precision positioning stage motion system...precision positioning stage motion system printed in...

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JAEWON.Co.,Ltd.509 Shin-il IT UTO, 13(Dangjeong-dong), LS-ro, Gunpo-si, Gyeonggi-do, KoreaTel: +82-31-477-7333 Fax: +82-31-477-7399E-mail : [email protected]

주식회사 재원경기도 군포시 엘에스로 13(당정동) 신일IT유토 509호

Tel: 031-477-7333 Fax: 031-477-7399

PRECISION POSITIONING STAGEMOTION SYSTEM

Ver. 1.04 – 20140801

Printed in August , 2014

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Model MXYRS-60 (A,B,C,S) -40Axis X YMotor SERVO or STEP Motor selectableTable size 60 X 60 [mm] 60 X 60 [mm] 80 [Ø]Height 15 [mm] 25 [mm]Travel Range ±10 [mm] ±10 [mm] ±3 [°]Mechanical Type Ball Screw Ø6 L 1 (C5)Guide Cross RollerAccuracy ±5 [μm]Repeatability ±1 [μm]Material AluminumLoad capacity 5 [kgf]Sensor 2 Limit

Model MAS-100 (B,C,S) -40Axis X YMotor SERVO or STEP Motor selectableTable size 100 X 100 [mm]Height 40 [mm]Travel Range ±5 [mm] ±5 [mm] ±5 [°]Mechanical Type Ball Screw Ø6 L 1 (C5)Guide V-Groove RailAccuracy ±5 [μm]Repeatability ±1 [μm]Material AluminumLoad capacity 5 [kgf]Sensor 2 Limit

Model MZH-60 (A,B,C,S) -26 MZH-60 (A,B,C,S) -39Axis Z ZMotor SERVO or STEP Motor selectableTable size 60 X 60 [mm]Height 26 [mm] 39 [mm]Travel Range ±2 [mm] ±3 [mm]Mechanical Type Ball Screw Ø6 L 1 (C5)Guide Cross RollerAccuracy ±5 [μm]Repeatability ±1 [μm]Material AluminumLoad capacity 5 [kgf]Sensor 2 Limit

Model MX-60 (A,B,C,S) -15 MXY-60 (A,B,C,S) -30Axis X XYMotor SERVO or STEP Motor selectableTable size 60 X 60 [mm]Height 15 [mm] 30 [mm]Travel Range ±10 [mm] ±10 [mm]Mechanical Type Ball Screw Ø6 L 1 (C5)Guide Cross RollerAccuracy ±5 [μm]Repeatability ±1 [μm]Material AluminumLoad capacity 5 [kgf]Sensor 2 Limit

Model MXYR-70 (A,B,C,S) -95Axis X YMotor SERVO or STEP Motor selectableTable size 70 X 70 [mm] 70 X 70 [mm] 70 [Ø]Height 20 [mm] 20 [mm] 45 [mm]Travel Range ±10 [mm] ±10 [mm] 360 [°]Mechanical Type Ball Screw Ø6 L 1 (C5) Worm & GearGuide Cross Roller Ball bearingAccuracy ±5 [μm] ±0.005 [°]Repeatability ±3 [μm] ±0.003 [°]Material AluminumLoad capacity 9 [kgf]Sensor 2 Limit , 1 Home (Photo Sensor NPN) 2 Limit , 1 Home (Magnetic Sensor)

Model MRS-60 (A,B,C,S) -25 MYRS-60 (A,B,C,S) -25Axis YMotor SERVO or STEP Motor selectableTable size 80 [Ø] 60 X 60 [mm] 80 [Ø]Height 25 [mm] 25 [mm]Travel Range ±5 [°] ±10 [mm] ±5 [°]Mechanical Type Ball Screw Ø6 L 1 (C5)Guide Cross RollerAccuracy ±5 [μm]Repeatability ±1 [μm]Material AluminumLoad capacity 5 [kgf]Sensor 2 Limit

+

+

1stin the world

ULTRA SLIM AUTO STAGEUltra slim XY positioning device Best slim device in the worldPCT (128 country) patent applied

ULTRA SLIM AUTO STAGEUltra slim X,XY Axis positioning device Best slim device in the world (15mm!!)

