recx thin film metrology. phi-scan -in plane orientation gixrd -enhance material probed -phase...
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![Page 1: RECX Thin film metrology. Phi-scan -In plane orientation GIXRD -Enhance material probed -Phase -Stress -Depth profiling HRXRD / RSM -Texture](https://reader037.vdocuments.site/reader037/viewer/2022110323/56649d885503460f94a6d358/html5/thumbnails/1.jpg)
RECX
Thin film metrology
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Phi-scan- In plane orientation
GIXRD- Enhance material probed- Phase- Stress- Depth profiling
HRXRD / RSM- Texture- Strain- Orientation
XRR- Film thickness- Roughness- Density
Rocking curve- Miscut- Orientation
Polar plot- Texture
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Phi-scan- In plane orientation
GIXRD- Enhance material probed- Phase- Stress- Depth profiling
HRXRD / RSM- Texture- Strain- Orientation
XRR- Film thickness- Roughness- Density
Rocking curve- Miscut- Orientation
Polar plot- Texture
![Page 11: RECX Thin film metrology. Phi-scan -In plane orientation GIXRD -Enhance material probed -Phase -Stress -Depth profiling HRXRD / RSM -Texture](https://reader037.vdocuments.site/reader037/viewer/2022110323/56649d885503460f94a6d358/html5/thumbnails/11.jpg)
Reflectivity as function of angle to obtain information on:- Film thickness- Surface roughness- Density
XRR (X-ray reflectometry)
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k’k
Q
Scattering from surfaces and interfaces at low angles, ~0-8o
Scattering occurs from variations in electron density
24
|)exp()(
|1
)( dzziqdz
zd
qqI z
zz
Electron density Fouriertransform
Variations in electron density arise from film thickness, roughness and density which can be determined for each layer
~50nm LaNiO3
on SrTiO3
~50nm LaNiO3
on SrTiO3
Density
Thickness
Roughness
XRR (X-ray reflectometry)
Refined parameters:LaNiO3 Thickness 48.98nm “ Roughness 0.30 nm “ Density 7.05 g/cm3
A surface layer of 1.4nm is also required to fully explain the results
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Layered thin films of Eu2O3 and TiO2 grown by ALD as conversion material with the aim of controlling the Eu-Eu distance.
XRR (X-ray reflectometry)
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Layered thin films of Eu2O3 and TiO2 grown by ALD as conversion material with the aim of controlling the Eu-Eu distance.
The double layer thicknesses: 10N = 7.5 Å20N = 15.9 Å50N = 29.1 Å
Half the double layer thickness of the 10N sample, 3.8 Å, is approx the same as the shortest Eu – Eu distance in cubic Eu2O3, 3.6 Å
XRR (X-ray reflectometry)
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XRR (X-ray reflectometry)
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Phi-scan- In plane orientation
GIXRD- Enhance material probed- Phase- Stress- Depth profiling
HRXRD / RSM- Texture- Strain- Orientation
XRR- Film thickness- Roughness- Density
Rocking curve- Miscut- Orientation
Polar plot- Texture
![Page 17: RECX Thin film metrology. Phi-scan -In plane orientation GIXRD -Enhance material probed -Phase -Stress -Depth profiling HRXRD / RSM -Texture](https://reader037.vdocuments.site/reader037/viewer/2022110323/56649d885503460f94a6d358/html5/thumbnails/17.jpg)
GIXRD (Grazing incident x-ray diffraction)
Increase the pathway through the sample
Conventional q-2q
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GIXRD (Grazing incident x-ray diffraction)
Increase the pathway through the sample
GIXRD
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GIXRD (Grazing incident x-ray diffraction)
A ZnO film of 200 nm deposited by ALD
GIXRD
Conventional q-2q
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GIXRD (Grazing incident x-ray diffraction)
Depth profile analysis
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Phi-scan- In plane orientation
GIXRD- Enhance material probed- Phase- Stress- Depth profiling
HRXRD / RSM- Texture- Strain- Orientation
XRR- Film thickness- Roughness- Density
Rocking curve- Miscut- Orientation
Polar plot- Texture
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Increase the pathway through the sample
HRXRD (High-resolution x-ray diffraction)
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HRXRD (High-resolution x-ray diffraction)Map the reciprocal space to obtain information on:- Orientation- Strain- Texture … and a lot more…
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HRXRD (High-resolution x-ray diffraction)
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HRXRD (High-resolution x-ray diffraction)
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HRXRD (High-resolution x-ray diffraction)
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HRXRD (High-resolution x-ray diffraction)
Film of NaNbO3 on LaAlO3
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Phi-scan- In plane orientation
GIXRD- Enhance material probed- Phase- Stress- Depth profiling
HRXRD / RSM- Texture- Strain- Orientation
XRR- Film thickness- Roughness- Density
Rocking curve- Miscut- Orientation
Polar plot- Texture
![Page 29: RECX Thin film metrology. Phi-scan -In plane orientation GIXRD -Enhance material probed -Phase -Stress -Depth profiling HRXRD / RSM -Texture](https://reader037.vdocuments.site/reader037/viewer/2022110323/56649d885503460f94a6d358/html5/thumbnails/29.jpg)