[ne ハンドブックシリーズ] パワー半導体 pr 3 power device...
TRANSCRIPT
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NE
NE Handbook Power Device
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6 1
6 9 MOSFET10 SJMOSFET 11 IGBT12 Si13 17 SiC19 GaN 21 SiCGaN
22 2
22 SiC SBD26 SiC MOSFET30 SiC BJT 32 SiC34 GaN38
42 3
42 46 48 52 54
CO
NT
EN
TS
NE
Ha
nd
bo
ok
Power D
evice
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2
PR
3
Power Device
SiC
1958
Si
SiC
1000V
LEDMOSFETIGBTInsulated Gate Bipolar TransistorFRDFast Recov-ery DiodeSBDSchottky Barrier DiodeIC1
1500VSi600VSiC
Si100VVMOSFETECOMOSTM
0.8mm0.6mm3V20A2012MOSFET2.0mm2.0mmHUML2020540V100V24VDC-DC40V
UPSUPS
TVTV
EV/HEVPCS
EV/HEVPCS
DSCDSC
IGBTIGBT
10V 100V 1kV 10kV
10kA
1kA
100A
10A
MOSFETMOSFET
PCPC
1
-
4
PR
5
Power Device
12SiC-MOSFET20123SiCSiC3SiCSiCSiC21VF0.1V0.15VSBDMOSFET1200V2SCTSiC SBDMOSFETSCH20121200V180ASiC-MOS1700VSiC
MOSFET201249A100A660V100VMOSFETV100A
MOSFETtrrPrestoMOSTM2MOSFETtrrPrestoMOSTM80
SiC1000V
600VSiCSiSiC20104SiC SBD
SiC
2MOSFETPrestoMOSTM
20123SiC
/ 615-858521 TEL 075311-2121FAX 075315-0172URLhttp://www.rohm.co.jp/
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6 7
NE Handbook Power Device1
MOSFETmetal-oxide-semiconductor field-effect transistorIGBTinsulated gate bipolar transistor1
Power Dev ice
CO2/302
1MOSFETSJMOSFETIGBTSiCMOSFET
1 IGBTVCEsat
MOSFET SJMOSFET IGBT SiCMOSFET V500V 500V1kV 400V10kV 600VkV 1
Fairchild semiconductorInfineon TechnologiesInternational RectifierVishay Intertechnology
Infineon TechnologiesSTMicroelectron-ics
CreeInfineonTechnologies
Infineon Technologies Semikron STMicroelectronics Vishay Intertechnology
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8 9
1 NE Handbook Power Device
21/16MOSFETSJsuper junctionMOSFETIGBT
MOSFETPower MOSFET Metal-Oxide-Semiconductor Field-Effect Transistor
Vin
SW1
SW2
L
Cout
Cin
Vout
1DC-DCDC-DC
MOSFETMOSFETDMOSdouble diffused MOSFET10V500V10V500V30Vm500V900V500V
nepi
n
pn
MOSFETMOSFET
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10 11
1 NE Handbook Power Device
500VMOSFETSJMOSFET1998SJMOSFETp500V1kVSJMOSFETp
400V10kVIGBTMOSMOSFET1.5V50kHzMOSFETMOSFETIGBTMOSFET100kHz
SJMOSFETSuper Junct ion Power MOSFET
--
-
-
--
p
n
pn
SJMOSFETMOSFETp
IGBTInsu lated Gate Bipolar Transistor
n-
np
n
p
IGBTMOS
Infineon Technologies
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12 13
1 NE Handbook Power Device
SiCGaNSiMOSFETRDSONSiSJSJMOSFETSi
SiPer formance L imitat ions of Si l icon Dev ices
SiCGaNSiCGaNSiC20018Infineon TechnologiesSBD20102011CreeMOSFETMOSFETJFETSiCGaN20102 International RectifierEfficient Power Conversion
Si
Next Generat ion Power Dev ice
SiSJMOSFET
Infineon Technologies
SiMOSFET
SJMOSFET
SJMOSFET
12
10
8
6
4
2
0400 500 600
700 800 900V
mmm2
SiMOSFET
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14 15
1 NE Handbook Power Device
SiSiCGaN1123
1/1000
SiCGaNSi1SiCGaNSi1/101/10SiCGaNSi2
10SiCGaN1001001/100SiCGaNSi1/10001SiCGaNSi23
SiCGaNSiCGaNSiSiC4H-SiC
Si SiC GaN
1.12eV 3.26eV 3.4eV
11.9 9.7 9.5
3.0105V/cm 2.7106V/cm 3.5106V/cm
1.0107cm/s 2.2107cm/s 2.7107cm/s
1350cm2/Vs 1000cm2/Vs 900cm2/Vs
1.5W/cmK 4.9W/cmK 2W/cmK
