qual1 aom 1xn switch 2013-07-01

Reliability and Qualification Report P/N 621-1002/1008

A-One MEMS Inc. Proprietary Information of 24

A-One MEMS, Inc.

Reliability & Qualification Report MEMS Based Optical Switch

(1x2, 1x3, 1x4, 1x5, 1x8 Ports) Part No.: 621-1002/1008

Raw Switch

Author: Process Owner Project Manager: B. Sastri B. Sastri Sohail Umar

Revision History

Rev Approval Date ECM/ECR Description of Change

00 06/30/2013 Initial release

A-One MEMS Confidential This document contains confidential & proprietary information that is the property of A-One MEMS Inc. and must be treated as CONFIDENTIAL.

Printed copies are uncontrolled and must be verified against the controlled version.

A-One MEMS, INC. 4051 Clipper Ct.

Fremont, CA 94538, USA



Table of Contents 1. PURPOSE ............................................................................................................................ 3 2. REFERENCE ....................................................................................................................... 3 3. PRODUCT DESCRIPTION .................................................................................................. 3 4. QUALIFICATION TEST DESCRIPTION .............................................................................. 5

4.1. TEST PROCEDURE ............................................................................................... 5 4.2. PASS/FAIL CRITERIA ............................................................................................ 5

5. TEST DEFINITIONS ............................................................................................................ 7 6. TEST RESULTS .................................................................................................................. 9 7. TEST DATA ....................................................................................................................... 10

7.1. HIGH TEMPERATURE STORAGE TEST DATA.......................................................... 10 7.1.1. Test Conditions ..........................................................................10 7.1.2. Test Results ...............................................................................10

7.2. LOW TEMPERATURE STORAGE TEST DATA .......................................................... 13 7.2.1. Test Conditions ..........................................................................13 7.2.2. Test results .................................................................................13

7.3. DAMP HEAT TEST DATA ..................................................................................... 16 7.3.1. Test Conditions ..........................................................................16 7.3.2. Test Results ...............................................................................16

7.4. TEMPERATURE CYCLING TEST DATA ................................................................... 19 7.4.1. Test Conditions ..........................................................................19 7.4.2. Test results .................................................................................19

7.5. MECHANICAL SHOCK IL TEST DATA ..................................................................... 22 7.5.1. Test Conditions ..........................................................................22 7.5.2. Test Results ...............................................................................22

7.6. MECHANICAL VIBRATION IL TEST DATA ................................................................ 23 7.6.1. Test Conditions ..........................................................................23 7.6.2. Test Results ...............................................................................23

8. MEMS RELIABILITY VERIFICATION ................................................................................ 24 8.1. LONG TERM MEMS RELIABILITY ......................................................................... 24

8.1.1. Hinge tests performed: .............................................................24 8.1.2. Hinge test Results .....................................................................24



1. PURPOSE

This document presents the qualification test data for the raw MEMS 1x4 Optical Switch made by A-One MEMS Inc. The MEMS based Optical Switch products are used to route the optical signal from the input fiber to the selected output fiber transmitted optical path. This operation is controlled by the applied DC voltage over the device electrodes. The MEMS devices, packaging, optical & electrical components, and assembly processes are identical for 1x2, 1x3, 1x4, 1x5, and 1x8 Optical Switches made by A-One MEMS Inc. The Company is therefore claiming Telcordia Qualification of 1x2, 1x3, 1x5, and 1x8 MEMS Switch products by similarity with the 1x4 MEMS Switch that was tested for this report.

2. REFERENCE

Telcordia GR-1221-CORE “Generic Reliability Assurance for Fiber Optic Components” 3. PRODUCT DESCRIPTION

The MEMS device is packaged in a hermetically sealed standard TO39 can. A multi-fiber pigtail is aligned with the MEMS through lens mounted in the TO39 Cap and laser-welded to the package. The MEMS is hermetically sealed in the TO39 package. The sealed packages are 100% tested for hermeticity and the passed ones have less than 1 x 10-8 std cc/sec leak rates. Figure 3 shows the Optical Switch mechanical drawing.



Figure 3: SWITCH Mechanical Specification Drawing



4. QUALIFICATION TEST DESCRIPTION 4.1. TEST PROCEDURE Table 4.1 shows the sample size and test sequence the switch devices per Telcordia GR-1221-CORE requirements. Four groups of 11 units each were used so that 4 of the 6 tests could progress in parallel. Group 2 units were first used for Low Temperature Storage, and subsequently for Mechanical Vibration test. Group 4 units were first used for Temperature Cycling, and subsequently for Mechanical Shock.

Table 4.1: SWITCH Testing Group List Test No. Sample Size TEST GROUP

1 11 High Temperature Storage Group 1 2 11 Low Temperature Storage Group 2 3 11 Damp Heat Group 3 4 11 Temperature Cycling Group 4 5 11 Mechanical Shock Group 4 6 11 Mechanical Vibration Group 2

4.2. PASS/FAIL CRITERIA The following Table 4.2 shows the general pass/fail criteria for qualification.

Table 4.2: General Qualification Pass/Fail Criteria for Switch 1550 nm Initial Post Test IL per Port < 1 dB < 1.2 dB RL per Port > 50 dB > 50 dB

Parameter Definitions: Before the stress test, the voltage required to switch the input to any output port with minimum insertion loss at 1550 nm should be recorded. After the stress test, the same voltage should be applied to the device.

