new sp210 revise - pemit.cz
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Cont
ents The Brooks® Advantage:
Integrated Flow TechnologiesFor Precision Applications
Every day, flow customers all over the world turn
to Brooks products for solutions to their gas and
liquid low-flow applications. Brooks provides an
array of flow measurement and control products
for dozens of industries from biopharmaceuticals,
oil and gas, fuel cell research and chemicals, to
medical devices, analytical instrumentation,
semiconductor manufacturing, and more. In fact,
numerous brand preference studies rate Brooks variable area and thermal mass
instruments at the top of their category for accuracy, reliability, repeatability,
and flexibility.
But Brooks products are only half the story. In every corner of the globe, our
customers are backed by unsurpassed technical support. Your local Brooks sales
representatives possess years of experience solving application challenges like
yours. They’re trained to help you select the optimal solution for your flow
measurement and control needs.
Brooks combines superior products and technology with industry-specific
engineering, consulting, project management and maintenance services. Our
products are approved by internationally recognized standards such as CE, ATEX, UL,
cUL, and CSA. Consult current product data sheets at www.BrooksInstrument.com
for specific information on all applicable codes and certifications.
If you’re serious about improving your process yields and product quality,
choose Brooks.
3Technologies
4-5Coriolis Mass
6-9Thermal Mass
10-11Pressure Products
12-14Variable Area
15OEM Products
16Specialized
Products
17Software &
Electronics
18-19Services
3
Brooks TechnologiesCoriolis The Brooks family of Coriolis products uses a proven direct
mass measurement technology to provide precise flow measurement
and control of liquids and gases. These stand-alone devices include an
integrally mounted control valve function in a compact miniaturized
configuration. They can simultaneously measure mass flow, fluid density
and temperature. Brooks Coriolis meters, controllers, and sensors
provide unsurpassed performance, solving specific challenges in demanding low-flow applications.
Thermal Mass Flow Thermal Mass Flow (TMF) technology uses
thermodynamic principles to derive actual mass flow. A TMF sensor can
be combined with an integral valve and PID controller in one compact,
efficient instrument that can accurately control the flow of gases and
liquids over a wide range of flowrates. A pressure sensor can be mounted
in place of a flow sensor for applications requiring pressure control. TMF
products exhibit high repeatability and accuracy, providing an effective way to
ensure a reliable and stable process.
Variable Area Variable Area (VA) meters, commonly called
rotameters, are a cost-effective solution used for flow indication of
liquids and gases. The Brooks line of VA meters ensures measurement
repeatability, which provides process stability and consistency. External
power is not required for operation; therefore, they provide a fail-safe
flow rate under any circumstance. VA meters are widely used in a
diverse range of applications, from simple to sophisticated. Brooks VA meters can be provided with a
variety of wetted materials for high pressure, high temperature conditions and hazardous locations.
Technology
TO POWER SUPPLY
T2 Downstream Temp. Sensor
Power Supply 0-5 Vdc
Flow
Bridge For ∆T Detection Amplifier
Heater
BypassSensorTube
T1 UpstreamTemp. Sensor
Inlet Side
Twist AxisInlet
Outlet
SupportAxis
OutletSide
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Coriolis Meters & Controllers
The Brooks QUANTIM® Coriolis mass flow meter/
controller offers unsurpassed accuracy and zero stability
in critical low flow liquid and gas applications.
• QUANTIM Coriolis controllers combine the sensor,
transmitter, control valve and PID control
electronics into one compact, integrated package,
reducing space requirements, and simplifying
purchase, installation, and start up
• Coriolis mass measurement, which is immune to
fluid property variations, provides greater application
flexibility and reduces spares requirements
• QUANTIM provides repeatable mass flow
measurement and control even under changing
conditions
• Multivariable output for mass flow or volumetric
flow and density or temperature adds diagnostics
capabilities and reduces the need for additional
instrumentation
• Available in NEMA 1/IP40, NEMA 4X/IP65,
explosion proof and ANSI/ISA-76 downport
configurations
• Available with stainless steel or Hastelloy sensor
tube material
• Globally approved for a variety of service areas
Model QMBC IP40
Model QMBC IP65
QUANTIM Mass Flow Measurement & Control
Nominal Flow1 Min. Flow Liquid Gas Liquid Max. Pressure Max Temp Input/
Type Model Tube Size (kg/hr) (lpm) (kg/hr) Accuracy bar psig ˚C ˚F Output
Precision Mass QMBC 2 0.15 1.0553 0.001 ±0.2%, 0.5%, or 1.0% 100 1500 65 150 0-5 Vdc,Flow Controller 3 0.78 2.96.430 0.01 Rate 4-20 mA orGas and Liquid 4 9.32 9.1430 0.1 HART
Precision Mass QMBM 2 0.19 2.430 0.001 ±0.2%, 0.5%, or 1.0% 300 4500 65 150 0-5 Vdc, Flow Meter 3 1.00 26030 0.01 Rate 4-20 mA orGas and Liquid 4 13.5 20.430 0.1 HART
