ralph w. bernstein sintef ict microsystems and nanotechnology · biomedical sensor technology:...
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1ICT
Biomedical sensor technology: state - of the art and future roadmap
Ralph W. BernsteinSINTEF ICT
Microsystems and nanotechnology
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2ICT
MiNaLabClean room area:SINTEF: 800 m2
University of Oslo: 600 m2
Micro environments, class 10A full silicon processing line for MEMS and radiation detectorsCapacity of 10.000 6”wafers/year Located at the campus of University of Oslo240 MNOK invested in scientific equipment and laboratory infrastructure Funded by Norwegian Research Council and SINTEF
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3ICT
Moores law
Gordon Mooresobservation from 1965: The number of transistors per square inch on an IC doubles every year.In subsequent years, the pace has slowed down a bit, but data density has doubled every 18 months.
Gordon Moore, Electronics, Volume 38, Number 8, April 19, 1965
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4ICT
Key technologies
UV-Light
Mask
Pattern transferred to wafer
Lence
Silicon wafer
Micro processor
Photo lithographyBatch production
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5ICT
Driving forcesCheaper
Cost per function decreases 25% / year
SmallerMoore's law: bits/chip grow by factor of 4 times every 3 years
Faster5 times growth every 10 years
Even more important: FUNCTIONALITY !
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6ICT
From the information society towards the instrumentation society
Microelectronics is the first industrial wave based on microtechnology. The next one, microsystems, will have great impact the next 5-10 years.
Microsystems perform measurements, signal conditioning and actuation
I the future the electronics will be connected direct to the environment via sensors => Ambient intelligence
The keys to this development:Low cost computer powerWireless communicationModern sensorsDistributed power generation
Same challenges for the biomedical area !!
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7ICT
Microsystem technology
Utilizes the production technology developed for microelectronics to make sensors (MEMS)
MiniaturizationHigh volume, low cost productionIntegration with electronics
Special processesMicromachining Functional thin filmsWafer stacking
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8ICT
Why silicon technology
Batch processing => low cost, high volumeWell established production technologyAdvanced infrastructure, materials and design tools available Wide range of sensor principles availableSilicon has attractive mechanical propertiesIntegration with electronics possible
Polymers are also important
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9ICT
A sensor converts stimuli to electricity
Optical sensor- +
Pressure sensor
Chemical sensor (ISFET)
Piezo resistors
p-n junction
Membrane
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10ICT
Pressure sensorsMeasure pressure gradients across heart valves accurately to help assess valve disease
Diagnose and monitor congestive heart failure Measure cardiac output and compliance
Monitor intracranial pressures in hydrocephalus patients
Understand glaucoma disease progression and improve patient care
Improve gastrointestinal tract diagnostic capabilities to help treat gastro esophageal reflux disease (GERD)
Assist in diagnosis of urological disorders
Measure drug delivery rate for infusion systems
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11ICT
Micromaching of 3D mechanical structuresfor mechanical sensors
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12ICT
Micro tools
TORSIONALHINGES
100 µm
MEMS PI
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13ICT
Micro and nano cantilever sensors
A. Tixier-Mitaa, Y. Mitab and Hiroyuki Fujitaa The University of Tokyo,
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14ICT
Market surveys and roadmapsNEXUS
20002005
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15ICT
Open consultation on the European Strategy for nanotechnology(December 2004)
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16ICT
Large R&D focus at implanted sensors
Reduce Surgical TraumaShorten Patient Recovery TimesEnhance Patient Quality of Life Increase Life ExpectancyReduce Healthcare & Social Care Costs
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17ICT
Therapeutic MEMS examples
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18ICT
Current commercial and research status
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19ICT
Commercial statusMost mature MEMS areas
Cardiovascularwhere pacemakers are gradually being supplemented by other devices such as defibrillators, and ventricular assist devices.
Neurologywhere neurostimulators are used to treat a wide range of neurological conditions.
Otologybased primarily on cochlear implants for sensorineural deafness.
Oncologyprimarily through the use of programmable drug infusion devices.
Diabetes (endocrinology)Insulin pumps, mainly
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20ICT
Highest research activity expected: 8 areas
CardiovascularDrug deliveryEndocrinologyGastroenterologyNeurologyOtologyRehabilitative medicineSurgery
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21ICT
Research challenges
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22ICT
Cardiovascular
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23ICT
Drug delivery
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24ICT
Endocrinology
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25ICT
Gastroenterology
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26ICT
Neurology
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27ICT
Otology
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28ICT
Rehabilitative medicine
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29ICT
Surgery
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30ICT
Activities at SINTEF ICT.
Measurement of inter cranial-pressure
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31ICT
Solid state silicon radiation detectorsfor medical imaging.Micro strip detectors for mammographyPixel detectors for dental x-rayPixel detectors for CT scanning.Micro strip detectors for screening of isotope labeled nucleotides
Mamea Imaging AB
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32ICT
Stent graft sensingAAA: Abdominal Aortic AneurismMission - improving the long term reliability of AAA stent graftsThe Product - introducing an add-on to the AAA stent grafts to enable a real time monitoring device to alert for possible sudden rupture and endo-leaks.
Orhere
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33ICT
Lab-on-a-chip for diagnostics based on mRNA anaylsis
Microfluidic handlingReal-time RNA amplification Fluorescent read-out.
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34ICT
Flow sensorApplication: Reagents flow measurements, dosing of drugsFluid flow through chipDifferential pressure sensorProtected conductors/resistors
Typical flow rate 5 µl/minLaminar flow, low Re numbersNarrow channel, Pouseille flow
Channel: 800x1500x10 µmPressure drop ~ 100 -200 Pa
Integrated temperature sensor3
12hw
Qlp⋅
⋅⋅⋅=∆
η
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35ICT
ConclusionMedical sensors and BioMEMS is a rapidly growing field.Many novel sensors products are under development or already on the marketFuture medical sensors will require
Small low cost, low power sensorsRemote power generationWireless communicationNanotechnology and advanced functional and bio compatibelmaterials
The field is highly inter disiplinaryRequires arenas and projects http://biox.stanford.edu/Education
The MiNaLab facility at SINTEF enables Norwegian industry and scientists to utilize new technology for new products and reserach tools.