on nano/micro engineered systems (nems 2014) · christoph glacer, alfonsdehe, david tumpold, ......

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2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2014) Waikiki Beach, Hawaii, USA 13 16 April 2014 IEEE IEEE Catalog Number: CFP14NME-POD ISBN: 978-1-4799-4725-6

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Page 1: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

2014 9th IEEE International Conference

on Nano/Micro Engineered and Molecular

Systems

(NEMS 2014)

Waikiki Beach, Hawaii, USA

13 - 16 April 2014

IEEE IEEE Catalog Number: CFP14NME-POD

ISBN: 978-1-4799-4725-6

Page 2: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

Table of Contents

M1A: Best Student Paper Award Finalists

Fabrication and Evaluation of Silicon Micromechanical Resonator using Neutral Beam Etching 1

Technology

Nguyen Van Toan, Tomohiro Kubota, Halubai Sekhar, Seiji Samukawa, Takahito Ono

Nanorobotic End-effectors: Design, Fabrication, and in situ Characterization 6

Zheng Fan, Miao Yu, Cautham Dharuman, Xudong Fan, Lixin Dong

Silicon Microspeaker with out-of-plane Displacement 12

Christoph Glacer, Alfons Dehe, David Tumpold, Rainer Law

Nano-Engineered Alumina Surfaces for Prevention of Bacteria Adhesions 17

Ferdi Hizal, Natthakan Rungraeng, Soojin Jun, Chang-Hwan Choi

Robotic Enuleation for Oocytes 23

Q/7/' Zhao, Maosheng Cui, ChunyangZhang, Jin Yu, Mingzhu Sun, Xin Zhao

M1B: Micro/Nano Sensors & Actuators (I)

Design and Fabrication of a Micro-electromechanical System Sandwich Capacitive Accelerometer 28

Xiaofeng Zhou, Youling Lin, Lufeng che, Xiaolin Li, Jian Wu, Yuelin Wang

In-Plane-Excited Silicon Nanowire Arrays-Patterned Cantilever Sensors for Enhanced Airborne 32

Particulate Matter Exposure Detection

Hutomo Suryo Wasisto, Stephan Merzsch, Frederik Steib, Andreas Waag, Erwin Peiner

CMOS-Compatible Silicon Nanowire Field-Effect Transistors for Rapid and Label-Free Detection of N/A

MicroRNAs

Na Lu, Anran Gao, Pengfei Dai, Tie Li, Yuelin Wang

Detection of Hazardous Vapors Including Mixture in Different Conditions Using Surface Acoustic 38

Wave Device ArrayHsu Chao Hao, Ming Chang Chiang, Da Jeng Yao

A Monolithic CMOS-MEMS Tri-axis Accelerometer with Routing Free Out-plane Electrode Design N/A

and Frequency Division Multiplexing Readout Circuit Under 0.18um Standard Process

Hong-Ting Lin, Kuei-Ann Wen

M1C: Microfluidics & BioMEMS (I)

Influences of Locally Mechanical Stimulation on Cellular Behaviors via Microfabrication Approach 42

Chung-Yao Yang, Kai-Wei Liao, Chao-Min Cheng, J. Andrew Yeh

Blood Separation and Plasma Preparation on a Compact Disk Microfluidic Chip 47

Xuan-Fu Chen, Ju-Nan Kuo

DYNAMIC ATTACHMENT OF HEPG2 IN A FRACTAL MICROCHANNEL 51

L.J. Yang, J.C. Liang, C.Y. Liu, H.C. Han

A Fabrication Method for Carbon Nanotube-based Sensors on Paper Substrate n/aShih-I Yang, Kin Fong Lei

Focus Ion Beam Based Nanofluidic System for Biomolecule Characterization 55

Taylor Busch, Bo Ma, Steve Tung

M1E: Printed Electronics & MEMS Commercialization

QED Cooling of ElectronicsN/A

Thomas Prevenslik

Electrosprayed membrane with heat treatment 60

Weiwei Huang, Yuekun Zheng, Jin Wei, Yihong Lin, Mingfeng Zhuang, Wei Wang, Jianyi Zheng,

Yongqiang Hong, Daoheng Sun

Multi Spinnerets Electrospinning with Assistant Sheath Gas 64

Zhaojie Yu, Yihong Lin, Weiwei Huang, Mingfeng Zhuang, Yongqiang Hong, Gaofeng Zheng, Daoheng Sun

Page 3: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

Printed Actuators made with Electroactive Polymers on Flexible Substrates

Aurelia Plihon, Vincent Fischer, Fabrice Domingues Dos Santos, Romain Gwoziecki

68

M1F: Carbon Nanomaterials Based Devices

Highly Stable Chemical N-doping of Graphene Nanomesh FET. 72

Haider Al-Mumen, Lixin Dong, wen Li

First Adhesion Measurements of Conductive Ultrananocrystalline Diamond MEMS Sidewalls 77

Federico Buja, Jaap Kokorian, Anirudha V. Sumant, W. Merlijn van Spengen

Improved Performance of Transparent Silver Nanowire Electrodes by Adding Carbon Nanotubes 81

Thomas Ackermann, Serhat Sahakalkan, Yu Zhang, Andreas Mettenbdrger, Sanjay Mathur, Ivica Kolaric,

Engelbert WestkSmper

Electronic Transport in Carbon Nanotube-Graphene Contact N/A

Wuzhu Deng, Yang Li, Yangyang Chen, Ivhui Jiang, Wenli Zhou

IS1: Bioinspired/Nano/Micro Technologies for Biomedical and Industrial

Bioinspired Smart Material Systems: From Warm-blooded Plastics to Biomolecule Catch and N/A

Release

Ximin He, Ankita Shastri, MichaelAizenberg, Olga Kuksenok, Anna Balazs, Joanna Aizenberg

Nano/Micro-Particle Polymer Composite MEMS Corrosion Sensor: Polymer Swelling and Oxide n/a

Removal.

Po-Hao Adam Huang

Bio-inspired photonic materials: Exploiting nature's optical solutions for the development of novel N/A

sensing technologyMathias Kolle

Smartphone-based biosensors for point-of-care disease diagnosisN/A

Peter Lillehoj

A nanoengineered systems approach for probing collective cell migration N/A

Pak Kin Wong

DNA Identification by Matching Topographic Label Patterns to Transcript Database N/A

Miu-Ling Lam

Robust Self-Repairable Omniphobic Slippery Coatings on Industrial Metals N/A

Tak-Sing Wong

Optimization of Valveless Micropump for Drug Delivery 86

Jiaqi Wang, Kean Aw, Rajnish Sharma

IS2: Functional Materials and Devices for Molecular Based Electronics

Molecular Electronic Devices Using Carbon Nanomaterials-based Electrodes N/A

Xuefeng Guo

Self-Assembly of 3D Nanostructures for Breath Analysis and Chemoresistive Gas Sensing N/A

Antonio Tricoli

Organic Field-Effect Transistor Nonvolatile Memories: Elucidation of Charge Trapping Mechanism N/A