Corio
lis M
ass F
low
1 Higher flows may be possible depending on the fluid and process conditions.
1.052.9629.1
1.435.6050.4
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Coriolis Sensors & Transmitters
The Brooks QUANTIM Coriolis mass flow sensor offers
unsurpassed accuracy and flexibility in low flow liquid
and gas measurement applications.
• The QUANTIM sensor provides superb communication
flexibility. This sensor, combined with Brooks’ newest
transmitter, lets you access more data in your plant’s
process language (Modbus®, HART®, FOUNDATIONTM
Fieldbus, PROFIBUS® PA)
• Coriolis mass measurement, which is immune to fluid
property variations, provides greater application
flexibility and reduces spares requirements
• Repeatable mass flow measurement is ideal for
variable process conditions
• Multivariable output for mass flow or volumetric
flow and density or temperature adds diagnostics
capabilities and reduces the need for additional
instrumentation
• Perfect solution for rapid fill batch applications
• ANSI/ISA-76 downport configurations
• Available with stainless steel or Hastelloy sensor
tube material
• Globally approved for a variety of service areas
Model QMBS Sensor
Model QTA5 Model QTA7
QUANTIM Flow TransmittersAvailable
Transmitter Type2 Model Display Number of Outputs Process Variables Output Type
Remote Mount QTA1 Optional
DIN Rail QTA2 NA
Remote Mount QTA3 OptionalQTA4
DIN Rail QTA5 NA
Remote Mount QTA6 FOUNDATION Fieldbus
QTA7 PROFIBUS-PA2 Transmitters for use with Sensor Model QMBS.
1 process variable
Up to 3 process variables
Up to 3 process variablesOptional
Mass or volume flow,
density, temperature, drive gain
Mass or volume flow,
density, temperature, drive gain
4-20 mA, Frequency, HART or Modbus
Mass or volume flow 4-20 mA, Frequency, HART or Modbus
Coriolis Mass Flow
QUANTIM Mass Flow Sensors
Nominal Flow1 Min. Flow Liquid Gas Liquid Max. Pressure Max Temp Input/
Type Model Tube Size (kg/hr) (lpm) (kg/hr) Accuracy bar psig ˚C ˚F Output
Precision Mass QMBS 2 0.19 1.43 0.001 ±0.2%, 0.5% or 1.0% 300 4500 65 150 ModbusFlow Sensor 3 1.00 5.60 0.01 RateGas and Liquid 4 13.5 50.4 0.11 Higher flows may be possible depending on the fluid and process conditions.
Compact Digital Mass Flow Meters & Controllers
The 7000 series mass flow instruments are the newest
addition to the Brooks suite of digital thermal mass flow
controllers. The advanced design and compact footprint
make these devices ideal for demanding applications.
• New coplanar valve offers improved performance
to deliver fast, accurate and reliable response
across a wide and varying range of differential
pressures
• 11⁄8” wide body offers users an efficient, space
saving footprint
• Proprietary valve control algorithm enhances
response time
• Ultra-high purity (UHP) and metal seal options
ensure clean flow paths for contamination sensitive
processes
• Available with traditional analog or digital I/O
• Globally approved for a variety of service areas
Model SLA7950D
Model SLA7950S Downport
Ther
mal
Mas
s Flo
w
Compact Digital Thermal Mass Flow
Full Scale Max Pressure Max Temp Input/ PowerType Model Capacity Accuracy bar psig ˚C ˚F Output Supply
UHP Metal Seal SL7900 3 ccm - 50 lpm 1% Rate 100 1500 65 150 0-5 Vdc, 4-20 mA 15-24 Vdc Meter/Controller Series DeviceNet, RS485 24 Vdc
Metal Seal SL7800 3 ccm - 50 lpm 1% Rate 100 1500 65 150 0-5 Vdc, 4-20 mA 15-24 Vdc Meter/Controller Series DeviceNet, RS485 24 Vdc
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The Brooks line of digital thermal mass flow instruments
offers faster response, better accuracy and improved
control over traditional analog devices.