1) The minimum IL is measured at 1550 nm for all output ports at room temperature only. 2) The RL is measured with no voltage applied.



3) Test Set-up for Optical Measurements

Fig A. Measurement of IL, PDL, WDL Set-up

Fig B. Measurement of RL Set-up

Agilent Tunable Laser Source 8164A/81642

Agilent Polarization

Controller 8169A

Agilent Detector Array 8169A/81635A(x2)/81533A

1x4 Switch

DUT

DUT

1x4 Switch

JDSU PS3 Multimeter



5. TEST DEFINITIONS The following is the description of the individual qualification item.

4)

High Temperature storage (Dry Heat)

The high temperature storage (Dry Heat) test is based on the procedures stated in EIA/TIA - 455-4A. Switch test samples are subjected to a temperature resistance test at a modified test temperature of +85°C with a relative humidity less than 40%, and a test duration of 2000 hrs for qualification and 5000 for information. Optical parameters, IL and RL are measured before and after the test.

5)

Low Temperature storage

The low temperature storage test is based on the procedures stated in EIA/TIA-455-4A. Switch test samples are subjected to a temperature resistance test at a modified test temperature of -40°C, and test length duration of 2000 hrs for qualification and 5000 for information. Optical parameters IL and RL are measured before and after the test.

6)

Damp Heat

Switch test samples are subjected to a temperature test at a test temperature of +85C with a Relative Humidity of 85% and test duration of 100 hrs and 500 hrs. The test is in compliance with GR-468-CORE. Optical parameters IL, RL and PDL measurements are made at the before and after the test.

7)

Temperature Cycling

Switch test samples are subjected to a temperature cycle between +85°C and –40°C for 500 cycles. Temperature rises from –40oC to +85o C within 25min. The temperature falls from +85o C to - 40oC in 25 min. The dwell time at specified temperature is 20min. The operating humidity condition is uncontrolled. The Optical parameters IL and RL are measured before and after the test.

8)

Mechanical shock (Impact test)

The above test method described in GR-1221-CORE is based on MIL-STD-883, Method 2002, with the following conditions:

a. Number of Shocks: 5 times per direction for 6 directions (on 3 axes) b. Shock Level: 500G c. Duration: 1 ms

The Switch must not incur physical damage according to GR-1209-CORE § 5.1.8 recommendations. Optical parameters IL and RL are measured before and after the test.



9)

Mechanical Vibration Test

The variable frequency vibration test is performed to evaluate the mechanical integrity of the Switch. Test samples are subjected to a sinusoidal vibration with amplitude of 1.52 mm maximum total excursion (20G at 55 Hz). Test samples are to withstand vibrations from 20Hz to 2000Hz. Each cycle has 4 min duration. This test is performed with 4 cycles per axis, total three perpendicular axes. The vibration test is to be performed according to EIA/TIA-455-11A, test condition IV. Optical parameters IL and RL are measured before and after the test.

10)

Fiber Side pull

Our pigtail supplier performs this test.

11)

Fiber and Cable retention

Our pigtail supplier performs this test.



6. TEST RESULTS

The following qualification items are tested and passed the required criteria. The results are summarized as below in Table 5. Detailed data provided in Section 6.

Table 6.1: SUMMARY OF QUALIFICATION TEST RESULTS

Test and conditions SS Sample Group

Test Pass/Fail Criteria

Test results Section

Environmental Tests

High temperature storage: 85 °C 2000 hrs

11 1

Δ IL < ± 0.5 dB and

IL ≤ 1.0 dB

PASS 7.1

Low temperature storage: -40 °C 2000 hrs

11 2 PASS 7.2

Damp heat: 85 °C / 85% RH 500 hrs

11 3 PASS 7.3

Temperature cycling: -40 °C to 85 °C, 100 cycles

11 4 PASS 7.4

Mechanical Tests

Mechanical shock: 5 times/direction 6 directions 500 G acceleration 1ms duration

11 4


IL ≤ 1.0 dB

PASS 7.5

Mechanical vibration: 20 G, 20 – 2000 Hz 4 min/cycle 4 cycles/axis

11 2 PASS 7.6

Fiber Integrity Tests

Side pull: 0.23 kgmf load, 90° 5 sec, 2 directions

11 NA


IL ≤ 1.0 dB

PASS Qualified by pigtail supplier

Cable retention: 0.45 kgmf load 5 sec, 3 times

11 NA PASS Qualified by pigtail supplier



7. TEST DATA 7.1. HIGH TEMPERATURE STORAGE TEST DATA

7.1.1. Test Conditions Storage Temperature: 85 °C. Humidity: uncontrolled. Duration: 2000 hours. Sample Size: 11 (Group 1) Testing Temperature: Room Temperature Tested Parameter for Pass/Fail: Minimum IL, RL, PDL, WDL Test Result: Pass 7.1.2. Test Results

