[ne ハンドブックシリーズ] パワー半導体 pr 3 power device...

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  • NE

    NE Handbook Power Device

  • 6 1

    6 9 MOSFET10 SJMOSFET 11 IGBT12 Si13 17 SiC19 GaN 21 SiCGaN

    22 2

    22 SiC SBD26 SiC MOSFET30 SiC BJT 32 SiC34 GaN38

    42 3

    42 46 48 52 54

    CO

    NT

    EN

    TS

    NE

    Ha

    nd

    bo

    ok

    Power D

    evice

  • 2

    PR

    3

    Power Device

    SiC

    1958

    Si

    SiC

    1000V

    LEDMOSFETIGBTInsulated Gate Bipolar TransistorFRDFast Recov-ery DiodeSBDSchottky Barrier DiodeIC1

    1500VSi600VSiC

    Si100VVMOSFETECOMOSTM

    0.8mm0.6mm3V20A2012MOSFET2.0mm2.0mmHUML2020540V100V24VDC-DC40V

    UPSUPS

    TVTV

    EV/HEVPCS

    EV/HEVPCS

    DSCDSC

    IGBTIGBT

    10V 100V 1kV 10kV

    10kA

    1kA

    100A

    10A

    MOSFETMOSFET

    PCPC

    1

  • 4

    PR

    5

    Power Device

    12SiC-MOSFET20123SiCSiC3SiCSiCSiC21VF0.1V0.15VSBDMOSFET1200V2SCTSiC SBDMOSFETSCH20121200V180ASiC-MOS1700VSiC

    MOSFET201249A100A660V100VMOSFETV100A

    MOSFETtrrPrestoMOSTM2MOSFETtrrPrestoMOSTM80

    SiC1000V

    600VSiCSiSiC20104SiC SBD

    SiC

    2MOSFETPrestoMOSTM

    20123SiC

    / 615-858521 TEL 075311-2121FAX 075315-0172URLhttp://www.rohm.co.jp/

  • 6 7

    NE Handbook Power Device1

    MOSFETmetal-oxide-semiconductor field-effect transistorIGBTinsulated gate bipolar transistor1

    Power Dev ice

    CO2/302

    1MOSFETSJMOSFETIGBTSiCMOSFET

    1 IGBTVCEsat

    MOSFET SJMOSFET IGBT SiCMOSFET V500V 500V1kV 400V10kV 600VkV 1

    Fairchild semiconductorInfineon TechnologiesInternational RectifierVishay Intertechnology

    Infineon TechnologiesSTMicroelectron-ics

    CreeInfineonTechnologies

    Infineon Technologies Semikron STMicroelectronics Vishay Intertechnology

  • 8 9

    1 NE Handbook Power Device

    21/16MOSFETSJsuper junctionMOSFETIGBT

    MOSFETPower MOSFET Metal-Oxide-Semiconductor Field-Effect Transistor

    Vin

    SW1

    SW2

    L

    Cout

    Cin

    Vout

    1DC-DCDC-DC

    MOSFETMOSFETDMOSdouble diffused MOSFET10V500V10V500V30Vm500V900V500V

    nepi

    n

    pn

    MOSFETMOSFET

  • 10 11

    1 NE Handbook Power Device

    500VMOSFETSJMOSFET1998SJMOSFETp500V1kVSJMOSFETp

    400V10kVIGBTMOSMOSFET1.5V50kHzMOSFETMOSFETIGBTMOSFET100kHz

    SJMOSFETSuper Junct ion Power MOSFET

    --

    -

    -

    --

    p

    n

    pn

    SJMOSFETMOSFETp

    IGBTInsu lated Gate Bipolar Transistor

    n-

    np

    n

    p

    IGBTMOS

    Infineon Technologies

  • 12 13

    1 NE Handbook Power Device

    SiCGaNSiMOSFETRDSONSiSJSJMOSFETSi

    SiPer formance L imitat ions of Si l icon Dev ices

    SiCGaNSiCGaNSiC20018Infineon TechnologiesSBD20102011CreeMOSFETMOSFETJFETSiCGaN20102 International RectifierEfficient Power Conversion

