precision systems control laboratory (pscl)
DESCRIPTION
Precision Systems Control Laboratory (PSCL). Jia-Yush Yen. Recent Projects. 70,950 cross-wafer beams 1-mm beam pitch. Massively Parallel E-Beam Lithography System. 子計劃一:資料傳輸與控制驅動系統. 子計劃二:電子光學系統設計與製作. 子計劃三:機械系統設計與製作. 子計劃四:低電壓電子束微影製程. 2. - PowerPoint PPT PresentationTRANSCRIPT
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Precision Systems Control Laboratory (PSCL)
Jia-Yush Yen
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子計劃一:資料傳輸與控制驅動系統
子計劃二:電子光學系統設計與製作
子計劃三:機械系統設計與製作
70,950 cross-wafer beams1-mm beam pitch
子計劃四:低電壓電子束微影製程
Recent Projects
• Massively Parallel E-Beam Lithography System
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Zone-Plate Based EUV Direct Write Lithography System
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Artificial Eye(a)
(b)
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Nano-Pattern Stitching
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AFM Manipulation or Nano Manufacturing
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Experiment hardware
- Two Adlink I/O card (9111DG 、 6308V) - Pentium PC
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Result of spiral flat with PID controller
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Result of spiral flat with PID controller
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Spiral LineSpiral Line
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Lithography skill by PI
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Nano-line method(2)
個別行進方向
總行進方向
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Nano-point method(1)By Nano-line(1) combine a circle
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Combine nano-line(2) method
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Bio-mimetic Robots
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Bio-mimetic leg design
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Modifications
• Aluminum alloy legs• Acrylic body
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Turtle test platform
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Real Module
112/04/21 NTU PSCL
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Real Module
112/04/21 NTU PSCL
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Wireless Health Monitoring Device
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One Very Brief Review
ARM9 Development Board
(running WinCE)
RF Transceiver
sensor
RF
RS232
sensorsensor
802.11b
Health Care Center
Mobile device
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Hardware
• Symbian OS was chosen forits open-minded architectures.
• I chose N95 for its mobility and connectivity.
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I/O problem
Q1 : USB-Host or USB-OTGA1 : Reprogrammed to Bluetooth protocol.
or Ask Project-F to use USB-Host driver chip.
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New Smart Solar Brick
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Smart brick
Solar tracker
Color solar cell
Optical fiber
Hydrogen generator
Solar power
Optical fiber lighting
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Area :20cm x 40 cm
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Smart brick integration
Solar cell
Optical fiber
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Composite film structure at anode “Photovoltaic effect”
“Pyroelectricity”
TiO2 nanotubes
PZT thin filmRectifier circuit
Bias from solar cell
+ -
PhotoelectrolysisH2 generation
at Pt cathode
e-
Light & Heat
New visible light absorbing oxides
UV-Vis absorption spectra of:(a) SrTiO3
(b) Mixture of (0.75AgNbO3 + 0.25SrTiO3)(c) Solid solution (Ag0.75Sr0.25)(Nb0.75Ti0.25)O3
(d) AgNbO3
(Ref: J. AM. CHEM. SOC. 130, 2724-2725, 2008)
Composite film
structure
Bias
Task 1: New oxide materials
Task 2: Photovoltaic + Pyroelectricity
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Machine Tool Servo Design
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Solid Modeling Servo 30
New Design Procedure
CAD tool
Controller synthesis tool
Structural analysis tool
Specifications
Prototyping
Modal testing
Servo implementation
Servo tuning
Performance test
Dynamic simulation tool
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Integrated System Model
Solid model for the Grinding Machine
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Solid Modeling Servo 32
無擋板下之受力變形
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Solid Modeling Servo 34
強韌性驗證• 改變平台的負載• O:總重 800kg• +:總重 750kg• -:總重 703kg
• 調整輸入增益• O : 1.2倍• + : 0.8倍• -:原輸入增益