Table 7.1.1: Minimum Insertion Loss Measurement (in dB) Group 1 IL Initial IL Post Test Change in IL IL < 1 dB Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0020 0.81 0.80 0.79 0.81 0.89 0.86 0.82 0.86 0.08 0.06 0.03 0.05 PASS A0021 0.80 0.81 0.81 0.80 0.85 0.84 0.79 0.82 0.05 0.03 -0.02 0.02 PASS A0022 0.78 0.80 0.79 0.78 0.80 0.85 0.82 0.81 0.02 0.05 0.03 0.03 PASS A0023 0.82 0.76 0.81 0.79 0.79 0.81 0.83 0.82 -0.03 0.05 0.02 0.03 PASS A0024 0.84 0.81 0.80 0.82 0.79 0.78 0.78 0.80 -0.05 -0.03 -0.02 -0.02 PASS A0025 0.78 0.83 0.81 0.81 0.81 0.80 0.82 0.83 0.03 -0.03 0.01 0.02 PASS A0026 0.80 0.77 0.78 0.80 0.87 0.81 0.84 0.83 0.07 0.04 0.06 0.03 PASS A0027 0.79 0.81 0.81 0.82 0.83 0.79 0.79 0.79 0.04 -0.02 -0.02 -0.03 PASS A0028 0.82 0.80 0.81 0.80 0.84 0.79 0.79 0.78 0.02 -0.01 -0.02 -0.02 PASS A0029 0.82 0.79 0.80 0.81 0.85 0.84 0.85 0.85 0.03 0.05 0.05 0.04 PASS A0030 0.81 0.80 0.83 0.80 0.78 0.78 0.80 0.77 -0.03 -0.02 -0.03 -0.03 PASS



Table 7.1.2: Return Loss Measurement (in dB) Group 1 RL Initial RL Post Test Change in RL RL > 50 dB Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0020 57.00 58.00 58.00 59.00 58.00 59.00 59.00 60.00 1 1 1 1 PASS A0021 57.00 57.00 59.00 57.00 57.00 57.00 58.00 57.00 0 0 -1 0 PASS A0022 58.00 58.00 59.00 58.00 59.00 59.00 60.00 59.00 1 1 1 1 PASS A0023 58.00 58.00 58.00 59.00 57.00 57.00 58.00 58.00 -1 -1 0 -1 PASS A0024 58.00 59.00 58.00 58.00 59.00 60.00 58.00 58.00 1 1 0 0 PASS A0025 61.00 59.00 58.00 59.00 59.00 58.00 57.00 58.00 -2 -1 -1 -1 PASS A0026 58.00 59.00 57.00 58.00 58.00 58.00 57.00 58.00 0 -1 0 0 PASS A0027 59.00 57.00 58.00 58.00 58.00 57.00 58.00 59.00 -1 0 0 1 PASS A0028 59.00 58.00 58.00 58.00 60.00 59.00 58.00 57.00 1 1 0 -1 PASS A0029 57.00 60.00 58.00 59.00 57.00 59.00 58.00 58.00 0 -1 0 -1 PASS A0030 60.00 60.00 59.00 60.00 59.00 59.00 59.00 60.00 -1 -1 0 0 PASS

Table 7.1.3: Polarization Dependent Loss Measurement (in dB)

Group 1 PDL Initial PDL Post Test Change in PDL Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0020 0.03 0.04 0.03 0.05 0.08 0.09 0.03 0.06 0.05 0.05 0.00 0.01 PASS A0021 0.04 0.03 0.03 0.05 0.04 0.07 0.09 0.04 0.00 0.04 0.06 -0.01 PASS A0022 0.07 0.07 0.06 0.06 0.03 0.06 0.07 0.08 -0.04 -0.01 0.01 0.02 PASS A0023 0.07 0.05 0.04 0.07 0.04 0.05 0.07 0.08 -0.03 0.00 0.03 0.01 PASS A0024 0.06 0.06 0.03 0.04 0.03 0.06 0.03 0.08 -0.03 0.00 0.00 0.04 PASS A0025 0.05 0.03 0.07 0.06 0.06 0.09 0.06 0.08 0.01 0.06 -0.01 0.02 PASS A0026 0.05 0.06 0.05 0.06 0.04 0.08 0.08 0.07 -0.01 0.02 0.03 0.01 PASS A0027 0.03 0.06 0.05 0.04 0.03 0.03 0.09 0.06 0.00 -0.03 0.04 0.02 PASS A0028 0.05 0.07 0.07 0.05 0.07 0.05 0.04 0.06 0.02 -0.02 -0.03 0.01 PASS A0029 0.03 0.07 0.03 0.04 0.08 0.03 0.05 0.08 0.05 -0.04 0.02 0.04 PASS A0030 0.04 0.05 0.07 0.05 0.08 0.05 0.05 0.07 0.04 0.00 -0.02 0.02 PASS



Table 7.1.4: Wavelength Dependent Loss Measurement (in dB)

Group 1 WDL Initial WDL Post Test Change in WDL Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0020 0.11 0.10 0.06 0.08 0.16 0.13 0.07 0.11 0.05 0.03 0.01 0.03 PASS A0021 0.14 0.06 0.07 0.07 0.18 0.11 0.06 0.13 0.04 0.05 -0.01 0.06 PASS A0022 0.12 0.11 0.14 0.12 0.16 0.16 0.18 0.16 0.04 0.05 0.04 0.04 PASS A0023 0.10 0.14 0.13 0.12 0.17 0.14 0.10 0.12 0.07 0.00 -0.03 0.00 PASS A0024 0.13 0.09 0.09 0.11 0.12 0.15 0.15 0.14 -0.01 0.06 0.06 0.03 PASS A0025 0.14 0.10 0.07 0.07 0.13 0.15 0.17 0.19 -0.01 0.05 0.10 0.12 PASS A0026 0.16 0.07 0.06 0.09 0.16 0.10 0.08 0.12 0.00 0.03 0.02 0.03 PASS A0027 0.12 0.09 0.12 0.06 0.13 0.11 0.09 0.07 0.01 0.02 -0.03 0.01 PASS A0028 0.16 0.12 0.09 0.07 0.13 0.16 0.08 0.14 -0.03 0.04 -0.01 0.07 PASS A0029 0.08 0.05 0.06 0.06 0.15 0.13 0.11 0.09 0.07 0.08 0.05 0.03 PASS A0030 0.11 0.10 0.12 0.13 0.12 0.09 0.07 0.12 0.01 -0.01 -0.05 -0.01 PASS