    Si

    Next Generat ion Power Dev ice

    SiSJMOSFET

    Infineon Technologies

    SiMOSFET

    SJMOSFET

    SJMOSFET

    12

    10

    8

    6

    4

    2

    0400 500 600

    700 800 900V

    mmm2

    SiMOSFET

  • 14 15

    1 NE Handbook Power Device

    SiSiCGaN1123

    1/1000

    SiCGaNSi1SiCGaNSi1/101/10SiCGaNSi2

    10SiCGaN1001001/100SiCGaNSi1/10001SiCGaNSi23

    SiCGaNSiCGaNSiSiC4H-SiC

    Si SiC GaN

    1.12eV 3.26eV 3.4eV

    11.9 9.7 9.5

    3.0105V/cm 2.7106V/cm 3.5106V/cm

    1.0107cm/s 2.2107cm/s 2.7107cm/s

    1350cm2/Vs 1000cm2/Vs 900cm2/Vs

    1.5W/cmK 4.9W/cmK 2W/cmK

  • 16 17

    1 NE Handbook Power Device

    1/101/10SiCSi3GaN1.4

    250V@50A/cm2

    Si-MOSFET

    ND41013cm-3 ND41015cm-3

    SiC-MOSFET

    10030m

    1.2V@50A/cm2

    ND:

    Pnn nn

    P

    n330m330m

    nn nnP P

    1/2001/200

    1/101/10

    1SiCMOSFETSi11/10100SiCSi1/10001/200

    SiCSiC Wafer

    N

    n

    p

    n

    2/

    1pn

    SiCMOSFETpnSiC

    SiCGaNSiSiCGaNSiCSiCSiCSiC

  • 18 19

    1 NE Handbook Power Device

    GaNAlN

    GaN

    AlGaNAlGaNGaNGaN

    SiCSiGaN

    GaNGaNHEMThigh electron mobility transistor

    SiC104/cm2SBDMOSFET200 /cm2MOSFET

    114SiC46SiC

    GaNGaN Wafer

    GaN2010SiGaNLEDLED 200V30AGaN

  • 20 21

    1 NE Handbook Power Device

    10 100 1000V

    MOSFETMOSFET

    GaNGaN

    IGBTIGBTSJMOSFETSJMOSFET

    SiCSiC

    10000

    A

    1000

    100

    10

    1

    SiC600VSiC600VGaN600V

    SiGaNGaNGaNGaN246Si81105 /cm2GaN102103/cm2GaN6GaNGaNSiCGaN

    SiCGaNSiC and GaN

    SiCSiIGBT600VIGBTSiCMOSFETIGBTGaNSiCV 600VMOSFETSJMOSFETGaNSi

  • 22 23

    2 NE Handbook Power Device

    SiCSBD2001Infineon TechnologiesSTMicroelectronicsCree600V10A SiCSBDSCS110A2010410SiCSBDSiC2010SiCSBD2010720113 SiCSBD20069SiCSBDSiCSBDSiC1

