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Sapphire

Fab condition Room temp 21~25 ℃ ； △≦ ±1 /h℃ Humidity have to below: 80%

Cooling system confirmed the first lay-out 12 tools assy main piping stainless ； sub-piping stainless Inlet 26~30 ;outlet 32~36 ; T℃ ℃ △ ＝～ 6 (max=40 )℃ ℃ Flow rate ＝ 10m3/h; 3.5 bar

Power system confirmed the first lay-out 12 tools assy for local power cabinet 3 tools for one group and AVR is need Power cable tray is need

Layout status stilling on going To split management and engineering office Labby and show room lay-out Fab entrance room lay-out Fab window glass is need 3 rooms for CEO/GM/VP

Facility FDMS facility design management system final confirming

Air condition Broken repair one tool; PM one tool and total max capacity is 300T

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Sapphire

1. 原則上以能控制恆溫恆濕且無持續微塵污染源即可。2. 潔淨室溫度設計＜製程冷卻水。至少 1℃ 以上為避免冷凝水損害機台。3. 溫度設計實例 : 濕度需低於 80% ，△≦ ±1%/h 。

4. 單一機台供電 :3P4W380V(+3-1%)60Hz 需建置穩壓系統； R_Gnd 4≦ Ω 獨立接地 。5. 規劃 12 台設置容量， 8/E 兩台， 9/E 三台，含二次側。6. 單一機台用電 :280/280/20A; max=90kw; avg=75kw 。 ( 需三台一組已達相位平衡 )7. 每台機台約有 15kw 的能量散失 ( 變壓器 ) ，需要考量潔淨室空調或加裝 exhaust 排風。8. 製程冷卻水單一流量 10 m3/h(167LPM) inlet:26~29 ( ±1/h; T=6 ) ℃ △≦ △ ℃9. Gas system: Ar purity: 99.99% centre supply( 鋼瓶供氣 ) 。10.exhaust system: 一般排。

潔淨室條件 vs 機台主要需求

Grower (outlet water ＜40℃)water flow/h

inlet water

outlet eater

room temp

10m3 21 27 20℃5m3 21 33 20℃3.5m3 21 39 20℃10m3 26 32 25℃5m3 26 38 25℃

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Sapphireby pass line

Design Concept of Cooling Water System

Tank 2

10 tones

Chiller- 20cm tilt- 5cm distance between

growers- Valve close 2.6 bar- Valve open 1.5 bar- One production line have 12

tools

Tank 1

20 tones

EMO CT in

PumpNeed UPS

10m^3/hour

Heat Exchanger

Pump

at least 50cm lower than pipe

At least 4m higher than growers

△ ≦±1 /h; ℃T=6△ ℃

- Pipes and Tanks must be made of stainless steel or plastic that capable to withstand 4~6 bars and temperature up to 100 centigrade.

- Cooling water have to higher than room temp 1℃- ΔT≤+-1 /h℃- Add filter is need- Max temp below 40 ℃

S12.6bar35 ℃

S22.6bar30 ℃

S41.2bar33 ℃

S31.3bar28 ℃

by pass line

Manual valve control pressure

4 bar

To city Water exhaust

1. HH/LL sensor2. Leak sensor3. Over flow design

Funnel10 line

冰機冷卻水

製程冷卻水

1. HH/LL sensor2. Leak sensor3. Over flow design

Funnel10 line

CT refill

DI refill

EMO CT out

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Sapphire

1. 15s mean to next 15s mean vibration 1 mv≦2. Max vibration in 15s ＜ 4 mv3. Gnd ＜ 4 Ω4. 8~10 V must stable and control limit ＜ 1mv5. Water out have to less then 40 else water vapper ℃6. 12 set Grower power : 12*90=1080 kw7. Chiller = Take out thermal energy = 1080*1.25=1350 kw8. A group for 3 tools9. 3P4W400~420Vac(min376V)

Design Concept of Power System

Heater

thyristor

380V ACSpec: 415~376V

380V ACSpec: 0~380V

376V ACSpec: 0~376V

12V ACSpec: 0~12V

10V ACSpec: 0~10V

Growercontroller

3P; 4w 380V

穩壓器

Grower 1

Grower 2

Grower 3

R_Gnd 4≦ Ω; 機台需獨立接地

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Sapphire

1. Inside grower max power 75kw2. Outside grower 15kw lost by WATT power meter3. Cooling water by manual measurement by weight is 9.9 m3/h4. Total power= 75kwX3600s=270x10E6 (J)5. Total bring out thermal energy by cooling water is C x weight x T=4200x6x9900=249x10E6 (J)△6. 12 set tool =249x10E6x12set=2988x10E6(J)= 717.12x10E6 (cal)(1J=0.24cal)7. Total water cooling by grower= 237.14USRT(1USRT=3024kcal)8. Total air condition cooling by grower= 15kwx3600x12=648x10E6(J) = 155.52x10E3 k.cal=51.48USRT 9. Suitable condition by

Conclusion:

Grower (outlet water ＜40℃)water flow/h

inlet water

outlet eater

room temp

10m3 21 27 20℃5m3 21 33 20℃3.5m3 21 39 20℃10m3 26 32 25℃5m3 26 38 25℃

Grower (outlet water ＜40℃)water flow/h

inlet water

outlet eater

room temp

10m3 21 27 20℃5m3 21 33 20℃3.5m3 21 39 20℃10m3 26 32 25℃5m3 26 38 25℃