• Industry leading repeatability ensures a stable
process even under changing conditions
• Self diagnostics and alarms eliminate downtime
• Multiple communication protocols allow easy
integration into many control systems
• Elastomer seal option provides exceptional leak
integrity and maximizes control valve shutoff
dependability
• Ultra-high purity (UHP) and metal seal options
ensure clean flow paths for contamination
sensitive processes
• Available with traditional analog or digital I/O
• Globally approved for a variety of service areas
Model SLA5850D
Model SLA5863D
Model SLA5850S with ANSI/ISA-76 Downport
Digital Thermal Mass Flow
Full Scale Max Pressure Max Temp Input/ PowerType Model Capacity Accuracy bar psig ˚C ˚F Output Supply
Elastomer Seal SL5800 3 ccm - 0.7% Rate 300 4500 65 150 0-5 Vdc, 4-20 mA 15-24 Vdc Meter/Controller Series 2500 lpm and 0.2% FS DeviceNet, PROFIBUS,RS485 24 Vdc
UHP Metal Seal SL6900 3 ccm - 100 lpm 1% Rate 100 1500 65 150 0-5 Vdc, 4-20 mA 15-24 Vdc Meter/Controller Series DeviceNet 24 Vdc
Metal Seal SL6800 3 ccm - 100 lpm 1% Rate 100 1500 65 150 0-5 Vdc, 4-20 mA 15-24 Vdc Meter/Controller Series DeviceNet 24 Vdc
Digital Mass Flow Meters & ControllersTherm
al Mass Flow
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Analog Mass Flow Meters & Controllers
The Brooks line of analog thermal mass flow
instruments is designed to meet the rigorous
demands of our customers’ established and newly
developing process applications. These devices
continue to add to their expansive installed base due
to their fast response, excellent accuracy, and simple
integration.
• Years of field-proven reliability
• Analog I/O allows for quick and easy system
integration
• Elastomer seal option provides exceptional leak
integrity and maximizes control valve shutoff
dependability
• Ultra-high purity (UHP) and metal seal options
ensure clean flow paths for contamination
sensitive processes
• Globally approved for a variety of service areas
Model 5850EM
Model 5853i
Ther
mal
Mas
s Flo
w
Analog Thermal Mass Flow
Full Scale Max Pressure Max Temp Input/ PowerType Model Capacity Accuracy bar psig ˚C ˚F Output Supply
Metal Seal 5850EM 3 ccm - 30 lpm 1% FS 100 1500 65 150 0-5 Vdc +/- 15 VdcController 5851EM 10 - 100 lpm (200 lpm H2)
UHP Metal Seal 5964 3 ccm - 30 lpm 1% FS 100 1500 65 150 0-5 Vdc +/- 15 VdcController 5965 0 - 100 lpm (200 lpm H2)
Elastomer Seal 5860E/5850E 3 ccm - 30 lpm 1% FS 100 1500 65 150 0-5 Vdc +/- 15 VdcMeter/Controller 5861E/5851E 10 - 100 lpm
5863E/5853E 100 - 1000 lpm
Elastomer Seal 5860i/5850i 3 ccm - 30 lpm 1% FS 100 1500 65 150 0-5 Vdc 15-24 VdcMeter/Controller 5861i/5851i 10 - 100 lpm 4-20 mA
5863i/5853i 100 - 1000 lpm
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NEMA 4X/IP65 Thermal Mass Flow
The Brooks MfTM Series mass flow instrument line is
designed specifically for use in harsh environments.
These devices’ unique enclosures provide protection
from dust and water making them ideal for indoor or
outdoor use.