    SiCSBDSiC Schot tky Bar r ier Diode

    1SiCSiCSiCSBDSiCrystalSiC

    4201262013SiCSBDSiCSiSiSiCSiSiC

  • 24 25

    2 NE Handbook Power Device

    2012

    2012 2011SiCSBDRJS6005TDPPSi120122 MCU IC

    SiCSBD1.35VSiC SBDSCS210AG/AM20126310

    31010SiCSBD

    2SiCSBDSi1 SiCSBDSi1

  • 26 27

    2 NE Handbook Power Device

    SiCMOSFETSiC Metal-Oxide-Semiconductor Field-Effect Diode

    SiCSiCSi

    SiSiCSiCSiMOSFET

    SiCMOSFET 201012Cree201111SiC1700Cree

    SiCMOSFETSi1/10

    SiCMOSFETJFETJFETSiMOSFET1/20SiCMOSFET1/7SiCMOSFET

    1SiCMOSFETCree20111SiCMOSFET

    Cree

  • 28 29

    2 NE Handbook Power Device

    2 600V 0.79m cm21200V1.41mcm22013HOYA3CSiCMOSFETSiC4H3CSiCSi

    3CSiCMOSFET370cm2/Vs4H3MOSFET300178cm2/Vs3CSiCMOSFETHOYA3CSiCMOSFET3CSiC

    mcm

    2

    SiCMOSFET

    3

    2

    1

    0

    80

    6m4m

    350m100m

    21.5

    SiC

    SiC70

    a bSiCMOSFET

    2SiCMOSFET

    mcm

    2

    SiCMOSFET

    3

    2

    1

    0

    80

    6m4m

    350m100m

    21.5

    SiC

    SiC70

    a bSiCMOSFET

  • 30 31

    2 NE Handbook Power Device

    SiC BJTBJTBJTBJTBJT50A100A50A 0.54cm20.25cm2145250501100V1.7mcm2100A0.790.73cm20.5cm2135250

    721200V3.5mcm22506.6mcm2257335SiCBJT12002001002572BJTSiC335

    SiCBJTSiC Bipolar Junction Transistor

    1200BJT

    105 104 103 102 101

    400

    350

    300

    250

    200

    150

    100

    50

    0

    257BJT

    335BJT

    A

    2

    n-SiC

    p-SiC

    n-SiC

    n-SiC

    SiO2

    p-SiC p-SiC

  • 32 33

    2 NE Handbook Power Device

    2012SiCSiCSiC20123SiCSiCSiCSi IGBT85100kHzSi IGBT10

    SiC1200V100A1100A200400ASi IGBT400A Si IGBT5020127SiCSiCSiC53600V21200V1SiC

    SiCSiC Module

    aSiC c 1200V 100A

    100kHz

    122mm46mm17mm

    IGBT35

    SiCSiCSBDMOSFETSiC1200V100Aa

    b

    SiCSBD SiCSBD

    SiCMOSFET

    SiCMOSFET

  • 34 35

    2 NE Handbook Power Device

    GaN1GaN2GaNSi33GaNGaNIC11GaNSi

    SiSi62SiGaNpGaN21.1kV20112012600V1.11.3

    GaNGaN Power Devices

    1GaNGaNGaN

    IC

    56Si

    GaN

    2GaNpGaN

    140

    120

    100

    80

    60

    40

    20

    00 100 200 300 400

    mm

    V

  • 36 37

    2 NE Handbook Power Device

    200V1kV1.7kVGaN

    37.3mGaN50nmGaN2.2kVSipSiGaN4GaN1.9m2.2kV3kV3GaNGaNEPC100V56VMOSFET2020VNational SemiconductorICHEMThigh electron mobility transistorGaN2012

