RF Discharge RF Discharge

Kingdom Of Saudi ArabiaImam Mohammed Bin SaudIslamic UniversityFaculty of SciencesDepartment of Physics

�م �حمي حر �نا ال نمحنم حر �هللاا ال �ما نمس �ب

المملكة العربية السعوديةجايمعة اليمام يمحمد بن لسعود اللسليمية

كلية العلومقسم الفيزياء

PHYS 471Dr.Nazir Mustapha

BY Students:

AHMED MUTLAQ ST ID#:429002715 MOHAMMED ASMRI ST ID#:429002676

Contnts:

Introduction radio frequency(RF), discharges. RF discharges in history . RF discharges types. application of RF discharges. RF discharges important. RF Discharge example Summery/ Conclusion Refrence

IntroductionIntroduction::

Interest in the study of processes occurring in radio frequency, or RF, discharges has increased significantly in the last decade.

this interest has been prompted by the broad.

Radio frequency power is the most common alternating current (AC) discharge used in plasma technology. RF discharges embody many of the same qualitative features of the DC glow discharge, including sheath formation, which creates a strong electric field resulting in the acceleration of ions and electrons. At low frequencies both DC andRF discharges behave similarly, but as frequency is increased, they substantially differ from each other and a new phenomenon is observed.Radio-frequency discharges are of both practical and scientific interest.

radio frequency(RF), dischargesradio frequency(RF), discharges

Methods of obtaining plasmas with specific desirable properties, from the viewpoint of plasmas physics they are one from of the nonlinear interaction of an electromagnetic field and abounded plasma.

RF RF dischargesdischarges in history in history

RF discharges attracted the attention of physicists long before any of their practical applications in technology were discovered. Thomson, of london's imperial collage , is said to

Have first observed RF discharges at the turn of the century lare 1920s, the first studied on RF discharges appeared , including those of R.W.Wood since then ,their unusual properties,as well as their

extraordinary colors and forms ,have been A constant fascination to researchers the world over.

RF discharges typesRF discharges types

RF discharges may be divided into three types on three basis of excitation method or, more precisely the form of electromagnetic field/plasma interaction .

1. H-type RF discharges ,corresponds to the inductive RF.

2. E-type RF discharges ,which corresponds to the capactiative discharges between RF electrodes.

3. Wave –type RF discharges ,which occurs the opposite case.

application of RF dischargesapplication of RF discharges

science and technology. Plasma chemistry. laser engineering . microelectronic technology . modern technology .

made a significant contribution and promises to guarantee further technological progress.

RF discharges importantRF discharges important

RF discharges are particularly

important in : ion generators for industrial accelerators

used in microelectronics . research accelerators used in

experimental nuclear physics.

RF Discharge ExampleRF Discharge Example

The Experiment from Stanford Plasma Physics Laboratory for Simple RF Discharge

(Helicon Setup).

Simple RF Discharge

Running in Helicon Mode

Conclusion:Conclusion:

We have examined RF discharges an know some information that We can Benefit From it in Field of study, learning and scientific progress.in this research talk about Rf discharges In general and The history of RF Discharges, Types, application and we learn how is RF Discharges is important in microelectronics. and we took very good example Of some pictures in Laboratory

Refrence:Refrence:

Radio Frequency Discharge - Valery Godyak Book

PLASMA AIDED FINISHING OF TEXTILE MATERIALS By SUZANNE RODDEN MATTHEWS

Stanford Plasma Physics Laboratory

Thank YouThank You

Questions WelcomedQuestions Welcomed......