• NEMA 4X/IP65 ratings affords washdown
protection eliminating the need for secondary
enclosures
• Industry leading repeatability ensures a stable
process even under changing conditions
• Self diagnostics and alarms eliminate downtime
• Analog and digital versions allow simple
integration into any control system
• Flow rates up to 36,000 lpm (meter) available to
meet high flow industrial process requirements
• EX-Series products feature remote electronics and
are certified for Zone 1 hazardous areas
• Globally approved for a variety of service areas
Model SLAMf50S
Model Mf53i
NEMA 4X/IP65 Thermal Mass Flow
Full Scale Max Pressure Max Temp Input/ PowerType Model Capacity Accuracy bar psig ˚C ˚F Output Supply
Digital SLMf Series 3 ccm - 0.7% Rate 100 1500 65 150 0-5 Vdc, 4-20 mA 15-24 VdcMeter/Controller 2500 lpm and 0.2 % FS DeviceNet, PROFIBUS, RS485 24 Vdc,
Analog Mfi Series 3 ccm - 1% FS 100 1500 65 150 0-5 Vdc, 4-20 mA 24 VdcMeter/Controller 1000 lpm
Analog MfX Series 3 ccm - 1% FS 100 1500 65 150 0-5 Vdc, 4-20 mA 24 VdcMeter/Controller 1000 lpm
Analog EX Series 10 ccm - 1% FS Model 65 150 0-5 Vdc, 4-20 mA 24 VdcMeter/Controller 1000 lpm Dependent
Thermal M
ass Flow
Pressure Controllers
Full Scale Max Pressure Max Temp Input/ PowerType Model Capacity Accuracy bar psig ˚C ˚F Output Supply
Pressure Controllers:Metal Seal, 11⁄8” SL7810/20 0-20 bar/290 psi 0.5% FS 20 290 65 150 0-5 Vdc 11 Vdc
DeviceNet 25 Vdc
UHP Metal Seal SL6910/20 0-20 bar/290 psi 0.5% FS 20 290 65 150 0-5 Vdc 11 Vdc Metal Seal SL6810/20 DeviceNet 25 Vdc
Elastomer Seal SL5810/20 0-100 bar/1500 psi 0.5% FS 100 1500 65 150 0-5 Vdc 11 Vdc DeviceNet 25 Vdc
Elastomer Seal 5866E 0-300 bar/4500 psi 0.5% FS 300 4500 65 150 0-5 Vdc, +/-15 Vdc4-20 mA
Remote Transducer/Pressure Controllers/Flow Meters:
Metal Seal, 11⁄8” SL7840 3 ccm-30 lpm 1% Rate 100 1500 65 150 0-5 Vdc 11 VdcDeviceNet 25 Vdc
UHP Metal Seal SL6940 3 ccm-30 lpm 1% Rate 100 1500 65 150 0-5 Vdc 11 Vdc Metal Seal SL6840 DeviceNet 25 Vdc
Elastomer Seal SL5840 3 ccm-30 lpm 1% Rate 100 1500 65 150 0-5 Vdc 11 VdcDeviceNet 25 Vdc
Elastomer Seal 5866RT 3 ccm-30 lpm 1% FS 100 1500 65 150 0-5 Vdc +/- 15 Vdc
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Analog & Digital Pressure Controllers
The Brooks line of electronic pressure controllers
utilizes Brooks’ superior mass flow designs and applies
them to process pressure. With a wide variety of
control and configuration options, Brooks is certain to
have the right pressure instrument for your application.
• Pressure controllers have options that accurately
control upstream or downstream pressure
• Remote transducer products control pressure
based on input from an external pressure device
while simultaneously measuring mass flow
• 11⁄8” and 11⁄2” footprint models
• Ultra high purity (UHP), metal seal or elastomer
seal options
• Available with analog or digital I/O
• Globally approved for a variety of service areas
Model 5866E
Model SLA7840D
Pres
sure
Pro
duct
s
1500
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Precision Pressure Regulators & UHP Pressure Transmitters
Brooks precision mechanical pressure regulators feature a direct-acting, non-relieving design for outstanding resolution and control. They are ideal for critical pressurecontrol applications, such as medical devices and analyticalinstrumentation. Brooks assembles, cleans and tests thesedevices in clean-room conditions, ensuring precise, reliableoperation.
• Bubble-tight shut off to 100 psi• Non-bleeding• Exceptionally precise control• Compact design• Suitable for at-line or panel mounting• UL listed
The unique Brooks Seal Free Pressure (SFP) transmitterprovides excellent pressure measurement on high purityfluids. Unlike other high purity pressure transmitters, theSFP is constructed using a single piece perfluoroalkoxy(PFA) sensing chamber that does not use any seals.Because the only fluid-wetted surface is PFA, the possibilityof fluid contamination is eliminated.