Ultra slim axis positioning device Compact & Precision axis stage

Ultra slim Y (integral) axis positioning device Precision axis motion control

* Patent apply for 'Anti-swing motion'

Ultra slim XY positioning device

* Patent apply for preventer of rotation device's error

* Grease Nipple applied (option)

AUTO ALIGNMENT STAGECompact alignment positioning device SERVO or STEP Motor selectableLight weight

Z STAGEUltra slim Z horizontal Axis positioning device Best slim device in the world compound with XY or Alignment Stage

15mm

40mm

26mm

26mm

26mm

30mm

20mm

Each detailed specifications, dimensions and drawing files are ready in our website. Each detailed specifications, dimensions and drawing files are ready in our website.

40mm

25mm

25mm

2D, 3D

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1 Axis (X)

Axis Stage

Model MX-40 (A,B,C,S) - (L,R) MX-60 (A,B,C,S) - (L,R) MXC-60 (A,B,C,S)Axis X X XMotor □28 Step or SERVO Motor selectableTable size 40 X 40 [mm] 60 X 60 [mm] 60 X 60 [mm]Travel Range ±6 [mm] ±13 [mm] ±10 [mm]Mechanical Type Ball Screw Ø6 L 1 (C5) Ball Screw Ø6 L 1 (C5) Ball Screw Ø6 L 1 (C5)Guide Cross Roller Cross Roller Cross RollerAccuracy ±5 [μm] ±5 [μm] ±5 [μm]Repeatability ±1 [μm] ±1 [μm] ±1 [μm]Material Aluminum Aluminum AluminumLoad capacity 3 [kgf] 6 [kgf] 4 [kgf]Sensor 2 Limit (24V DC) 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC)

Model MX-80 (A,B,C,S) - (L,R) MX-1012 (A,B,C,S) - (L,R) MX-1016 (A,B,C,S) - (L,R) MX-160 (A,B,C,S) - (L,R)Axis X X X XMotor □42 Step or SERVO Motor selectableTable size 80 X 80 [mm] 100 X 120 [mm] 100 X 160 [mm] 160 X 160 [mm]Travel Range ±15 [mm] ±30 [mm] ±50 [mm] ±50 [mm]Mechanical Type Ball Screw Ø8 L 1 (C5) Ball Screw Ø8 L 1 (C5) Ball Screw Ø8 L 1 (C5) Ball Screw Ø8 L 1 (C5)Guide Cross Roller LM Guide Cross Roller Cross RollerAccuracy ±5 [μm] ±5 [μm] ±5 [μm] ±5 [μm]Repeatability ±1 [μm] ±1 [μm] ±1 [μm] ±1 [μm]Material Aluminum Aluminum Aluminum AluminumLoad capacity 8 [kgf] 12 [kgf] 16 [kgf] 16 [kgf]Sensor 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC)

Model MRD-40 (A,B) MRS-60 (A,B,C,S) - (L,R) MRC-60 (A,B,C,S) - (L,R) MRC-70 (A,B,C,S) - (L,R) MRC-80 (A,B,C,S) - (L,R)AxisMotor Step motor □28 Step or SERVO Motor selectable □42 Step or SERVO Motor selectableTable size 40 [ø] 60 [ø] 60 [ø] 70 [ø] 80 [ø]Travel Range 360 [˚] ±5 [˚] 360 [˚] 360 [˚] 360 [˚]Mechanical Type Direct Drive Ball Screw Ø6 L 1 (C5) Worm&Gear Worm&Gear Worm&GearGuide - Crossroller bearing Ball bearing Ball bearing Ball bearingAccuracy - ±0.01 [˚] ±0.02 [˚] ±0.02 [˚] ±0.02 [˚]Repeatability - ±0.003 [˚] ±0.005 [˚] ±0.005 [˚] ±0.005 [˚]Material Aluminum Aluminum Aluminum Aluminum AluminumLoad capacity 1 [kgf] 5 [kgf] 3 [kgf] 9 [kgf] 9 [kgf]Sensor 1 Home (24V DC) 2 Limit (24V DC) 1 Home (24V DC) 1 Home (24V DC) 1 Home (24V DC)

Each detailed specifications, dimensions and drawing files are ready in our website..