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16 17
1 NE Handbook Power Device
1/101/10SiCSi3GaN1.4
250V@50A/cm2
Si-MOSFET
ND41013cm-3 ND41015cm-3
SiC-MOSFET
10030m
1.2V@50A/cm2
ND:
Pnn nn
P
n330m330m
nn nnP P
1/2001/200
1/101/10
1SiCMOSFETSi11/10100SiCSi1/10001/200
SiCSiC Wafer
N
n
p
n
2/
1pn
SiCMOSFETpnSiC
SiCGaNSiSiCGaNSiCSiCSiCSiC
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18 19
1 NE Handbook Power Device
GaNAlN
GaN
AlGaNAlGaNGaNGaN
SiCSiGaN
GaNGaNHEMThigh electron mobility transistor
SiC104/cm2SBDMOSFET200 /cm2MOSFET
114SiC46SiC
GaNGaN Wafer
GaN2010SiGaNLEDLED 200V30AGaN
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20 21
1 NE Handbook Power Device
10 100 1000V
MOSFETMOSFET
GaNGaN
IGBTIGBTSJMOSFETSJMOSFET
SiCSiC
10000
A
1000
100
10
1
SiC600VSiC600VGaN600V
SiGaNGaNGaNGaN246Si81105 /cm2GaN102103/cm2GaN6GaNGaNSiCGaN
SiCGaNSiC and GaN
SiCSiIGBT600VIGBTSiCMOSFETIGBTGaNSiCV 600VMOSFETSJMOSFETGaNSi
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22 23
2 NE Handbook Power Device
SiCSBD2001Infineon TechnologiesSTMicroelectronicsCree600V10A SiCSBDSCS110A2010410SiCSBDSiC2010SiCSBD2010720113 SiCSBD20069SiCSBDSiCSBDSiC1
SiCSBDSiC Schot tky Bar r ier Diode
1SiCSiCSiCSBDSiCrystalSiC
4201262013SiCSBDSiCSiSiSiCSiSiC
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24 25
2 NE Handbook Power Device
2012
2012 2011SiCSBDRJS6005TDPPSi120122 MCU IC
SiCSBD1.35VSiC SBDSCS210AG/AM20126310
31010SiCSBD
2SiCSBDSi1 SiCSBDSi1
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26 27
2 NE Handbook Power Device
SiCMOSFETSiC Metal-Oxide-Semiconductor Field-Effect Diode
SiCSiCSi
SiSiCSiCSiMOSFET
SiCMOSFET 201012Cree201111SiC1700Cree
SiCMOSFETSi1/10
SiCMOSFETJFETJFETSiMOSFET1/20SiCMOSFET1/7SiCMOSFET
1SiCMOSFETCree20111SiCMOSFET
Cree
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28 29
2 NE Handbook Power Device
2 600V 0.79m cm21200V1.41mcm22013HOYA3CSiCMOSFETSiC4H3CSiCSi
3CSiCMOSFET370cm2/Vs4H3MOSFET300178cm2/Vs3CSiCMOSFETHOYA3CSiCMOSFET3CSiC
mcm
2
SiCMOSFET
3
2
1
0
80
6m4m
350m100m
21.5
SiC
SiC70
a bSiCMOSFET
2SiCMOSFET
mcm
2
SiCMOSFET
3
2
1
0
80
6m4m
350m100m
21.5
SiC
SiC70
a bSiCMOSFET
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30 31
2 NE Handbook Power Device
SiC BJTBJTBJTBJTBJT50A100A50A 0.54cm20.25cm2145250501100V1.7mcm2100A0.790.73cm20.5cm2135250
721200V3.5mcm22506.6mcm2257335SiCBJT12002001002572BJTSiC335
SiCBJTSiC Bipolar Junction Transistor
1200BJT
105 104 103 102 101
400
350
300
250
200
150
100
50
0
257BJT
335BJT
A
2
n-SiC
p-SiC
n-SiC
n-SiC
SiO2
p-SiC p-SiC
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32 33
2 NE Handbook Power Device
2012SiCSiCSiC20123SiCSiCSiCSi IGBT85100kHzSi IGBT10
SiC1200V100A1100A200400ASi IGBT400A Si IGBT5020127SiCSiCSiC53600V21200V1SiC
SiCSiC Module
aSiC c 1200V 100A
100kHz
122mm46mm17mm
IGBT35
SiCSiCSBDMOSFETSiC1200V100Aa
b
SiCSBD SiCSBD
SiCMOSFET
SiCMOSFET
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34 35
2 NE Handbook Power Device
GaN1GaN2GaNSi33GaNGaNIC11GaNSi
SiSi62SiGaNpGaN21.1kV20112012600V1.11.3
GaNGaN Power Devices
1GaNGaNGaN
IC
56Si
GaN
2GaNpGaN
140
120
100
80
60
40
20
00 100 200 300 400