    HEMTGaN

    31.7kV1.7kVGaN

    4SipGaNSiGaN

    Si

    GaNGaN

    AlGaNAlGaNSiO2

    CGaN

    CGaN

    GaN50nm7.3m

    p p

    Si

    GaN

    AlGaN

  • 38 39

    2 NE Handbook Power Device

    SiCGaNGa2O3NICTGa2O31NEDO NICTMESFETmetal-semiconductor field effect transistor

    257V5A/mm

    SiCGaN

    SiCGaN

    2Ga2O34.84.9eVSi43.3eVSiC3.4eVGaN8MV/cmSi20SiCGaN2Ga2O3SiCGaN

    Gall ium Oxide

    1Ga2O3NICTGa2O3a257Vb

    Ti/Au Pt/Ti/Au Ti/Au

    SnnGa2O3300nm

    MgGa2O3010

    ba

    1.4mS2.3mS/mm

    257V

    3A5A/mm

    / 10

    4

  • 40 41

    2 NE Handbook Power Device

    SiC

    3k4kVNICTFZf loat ing zoneEFG

    edge-defined film-fed growthGa2O3FZEFGLED68SiCGaN

    Ga2O3FZ6mm4mmNICT6Ga2O31SiCGa2O32015 4MOSFET2020

    2SiCGaNGa2O3aGa2O3GaNSiCb

    a b

    10

    1

    0.1

    0.0110 100 1 10

    V

    mcm

    2

    Si

    SiC4H

    GaN

    Ga2O3

    Ga2O3 Si SiC4H GaN

    (eV) 4.84.9 1.1 3.3 3.4 5.5

    (cm2/Vs) 300 1400 1000 1200 2000

    (MV/cm) 8 0.3 2.5 3.3 10

    10 11.8 9.7 9 5.5

    Ec3 3444 1 340 870 24664

    Ga2O3 Si SiC4H GaN

    (eV) 4.84.9 1.1 3.3 3.4 5.5

    (cm2/Vs) 300 1400 1000 1200 2000

    (MV/cm) 8 0.3 2.5 3.3 10

    10 11.8 9.7 9 5.5

    Ec3 3444 1 340 870 24664

  • 42 43

    3 NE Handbook Power Device

    SiCDC-DCSiCSiCSiCIPMintelligent power moduleSiCSi2/31/3SiCSi8203025

    60kW/L20122012523251

    Automobi le

    1

    SiSiC68%0.5L60kW/L30kW180SiC70kW2

  • 44 45

    3 NE Handbook Power Device

    10 SiCSiCSi2014Si

    3SiCIC3SiQMETSiCSiC-QMETSiCMOSFETSBD

    3IC3

    2

  • 46 47

    3 NE Handbook Power Device

    Car Audio System

    42201112311SiCSBDA-110S II 308CCSLR 12 A-110S IISiCSBDBD01

    SiCSBD2A-110S IISiSBD SiSBD1/31/4 SiC

    1308CCSiCSBD

    2SLR SiCSBD

  • 48 49

    3 NE Handbook Power Device

    SiC1201110SiCSBD01201112SiCSBD1700V600/750V1500V3300VSiCSBD20124SiC1Si

    302SiCSBD403SiSiC4SiCSi

    Rai lway

    1700V1200A

    1700V1200A

    3300V1200A

    1700V1200A

    1700V1200A

    3300V1200A

    1 SiCSiC1700V3300V

  • 50 51

    3 NE Handbook Power Device

    21231SiCSBDSiCSBDSiIGBT55952

    3540kmSiSiCSi70km2SiC340

    a

    30

    Si

    SiCSBD

    b

    Si SiCSBD

    3540 70

    km/h

    3540 70

    km/h

    2SiCSBDSi30

  • 52 53

    3 NE Handbook Power Device

    SiCMOSFETSBD1SiSiCSiPV-PN50G1298SiSiC98AC98.2

    982 97.5SiSiCSiCSTMicroelectronicsSiCSBDSTPSC806G95

    Photovolta ic System

    1SiC

    298SiC298

    SiC

    Si

    400020000

    100

    98

    96

    94

    92

    90

    W

    2

  • 54 55

    3 NE Handbook Power Device

    SiCSBD201010 MSZ-ZW102.8kW3.6kW2SiCSBD12.2kW7.1kWZW2SiCSBDSiC-SBDSiC-SBD152

    Home Appl iance

    SiC2IGBTSiC MOSFETSiCSBDSiCSiCCreeSiCSiC

    SiC2011

    1SiCSBDSiCSBD

    MSZ-ZW

    2SiCSBD

  • 56

    3

    SiCMOSFET36.78MHz95 50WEL2SiC

    3SiCMOSFET

  • NE

    BP

    108-8646 1-17-3NBF

    2012 9

    BP2012 PrintedinJapan

  • www.rohm.co.jp