Nanotechnology Symposium

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• Theory and structure• Specifications• How to use / select • Applications

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• Theory and structure

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What is a Linear Shaft Motor?

It is a direct drive linear It is a direct drive linear brushless servomotor!brushless servomotor!

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Linear Servomotor Classification• Linear Induction Motor (LIM)• Linear Pulse Motor (LPM)• Linear DC Motor (LDM) --- Voice Coil

Motor• Linear Synchronous Motor (LSM)

– Flat type• With core• Coreless

– Cylindrical type• With core• Coreless

---- Linear Shaft Motor

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0

1000

2000

3000

4000

5000

6000

7000

8000

0 0.5 1 1.5 2 2.5 3 3.5 4VELOCITY (m/ sec)

FORC

E (N

)

0%

10%

20%

30%

40%

50%

60%

70%

80%

F-V定格推力出力効率

Output

Efficiency

F - V

S605Q Specification Curve

Actually, linear F-V curve is a characteristic of DC motor.

Force Velocity Curve

Published Continuous Force

Published Peak Force

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Synchronous Motor F vs. C

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Design Concept

• Simple

• High precision

• Non-contact

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Design Concept: Simple

US Patent 06,040,642US Patent 2006162650A

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Design Concept: Simple

Magnetic field distribution

Simulated by FEM Actual

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Linear Shaft Motor Principle

Flux Force

CurrentFleming’s law

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Design Concept: High Precision– Coreless design

– No iron in forceror shaft

– No cogging

– Stiff design• The coils themselves are the core, thus

the stiffness of an iron core design

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Design Concept: Non-Contact

Large Air Gap0.5mm to 1.75mm nominal annular air gap

Non-criticalNo variation in force as gap varies over stroke of device

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CoilMagnetic Flux

(a) Flat type

Ineffective use of flux

(b) Cylindrical type

Effective use of flux

Only upper side flux is effective

All flux is effective

Magnets

Coil

Design Concept: Non-Contact

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Linear Shaft Motor

NS

SN

NS

SN

NS

SN

Core(Iron ）

Back York(Iron)

Coil

Coil Magnet

Magnet Absorption Force

No influence by change of gap

Linear Motor

Cogging by concentration of flux

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Comparison of Linear MotorsLinear Motor Type

Flat & Cylindrical type with

core

Coreless Flat

Coreless Cylindrical

Linear Shaft Motor

Output High Low High

Stiffness

High Low High

Adsorption force

Very High

Non Non

Result of adsorption force

Need more space for assembly

No effect No effect

Cogging Large Non Non

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• Theory and structure• Specifications

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Largest Linear Shaft Motor S1000T

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Longest Linear Shaft MotorS427Q 4600mm （ 15’ 1” ） Stroke

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Smallest Shaft MotorS040: Diameter 4mm(0.16) Width 10mm(0.4”)

Stroke 30mm(1.2”) 10 cycle/sec

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Maximum velocity: 6.3 m/sec

(20.7 ft/sec)

Motor: S435QMaximum velocity: 6.3m/secAcceleration: 13.5GPayload: 20kg (44lbs)Stroke: 800mm 2’7”

High speed drive

Encoder: HeidenhainResolution: 1µmDriver: Servoland SVDM 40PGuide: LM guide

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μ 低速送り （８ ｍ／ｓ） 移動距離２ｍｍ

0

0.005

0.01

0.015

0.02

0.025

0.03

0.035

0.04

0.045

0.05

0 50 100 150 200 250

Time (s)

Velo

city

(mm

/s)

Velocity fluctuation is under 1%.

Slow speed drive

Motor: 2-S160T in parallelMaximum velocity: 8 µm/secPayload: 25kg (55 lbs)

Encoder: HeidenhainResolution: 10 nmDriver: Delta Tau P-MacGuide: Air bearing

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Acceleration: 20G (198 m/sec2)

Motor: S435QMaximum velocity: 5m/secAcceleration: 20GPayload: 1.7kg (4 lbs)

Encoder: MitsutoyoResolution: 0.5 µmDriver: Servoland SVDM 40PGuide: LM guide

Acceleration

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Motor: S160TVelocity: 1m/secAcceleration: 1GPayload: 3kg (6.6lbs)Stroke: 800mm

Encoder: HeidenhainResolution: 0.1µmDriver: Servoland SVDM 2PGuide: LM guide

There is no overshoot. And positioning is 0.1 micron.

High speed positioning

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Stage: GTX 250Motor: S200QVelocity: 100mm/secAcceleration: 1GPayload: 25kg (55 lbs)

2.5 3 .0 3 .5 4 .0T im e (Seconds)

99 .990

99.995

100.000

100.005

100.010

100.015

C hanne l 1 Ve loc ity (M illim eter/sec)

Velocity fluctuation is under 0.006%.