Each detailed specifications, dimensions and drawing files are ready in our website.

We can provide other customizing products

Z Axis Stage (Vertical)

Z Axis Stage (Horizontal)

Model MZV-40 (A,B,C,S) - (L,R) MZV-60 (A,B,C,S) - (L,R)Axis Z Vertical Z VerticalMotor □28 Step or SERVO Motor selectableTable size 40 X 40 [mm] 60 X 60 [mm]Travel Range ±6 [mm] ±13 [mm]Mechanical Type Ball Screw Ø6 L 1 (C5) Ball Screw Ø6 L 1 (C5)Guide Cross Roller Cross RollerAccuracy ±5 [μm] ±5 [μm]Repeatability ±1 [μm] ±1 [μm]Material Aluminum AluminumLoad capacity 0.5 [kgf] 3 [kgf]Sensor 2 Limit (24V DC) 2 Limit, 1 Home (24V DC)

Model MZV-80 (A,B,C,S) - (L,R) MZV-1012 (A,B,C,S) - (L,R) MZV-1016 (A,B,C,S) - (L,R)Axis Z Vertical Z Vertical Z VerticalMotor □42 Step or SERVO Motor selectableTable size 80 X 80 [mm] 100 X 120 [mm] 100 X 160 [mm]Travel Range ±15 [mm] ±30 [mm] ±50 [mm]Mechanical Type Ball Screw Ø8 L 1 (C5) Ball Screw Ø8 L 1 (C5) Ball Screw Ø8 L 1 (C5)Guide Cross Roller LM Guide Cross RollerAccuracy ±5 [μm] ±5 [μm] ±5 [μm]Repeatability ±1 [μm] ±1 [μm] ±1 [μm]Material Aluminum Aluminum AluminumLoad capacity 4 [kgf] 5 [kgf] 5 [kgf]Sensor 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC)

Model MZH-60 (A,B,C,S) - (L,R) MZH-108 (A,B,C,S) MZH-120 (A,B,C,S) MZH-250 (A,B,C,S)Axis Z Horizontal Z Horizontal Z Horizontal Z HorizontalMotor □42 Step or SERVO Motor selectableTable size 60 X 88 [mm] 100 X 80 [mm] 120 X 120 [mm] 250 X 250 [mm]Travel Range ±3 [mm] ±5 [mm] ±6 [mm] ±10 [mm]Mechanical Type Ball Screw Ø6 L 1 (C5) Ball Screw Ø6 L 1 (C5) Ball Screw Ø6 L 1 (C5) Ball Screw Ø12 L 5 (C5)Guide Cross Roller Cross Roller Cross Roller LM GuideAccuracy ±5 [μm] ±5 [μm] ±7 [μm] ±7 [μm]Repeatability ±1 [μm] ±1 [μm] ±2 [μm] ±2.5 [μm]Material Aluminum Aluminum Aluminum AluminumLoad capacity 3 [kgf] 6 [kgf] 12 [kgf] 35 [kgf]Sensor 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC)


AUTO STAGE

Patent ✽ Patent apply for preventer of rotation device's error

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2 Axis (XY)