• No-seal design eliminates fluid contamination sources• All PFA flow path• Extremely strong sensor/PFA bond• Versions available for UHP water, chemicals, acids,
and bases• Single-ended and flow-through versions available• Integrated vapor leak indicator• Not damaged by sub-atmospheric process conditions• Temperature compensated output
Pressure Products
Model 8601 Pressure Regulator
Model SFP33
Precision Pressure Regulator
Capacity Maximum Temperature ConstructionModel Air Pressure ˚C ˚F
8601 3 to 1000 ccm 17 bar, 250 psig 1 to 60 33 to 140 Aluminum or 316 SS
UHP Pressure Transmitters
Full Scale Maximum PowerType Model Capacity Accuracy Temperature Output Supply
Flow Through – Ultra Pure Water SFP33WA 0-15 psig +/-1% 15-40 ˚C 4-20 mA, 24 VdcFlow Through – Chemicals, Acids, Bases SFP33CA up to Full Scale 59-104 ˚F 0-5 V, current,Single Ended – Ultra Pure Water SFP32WA 0-150 psig 1-5 V, 12-24 VdcSingle Ended – Chemicals, Acids, Bases SFP32CA 0-10V voltage
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Armored Variable Area Meters
Armored Variable Area
Capacity – Water Capacity – Air Max Pressure TemperatureModel lph gpm m3n/hr scfm Accuracy bar psig ˚C ˚F Output
MT3809 25 to 100,000 0.11 to 440 0.78 to 1404 0.49 to 888 2% FS 103 1500 -29 to 325 -20 to 617 Alarm and/or 4-20 mA, HART(IS or X-Proof)
MT3819 110 to 15,000 0.48 to 66 3.2 to 435 2 to 275 2% FS 19 275 -29 to 150 -20 to 300 Alarm and/or 4-20 mA, HART(IS or X-Proof)
MT3810 25 to 20,000 0.11 to 88 0.78 to 620 0.49 to 392 5% FS 103 1500 -29 to 215 -20 to 420 Alarm and/or 4-20 mA, HART(IS or X-Proof)
3750 0.8 to 100 .003 to 44 .04 to 3.1 .02 to 2 5% FS 275 4000 -29 to 204 -20 to 400 Alarm and/or4-20 mA(IS or X-Proof)
3600 Series 18 to 11,355 .08 to 50 0.65 to 43 0.38 to 28 10% FS 103 1500 -29 to 204 -20 to 400 Alarm(IS or X-Proof)
The Brooks line of rugged metal tube variable area
meters (rotameters) is ideal for high pressure, high
temperature and other demanding flow applications
where safety is a concern.
• Globally approved for use in hazardous
environments
• Needle valves for flow control
• Multiple connection options to match your existing
system and provide easy installation
• Many corrosion resistant material options for the
metering of aggressive fluids
• HART and 4-20mA outputs provide for remote
flow monitoring
• Excellent meter repeatability provides consistent
batch and/or process production
• No power required which reduces installation cost
and provides flow measurement in hazardous area
• Low-pressure drop allows for economical pump
selection
Model MT3809
Model MT3809 with X-proof Housing
Model 3750C Ar-Mite™with Transmitter
Varia
ble
Are
a
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Glass Tube Variable Area Meters
The Brooks line of reliable glass tube variable area
meters (rotameters) is ideal for many gas and liquid
flow measuring applications where viewing the
process is important.
• Rugged, vented polycarbonate tube enclosure
available on most models
• Tube and float can be re-ranged in line therefore
minimizing process down time
• Rotatable connections for easy installation at
any angle
• Packing gland or O-ring sealing to meet piping
requirements or customer preference
• Globally approved for use in hazardous
environments
• Reliable – only one moving part
• No power required which reduces installation
cost and provides flow measurement in
hazardous areas
• Low-pressure drop allows for economical pump
selection
Model GT1000 Model 1110 Full-View®
Model 1305
Glass Tube Variable Area
Capacity – Water Capacity – Air Max Pressure TemperatureModel lph gpm m3n/hr scfm Accuracy bar psig ˚C ˚F Output
GT1000 0.024 0.0001 0.002 0.001 2% FS 34 500 1 to 121 33 to 250 Alarm (IS)to 22392 to 98 to 431 to 273
1100 0.032 0.0001 0.002 0.001 2% FS 34 500 1 to 121 33 to 250 Local Series to 29300 to 129 to 342 to 217 Indication
1307 39 0.17 1.5 0.9 2% FS 24 350 1 to 121 33 to 250 Local to 20900 to 92 to 342 to 217 Indication
1306 31 0.14 1.2 to 66 0.8 to 42 3% FS 24 350 1 to 121 33 to 250 Localto 2205 to 9.7 Indication
1305 182 0.8 to 50 4.7 to 79 3 to 50 10% FS 14 200 1 to 121 33 to 250 Alarm to 11355
Variable Area
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Purgemeters
The Brooks Model 1350 and 1355 Sho-RateTM variable
area meters deliver industry-leading performance for
gas or liquid flows. Their robust, proven engineering
ensures reliable indication and unsurpassed service
life. Sho-Rate meters pioneered the concept of field-
replaceable tube and float kits. If necessary, the tube
and float can be replaced in-line in a matter of minutes.