Xiao-Jian She, Xu Gao, Sui-Dong Wang

Surface Nanostructures of Diamond and Cubic Boron Nitride Films and Their Applications N/A

Wenjun Zhang

Hierarchical superhydrophobic surfaces for multifunctional applications N/A

Zuankai Wang

Printed floating gate flash memories and bio-sensors N/A

V. A. L. Roy

IS3: Nanotechnology in Food and Agriculture (I)

Development of cRNA-based Technologies for Biosensing Bacteria N/AJacek Wower, Christian Zwieb, Iwona Wower

Biosensor Based on Nano-Assembly for Rapid Detection of Infectious Pathogens N/A

Evangelyn Alocilja

Page 4: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

A Self-Referencing Detection of Pathogens Using Surface Enhanced Raman Scattering n/a

Nanoprobes in a nano-DEP Microfluidic Biosensor

Chao Wang, Foram Madiyar, Jun Li, Chenxu Yu

Nanoparticle Assisted Biofilm Disruption for Rapid Recovery and Detection of Bacterial Pathogens N/A

Tamara McNealy, Yong Li, David Garmire, Ryo Kubota, Daniel Jenkins

Painting with Fluorescent RNA Networks: A Novel Approach for Detecting Bacteria N/A

Jacek Wower, Iwona Wower

N/APrinted nanosensors for food safety and security

Paul Takhistov

M2D: Micro/Nano Robotics, Assembly & Automation

THE NANOWORKBENCH: Automated Nanorobotic system inside of Scanning Electron or 89

Focused Ion Beam Microscopes THE NANOWORKBENCH: Automated Nanorobotic systeminside of Scanning Electron or Focused Ion Beam MicroscopesIvo Burkart, Volker Klocke, Eva Maynicke

Bubble Micro-Manipulator for Cooperative Micro-Manipulation ^/AWenqiHu, QihuiFan, AlexanderNicholas, Michael Hagenow

Reduction of Machining Motion Error of an Aspheric Profile Coordinate Measuring Machine by a 93

New Error Compensation Method

Xiang Wei, Bing Li, Lijiao Jia, Zhuangde Jiang, Lei Chen

Investigation on Alignment of Dielectrophoretic Force Assembled Nanowires n/AQuan Tao, Guangyong Li

Position Determination of A Ball Grid Array by Automated Optical Inspection Method 97

Yi-Chuan Lin, Kerwin Wang

Precision improvement of MEMS gyros for indoor mobile robots with horizontal motion inspired by 102

methods of TRI2

Dongmyoung Shin, Sung Gil Park, Byung Soo Song, Eung Su Kim, Oleg Kupervasser, Denis Pivovartchuk,

llya Gartseev, OlegAntipov, Evgeniy Kruchenkov, Alexey Milovanov, Andrey Kochetov,

Igor Sazonov, Igor Nogtev, Sun Woo Hyun

Elasticity measurement of DNA origami nanotube in liquid with tapping mode AFM n/a

Longhai Li, Lianqing Liu, Osamu Tabata, Wen J. Li

M2E: Micro/Nano/Molecular Fabrication

Fabrication of Through-Silicon Vias (TSV) by Nickel Electroplating in Supercritical C02 108

Ho-Chiao Chuang, Wei-Hong Lai, Ai-Ho Liao, Chih-Chung Huang, Chih-Kuang Yeh

Super hydrophobic/Super hydrophilic Transparent Nanostructured Glass Fabricated by Wet 113

EtchingAmarendra Kumar, Kunal Kashyap, Kaiwei Liao, Max T. Hou, J. Andrew Yeh

Laser-Induced Greenish-Blue Photoluminescence of Mesoporous Silicon Nanowires n/AZhifeng Huang, Chorng Haur Sow

Laser Direct Nano-Structuring Assisted by Water Droplets 117

Y. J. Chang, C. H. Chang, C. C. Ho, J. C. Hsu, C. L. Kuo

Fabrication of Seamless Roller Mold with Wavy Microstructures Using Mask-less Curved Surface N/A

BeamPen Lithography

Sung-Wen Tsai, Po-Yu Chen, Cho-Wei Chang, Yung-Chun Lee

Molecular Dynamics Simulation of Molecular Orientation Transformation of Pentacene on a-Si02 121

YuanqiZeng, Bo Tao, Zhouping Yin

Nano-scale Tip Fabricated by Electro-chemical Machining for Nano Lithography 126

Y. J. Chang, H. K. Huang

M2F: Micro/Nano Sensors & Actuators (II)

Nanoscaled Biological Gated Field Effect Transistors for Cytogenetic Analysis 130

Winnie Edith Svendsen, Dorota Kwasny, Karsten Brandt Andersen, Azeem Zulfiqar, Maria Dimaki

Page 5: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

Nanomachined Truss-like Resonators as High Sensisitive Mass Detectors n/a

Giancarfo Canavese, Ivan Ferrante, Gian Carlo Gazzadi, Simone Marasso, Andrea Mura, Alessandro Ricci,

Carlo Ricciardi

Electromagnetic Wave Absorption Characteristics of H-Shaped Fractal Antenna for Multi-Band 135

Microbolometer

Kozaburo Takebe, Hidetoshi Miyashita, Keisuke Takano, Masanori Hangyo, Sang-Seok Lee

A Novel Interdigitated, Inductively Tuned, Capacitive Shunt RF MEMS Switch for X and K Bands 139

ApplicationsMahesh Angira, Kamaljit Rangra, G.M Sundaram

A Resonant MEMS Magnetic Field Sensor with Electromagnetic Induction Sensing 143

Dehui Xu, Guoqiang Wu

M2G: Microfluidics & BioMEMS (II)

An Aluminum Nano-Spike Electroporation Chip for Low Voltage Delivery of Molecules to Cancer Cells 147

KashifRiaz, Siu Fung Leung, Siddhant Tripathi, Gursimran Sethi, Hooman Shagoshtasbi, Zhiyong Fan,

Yi-Kuen Lee

NO Gradient Microfluidic Cell Culture Device Based on Spatially Controlled Chemical Reactions N/A

Ying-Hua Chen, Chien-Chung Peng, Yi-Chung Tung

Oviduct-Mimetic Chip to Improve In Vitro Fertilization for Oligozoospermia 152

Wei-Lun Kao, Da-Jeng Yao, Hong-Yuan Huang

Liquid-Liquid Two-Phase Microflow Patterns and Mass Transfer of Radionuclides 157

Gwendolyne Helle, C/arisse Mariet, Gerard Cote

PM1-A: Nanomaterials

The Efficiency of Transdermal a-Arbutin Delivery after Albumin Microbubbles Treatment with 163

Ultrasound in Mice

Ai-Ho Liao, Wan-Chun Ma, Ho-Chiao Chuang, Chih-Chung Huang, Chih-Kuang Yeh

Synthesis and Characterization of Zinc Oxide Nanoparticle for Reference Material n/A

Guo-Dung Chen, Han-Fu Weng

Epitaxial Growth Controlled Tailoring of Metal-Insulator (Ml) Transition Properties of Rare Earth 168