7.2. LOW TEMPERATURE STORAGE TEST DATA

7.2.1. Test Conditions Storage Temperature: -40 °C. Humidity: uncontrolled. Duration: 2000 hours. Sample Size: 11 (Group 2) Testing Temperature: Room Temperature Tested Parameter for Pass/Fail: Minimum IL, RL, PDL, WDL Test Result: Pass 7.2.2. Test results

Table 7.2.1: Minimum Insertion Loss Measurement (in dB) Group 2 IL Initial IL Post Test Change in IL IL < 1 dB Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0007 0.79 0.81 0.81 0.78 0.80 0.84 0.79 0.80 0.01 0.03 -0.02 0.02 PASS A0008 0.82 0.81 0.80 0.82 0.85 0.83 0.79 0.84 0.03 0.02 -0.01 0.02 PASS A0009 0.81 0.78 0.83 0.79 0.82 0.81 0.85 0.81 0.01 0.03 0.02 0.02 PASS A0010 0.82 0.76 0.81 0.79 0.79 0.79 0.84 0.82 -0.03 0.03 0.03 0.03 PASS A0011 0.81 0.83 0.80 0.81 0.85 0.85 0.82 0.82 0.04 0.02 0.02 0.01 PASS A0012 0.83 0.82 0.82 0.80 0.86 0.79 0.83 0.82 0.03 -0.03 0.01 0.02 PASS A0013 0.78 0.77 0.78 0.81 0.81 0.82 0.83 0.83 0.03 0.05 0.05 0.02 PASS A0014 0.79 0.81 0.80 0.82 0.84 0.83 0.78 0.81 0.05 0.02 -0.02 -0.01 PASS A0015 0.80 0.82 0.81 0.80 0.81 0.84 0.79 0.79 0.01 0.02 -0.02 -0.01 PASS A0016 0.79 0.81 0.81 0.80 0.82 0.83 0.84 0.83 0.03 0.02 0.03 0.03 PASS A0017 0.82 0.80 0.82 0.81 0.81 0.79 0.79 0.83 -0.01 -0.01 -0.03 0.02 PASS



Table 7.2.2: Return Loss Measurement (in dB) Group 2 RL Initial RL Post Test Change in IL RL>50dB Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0007 57.00 58.00 58.00 59.00 57.00 57.00 58.00 59.00 0 -1 0 0 PASS A0008 57.00 57.00 59.00 57.00 58.00 58.00 59.00 57.00 1 1 0 0 PASS A0009 58.00 58.00 59.00 58.00 57.00 59.00 59.00 59.00 -1 1 0 1 PASS A0010 58.00 58.00 58.00 59.00 59.00 57.00 58.00 58.00 1 -1 0 -1 PASS A0011 58.00 59.00 58.00 58.00 59.00 60.00 58.00 57.00 1 1 0 -1 PASS A0012 61.00 59.00 58.00 59.00 60.00 58.00 57.00 58.00 -1 -1 -1 -1 PASS A0013 58.00 59.00 57.00 58.00 59.00 58.00 57.00 58.00 1 -1 0 0 PASS A0014 59.00 57.00 58.00 58.00 59.00 57.00 58.00 59.00 0 0 0 1 PASS A0015 59.00 58.00 58.00 58.00 60.00 58.00 58.00 57.00 1 0 0 -1 PASS A0016 57.00 60.00 58.00 59.00 57.00 61.00 58.00 60.00 0 1 0 1 PASS A0017 60.00 60.00 59.00 60.00 61.00 61.00 60.00 60.00 1 1 1 0 PASS


Group 2 PDL Initial PDL Post Test Change in PDL Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0007 0.05 0.06 0.04 0.05 0.08 0.09 0.07 0.08 0.03 0.03 0.03 0.03 PASS A0008 0.05 0.07 0.06 0.03 0.05 0.08 0.03 0.07 0.00 0.01 -0.03 0.04 PASS A0009 0.06 0.06 0.05 0.06 0.07 0.06 0.03 0.09 0.01 0.00 -0.02 0.03 PASS A0010 0.06 0.05 0.04 0.05 0.03 0.08 0.07 0.04 -0.03 0.03 0.03 -0.01 PASS A0011 0.03 0.06 0.07 0.06 0.09 0.03 0.09 0.04 0.06 -0.03 0.02 -0.02 PASS A0012 0.04 0.07 0.06 0.04 0.06 0.08 0.07 0.03 0.02 0.01 0.01 -0.01 PASS A0013 0.05 0.05 0.06 0.06 0.05 0.09 0.09 0.09 0.00 0.04 0.03 0.03 PASS A0014 0.04 0.05 0.03 0.07 0.04 0.08 0.03 0.03 0.00 0.03 0.00 -0.04 PASS A0015 0.05 0.03 0.06 0.05 0.08 0.04 0.05 0.04 0.03 0.01 -0.01 -0.01 PASS A0016 0.07 0.06 0.04 0.04 0.09 0.03 0.07 0.04 0.02 -0.03 0.03 0.00 PASS A0017 0.06 0.03 0.03 0.05 0.04 0.09 0.03 0.04 -0.02 0.06 0.00 -0.01 PASS