Brooks also offers low cost meters in glass, acrylic and
polycarbonate tube configurations for less critical
applications.
• Integral needle valves on inlet or outlet
• Integral flow controller that compensates for
varying inlet or outlet pressures
• 316 stainless, brass or aluminum construction
• Compact, space saving size
Model 1350E Sho-Rate™
Model 1510 Model 2001
Purgemeters
Capacity – Water Capacity – Air Max Pressure TemperatureModel lph gph m3n/hr scfm Accuracy bar psig ˚C ˚F Construction
1350/ 0.032 0.006 0.002 0.001 10% (1350) FS 14 200 1 to 121 33 to 250 Glass Tube w/ Aluminum,1355 to 114 to 30 to 3.7 to 2.33 5% (1355) FS Brass or 316 SS
1358 182 to 1136 48 to 300 5.4 to 23.6 3.4 to 15 10% FS 14 200 1 to 121 33 to 250 Glass Tube w/ Brass or 316 SS
1510 0.032 0.006 0.002 0.001 10% FS 14 200 1 to 121 33 to 250 Glass Tube w/ to 114 to 30 to 3.7 to 2.33 316 SS
2001 1 to 72 0.25 NA 0.03 to 15 10% FS 7 100 1 to 71 33 to 160 Acrylic Tube w/ Brass to 270 or 316 SS
2700 1.5 to 80 0.4 to 20 0.5 to 18.5 0.05 to 1.7 10% FS 7 100 1 to 54 33 to 130 Polycarbonate Tubew/ Brass or 316 SS
Varia
ble
Are
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OEM Products
Brooks OEM products provide high-performing, cost
effective solutions for OEM applications. Some of the
OEM customers that we serve include medical device
manufacturers, analyzer manufacturers, suppliers of
gas blending equipment, vacuum pump makers and
industrial processing equipment suppliers. In addition
to the products shown here, Brooks can customize
any standard product to meet OEM requirements.
• Compact thermal mass flow meters and
controllers
• Needle valves for precise flow control
• Compact pressure regulators
• Flow controllers for variable upstream or
downstream pressures
• Customized variable area, thermal mass, and
Coriolis flow controllers and pressure products
• Private labeling available
Model 8504 Valve Model 5850TR Mass Flow Controller
Model 8601Pressure Regulator
Model 5700 Mass Flow Meter
Valves, Flow Controllers & Pressure Regulators
Capacity – Water Capacity – Air Max Pressure TemperatureModel lph gph ln/hr scfh bar psig ˚C ˚F Construction
FC8800/8900 0.025 0.025 0.52 to 0.02 to 68 1000 1 to 149 33 to 300 Brass or 316 SSSeries to 1820 to 480 56000 2130
8601 Pressure Regulator 3 to 1000 ccm 17 250 1 to 60 33 to 140 Aluminum or 316 SS
8500 0.24 0.02 8 to 0.3 68 1000 1 to 121 33 to 250 Brass or 316 SSSeries to 39 to 10 1500 to 57
OEM
Products
Thermal Mass Flow Products
Full Scale Max Pressure Max Temp Input/ PowerModel Type Capacity Accuracy bar psig ˚C ˚F Output Supply
5700 Mass Flow Meter 10 ccm - 50 lpm 5% FS 10 150 65 150 0-5 Vdc 11.5 - 15.5 Vdc
5850TR Mass Flow Controller 10 ccm - 20 lpm 1% FS 300 4500 65 150 0-5 Vdc 15/24 Vdc4-20 mA
Model 1350E Sho-Rate™ withFC8900 Flow Controller
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Specialized Flow Products
Positive Displacement, Sight Flow Indicators
Capacity - Water Max Pressure TemperatureModel lph gpm Accuracy bar psig ˚C ˚F Output Construction Connection
BM01/ 2 to 5000 008 to 2.2 1% Rate 10 150 -29 to 66 -20 to 150 Pulse 316 SS or PPS ThreadedBM02
BM04 60 to 21000 0.3 to 92.5 0.5% Rate 55 800 -29 to 120 -20 to 248 Pulse or Aluminum, Threaded BM50 4-20 mA 316 SS or PPS or Flanged
8000 Sight Flow Indicator 41 600 1 to 177 33 to 350 Local indication Steel, Bronze Threaded Series or 316 SS or Flanged
Liquid Mass Flow
Max Pressure Max Temp Input/ PowerModel Type Full Scale Capacity Accuracy bar psig ˚C ˚F Output Supply
5881/91 Liquid Mass Flow 30 - 100 grams/hr 0.5% FS 400 5800 65 150 0-5 Vdc, 15 or 24 VdcMeter/Controller 4-20 mA
5882/92 Liquid Mass Flow 200 - 1000 grams/hr 0.5% FS 400 5800 65 150 0-5 Vdc, 15 or 24 VdcMeter/Controller 4-20 mA
Model BM10Model 5881 FlomegaTM
Model 2800/2820 VaporizerTM
The Brooks portfolio of products includes additional
liquid metering and controlling devices. These products
are appropriate for numerous specialized applications.