3 Axis (XY )

Model MXYRS-60 (A,B,C,S) - (L,R) MXYRC-60 (A,B,C,S) - (L,R) MXYRC-80 (A,B,C,S) - (L,R)Axis XY XY XYMotor □28 Step or SERVO Motor selectable □28 Step or SERVO Motor selectable □42 Step or SERVO Motor selectableTable size 60 X 60 [mm] / 60 [ø] 60 X 60 [mm] / 60 [ø] 80 X 80 [mm] / 80 [ø]Travel Range ±13 [mm] / ±5 [°] ±13 [mm] / 360 [˚] ±15 [mm] / 360 [˚]Mechanical Type Ball Screw Ø6 L 1 (C5) Ball Screw Ø6 L 1 (C5) / Worm&Gear Ball Screw Ø8 L 1 (C5) / Worm&GearGuide Cross Roller / Crossroller Bearing Cross Roller / Ball Bearing Cross Roller / Ball BearingAccuracy XY : ±5 [μm] / R : ±0.01 [˚] XY : ±5 [μm] / R : ±0.02 [˚] XY : ±5 [μm] / R : ±0.02 [˚]Repeatability XY : ±1 [μm] / R : ±0.003 [˚] XY : ±1 [μm] / R : ±0.005 [˚] XY : ±1 [μm] / R : ±0.005 [˚]Material Aluminum Aluminum AluminumLoad capacity 5 [kgf] 3 [kgf] 7 [kgf]Sensor 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home / 1 Home (24V DC) 2 Limit, 1 Home / 1 Home (24V DC)

Model MXY-40 (A,B,C,S) - (L,R) MXY-60 (A,B,C,S) – (L,R) MXYC-60 (A,B,C,S) MXY-80 (A,B,C,S) – (L,R)Axis XY XY XY XYMotor □28 Step or SERVO Motor selectable □28 Step or SERVO Motor selectable □28 Step or SERVO Motor selectable □42 Step or SERVO Motor selectableTable size 40 X 40 [mm] 60 X 60 [mm] 60 X 60 [mm] 80 X 80 [mm]Travel Range ±6 [mm] ±13 [mm] ±10 [mm] ±15 [mm]Mechanical Type Ball Screw Ø6 L 1 (C5) Ball Screw Ø6 L 1 (C5) Ball Screw Ø6 L 1 (C5) Ball Screw Ø8 L 1 (C5)Guide Cross Roller Cross Roller Cross Roller Cross RollerAccuracy ±5 [μm] ±5 [μm] ±5 [μm] ±5 [μm]Repeatability ±1 [μm] ±1 [μm] ±1 [μm] ±1 [μm]Material Aluminum Aluminum Aluminum AluminumLoad capacity 3 [kgf] 5 [kgf] 3 [kgf] 8 [kgf]Sensor 2 Limit (24V DC) 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC) 2 Limit, 1 Home (24V DC)




Actuator

ALIGNMENT STAGE (UVW)

Model MLS-6010 (A,B,C,S) -ST80 MLS-6010 (A,B,C,S) -ST100 MLS-6005 (A,B,C,S) -ST150 MLS-6005 (A,B,C,S) -ST350Axis X X X XMotor □42 Step or SERVO Motor selectableTable size 60 X 60 [mm] 60 X 60 [mm] 60 X 60 [mm] 60 X 60 [mm]Travel Range ±40 [mm] ±50 [mm] ±75 [mm] ±175 [mm]Mechanical Type Ball Screw Ø6 L 10 (C5) Ball Screw Ø6 L 10 (C5) Ball Screw Ø8 L 5 (C5) Ball Screw Ø12 L 5 (C5)Guide LM Guide LM Guide LM Guide LM GuideAccuracy ±5 [μm] ±5 [μm] ±5 [μm] ±10 [μm]Repeatability ±1 [μm] ±1 [μm] ±1 [μm] ±2 [μm]Material Aluminum Aluminum Aluminum AluminumLoad capacity 8 [kgf] 8 [kgf] 8 [kgf] 8 [kgf]Sensor 2 Limit (24V DC) 2 Limit (24V DC) 2 Limit (24V DC) 2 Limit (24V DC)