Encoder: HeidenhainResolution: 0.1µmDriver: Servoland SVDM 5PGuide: Air bearing

Velocity fluctuationmedium speed

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4.994.9914.9924.9934.9944.9954.9964.9974.9984.999

55.0015.0025.0035.0045.0055.0065.0075.0085.0095.01

0 100 200 300 400 500 600 700 800 900 1000 1100

Time (s)

Velo

city (m

m/s)）

Velocity fluctuation is under 0.01%.

Velocity fluctuationvery slow speed

Motor: 2-S160T in parallelMaximum velocity: 8 µm/secPayload: 25kg (55 lbs)

Encoder: HeidenhainResolution: 10 nmDriver: Delta Tau P-MacGuide: Air bearing

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- 5

0

5

10

15

20

25

30

35

40

45

50

55

0 5 10 15 20 25 30 35

A ACT POS

B ACT POS

COMAND POS

[SEC]

[nm]

No overshoot

No backlash

5 nanometer step motion

Motor: 2- S320D in parallelPayload: 25kg (55 lbs)Guide: Air bearing

Encoder: HeidenhainResolution: 1 nmDriver: Delta Tau P-Mac

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Parallel Motor Example

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Following error is very small. Maximum following error is under 100 nm.

Red line: command velocityBlue line: actual velocity

Following error

Parabolic moveConstantly changing velocity

Stage: GTX 250Motor: 2-S160T in parallelMaximum Velocity: 3mm/secPayload: 10kg (22 lbs)

Encoder: SONY BS78 TS13Resolution: 0.14nmDriver: P-Mac U-mac systemGuide: Air bearing

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Summary Linear Shaft motor’s capabilities

• Maximum force 36000N (S1150T) 　　　　　　　　　　　　　　　　　

• Smallest motor S040D 25x10x10mm• Longest stroke 4.6m (15’ 1”)• Fastest speed 6.3m/sec (21ft/sec)• Slowest speed 8 µm/sec• Maximum acceleration 20G• Velocity fluctuation under 0.05%• Finest resolution 70pm

(0.00007µm)

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• Theory and structure• Specifications• How to use / select

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TableForcer (coil)

Linear encoder

LinearGuideCable carrier

Shaft Support

How to construct?

Linear Shaft MotorLinear Shaft Motor

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Linear Shaft Motor

Linear guide

Table

Encoder

Shaft Support

Actual stage (Moving Forcer)

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Shaft motor Cross Roller Bearings

TableEncoder

Shaft Support

Actual stage (Moving Shaft)

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Operating ConditionsLinear Shaft Motor Selection

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Calculations

In these equations, “μ” is the coefficient of friction on the guide. "g" is as the acceleration of gravity. g = 9.81 m/sec2

Continuous Force => Feff

Peak Force => larger Fa or Fd

Linear Shaft Motor Selection

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435Q

0

500

1000

1500

2000

2500

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1

DUTY

推

力（

Ｎ）

+10℃

+20℃

+30℃

+40℃

+50℃

+60℃

+70℃

+80℃

+90℃

+100℃

•Acceleration time 0.15s

•Const. speed period 0.6s

•Deceleration time 0.15s

•Dwell time 0.1s

•Mass (Load & Forcer) 25kg

•Speed 1.5m/s

•Duty 34 %

•Acceleration 10m/s2

•Acceleration force 250N

Temperature rise is 38℃

Linear Shaft Motor Selection

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System input

Move input

Motor Selection

Create Data Sheet

Create Move Data

Move data updated

LSMART Motion ProfileMotor

Suggestions

Motion Calculator

Application testing

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Motion DataMotion & Force

Profile

Linear Shaft Motor Data

Suggested Part numberSuggested

Part numberSuggested

Part number

Amplifier and Encoder

sizing data

LSMART Data Sheet

Force Duty

Force Velocity

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Advantages of Linear Shaft Motor

• The ability to use commercially available servo drivers.

• Higher speeds are able to be achieved while retaining high precision.– At the same time, extremely high precision low speed

uniformity and high repeatability are possible.• Because of the non-contact design, no lubrication

or adjustment necessary. • Very simple setup and operation time. No need

for extended burn in.• Simple alignment and QC period. • Eco-friendly - no noise, no dust. • Energy efficient, - power requirements are lower

then that of ball screw systems.

（ In comparison to types of liner motion ）

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• Theory and structure• Specifications• How to use / select • Applications

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World Wide Markets Served by Linear Shaft Motor

Inspection machines

Machining

Other

Manufacturing

equipment

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Inspection machines

• HDD• LCD• PCB• 3D• Microscope• Semiconductor• Other

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Machining

• Milling Machine• Grinders• Press• EDM• Machining center• Laser machine• Wire cut EDM• Other

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Manufacturing equipment • LCD• Boiling machine• Injection• Stage• Eject robot• Handling• Semiconductor before process• Semiconductor after process• Bonding• Surface mounter• Organic Electroluminescence (OEL) Display • Robot• Other

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Other applications • Office Automation• Medical• Printer• Machine parts• Health• Automatic sliding doors • Food handling• Fiber• Research• Other

Thank You !