• The Brooks®/MSP Turbo-VaporizerTM provides
on-demand high purity vapor generation and
minimizes precursor degradation. Suitable for
atomic layer depositin (ALD), metal oxide chemical
vapor deposition (MOCVD), catalyst production,
optical coatings, fuel cell humidification and other
industrial coatings.
• FlomegaTM liquid flow meters and controllers use
thermal mass flow technology to accurately
measure and control liquids and are weatherproof
and certified for use in hazardous areas
• Oval Gear positive displacement meters are ideal
for highly viscous liquids in applications where
accuracy and repeatability are critical
• Sight flow indicators provide quick visual process
indication and are available in many materials
compatible with a variety of fluid and process
conditions
Spec
ializ
ed F
low
Pro
duct
s
VaporizerModel
2800/2820 The Brooks®/MSP Turbo-VaporizerTM combines a proprietary technology developed by MSP Corporation with specialized flow control products from Brooks Instrument.
17
Software &
ElectronicsMass Flow Software Tools & Secondary Electronics
Brooks provides a variety of software and accessory
options to ensure mass flow controllers perform at
their best. Calibration and control software, as well as
certified calibration standards (see page 17), allow cus-
tomer to perform calibration checks to verify
accuracy and repeatability.
• Simple software programs give access to tuning,
alarms and other basic functions
• More rigorous programs available for
configuration, calibration and advanced service
• Secondary electronics units available for up to
four channels offer easy visual indication, control
of flow, and also provide external power
Model 0152/0154
Brooks Service Tool
Software Tools
Type Functionality (See data sheet for applicable models)
Brooks Service Suite, Provides access to I/O tuning, alarm indication/configuration, diagnostics, selectedBrooks Service Tool response tuning, control and monitor
Brooks Service Suite Pro, Provides access to I/O tuning, alarm indication/configuration, diagnostics, selected Brooks Service Tool Plus response tuning, control and monitor, plus calibration and accuracy reporting capabilities
Secondary Electronics
AdditionalModel Channels Functions Control I/O Power Input Power Output
0151 1 Totalizer & Blending 0-5 Vdc, 4-20 mA, 100-240 Vac, 50/60 Hz +/-15 Vdc, 24 VdcRS-232/485
0152/0154 2/4 Totalizer & Blending 0-5 Vdc, 4-20 mA, 100-240 Vac, 50/60 Hz +/-15 Vdc, 24 VdcRS-232
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Technical Services
Full Service CapabilitiesBrooks Instrument’s Technical Services Group has theexpertise to provide a complete range of services worldwide for every Brooks product. Our staff includesservice engineers, instrument technicians, calibrators,coordinators, and training professionals dedicated toafter-sales support. Our engineers are experts in lowflow applications and fluid measurement and control,and can assist customers in all aspects of project implementation, including installation, tuning and communications.
• Phone support for all products, including emergencies
•Software and product training at Brooks or on-site• Field services for start-up and tuning to recognized
standards (NIST/NMI)•Calibration certifications•Firmware upgrades
Product ServicesProduct services from Brooks come with a 90-day warranty on materials and workmanship. Productsundergo rigorous processes, such as:
• Inspection• Disassembly and cleaning• Parts replacement as required• Pressure testing to 1.5 times design pressure,
as required• Helium leak testing, as appropriate• Complete refurbishment, if necessary• Native gas calibrations on Nitrogen, Argon,
Hydrogen, Helium and Carbon Dioxide• Calibration using high and low viscosity liquids• As-found, as-left calibrations• Serialized record of work performed
QUANTIM® Precision Mass Flow Meters & Controllers QUANTIM Mass Flow products are fully supported withservices such as cleaning, re-ranging and repair.Calibrations are possible through the complete range offlows offered, as low as 1 gram/hr.