Model MAS-200 (A,B,C,S) MAS-300 (A,B,C,S) MAS-400 (A,B,C,S) MAS-500 (A,B,C,S)Axis XY XY XY XYMotor □42 Step or SERVO Motor selectableTable size 200 X 200 [mm] 300 X 300 [mm] 400 X 400 [mm] 500 X 500 [mm]Travel Range X,Y : ±5 [mm] / R : ± 3 [˚] X,Y : ±5 [mm] / R : ± 3 [˚] X,Y : ±5 [mm] / R : ± 3 [˚] X,Y : ±5 [mm] / R : ± 3 [˚]Mechanical Type Ball screw Ball screw Ball screw Ball screwGuide V-groove rail V-groove rail V-groove rail V-groove railAccuracy ±2 [μm] ±2 [μm] ±2 [μm] ±2 [μm]Repeatability ±1 [μm] ±1 [μm] ±1 [μm] ±1 [μm]Material Aluminum Aluminum Aluminum AluminumLoad capacity 35 [kgf] 40 [kgf] 50 [kgf] 50 [kgf]Sensor 2 Limit (24V DC) 2 Limit (24V DC) 2 Limit (24V DC) 2 Limit (24V DC)

AUTO STAGE

Model MXYRS-70B-45-SAxis XYMotor □28 Step MotorTable size 70 X 70 [mm]Height 45 [mm]Travel Range ±3 [mm] / ±3 [°]Mechanical Type Ball Screw Ø6 L 1Guide Cross RollerAccuracy <±3 [μm]Repeatability <±1 [μm]Material AluminumLoad capacity 5 [kgf]Sensor 2 Limit , 1 Home (24V DC)

Model MZH-2426B-75 MZH-2940B-135Axis Z ZMotor □42 αStep (Harmonic Geared Type) □60 αStep (Harmonic Geared Type)Table Size 238 X 260 [mm] 290 X 400 [mm]Height 75 [mm] 135 [mm]Travel Range ±5 [mm] ±5 [mm]Mechanical Type Ball Screw Ø12 L 5 Ball Screw Ø20 L 5Guide LM Guide / Cross Roller LM GuideAccuracy ±5 [μm] ±5 [μm]Repeatability ±1 [μm] ±1 [μm]Material Aluminum 석정반 / AluminumLoad capacity 10 [kgf] 50 [kgf]Sensor 2 Limit , 1 Home (24V DC) 2 Limit , 1 Home (24V DC)

3 Axis ultra slim

Z Axis

SPECIAL AUTO STAGE

Patent ✽ Patent apply for 'Anti-swing motion'

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Dimension Machine Size 380x380x420 mm

Motion

X-Y Configuration coordinate Max : 50x50 mm

X-Y Accuracy ± 5 μm

X-Y Repeatability ± 1 μm

Integrated-type Photodetector

Sensitinity wavelength region 200~310 nm

Wavelingth for calibrating absolute value 254 nm

Accumulated light amount measurement 0.01 mJ/cm2

Recognized position differenceEdge detectionProjection and edge detectionCatching hundokDetect differences

SPECIAL GONIOMETER STAGE

ALIGN SYSTEM

ILLUMINATION INTENSITY MEASURING

VISION ALIGN SYSTEM

•Model : IMS-400

•ProductsIllumination intensity measurement system on specified areaPrecise measurement of 10 [um] step, 0.1 [mJ/cm2]Easy operation of the system UI

•ApplicationsOptical illuminations intensity measurement ( Laser, Lighting etc. )

•ProductsUltrasonic welding machine align system(by installed 2 Z-vertical precision stage)(ENCODER FEED BACK SYSTEM)

•ApplicationsMechanical table size : 80 X 80 [mm]Maintain flatness : <10 [μm]

•OutlineMYVIS YV260 controls X-Y- -Z Stage with MA100 through MEMOBUS communication.MYVIS always monitors MA100 system and all axis status, such as alarm, SVON status, feedback position, etc.

(Area can be changed. Please ask staff.)