Correlated Oxides

Asiflqbal, Sabbir Ahmed Khan, Nafiz Ur Rahman, Tahsin Faraz

Fabrication of Light-accelerated Nanomotor based on Ti02/Pt/Au nanorod and Investigated Its N/A

Self-cleaning Effect

Isao Shitanda, Taiga Sagisaka, Yoshinao Hoshi, Masayuki Itagaki

Assemblies of Au Nanoparticles with Tunable Plasmonic Properties N/A

Michela Corricelli, Nicoletta Depalo, Elisabetta Fanizza, Angela Agostiano, Marinella Striccoli, Maria Lucia

Biotinylation of Silica Coated Near-Infrared Emitting PbS Nanocrystals for Molecular Recognition N/A

Nicoletta Depalo, Michela Corricelli, Elisabetta Fanizza, Emanuele Di Carlo, Doriana Debellis,

Angela Agostiano, Marinella Striccoli

Nano-Porous Membranes Mediate Podocyte Proliferation and Morphology 172

chih-shuan Lu

Localized Two-Step Galvanic Replacement of A Tip Apex Modification for Field Sensitive Scanning 176

Probe MicroscopyChun-Ting Lin, Mao-Nan Chang, Yu-Wei Chen, Shu-Hung Tung, Nancy Chu, Chien-Nan Hsiao,

Ming-Hua Shiao

Electrochemical sensing of potassium Based on G-quadruplexs structure n/aKuk Ro Yoon

The Study of Tungsten One-Dimensional Nanostructures by Simulated Annealing Basin-Hopping n/AMethod

Ken-Huang Lin, Shin-Pon Ju, Jia-Yun Li

PM1-B: MEMS Sensors

Development of A Novel Bidirectional Electrothermal Actuator and its Application to RF MEMS 180switch

Yan-qing Zhu, Lei Han, Ming Qin, Qing-an Huang, Ming-xia Jiang

Page 6: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

Achievement of a High-Sensitive and High-Overload Sensor Based on the Bossed-Diaphragm 186

Structure

Zhongliang Yu, Yulong Zhao, Lili Li, Cun Li, Guanwu Zhou, Bian Tian

MEMS-based Humidity Sensor Based on Thiol-coated Gold Nanoparticles 191

Che-Hsin Lin, Lung-Ming Fu, Chia-Yen Lee

A Virtual Gyroscope Based-on a Single-Chip Four-Microgyroscope Array 195

qiang shen, weizheng yuan, beini qu, jianbing xie, honglong chang

Effects of electrical current on microstructure and interface properties of Sn-Ag-Cu/Ag photovoltaic N/A

ribbons

Kuan-Jen Chen, Fei-Yi Hung, Truan-Sheng Lui, Li-Hui Chen, Dai-Wen Qiu, Sheng-Po Chang

Design of a Digital Closed Control Loop for the Sense Mode of a Mode-matching MEMS Vibratory 199

GyroscopeYuxian Liu, Weilei Feng, Chunhua He, Long Wang, Liguo Dong, Qiancheng Zhao, Zhenchuan Yang,Guizhen Yan

A Low-Noise CMOS Interface Circuit for Resonant Pressure Sensor 204

Xiaodong Sun, Weizheng Yuan, Sen Ren, Jinjun Deng, Chengyu Jiang

Digital Fast Startup Procedure for Micro-machined Vibratory Gyroscopes Using Optimized Fuzzy 208

Control StrategyLong Wang, Qiancheng Zhao, Minghao Nie, Dachuan Liu, Yuxian Liu, Junjie Yan, Zhenchuang Yang,Guizhen Yan

Nonlinearity Investigation ofthe MEMS Scanning Mirror with Electrostatic Comb Drives 212

Peigang Deng, Wei Ma

Pulse Mode Actuation-Readout System Based on MEMS Resonator for Liquid Sensing 216

Meng Tang, Alberto Cagliani, Zachary Davis, Lin He

PM2-A: BioMEMS

A High Density Full Blood Cells Self-Assembly Chip for Breast Cancer CTCs Detection N/A

Jui-Chia Chang, Tsung-Ju Chen, Hsuei-Yao Chu, Da-Cheng Yeh, Fan-Gang Tseng

Circulating Tumor Cell Isolation Device for On-Chip Microfluidic Whole Blood Analysis N/A

Yoo-sang Yoon, Sunki Cho, Rae-Kwon Kim, Su-Jae Lee, Seung-Beck Lee

RAPID BLOOD TYPING MONITORING VIA PAPER-BASED DIAGNOSTIC DEVICES N/A

Shang-chi Lin, Shueh-Yao Chu, Chao-Min Cheng, Fan-Gang Tseng

On-Chip Manipulating and Impedance Spectroscopy Sensing of Single Mouse Embryo 220

Zhuoqi Li, XinwuXie, Weixing Chen, Weiran Liu, Ran Liu

Diffuser-Type Micro Fluidic System for High-Throughput Sperm Sorting Based on Sperm's Moving N/A

Against Flow Behaviour

Yu-Nan Lin, Peng-Chun Chen, Ren-Guei Wu, Li-Chem Pan, Fan-Gang Tseng

A MICROFLUIDIC DEVICE FOR SINGLE EMBRYO POSITIONING AND CO-CULTURE WITH N/A

THREE-DIMENSIONAL CELLS

Zhuoqi Li, Weixing Chen, Weiran Liu, Dong Wang, Ran Liu

PM2-B: Micro/Nano Sensors

Cardiomyocyte Sensor Responsive to Changes in Chemical Environments 225

Jin You, Hyowon Moon, Boo Yong Lee, Ju YoungJin, Zi Eun Chang, Jungyul Park, Yu-Shik Hwang,

Jun-Kyo Francis Suh, Jinseok Kim

Bio-mimetic Fingerprint and Epidermal Board for Tactile Sensor Application N/A

Eunsuk Choi, Soonhyung Hwang, Hyunsuk Chun, Joonhyung Cho, Hyungyu Lee, Seung-Beck Lee

Microfabricated SOI Pressure Sensor using Dynamically Balanced Lateral Resonator 229

Sen Ren, Weizheng Yuan, Xiaodong Sun, Jinjun Deng, Dayong Qiao, Chengyu Jiang

A Novel Piezoelectric Acoustic Sensor for Mimicking Human Auditory System N/A

Ji Hye Lee, Jun Young Lee, Jong-Souk Yeo

The Weak-light Readout and Display of Lower Dimension Photodetector 233

X. Y. Liu, J. H. Shen, F. M. Guo', M. J. Wang, L. Ding, S. H. Zhang

A gas sensor based on natural dye-sensitized Ti02 thin film for pork-borne amines monitor 237

Yanxiao Li, Xiaobo Zou, Xiaowei Huang, Jiyong Shi, Jiewen Zhao

Page 7: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

Resonant Pressure Sensor with Through-glass Electrical Interconnect Based on SOI wafer 243

Zhenyu Luo, Deyong Chen, Junbo Wang

Rapidly Bio detection by High Sensitive AC Electroosmosis Chip Concentrate SERS Nanoparticles n/A

and Biomolecules SimutaneouslyChun-Wei Lee, Fan-Gang Tseng

Introduction of Ruthenium Complexes onto Triethylenediamine-Modified MWNT Supports and N/A