Thermal Mass Flow Meters and ControllersOur wide range of services for Thermal Mass Flow products includes valve adjustment and tuning for controllers. During refurbishment, critical seals, valvecomponents and fasteners are replaced along with anyworn or damaged components. Communications suchas DeviceNet, PROFIBUS and RS 485/232 are verified onall digital products. Brooks has the capacity to calibrateon select native gases at flows up to 2500 LPM and onair to 7000 LPM. These services can also be performedin high purity clean room environments.
Variable Area MetersComprehensive services for glass and metal tubeVariable Area flow meters include scale checks, realignments, and tube and float replacements.
Secondary ElectronicsOur service organization can provide circuit board repair,calibration and refurbishment of secondary electronics.
Educational ServicesBrooks encourages our customers to take advantage ofour excellent training programs. These include: thebasics of flow measurement, flow technologies, sizing,calibration, maintenance, and more. In addition to standard programs, we offer customized programs toprecisely fit your specific needs. Both factory and fieldtraining are available.
Serv
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How To Find The Right Brooks Product
There are several ways for you to select the
perfect Brooks flow meter, controller, or flow
accessories for your application.
• Contact the Brooks specialist in your area.
Brooks has representatives all over the globe
ready to assist you. If you need help finding
the rep closest to you, visit our web site.
• Call Brooks regional customer service for fast,
expert assistance by phone. See back cover.
• Find the technology solution you need at
www.BrooksInstrument.com. In the
conveniently organized “Products” section
you can search by flow technology or process
application. Or you can utilize our easy-to-use
MeterMatchTM search tool and find the Brooks
product that precisely fits your specifications
with just a few clicks.
• Check your needs against detailed Product
Data sheets on the web.
Brooks is prepared to assist you with your unique
flow measurement and control applications to
help you get the most value from our products.
Just contact us at the office location most
convenient to you. As the leading provider of
integrated low-flow technologies for precision
applications, we hope you’ll find that Brooks is
precisely what you need.
Custom Engineering for Special Applications
Can’t find the exact flow measurement or
control instrument for your application? Let us
make a custom solution for you. Our expertise in
custom-engineered flow products for demanding
or unique applications includes:
• Special ambient requirements
• Extremely high or low process temperature
operation
• Exotic materials
• Extremely high process pressure capability
• Difficult process streams
• Custom physical dimensions
• Special process connections
• Material traceability
• Special testing requirements, such as dye
penetrant, radiography, or positive material ID
If you have a unique application, contact Brooks
or your local sales representative.
Application Assistance & Custom Engineered SpecialsServices
www.BrooksInstrument.com
Publication SP-210-eng 1/08 ©2008, Brooks Instrument , LLC
The contents of this publication are presented for information purposes only, and while effort has been
made to ensure their accuracy, they are not to be construed as warranties or guarantees, express or implied,
regarding the products or services described herein or their use or applicability. All sales are governed by
our terms and conditions, which are available on request. We reserve the right to modify or improve the
designs or specifications of our products at any time without notice. For the latest Brooks product
specifications, view the “Products” section of our web site.
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
USA
Telephone 215-362-3700
Toll Free 888-554-FLOW
Fax 215-362-3745
E-Mail [email protected]
Brooks Instrument
Neonstraat
6718 WX Ede, Netherlands
Telephone 31-318-549-300
Fax 31-318-549-309
E-Mail [email protected]
Brooks Instrument
1-4-4, Kitasuna, Koto-Ku
Tokyo, 136-0073
Japan
Telephone 81-3-5633-7105
Fax 81-3-5633-7124
E-Mail [email protected]
ISO 9001QUALITY SYSTEMCertificate of Conformity
The Quality System at BrooksInstrument conforms to the quality
standards set forth in ISO 9001.
Represented By:
Ar-Mite, Brooks, Flomega, Mf, MeterMatch, QUANTIM, SMM Smart Meter Manager, and Sho-Rate are marks of Brooks
Instrument, LLC. All other marks are property of their respective owners.