Table 7.2.4: Wavelength Dependent Loss Measurement (in dB) Group 2 WDL Initial WDL Post Test Change in WDL Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0007 0.12 0.07 0.09 0.12 0.14 0.08 0.10 0.07 0.02 0.01 0.01 -0.05 PASS A0008 0.14 0.10 0.13 0.11 0.12 0.08 0.16 0.18 -0.02 -0.02 0.03 0.07 PASS A0009 0.12 0.11 0.07 0.11 0.17 0.11 0.15 0.09 0.05 0.00 0.08 -0.02 PASS A0010 0.09 0.07 0.09 0.10 0.18 0.09 0.12 0.09 0.09 0.02 0.03 -0.01 PASS A0011 0.12 0.06 0.08 0.08 0.16 0.16 0.15 0.08 0.04 0.10 0.07 0.00 PASS A0012 0.11 0.10 0.09 0.11 0.17 0.08 0.07 0.16 0.06 -0.02 -0.02 0.05 PASS A0013 0.07 0.11 0.12 0.10 0.14 0.07 0.15 0.12 0.07 -0.04 0.03 0.02 PASS A0014 0.05 0.08 0.10 0.09 0.12 0.16 0.14 0.12 0.07 0.08 0.04 0.03 PASS A0015 0.11 0.13 0.09 0.07 0.18 0.11 0.14 0.05 0.07 -0.02 0.05 -0.02 PASS A0016 0.08 0.07 0.09 0.10 0.17 0.13 0.13 0.16 0.09 0.06 0.04 0.06 PASS A0017 0.13 0.08 0.11 0.07 0.10 0.10 0.11 0.12 -0.03 0.02 0.00 0.05 PASS



7.3. DAMP HEAT TEST DATA

7.3.1. Test Conditions Temperature: 85 °C. Humidity: 85 %. Duration: 500 hours. Sample Size: 11 (Group 3) Testing Temperature: Room Temperature Tested Parameter for Pass/Fail: IL, RL, PDL, WDL Test Result: Pass 7.3.2. Test Results

Table 7.3.1: Insertion Loss Measurement (in dB) Group 3 IL Initial IL Post Test Change in IL IL < 1Db Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0040 0.83 0.82 0.80 0.82 0.89 0.87 0.85 0.89 0.06 0.05 0.05 0.07 PASS A0041 0.81 0.80 0.80 0.82 0.86 0.83 0.83 0.84 0.05 0.03 0.03 0.02 PASS A0042 0.80 0.79 0.83 0.78 0.88 0.84 0.90 0.81 0.08 0.05 0.07 0.03 PASS A0043 0.82 0.82 0.81 0.82 0.88 0.85 0.84 0.89 0.06 0.03 0.03 0.07 PASS A0044 0.84 0.82 0.83 0.83 0.93 0.87 0.86 0.90 0.09 0.05 0.03 0.07 PASS A0045 0.79 0.81 0.80 0.80 0.84 0.88 0.83 0.86 0.05 0.07 0.03 0.06 PASS A0046 0.80 0.77 0.80 0.82 0.85 0.82 0.85 0.84 0.05 0.05 0.05 0.02 PASS A0047 0.78 0.81 0.83 0.79 0.83 0.83 0.90 0.84 0.05 0.02 0.07 0.05 PASS A0048 0.81 0.81 0.83 0.80 0.89 0.87 0.87 0.83 0.08 0.06 0.04 0.03 PASS A0049 0.83 0.81 0.82 0.82 0.88 0.87 0.90 0.91 0.05 0.06 0.08 0.09 PASS A0050 0.80 0.82 0.79 0.81 0.83 0.87 0.82 0.86 0.03 0.05 0.03 0.05 PASS



Table 7.3.2: Return Loss Measurement (in dB) Group 3 RL Initial RL Post Test Change in IL RL > 50 dB Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0040 60.00 58.00 59.00 59.00 61.00 59.00 59.00 58.00 1 1 0 -1 PASS A0041 58.00 58.00 59.00 58.00 59.00 58.00 60.00 59.00 1 0 1 1 PASS A0042 61.00 59.00 59.00 57.00 62.00 60.00 58.00 57.00 1 1 -1 0 PASS A0043 57.00 59.00 59.00 59.00 58.00 60.00 60.00 58.00 1 1 1 -1 PASS A0044 59.00 60.00 60.00 59.00 59.00 60.00 60.00 58.00 0 0 0 -1 PASS A0045 58.00 61.00 59.00 58.00 57.00 61.00 60.00 56.00 -1 0 1 -2 PASS A0046 58.00 58.00 57.00 58.00 59.00 57.00 57.00 58.00 1 -1 0 0 PASS A0047 59.00 58.00 59.00 58.00 60.00 59.00 60.00 59.00 1 1 1 1 PASS A0048 60.00 58.00 57.00 57.00 59.00 57.00 57.00 58.00 -1 -1 0 1 PASS A0049 59.00 59.00 59.00 58.00 60.00 57.00 60.00 59.00 1 -2 1 1 PASS A0050 61.00 59.00 60.00 60.00 62.00 58.00 59.00 61.00 1 -1 -1 1 PASS