Their Application asElectrogeneratedChemiluminescence (ECL) Biosensors

Seong-Ho CHoi

PM2-C: Carbon Nanomaterials Based Devices

A Dual-gate Ambipolar Graphene Field Effect Transistor 247

Wang Pan, Yang Li, Wuzhu Deng, Yangyang Chen, Wenli Zhou

Low-temperature compatible electrostatic comb-drive actuators with integrated graphene 251

Matthias Goldsche, Pascal Kaienburg, Chhstoph Neumann, Gregor Mussler, Stefan Trellenkamp,

Christoph Stampfer

Current-Voltage Characteristics of CNTFET Considering Non-Ballistic Conduction: Effect of 256

Dielectric Constant

Nirjhor Tahmidur Rouf, Ashfaqul Haq Deep, Rusafa Binte Hassan, SabbirAhmed Khan, Mahmudul Hasan,

SharifMohammad Mominuzzaman

Enhancement of Catalytic Efficiency by Partial Replacement of Ruthenium with Platinum 260

Nanoparticles for Direct Methanol Fuel Cell

Chuan Chang, Liang-You Lin, Yi-Shiuan Wu, Fan-Gang Tseng

Resistive Switching Memory Device Consisted of Au Quantum Dots Embedded in Si02 N/A

on Single-Graphene Layer

Dong Uk Lee, Joon Sub So, Bun Kyu Kim

T1A: Best Conference Paper Award Finalists

A Micro-sized Microbial Solar Cell 265

San Yoon, Hankeun Lee, Arwa Fraiwan, Chunhui Dai, Seokheun Choi

Microfabrication of High Aspect Ratio Microtubes Arrays to Store High Density Charged Particles 269

Alireza Narimannezhad, Joshah Jennings, Marc Weber, Kelvin Lynn

Nanorobotic Processing of Graphene for Rapid Device Prototyping 275

Sdren Zimmermann, SergioAlfredo Gamica Barragan, Serge/ Fatikow

A Microfluidic Device for Automatic Embryo Trapping and Coculture with Stromal Cells in Vitro 281

Chi-Fan Chen, Kuo-Wei Chang, Ting-Ru Yueh, Hong-Yuan Huang, Chen-Shien Liu

NANOLOCALIZED SINGLE CELL MEMBRANE NANOELECTROPORATION 285

Tuhin Santra, Chun-Wei Lee, Srabani Kar, Jayant Borana, Peng-Cheng Wang, Fang-Gang Tseng

T1B: Microfiuidics & BioMEMS (III)

Design and Fabrication of Micro Hot-wire Flow Sensor Using 0.35pm CMOS MEMS Technology 289

Zhuonan Miao, Christopher Chao, Yi Chiu, Chia-Wei Lin, Yi-Kuen Lee

Numerical Simulation on the Formation of a Toroidal Microvortex by the Optoelectrokinetic Effect 294

Dong Kim, Jaesool Shim, Kyung Chun Kim

Liquid-Liquid Phase Separator for Synthesizing Gold Nanoparticles in Toluene 298

Ho-Cheng Lee, Che-Hsin Lin

Study Cell Migration under Perpendicular Chemokine and Oxygen Gradients in Microfluidic N/A

Chia-Weng Chang, Yung-Ju Cheng, Yueh-Ning Ku, Yi-Chung Tung

Molecular Delivery and Transfection by Laser -Induced Oscillating Microbubbles 302

Qihui Fan, Wenqi Hu, Aaron Oh/a

An Accessible Superhydrophobic Coating with Nanostructure for Continuous Oil/Water Separation 306

Wang Yaqun

A Nonlinear Cell Electroporation Model and Its Verification Using Micro Electroporation ChipsPeigang Deng, Hongbin MEI, Yi-Kuen Lee

311

Page 8: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

T1C: Microfluidics & BioMEMS (IV)

Design and Fabrication of Multi-scale Label-free Protein Microarray with Nanogratings N/A

on Micro-well Structures for Parallel Detection

Jongmyeong Shim, Eikhyun Cho, Taekyung Kim, Ryung Shin, Myungyon Kim, Jinhyung Lee, Younggeol Cho,

Shinill Kang

Pulsed Laser Activated Cell Sorting with Three Dimensional Sheathless Inertial Focusing 315

Yue Chen, Aram Chung, Ting-Hsiang Wu, Michael Teitell, Dino Di Carlo, Pei-Yu Chiou

Towards Optimized Conception of SSAW-Based Acoustic Tweezers 319

Sylvain Torn, Marie Frenea-Robin, Francois Buret

Enabling Local Deposition and Controlled Synthesis of Au-Nanoparticles Using a Femtopipette 323

Hector Hugo Perez Garza, Murali Krishna Ghatkesar, Per Lothman, Andreas Manz, Urs Staufer

Passive Autonomous Lab-On-Chip TechnologySebastian Wahl, Bruno Mercier, Frederic Flourens, Dan Angelescu

Rapid detection of bladder cancer using immunoassay transistor combined with DNA labeling 329

technique in microfluidic chipPo-Yu Peng, Wei-Chieh Hsu, Tung-Ming Pan, Yen-Heng Lin

SOI Technology-Based Microfiltration System for Circulating Tumor Cells Isolation and 333

Wei MA, Ronghao ZENG, Dayu Liu, Yitshak Zohar, Yi-Kuen Lee

T1D: Micro/Nano Sensors & Actuators (III)

The Phenomenon of "Sharp Corner" of Electrolyte-Oxide-Semiconductor Structure for Copper Ions 337

Detection

J. G. Gao, H. Wang, P. C. Ma, W. G. Wu

A SOI Sandwich Differential Capacitance Accelerometer with Low-stress Package 341

Yangxi Zhang, Chengchen Gao, Fanrui Meng, Yilong hao

A Micro Resonant Acceleration Sensor Comprising Silicon Support with Temperature Isolator and 346

Quartz Doubled Ended Tuning Fork

Cun Li, Yulong Zhao, Rongjun Cheng

Fluid Structure Interaction Analysis and Simulation of Micromachined cantilever-based flow sensor 350

Pei Chen, Yulong Zhao, Yiyao Li

Electrochemical Properties of Microelectrode Fabricated by Screen-Printing n/a

Masayuki Itagaki, Yasufumi Asano, Yoshinao Hoshi, Isao Shitanda

Feasibility Study of a Pressure Sensor Based on Double-Ended Tuning Fork Quartz Resonator 354

Rongjun Cheng, Yulong Zhao, Cun Li

Development of Microplasma Devices Arrays for Maskless Nanoscale Material Etching 358

Li Wen, Han Xie, Jiaru Chu, Hai Wang

T1E: Micro/Nano/Molecular Fabrication (II)

FIELD-ASSISTED TITANIUM-GLASS BONDING 362

Tianyu Li, Yiming Zhang, Jin Luo, Jing Chen

Filling Through Silicon Vias with Conductive Ferromagnetic Silver-iron Composite 366

