul Aug
TrapRich Yield Trend 2017
Yield Target Volume
15
RFSOI Product Roadmap
Product Application 2017.09 2018.06
RF-SOI T1 RF 0.18 Si Thickness Uniformity
+/- 12.5 nm
Si Thickness Uniformity
+/- 10nm
RF-SOI T2 RF 0.13 Si Thickness Uniformity
+/- 10 nm
Si Thickness Uniformity
+/- 8nm
RF-SOI H1 RF Si Thickness Uniformity
+/- 12.5 nm
Si Thickness Uniformity
+/- 10nm
16
8 10
15
20
30
0
5
10
15
20
25
30
35
2017.09 2018.01 2018.07 2018.12 2019.12
200mm Smart-Cut Capacity Roadmap (kw/month)
SOI Capacity Roadmap
(Project in preparation)
17
RF-SOI Players in China
Substrate
Provider Foundries Design Companies Phone Makers
18
Simgui Values for RFSOI
• Technology – Smart-Cut technology transferred from Soitec
• Maturity – Product performance equivalent to Soitec’s, product yield met
high volume manufacturing target
• Capacity – 15K/month by mid-2018, totally 1 Mw/year of 200mm together
with Soitec. 30K/month by 2019.
• 4 SOI technologies available to meet requirement of various applications
• Active SOI promoter in China, close partnership with most of the Chinese
foundries and design companies.
19
Thank you