mm
V
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36 37
2 NE Handbook Power Device
200V1kV1.7kVGaN
37.3mGaN50nmGaN2.2kVSipSiGaN4GaN1.9m2.2kV3kV3GaNGaNEPC100V56VMOSFET2020VNational SemiconductorICHEMThigh electron mobility transistorGaN2012
HEMTGaN
31.7kV1.7kVGaN
4SipGaNSiGaN
Si
GaNGaN
AlGaNAlGaNSiO2
CGaN
CGaN
GaN50nm7.3m
p p
Si
GaN
AlGaN
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38 39
2 NE Handbook Power Device
SiCGaNGa2O3NICTGa2O31NEDO NICTMESFETmetal-semiconductor field effect transistor
257V5A/mm
SiCGaN
SiCGaN
2Ga2O34.84.9eVSi43.3eVSiC3.4eVGaN8MV/cmSi20SiCGaN2Ga2O3SiCGaN
Gall ium Oxide
1Ga2O3NICTGa2O3a257Vb
Ti/Au Pt/Ti/Au Ti/Au
SnnGa2O3300nm
MgGa2O3010
ba
1.4mS2.3mS/mm
257V
3A5A/mm
/ 10
4
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40 41
2 NE Handbook Power Device
SiC
3k4kVNICTFZf loat ing zoneEFG
edge-defined film-fed growthGa2O3FZEFGLED68SiCGaN
Ga2O3FZ6mm4mmNICT6Ga2O31SiCGa2O32015 4MOSFET2020
2SiCGaNGa2O3aGa2O3GaNSiCb
a b
10
1
0.1
0.0110 100 1 10
V
mcm
2
Si
SiC4H
GaN
Ga2O3
Ga2O3 Si SiC4H GaN
(eV) 4.84.9 1.1 3.3 3.4 5.5
(cm2/Vs) 300 1400 1000 1200 2000
(MV/cm) 8 0.3 2.5 3.3 10
10 11.8 9.7 9 5.5
Ec3 3444 1 340 870 24664
Ga2O3 Si SiC4H GaN
(eV) 4.84.9 1.1 3.3 3.4 5.5
(cm2/Vs) 300 1400 1000 1200 2000
(MV/cm) 8 0.3 2.5 3.3 10
10 11.8 9.7 9 5.5
Ec3 3444 1 340 870 24664
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42 43
3 NE Handbook Power Device
SiCDC-DCSiCSiCSiCIPMintelligent power moduleSiCSi2/31/3SiCSi8203025
60kW/L20122012523251
Automobi le
1
SiSiC68%0.5L60kW/L30kW180SiC70kW2
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44 45
3 NE Handbook Power Device
10 SiCSiCSi2014Si
3SiCIC3SiQMETSiCSiC-QMETSiCMOSFETSBD
3IC3
2
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46 47
3 NE Handbook Power Device
Car Audio System
42201112311SiCSBDA-110S II 308CCSLR 12 A-110S IISiCSBDBD01
SiCSBD2A-110S IISiSBD SiSBD1/31/4 SiC
1308CCSiCSBD
2SLR SiCSBD
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48 49
3 NE Handbook Power Device
SiC1201110SiCSBD01201112SiCSBD1700V600/750V1500V3300VSiCSBD20124SiC1Si
302SiCSBD403SiSiC4SiCSi
Rai lway
1700V1200A
1700V1200A
3300V1200A
1700V1200A
1700V1200A
3300V1200A
1 SiCSiC1700V3300V
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50 51
3 NE Handbook Power Device
21231SiCSBDSiCSBDSiIGBT55952
3540kmSiSiCSi70km2SiC340
a
30
Si
SiCSBD
b
Si SiCSBD
3540 70
km/h
3540 70
km/h
2SiCSBDSi30
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52 53
3 NE Handbook Power Device
SiCMOSFETSBD1SiSiCSiPV-PN50G1298SiSiC98AC98.2
982 97.5SiSiCSiCSTMicroelectronicsSiCSBDSTPSC806G95
Photovolta ic System
1SiC
298SiC298
SiC
Si
400020000
100
98
96
94
92
90
W
2
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54 55
3 NE Handbook Power Device
SiCSBD201010 MSZ-ZW102.8kW3.6kW2SiCSBD12.2kW7.1kWZW2SiCSBDSiC-SBDSiC-SBD152
Home Appl iance
SiC2IGBTSiC MOSFETSiCSBDSiCSiCCreeSiCSiC
SiC2011
1SiCSBDSiCSBD
MSZ-ZW
2SiCSBD
-
56
3
SiCMOSFET36.78MHz95 50WEL2SiC
3SiCMOSFET
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NE
BP
108-8646 1-17-3NBF
2012 9
BP2012 PrintedinJapan
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www.rohm.co.jp