Chung-Han Lu, Kerwin Wang

Capacitor Discharge Sintering with Silver-Nickel Nano-composite in the Interconnection of 370

Thermoelectric Generators

C.H. Lu, Y.C. Lin, K. Wang, M.J. Dai, L.L. Liao, H.C. Chien, Y.S. Chen

Fabrication of 2D-Extruded Fractal Structures Using Repeated Corner Lithography and Etching 374

Erwin Berenschot, Hadi Yagubizade, Henri Jansen, Marcel Dijkstra, Niels Tas

Fabrication of Piezoelectric Zinc Oxide Nanorods by Electrospraying Method 378

Shao-Yu Wang, Kun-Hao Hung, Yi-Chian Chen, Cheng-Tang Pan, Zong-Hsin Liu, Chung-Kun Yen,

Wei-Chuan Wang

Selective Patterning of Indium Tin Oxide Films Using 1064 nm Laser for Micro Parts Processing 382

Kun-Tse Tu, Chen-Kuei Chung

Page 9: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

T1F: Nanomaterials (I)

Quantum Cloakings Hide Electronic Devices 386

Jeng-Yi Lee, Ray-Kuang Lee

Silicon Substrate Strength Enhancement Depending on Nanostructure Morphology 390

Kunal Kashyap, Amarendra Kumar, Chung-Yao Yang, Max T. Hou, J. Andrew Yeh

Superficial Nanocrystallization of AISI 304 Stainless Steel Induced by Surface Mechanical Attrition N/A

Treatment and its Effect on Structure and PropertiesShan CAO

Size Effect of Mesoporous and Hollow Silica nanoparticles on Tumor Targeting and Penetration N/A

Linlin Li, Tianlong Liu, Longfei Tan, Changhui Fu, Huiyu Liu, Xianwei Meng

"Ship-in-a-Bottle" Synthesis of bimetallic nanocrystals in hollow silica nanospheres N/A

Longfei Tan, Linlin Li Li, Tianlong Liu, Xianwei Meng

Zinc Oxide-based Nanosensor for the Ultra-sensitive Detection of Troponin-T N/AMichael Jacobs, Sriram Muthukumar, Shalini Prasad

T1G: Heat Transfer & Energy Conversion

Reduced thermal conduction in Si nanowires and phononic crystal nanostructures fabricated using N/A

EB lithographyMasahiro Nomura, Jeremie Make

The Influence of Light Soaking on Photovoltaic Performance in Solid-State Dye-Sensitized Solar N/A

CellsLei Yang, Dongqin Bi, Gerrit Boschloo, Anders Hagfeldt, Erik Johansson

Development Of Multiple Layered Micro-reformer With Heat-Exchanger For PEMFC N/A

Shih-Yi Fu, Hsueh-Sheng Wang, Fan-Gang Tseng

A Paper-based Bacteria-Powered Battery Having High Power Generation 394

Arwa Fraiwan, Chunhui Dai, Thu H Nguyen, Seokheun Choi

T2A: CM Ho Best Paper Award in Micro/Nano Fluidics Finalists

A clogging-free microfluidic platform for size independent single cancer cellular electrical property 398

characterization

Song-Bin Huang, Yang Zhao, Deyong Chen, Hsin-Chieh Lee, Yana Luo, Tzu-Keng Chiu, Junbo Wang,Jian Chen, Min-Hsien Wu

Novel 3D Nano-Fence Matrixes for Integrated Nanofluidic Channels 403

Pengcheng Ma, KaiZhang, Wengang Wu

Rare Cells Detection by Selective Enrichment with a Novel Multilayer Concentric Filter Device 407Chih Chung Chen, Yu-An Chen, Da-Jeng Yao

Analytical Design and Fabrication of Thermal Latch Valve Driven Flexible Microscaffold for 411

Applications in Tissue EngineeringPuwanan Chumtong, Masaru Kojima, Mitsuhiro Horade, Kenichi Ohara, Kazuto Kamiyama, Yasushi Mae,Yoshikatsu Akiyama, Masayuki Yamato, Tatsuo Arai

The Fabrication of PDMS-based Functional Surface Mimicking Namib Desert Beetle Back for 417

Collecting Water Vapor in the Air

Wei Hu, Wen Liu, Fuyun Zhu, Xiaosheng Zhang, HaiXia Zhang

IS4: Advanced Micro/Nano/Bio Assembly

Self-Assembly of Statistical Patterns N/A

Russell Deaton

Nano-Building Block Toolboxes ("Nanotoolboxes") for Programmable Self-Assembly of Advanced N/AMaterials and Devices

Jin-Woo Kim

Stacked paper microfluidic devices for automated biosensing N/APeter B. Lillehoj

Multiscale Modeling of Biomaterials to Determine Mechanical Properties N/A

Awn K. Nair

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Insights into self-assembling systems provided by computational theoryMatthew Patitz

Video Rate Imaging using Atomic Force MicroscopyNingXi

Printed low temperature transparent metal oxide thin film transistors

Zheng Chen, Xinzhou Wu, Teng Zhou, Zheng Cui

The Virtual Gyroscope TechnologyHonglong Chang

IS5: Nanotechnology in Food and Agriculture (II)

Paper Microfluidics for Red Wine TastingTu San Park, Cay/a Baynes, Seong-ln Cho, Jeong-Yeol Yoon

In Situ Synthesis of Gelatin-capped Gold Nanoparticles as Food Thermal History Indicator

Seokwon Lim, Sundaram Gunasekaran

Fabrication of a Pro-Adhesive Surface Using Electrospun PCL Nanofibers Interspersed with

Peptide Conjugated Polystyrene Particles

Ariana Nicolini, Celine Cohn, Jessica Gamboa, Marvin Slepian, Xiaoyi Wu, Jeong-Yeol Yoon

Assessment of trophoblast derived cells behaviors on Ti02 nanotube arrays coated with gold

nanoparticles by fluorescence microscopy and Raman spectroscopyQifei Li, Sierra Heywood, Spencer Williams, S. Clay Isom, Anhong Zhou

Nano-Biosensor for Biomarker Monitoring in Disease ProgressionEvangelyn Alocilja, Yun Wang

T2C: Microfluidics & BioMEMS (V)

Co-cultured Cluster Formation and Self-organization of Cells in Hydrophilic Tapered Microwell

ArrayMasashi Ikeuchi, Shuji Hayashi, Koji Ikuta

An Integrated Microfluidic Chip for the study of Metastasis and AngiogenesisYong-Yu Hsu, Kuo-Wei Chang, Tse-Shao Chen, Kang-Yun Lee, Chen-Shien Liu

Design of Micromachined Condenser Microphone with Concave Backplate and Comparison with

Flat Backplate MicrophoneXiaomei Shi, Ching-Hsiang Cheng

A Novel Design of Hollow Microneedle for Blood Extraction

Hoa Le-Thanh, Nhut Tran-Minh, Hai Le The, Frank Karlsen

Paper-fluidic Enzymatic Electrochemical Biosensing

Jiang Yang, Woo-jin Chang, Sundaram Gunasekaran

Nucleus Extraction from Cells by Optical-induced Cell Lysis on a Continuous Flow Platform