Group 3 PDL Initial PDL Post Test Change in PDL Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0040 0.05 0.07 0.04 0.04 0.07 0.08 0.03 0.04 0.02 0.01 -0.01 0.00 PASS A0041 0.03 0.05 0.03 0.05 0.03 0.03 0.08 0.07 0.00 -0.02 0.05 0.02 PASS A0042 0.04 0.03 0.03 0.06 0.05 0.07 0.06 0.03 0.01 0.04 0.03 -0.03 PASS A0043 0.03 0.05 0.06 0.03 0.07 0.07 0.04 0.05 0.04 0.02 -0.02 0.02 PASS A0044 0.07 0.05 0.03 0.06 0.08 0.05 0.09 0.08 0.01 0.00 0.06 0.02 PASS A0045 0.03 0.05 0.05 0.07 0.09 0.06 0.04 0.03 0.06 0.01 -0.01 -0.04 PASS A0046 0.07 0.06 0.07 0.04 0.08 0.03 0.03 0.04 0.01 -0.03 -0.04 0.00 PASS A0047 0.06 0.07 0.04 0.05 0.08 0.08 0.06 0.07 0.02 0.01 0.02 0.02 PASS A0048 0.07 0.07 0.04 0.06 0.09 0.05 0.04 0.06 0.02 -0.02 0.00 0.00 PASS A0049 0.04 0.03 0.07 0.05 0.08 0.05 0.03 0.08 0.04 0.02 -0.04 0.03 PASS A0050 0.05 0.03 0.03 0.06 0.07 0.04 0.08 0.04 0.02 0.01 0.05 -0.02 PASS



Table 7.3.4: Wavelength Dependent Loss Measurement (in dB) Group 3 WDL Initial WDL Post Test Change in WDL Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0040 0.10 0.08 0.10 0.07 0.13 0.16 0.08 0.09 0.03 0.08 -0.02 0.02 PASS A0041 0.09 0.06 0.07 0.13 0.07 0.09 0.15 0.05 -0.02 0.03 0.08 -0.08 PASS A0042 0.08 0.10 0.08 0.07 0.18 0.16 0.13 0.14 0.10 0.06 0.05 0.07 PASS A0043 0.12 0.12 0.07 0.09 0.18 0.14 0.08 0.16 0.06 0.02 0.01 0.07 PASS A0044 0.06 0.06 0.07 0.14 0.08 0.09 0.06 0.11 0.02 0.03 -0.01 -0.03 PASS A0045 0.11 0.08 0.11 0.09 0.13 0.10 0.11 0.06 0.02 0.02 0.00 -0.03 PASS A0046 0.13 0.10 0.12 0.09 0.11 0.12 0.16 0.15 -0.02 0.02 0.04 0.06 PASS A0047 0.09 0.06 0.08 0.12 0.11 0.10 0.09 0.08 0.02 0.04 0.01 -0.04 PASS A0048 0.09 0.06 0.05 0.14 0.14 0.12 0.06 0.10 0.05 0.06 0.01 -0.04 PASS A0049 0.10 0.07 0.07 0.07 0.12 0.15 0.07 0.13 0.02 0.08 0.00 0.06 PASS A0050 0.08 0.14 0.06 0.08 0.09 0.07 0.11 0.15 0.01 -0.07 0.05 0.07 PASS



7.4. TEMPERATURE CYCLING TEST DATA

7.4.1. Test Conditions Temperature range: -40 °C to 85 °C. Dwell time at extreme temperatures: 20 minute. Temperature rising rate: 25 minute from -40 °C to 85 °C. Temperature falling rate: 25 minute from 85 °C to -40 °C. Humidity: uncontrolled. Numbers of cycles: 500 cycles. Sample Size: 11 (Group 2B) Testing Temperature: Room Temperature Tested Parameter for Pass/Fail: IL, RL, PDL, WDL Test Result: Pass 7.4.2. Test results

Table 7.4.1: Insertion Loss Measurement (in dB) Group 4 IL Initial IL Post Test Change in IL IL < 1 dB Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0060 0.79 0.81 0.80 0.81 0.78 0.82 0.82 0.83 -0.01 0.01 0.02 0.02 PASS A0061 0.82 0.81 0.80 0.79 0.85 0.82 0.81 0.79 0.03 0.01 0.01 0.00 PASS A0062 0.81 0.82 0.83 0.83 0.82 0.80 0.81 0.86 0.01 -0.02 -0.02 0.03 PASS A0063 0.80 0.83 0.81 0.80 0.83 0.86 0.83 0.84 0.03 0.03 0.02 0.04 PASS A0064 0.81 0.84 0.82 0.83 0.87 0.87 0.87 0.86 0.06 0.03 0.05 0.03 PASS A0065 0.83 0.82 0.80 0.81 0.86 0.86 0.82 0.83 0.03 0.04 0.02 0.02 PASS A0066 0.80 0.78 0.79 0.81 0.83 0.81 0.81 0.83 0.03 0.03 0.02 0.02 PASS A0067 0.79 0.83 0.82 0.80 0.84 0.85 0.87 0.83 0.05 0.02 0.05 0.03 PASS A0068 0.82 0.81 0.83 0.83 0.86 0.84 0.86 0.86 0.04 0.03 0.03 0.03 PASS A0069 0.81 0.84 0.83 0.84 0.83 0.87 0.86 0.87 0.02 0.03 0.03 0.03 PASS A0070 0.82 0.83 0.79 0.81 0.83 0.85 0.81 0.84 0.01 0.02 0.02 0.03 PASS