•Specifications

•Specifications

•System Configuration

•Applications

Model Table Size (mm) Stroke (°) Load Capacity (kgf) Material Motion TypeGX60-60S-S 60 x 60 ±10 12 Aluminum ScrewGX60-80S-S 60 x 60 ±10 12 Aluminum ScrewGX80-87S-S 80 x 80 ±10 15 Aluminum Screw

Patent

Patent

Illumination DATA(RS-232)

request

Illumination SensorMOTION command

(USB)

CONTROLLER

Y Axis sensor signals

X Axis sensor signals

X Axis motor signals

Y Axis motor signals

STAGE X AXIS STEP DRIVER 1

STEP DRIVER 1STAGE Y AXIS

response

MEMOBUS

Monitor

Trackball

CF Card

MECHATROLINK-II

X-Y- -Z Stage

4x SERVOPACK

CameraVISION

ENCODER

X-STAGE (ALUMINUM)

XY-STAGE (ALUMINUM)

X-STAGE (SUS & STEEL - IN BODY TYPE)

XY-STAGE (SUS & STEEL - IN BODY TYPE)

Z-STAGE (VERTICAL TYPE)

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MANUAL STAGE MANUAL STAGE

Model Type Table Size (mm)

Stroke (mm)

Load Capacity (kgf) Material Travel Guide

XY-25□A L,R,C 25 x 25 ±3.25 1 Aluminum Cross RollerXY40□A L,R,C 40 x 40 ±6.5 2 Aluminum Cross RollerXY-60□A L,R,C 60 x 60 ±6.5 5 Aluminum Cross RollerXY-80□A L,R,C 80 x 80 ±12.5 8 Aluminum Cross Roller

XY-100□A L,R,C 100 x 100 ±12.5 15 Aluminum Cross RollerXY-120□A L,R,C 120 x 120 ±25 20 Aluminum Cross RollerXY-150□A L,R,C 150 x 150 ±25 23 Aluminum Cross Roller


Stroke (mm)


ZV-25□A L,R,C 25 x 25 ±3.25 0.5 Aluminum Cross RollerZV-40□A L,R,C 40 x 40 ±6.5 1 Aluminum Cross RollerZV-60□A L,R,C 60 x 60 ±6.5 2 Aluminum Cross RollerZV-80□A L,R,C 80 x 80 ±12.5 5 Aluminum Cross RollerZV-100□A L,R,C 100 x 100 ±12.5 5.5 Aluminum Cross RollerZV-120□A L,R,C 120 x 120 ±25 6 Aluminum Cross Roller


Stroke (mm)


X-25□TI L,R,C 25 x 25 ±3.25 3 STEEL V-Groove RailX-40□TI L,R,C 40 x 40 ±6.5 4 STEEL V-Groove RailX-50□TI L,R,C 50 x 50 ±6.5 6 STEEL V-Groove RailX-60□TI L,R,C 60 x 60 ±6.5 8 STEEL V-Groove Rail


Stroke (mm)


ZH-40CA C 40 x 40 ±3 1 Aluminum Cross RollerZH-60CA C 60 x 60 ±6 4 Aluminum Cross RollerZH-80CA C 80 x 80 ±6 4 Aluminum Cross RollerZH-100CA C 100 x 100 ±12 5 Aluminum Cross RollerZH-40CT C 40 x 40 ±3 1 STEEL Cross RollerZH-60CT C 60 x 60 ±6 4 STEEL Cross Roller


Stroke (mm)


XY-25□TI L,R,C 25 x 25 ±3.25 3 STEEL V-Groove RailXY-40□TI L,R,C 40 x 40 ±6.5 4 STEEL V-Groove RailXY-50□TI L,R,C 50 x 50 ±6.5 6 STEEL V-Groove RailXY-60□TI L,R,C 60 x 60 ±6.5 8 STEEL V-Groove Rail

XYC-40□TI L,R 40 x 40 ±6.5 4 STEEL V-Groove RailXYC-60□TI L,R 60 x 60 ±6.5 6 STEEL V-Groove RailXYC-100□T L,R 100 x 100 ±12.5 8 STEEL Cross RollerXZV-60□TI L,R 60 x 60 ±6.5 5 STEEL V-Groove Rail


Stroke (mm)