Shih-Shaun Huang, Gwo-Bin Lee

An Integrated Microfluidic System for Screening of Peptides Specific to Colon Cancer Cells and

Colon Cancer Stem Cells Using the Phage Display TechnologyYu-Jui Che, Huei-Wen Wu, Lein-Yu Hung, Hwan-You Chang, Gwo-Bin Lee

T2D: Micro/Nano Sensors & Actuators (IV)

Wireless Shock Recording through The Integration of LC Circuits and Micro Mechanical-latch

Switch

Sung-Yueh Wu, Chen-Yuan Hung, Yi-Chueh Shieh, Wensyang Hsu

A Miniature Fabry-Perot Pressure Sensor for Intracranial Pressure Measurement

Yuting Li, Wentao Zhang, Fang Li

A Wireless Micro Thermal Actuator Powered through LC Circuits

Sung-Yueh Wu, Chen-Yuan Hung, Wensyang Hsu

Fabrication and Characterization of Single-crystal Silicon Carbide NEMS for Sensor Applications i

Harsh Environment

Feng Zhao

Page 11: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

A Memristor-Based LUT For FPGAs

HaiderAbbas F. Almurib, Nandha Kumar Thulasiraman, Fabrizio Lombard!

448

A SOI-MEMS ATMOSPHERE PRESSURE SENSOR AND ITS LOW STRESS PACKAGING 454

Lidong Du, Mengying Zhang, Zhan Zhao, Liang Li, Zhen Fang

T2E: Micro/Nano/Molecular Fabrication (III)

A Soft PDMS/Metal-Film Photo-Mask Apply in Patterned Sapphire Substrates mass production N/A

Yi-Ta Hsieh, Yung-Chun Lee

Wide-area Water Repellent Plastic Plate with Nano-periodic Structure N/A

Masafci Yamaguchi, Shinya Sasaki, Yuto Sasaki, Shojiro Suzuki

Fabrication of Spiral-Shaped PVDF Cantilever Based Vibration Energy Harvester 458

Wen Liu, Mengdi Han, Xuming Sun, Haixia Zhang

High Throughput Deep Submicron Scanning Probe Lithography using Two DOF MEMS Actuators N/A

with Integrated Nano-TipsEmad Mehdizadeh, Siavash Pourkamali

Direct Ga and Si Ion Beam Lithography for Nanopore Fabrication with High Resolution and N/A

ReproducibilityAndre Linden, Joel Fridmann, Jason E. Sanabia, Sven Bauerdick, Achim Nadzeyka, Lars Bruchhaus

T2F: MEMS/NEMS Applications

Integration of Micro Sensors with Mobile Devices for Monitoring Vita! Signs of Sleep Apnea 462

Patients

Rong Zhu, Zhe Cao, Ruiyi Que

A Temperature Compensation System for Silicon Pressure sensor Based on Neural Networks 467

Guanwu Zhou, Yulong Zhao, FangFang Cuo

Analysis of Practical Scaling Limits in Nanoelectromechanical Switches 471

Vaishnavi Ranganathan, Srihari Rajgopal, Mehran Mehregany, Swarup Bhunia

Design and fabrication of lens selectively coated with TFMG for uniform intensity of UV LED 477

Po-Hung Lin, Cheng-Tang Pan, Yi-Chian Chen, Feng-Tzu Hsu, Po-Hsun Lin, Jr-Ching Huang,

Che-Ming Chang, Sheng-Chih Shen

Optimal Design of Wet Cell for the Thermal System in the Scanning Electron Microscope N/A

Hsin-Hung Lee, Cheng-Yu Lee, Chun-Lin Chiang, Kun-Chih Tsai, Win-Ti Lin

T2G: Nanophotonics

High-Aspect-Ratio Plasmonic U-Shaped Nano-Cavity with High Sensitivity and Figure of Merit N/A

Ya-Lun Ho, Yaerim Lee, Etsuo Maeda, Jean-Jacques Delaunay

Generation of Electric-fields Enhancements by Focused Radially Polarized Beams N/A

Kyoko Kitamura, Ting Ting Xu, Susumu Noda

Three dimensional single-molecule tracking with confocal-feedback microscope 481

Cong Liu, Quincy Zhuang, Hsin-Chih Yeh

Plasmon Enhanced Faraday Rotation in Inhomogeneous Nanostructures N/A

Zhyrair Gevorkian, Vladimir Gasparian

PT1-A: Microfluidics

Capillary Kinetics of Ferrofluid in Hydrophilic Microscope Slide Nanochannels 485

Wei-Kai Wang, Ju-Nan Kuo

Performance Improvement of Multi-electrode Micropump using Various Actuating Signals N/A

Pyohwan Hong, Deaseung Pyo, Chanseob Cho, Jonghyun Lee, Byeungleul Lee, Young-Soo Sohn,

Bonghwan Kim

Microvesicle Fractionation Using Deterministic Lateral Displacement Effect 490

Andr&s J. Laki, Lilla Botzheim, Krist6flv$n, Viola Tamasi, Tam&s Szabo, Edit Buz&s, Pieriuigi Civera

High Performance Thread-based CE-EC System with Variable Volume Injection Capability and 3D 494

Detection Electrodes

Yu-An Yang, Yi-Chi Wei, Cfie-Hsi'n Lin

Page 12: on Nano/Micro Engineered Systems (NEMS 2014) · Christoph Glacer, AlfonsDehe, David Tumpold, ... Soojin Jun, Chang-HwanChoi RoboticEnuleation for Oocytes 23 ... Lung-MingFu, Chia-YenLee

Study of Micro-channel Shape and Material Property on Cooling Performance of High Power LED

ChipsQian Mao, Peigang Deng

Extinction Coefficient of Water-based MWCNT Nanofluids for Application in Direct-Absorption

Solar Collectors (DASC)

Seung-hyun Lee, Seok Pit Jang

E-BEAM CROSSLINKING AND THERMAL DEGRADATION OF HYDROGEL UNDER ELECTRON

MICROSCOPE

Chih-Hsiang Kuo, Tsu-wei Huang, Shih-Yi Liu, Hsin-Yi Hsieh

PT1-B: MEMS/NEMS Applications

A Convenient Wafer Level Bonding Based on Unpatterned BCB

Lei Li, Kangfa Deng, Wen Xia, Ningli Zhu, Song Li, Weiguo Su, Wei Zhang

ZTO Thin Films for Glucose Biosensor

Sheng-Po Chang, Po-Jui Kuo, Kuan-Jen Chen, Shoou-Jinn Chang

Effect of Taper Angle on Serpentine Microspring Deformation

Hui-Min Chou, Meng-Ju Lin, R. Chen

Using TD-GC-MS to Measure and Analyze Coffee Beans Aroma of Different Roasting Levels

Chia-Hui Li, Li-Huan Chieng, Da-Jeng Yao

Study on Compatible CMOS-MEMS Process with Surface Micromachining for the Application of