Table 7.4.2: Return Loss Measurement (in dB) Group 4 RL Initial RL Post Test Change in RL RL>50dB Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0060 58.00 58.00 58.00 59.00 59.00 58.00 58.00 59.00 1 0 0 0 PASS A0061 58.00 58.00 59.00 58.00 59.00 59.00 60.00 59.00 1 1 1 1 PASS A0062 59.00 60.00 59.00 58.00 60.00 59.00 59.00 58.00 1 -1 0 0 PASS A0063 58.00 58.00 59.00 59.00 58.00 58.00 58.00 58.00 0 0 -1 -1 PASS A0064 58.00 60.00 58.00 59.00 59.00 61.00 58.00 59.00 1 1 0 0 PASS A0065 61.00 59.00 59.00 58.00 62.00 58.00 58.00 58.00 1 -1 -1 0 PASS A0066 59.00 58.00 59.00 58.00 59.00 57.00 60.00 57.00 0 -1 1 -1 PASS A0067 58.00 58.00 58.00 58.00 59.00 59.00 58.00 58.00 1 1 0 0 PASS A0068 59.00 59.00 58.00 59.00 58.00 59.00 58.00 60.00 -1 0 0 1 PASS A0069 58.00 59.00 60.00 59.00 56.00 58.00 61.00 59.00 -2 -1 1 0 PASS A0070 58.00 60.00 59.00 59.00 59.00 60.00 58.00 58.00 1 0 -1 -1 PASS


Group 4 PDL Initial PDL Post Test Change in PDL Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0040 0.05 0.06 0.04 0.07 0.07 0.07 0.05 0.07 0.02 0.01 0.01 0.00 PASS A0041 0.07 0.03 0.04 0.03 0.09 0.04 0.03 0.04 0.02 0.01 -0.01 0.01 PASS A0042 0.03 0.06 0.06 0.03 0.03 0.03 0.04 0.06 0.00 -0.03 -0.02 0.03 PASS A0043 0.05 0.04 0.06 0.05 0.07 0.03 0.06 0.03 0.02 -0.01 0.00 -0.02 PASS A0044 0.06 0.05 0.05 0.03 0.05 0.08 0.08 0.03 -0.01 0.03 0.03 0.00 PASS A0045 0.04 0.03 0.06 0.04 0.03 0.06 0.06 0.06 -0.01 0.03 0.00 0.02 PASS A0046 0.07 0.03 0.07 0.06 0.07 0.07 0.03 0.04 0.00 0.04 -0.04 -0.02 PASS A0047 0.04 0.04 0.06 0.03 0.08 0.03 0.07 0.03 0.04 -0.01 0.01 0.00 PASS A0048 0.05 0.06 0.03 0.07 0.03 0.07 0.03 0.09 -0.02 0.01 0.00 0.02 PASS A0049 0.05 0.04 0.03 0.03 0.03 0.07 0.05 0.05 -0.02 0.03 0.02 0.02 PASS A0050 0.04 0.07 0.03 0.06 0.07 0.07 0.07 0.07 0.03 0.00 0.04 0.01 PASS



Table 7.4.4: Wavelength Dependent Loss Measurement (in dB) Group 4 WDL Initial WDL Post Test Change in WDL Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0040 0.05 0.10 0.06 0.10 0.09 0.13 0.12 0.08 0.04 0.03 0.06 -0.02 PASS A0041 0.06 0.13 0.11 0.04 0.10 0.16 0.09 0.14 0.04 0.03 -0.02 0.10 PASS A0042 0.07 0.09 0.10 0.09 0.09 0.11 0.15 0.09 0.02 0.02 0.05 0.00 PASS A0043 0.11 0.07 0.13 0.08 0.11 0.09 0.14 0.10 0.00 0.02 0.01 0.02 PASS A0044 0.05 0.08 0.07 0.08 0.07 0.14 0.06 0.16 0.02 0.06 -0.01 0.08 PASS A0045 0.10 0.07 0.07 0.10 0.13 0.12 0.17 0.14 0.03 0.05 0.10 0.04 PASS A0046 0.07 0.08 0.12 0.12 0.07 0.07 0.10 0.14 0.00 -0.01 -0.02 0.02 PASS A0047 0.07 0.10 0.12 0.09 0.08 0.14 0.12 0.05 0.01 0.04 0.00 -0.04 PASS A0048 0.05 0.07 0.11 0.06 0.08 0.06 0.14 0.12 0.03 -0.01 0.03 0.06 PASS A0049 0.08 0.11 0.05 0.07 0.09 0.12 0.11 0.11 0.01 0.01 0.06 0.04 PASS A0050 0.06 0.12 0.14 0.10 0.07 0.15 0.14 0.14 0.01 0.03 0.00 0.04 PASS