X-25□A L,R,C 25 x 25 ±3.25 1 Aluminum Cross RollerX-40□A L,R,C 40 x 40 ±6.5 2 Aluminum Cross RollerX-60□A L,R,C 60 x 60 ±6.5 5 Aluminum Cross RollerX-80□A L,R,C 80 x 80 ±12.5 8 Aluminum Cross RollerX-90□A L,R,C 90 x 90 ±12.5 10 Aluminum Cross RollerX-100□A L,R,C 100 x 100 ±12.5 15 Aluminum Cross RollerX-120□A L,R,C 120 x 120 ±25 20 Aluminum Cross RollerX-150□A L,R,C 150 x 150 ±25 23 Aluminum Cross Roller


Stroke (mm)


XYZV-25□A L,R,C 25 x 25 ±3.25 0.5 Aluminum Cross RollerXYZV-40□A L,R,C 40 x 40 ±6.5 1 Aluminum Cross RollerXYZV-60□A L,R,C 60 x 60 ±6.5 2 Aluminum Cross RollerXYZV-80□A L,R,C 80 x 80 ±12.5 5 Aluminum Cross RollerXYZV-100□A L,R,C 100 x 100 ±12.5 5.5 Aluminum Cross RollerXYZV-120□A L,R,C 120 x 120 ±25 6 Aluminum Cross RollerXYZH-40□A L,R,C 40 x 40 ±6 1 Aluminum Cross RollerXYZH-60□A L,R,C 60 x 60 ±6 4 Aluminum Cross RollerXYZH-80□A L,R,C 80 x 80 ±12 4 Aluminum Cross RollerXYZH-100□A L,R,C 100 x 100 ±12 5 Aluminum Cross Roller


Stroke(°)


GX40-15W - 40 x 40 ±15 3 Brass Worm & GearGX40-35W - 40 x 40 ±15 3 Brass Worm & GearGX40-51W - 40 x 40 ±15 3 Brass Worm & GearGX60-60S - 60 x 60 ±10 6 Aluminum ScrewGX60-80S - 60 x 60 ±10 6 Aluminum ScrewGX80-87S - 80 x 80 ±10 15 Aluminum Screw

GX100-105S - 100 x 100 ±10 17 Aluminum ScrewGX60-60S-S - 60 x 60 ±10 12 Aluminum ScrewGX60-80S-S - 60 x 60 ±10 12 Aluminum Screw

GXY40-1535W - 40 x 40 ±13 2.5 Brass Worm & GearGXY40-3551W - 40 x 40 ±13 2.5 Brass Worm & GearGXY60-6080S - 60 x 60 ±10 6 Aluminum Screw

TXY-7612T - 76 x 120 ±1.5 3 STEEL Tilting

Model Type Table Size(Ø)

Stroke(°)


RS-40 R 40 360 2 Aluminum Surface SlideRS-60 L,R 60 360 3 Aluminum Surface SlideRC-80 R 80 360 7 Aluminum Cross Roller Bearing

RC-100 R 100 360 10 Aluminum Cross Roller BearingRC-120 R 120 360 12 Aluminum Cross Roller BearingRC-150 R 150 360 13 Aluminum Cross Roller Bearing


Stroke (mm)


DX-40SS L,R 40x40 ±4 5 Brass Lead ScrewDX-40S L,R 40x40 ±7 5 Brass Lead ScrewDX-60S L,R 60x60 ±9 7 Brass Lead ScrewDX-40R C 40x40 ±10 3 Aluminum Rack & PinionDX-46R C 40x60 ±20 4 Aluminum Rack & PinionDX-48R C 40x80 ±30 5 Aluminum Rack & Pinion

DX-410R C 40x100 ±40 5 Aluminum Rack & PinionDX-412R C 40x120 ±50 5 Aluminum Rack & PinionDX-414R C 40x140 ±60 5 Aluminum Rack & Pinion

XYZ-STAGE

ROTATION STAGE

GONIO STAGE

DOVETAIL STAGE (SCREW TYPE)

Lead Screw, Rack & Pinion

Patent

Z-STAGE (HORIZONTAL TYPE)


Tilting X & XY-AxisSuperprecision Gonio StageTilt Stage device

precision positioning stage motion system...precision positioning stage motion system printed in...

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