Monolithic Integration

Danqi Zhao, Xian Huang, Jun He, Li Zhang, Peng Liu, Fang Yang, Dacheng Zhang

Effect of RF Plasma treatment on Inkjet-printed Silver Nanoparticle

Hyun-Seok Kim, Kwon-Yong Shin, Sang-Ho Lee, Jung-Mu Kim

Monolithic Lorentz-Force Z-Axis Magnetometer And Readout Circuit on Standard 0.18pm 1P6M

CMOS TechnologyTai-Wei Chiang, Kuei-Ann Wen

A Directional Anemometer Based on MEMS Differential Pressure Sensors

Cheng Liu, Lidong Du, Zhan Zhao, Liang Li, Zhen Fang

Micromachined Substrate Integrated Waveguides with Electroplated Copper Vias Embedded in

Reflowed Glass Dielectric Substrate

Ik-Jae Hyeon, Chang-Wook Baek

Enhanced Light Extraction of Organic Light Emitting Diodes by Embedding Printed Polymethyl

Methacrylate Dot ArrayLu Zhou, Jinyong Zhuang, Minshun Song, Weichen Wu, Shuhong Nie, Wenming Su, Zheng Cui

Inkjet-Printed Silver CPW with Narrow GapHyun-Seok Kim, Gyu-Young Yun, Sang-Ho Lee, Ignacio Llamas-Garro, Jung-Mu Kim

The Illumination Uniformity Study of Diffuser Plates for Reflective LED Desk LightingPo-Li Chen, Wei-Jei Peng, Han-Ting Chen, Hui-Jean Kuo, Yu-Hsin Lin, Yu-Hsiang Tang, Chien-Nan Hsiao,

Ming-Hua Shiao

Size Scaling of Printed Microstructures Using a Lift-off Printing (LoP) Process

Yu-Min Fu, Yen-Ju Liang, Yu-Ting Cheng, Pu-Wei Wu

PT2-A: Nanophotonics

Infrared Absorption Enhancement Phenomenon on Nano Materials

Jae Hong Park

Experimental Investigation of 3D Plasmon Talbot Effect

Yiting Yu, Hans Zappe

Photonic nanojet in non-spherical micro-particles

Cheng-Yang Liu, Li-Jen Chang, Lung-Jieh Yang

Plasmonic Properties of Metal Nanodot Arrays with Same Diameter utilizing Nanoporous Alumina

Mask

Mi Jung, Chulki Kim, Taikjin Lee, Jae Hun Kim, Seok Lee, Deokha Woo

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Fabrication Technology for Three Dimensional Metallic Photonic Crystal Slab

Etsuo Maeda

540

Blue-Shifted Photoluminescence of MEHPPV Attained by a Novel Droplet Laser Processing N/A

Masato Kawabata, Akihiro Tomioka, Kouhei Takada

Optical Manipulation of Pairing Biological Cells Using an Artificial Potential Field Based Controller 544

Mingyang Xie, Yong Wang, Dong Sun

PT2-B: Micro/Nano Fabrication

Reversible Nano-Lithography between Materials 549

Jae Hong Park

Novel Shrink Lithography by External Stress Orthogonal to the Critical Dimension N/A

Chung-Yuan Yang, Jian-Wei Hong, Chin-Yen Lin, Cheng-Yao Lo

Superhydrophobic Surface Obtained by Micro/Nano Textured Structure and Polymer Coating N/A

Deaseung Pyo, Pyohwan Hong, Chanseob Cho, Jonghyun Lee, Byeungleul Lee, Bonghwan Kim

Development of Catalytic Etching using Dual Materials 551

Mao-Jung Huang, Nien-Nan Chu, Chun-Ming Chang, Ming-Hua Shiao, Chien-Nan Hsiao

Throughput Comparison of Multi-exposure and Multi-beam Laser Interference Lithography on 555

Nano Patterned Sapphire Substrate Process

Te-Hsun Lin, Tze-Bin Huang, Yin-Kuang Yang, Kuo-Chun Tseng, Chien-Chung Fu

Evaluation of Au/a-Si Eutectic Wafer Level Bonding Process 560

Xian Huang, Jun He, Li Zhang, Fang Yang, Dacheng Zhang

Development of Composite Vertical Wet Etching for Silicon Material 564

Mao-Jung Huang, Chun-Ming Chang, Chii-Rong Yang, Nien-Nan Chu, Yu-Hsiang Tang

Mechanical Strength Measurement of Micro Anchor-Beam Combined Structure Fabricated by 568

Silicon-on-Glass Process

Jun He, Xian Huang, Li Zhang, Danqi Zhao, Fang Yang, Wei Wang, Dacheng Zhang

Spin coating of uniform photoresist for pattern transfer on micromachined 3-D surfaces N/A

Ying-Bin Wang, Yu-Hsin Lin, Wensyang Hsu

Flow Instability with Different Viscous Fluids in Concentric-cylindrical Shell for Micro/nano Devices N/ADandan Liu, Zhijun Ma, Jian Yang, Weiping Wang, YumeiXu, Shen Jian

Self-assembly of Colloid Nano Particle by Evaporation-induced Method 572

Su Zongming, Zhang Xiaosheng, Zhang Haixia

The SWCNTs film-silicon vertical heterojunction fabricated by drop-casting technique 578

Peng Liu, Yiyang Chang, Jinwen Zhang

Large Scale and High Yield Assembly of SWNTs by Sacrificial Electrode Method 582

Tao Yu, Mengge Li, YuXiang, Jinwen Zhang

W1A: Micro/Nano Sensors & Actuators (V)

The application of a new beam-rigid body MEMS gyroscope in the frequency-modulation mode 586

S. A. Mousavi Lajimi, G. Heppler, E. Abdel-Rahman

Polymer Material Grating Used on Contactless Sub-Wavelength MEMS Physical Sensors 592

Kuo-Chun Tseng, Te-Hsun Lin, Norbert Modsching, Wei-Leun Fang, Chien-Chung Fu

A Capacitive Micromachined Ultrasonic Transducer (CMUT) Array with Nickel Membranes in A 596

Convex Shape

Po-Fat Chong, Xiaomei Shi, Ching-Hsiang Cheng

Label Free Detection of Proteins and Target Cells by Using a Novel Nanoelectronic Biosensor N/ARahim Esfandyarpour, MehdiJavanmrad, Zahra Koochak, James Harris, Ronald Davis

Capacitive Micromachined Ultrasonic Transducer for Ultra-low Pressure Detection 600

Zhikang Li, Libo Zhao, Zhuangde Jiang, Zhiying Ye, Yulong Zhao

Inkjet printing of microstructures with magnetic anisotropy N/ALoic Jacot-Descombes, Maurizio R. Gullo, Victor J. Cadarso, Olgac Ergeneman, Massimo Mastrangeli,Christian Peters, Philipe Fatio, Mouhamadali Freidy, Christofer Hierold, Bradley J. Nelson, Juergen Brugger

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W1B: Micro/Nano Sensors & Actuators (VI)

Immunosensor with well-separated Polyaniline Nanowires for Determination of Isoelectric Point 604

based on Electrochemical Impedance SpectroscopyCheng-Hsin Chuang, Hung-Liang Chien