7.5. MECHANICAL SHOCK IL TEST DATA

7.5.1. Test Conditions Acceleration: 500 G. Numbers of shocks: 5 times per direction. Numbers of directions: 6 directions. Shock duration: 1ms. Sample Size: 11 (Group same as temperature cycling) Testing Temperature: Room Temperature Tested Parameter for Pass/Fail: Minimum IL Test Result: Pass 7.5.2. Test Results

Table 7.5.1: Insertion Loss Measurement (in dB) Group 4 IL Initial IL Post Test Change in IL IL < 1 dB Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0060 0.78 0.82 0.82 0.83 0.79 0.83 0.85 0.85 0.01 0.01 0.03 0.02 PASS A0061 0.85 0.82 0.81 0.79 0.86 0.82 0.86 0.81 0.01 0.00 0.05 0.02 PASS A0062 0.82 0.80 0.81 0.86 0.82 0.81 0.82 0.89 0.00 0.01 0.01 0.03 PASS A0063 0.83 0.86 0.83 0.84 0.85 0.89 0.85 0.86 0.02 0.03 0.02 0.02 PASS A0064 0.87 0.87 0.87 0.86 0.89 0.90 0.87 0.87 0.02 0.03 0.00 0.01 PASS A0065 0.86 0.86 0.82 0.83 0.87 0.89 0.84 0.85 0.01 0.03 0.02 0.02 PASS A0066 0.83 0.81 0.81 0.83 0.85 0.83 0.82 0.83 0.02 0.02 0.01 0.00 PASS A0067 0.84 0.85 0.87 0.83 0.87 0.87 0.89 0.86 0.03 0.02 0.02 0.03 PASS A0068 0.86 0.84 0.86 0.86 0.87 0.84 0.87 0.88 0.01 0.00 0.01 0.02 PASS A0069 0.83 0.87 0.86 0.87 0.85 0.89 0.88 0.89 0.02 0.02 0.02 0.02 PASS A0070 0.83 0.85 0.81 0.84 0.83 0.86 0.82 0.85 0.00 0.01 0.01 0.01 PASS



7.6. MECHANICAL VIBRATION IL TEST DATA

7.6.1. Test Conditions Acceleration: 20 G. Frequency: 20 – 2000 Hz. Duration: 4 minutes per cycle. Numbers of cycles: 4 cycles per axis. Numbers of axis: 3 axes. Sample Size: 11 (same as low temp storage) Testing Temperature: Room Temperature Tested Parameter for Pass/Fail: Minimum IL Test Result: Pass 7.6.2. Test Results

Table 7.6.1: Insertion Loss Measurement (in dB) Group 2 IL Initial IL Post Test Change in IL IL < 1 dB Sample P1 P2 P3 P4 P1 P2 P3 P4 P1 P2 P3 P4 P/F A0007 0.80 0.84 0.79 0.80 0.82 0.85 0.80 0.82 0.02 0.01 0.01 0.02 PASS A0008 0.85 0.83 0.79 0.84 0.87 0.86 0.80 0.86 0.02 0.03 0.01 0.02 PASS A0009 0.82 0.81 0.85 0.81 0.84 0.82 0.85 0.83 0.02 0.01 0.00 0.02 PASS A0010 0.79 0.79 0.84 0.82 0.80 0.80 0.86 0.84 0.01 0.01 0.02 0.02 PASS A0011 0.85 0.85 0.82 0.82 0.88 0.86 0.83 0.84 0.03 0.01 0.01 0.02 PASS A0012 0.86 0.79 0.83 0.82 0.88 0.81 0.84 0.84 0.02 0.02 0.01 0.02 PASS A0013 0.81 0.82 0.83 0.83 0.84 0.85 0.83 0.85 0.03 0.03 0.00 0.02 PASS A0014 0.84 0.83 0.78 0.81 0.85 0.85 0.80 0.82 0.01 0.02 0.02 0.01 PASS A0015 0.81 0.84 0.79 0.79 0.82 0.86 0.81 0.80 0.01 0.02 0.02 0.01 PASS A0016 0.82 0.83 0.84 0.83 0.85 0.84 0.87 0.85 0.03 0.01 0.03 0.02 PASS A0017 0.81 0.79 0.79 0.83 0.81 0.80 0.82 0.85 0.00 0.01 0.03 0.02 PASS



8. MEMS RELIABILITY VERIFICATION

8.1. LONG TERM MEMS RELIABILITY Long term MEMS reliability is tested by rapid cycling of MEMS devices over deflection angles larger than those encountered in the switch device at rates much higher than those used in normal operation. The purpose is to determine if actuator hinges undergo mechanical fatigue and/or break during extended operation. MEMS devices used in the 1x4 Switch have been tested for 10 billion operations per hinge. 8.1.1. Hinge tests performed:

a. Hinge lifetimes

are tested at the first resonance frequency and the resonant frequencies before and after stress test are compared.

b. Hinge memory or reversibility

is tested by comparing deflection angles at voltages higher than those during normal operation before and after stress test.

8.1.2. Hinge test Results

a. Hinge lifetimes

exceed 10 billion cycles. Resonance frequencies have changed by less than 3% which is accuracy of our measurements.

b. Hinge memory is not detectable at 10 billion cycles as deflection angles have changed by less than 4% which is accuracy of our measurements.

qual1 aom 1xn switch 2013-07-01

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