Miniaturized Wireless Implantable Electrochemical Sensing Platform N/A

Muhammad Mujeeb-U-Rahman, Mehmet Sencan, Axel Scherer

Electrospun PVDF fibers on bio-wings using multi-spinnerets 609

C.K. Yen, C.H. Tsao, C.T. Pan, H.C. Wu, Uwei Lin, S. W. Kuo, Y. S. Lu, Y.C. Lai, Z.H. Liu, Y.L Lin,H.L Hung, S.W. Mao, C.F. Liu, S.C. Shen

Co-axially electrospun PVDF fibers with hollow wall 614

Y.C. Lai, H.C. Wu, C.T. Pan, LiweiLin, C.K. Yen, C.H. Tsao, S. W. Kuo, Y. S. Lu, S.C. Shen

Characterization of a Nanoparticle Collector with Embedded MEMS-Based Mass Monitors N/A

Emad Mehdizadeh, Varun Kumar, Siavash Pourkamali

Simulation and Experiments of Broadband Piezoelectric Energy Harvesting Devices 618

Hai Wang, Xuan Zhou, Wanqun Qiu, Bangchen Fu, Li Wen

Simulation of piezoelectric plasma micro-thruster 622

Hai Wang, Yang An, Than Wang, Han Li, Li Wen

W1C: Microfluidics & BioMEMS (VI)

Multi-antibody Array Chip for Immunoassay of Different-grade Bladder Cancer Cell Lysates based 626

on DEP Manipulations of NanoprobesCheng-Hsin Chuang, Jing-Wei Ju, Kai-Chieh Chang, Yao-Wei Huang, Chun-Ping Jen

A Flexible Parylene-Based Intraocular Pressure Sensor N/A

Brian Crum

The Demand Model of Electric Field Strength on Microelectrode Designed for AC Electrokinetic 628

ApplicationsNurul Amziah Md Yunus, Haslina Jaafar, lihal Abdul Halin, Jasronita Jasni

Particles Sorting in Micro-Channel Using Magnetic Tweezers and Optical Tweezers 633

Yung-Chiang Chung, Po-Wen Chen, Jyun-Hong Jheng

A Micro-sized Microbial Fuel Cell With Electrochemical Sensing Functionality 635

Anna Fraiwan, Chunhui Dai, Navjot Kaur Sidhu, Alok Rastogi, Seokheun Choi

A Miniaturized Parallel Analyses Platform for Rapid Electrochemical Discoveries of Microbial 639

Activities

Simeng Chen, Chunhui Dai, Arwa Fraiwan, Seokheun Choi

W1D: Microfluidics & BioMEMS (VII)

Multi-Walled Carbon Nanotube Coated Microelectrode Array for High-Throughput Sensitive 643

Dopamine Detection

Suwen Li, Jing Guo, Mansun Chan, Jie Yuan

Measurement of Glycated Hemoglobin Using an Aptamer/antibody Assay on an Integrated 647

Microfluidic SystemKo-Wei Chang, Jing-Lun Li, Ching-Hsuan Yang, Shu-Chu Shiesh, Gwo-Bin Lee

Enhanced fluorescence detection through post-immunoassay beads aggregation on bead-based n/a

immunoassay using digital microfluidics

Cheng-Yeh Huang, Po-Huai Shih, Po-Yen Tsai, l-Chin Lee, Hsin-Yun Hsu, Shih-Kang Fan, Wensyang Hsu

A Novel Micromixer with Multimixing Mechanisms for High Mixing Efficiency at Low Reynolds 651

Number

Hai Le The, Nhut Tran-Minh, Hoa Le-Thanh, Frank Karisen

Low bead number washing for bead-based immunoassay using double sided EWOD and N/A

magnetic force

Po-Yen Tsai, Cheng-Yeh Huang, Hsin-Yun Hsu, Wensyang Hsu

A versatile nanolieter microfluidic chemostat for cyclic growth of bacteria N/A

Chih-Chung Chiang, S. B. Hsu, Ya-Tang Yang

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W1E: Nanomaterials (II)

Cellular Behaviors on Chemically/Physically Modified Si02 Surfaces 655

Chung-Yao Yang, Amarendra Kumar, Yao-Joe Yang, J. Andrew Yeh

Preparation of High-Strength Transparent Chitosan Film Reinforced with Chitin Nanofibers N/A

Shinsuke Ifuku, Akiko Ikuta, Mayumi Egusa, Hironori Kaminaka, Hironori Izawa, Minoru Morimoto,

Hiroyuki Saimoto

Lowered Melting Point of Polyvinyl Pyrrolidone Bound 1D Silver Nanowires 660

Akihiro Tomioka, Kenji Ozasa, Mizuki Hirayama, Hayami Tsukamoto, Akihiro Masuda, Shougo Maeda,

Masato Kawabata

Synthesis and Characterization of Gold Nanoparticle/SU-8 Polymer based Nanocomposite 664

Anju Toor, Jim C. Cheng, Albert P. Pisano

Effects of Acid Exposure on Silicon Nanowire Reliability N/A

Nathan Willems, Uche Wejinya

Monolayer Molybdenum Disulfide Self Switching Diodes N/A

Feras Al-Dirini, Faruque M. Hossain, Ampalavanapillai Nirmalathas, Efstratios Skafidas

W1F: Nanomedicine & Nanobiology

Mechanical Characterization of Cancer Cell Nuclei in situ 669

Haijiao Liu, Jun Wen, Jun Liu, Sevan Hopyan, Craig Simmons, Yu Sun

Nanochannel electrical immunosensor for cellular level classification of breast cancer metastisis N/A

using protein biomarkers

Anjan Panneer Selvam, Shalini Prasad

Fibroblasts Connection on Nano/Micro Silicon 674

Tzu-Chun Liao, Kai-Wei Liao, Wen-Shiang Chen, J. Andrew Yeh

Characterization of Cellular Mechanical Torque by Rotation of Ferromagnetic Nanowire 678

Ting-hsuan Chen, Wei Liu, Yuanhang Li

IS6: Endomicroscope and MEMS/NEMS Based Optical Imaging Systems

Multiphoton Endomicroscopy Enabling Label-free Visualization of Tissue Histology in vivo N/A

Xingde Li

In-vivo imaging with Dual Axis Confocal Microscopes enabled by Optical MEMS/NEMS N/A

Olav Solgaard

Toward Temporal Focused Wide-Field Endomicroscope N/A

Peter T. C. So, Heejin Choi

Clinical Applications of Confocal Endomicroscopy for Image-Guided Surgery N/A

Joseph Liao

MEMS for Advanced Medical Endoscopy N/A

Ki-Hun Jeong

In vivo imaging by high-resolution GRIN probesN'A

Seok-HyunAndy Yun

Thermomechanical Actuator-Based Three-axis Optical Scanner for High-Speed Two-photon N/A

Endomicroscope ImagingShih-Chi Chen, Heejin Choi, Peter So, Martin Culpepper

Multimodal optical imaging technologies for cardiovascular disease

Hongki Yoo

N/A