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MS3 HPK sensor measurements at LAL

Planar Sensor MS Step3Laboratoire de l’accélérateur linéaire (LAL)

Orsay, France

Lydia Fayard, Abdenour Lounis, Dimitris Varouchas, Marc Escalier, Stéphane Trochet, Dmytro Hohov, Anastasia Kotsokechagia, Tobias Fitschen(LAL)

Marco Bomben, Giovanni Calderini, Reina Camacho, Rémi Cornat, Francesco Crescioli, Louis D’Eramo, Sonia Karkar, Kun Liu, Giovanni Marchiori,Yann Orain, Reem Taibah

(LPNHE)

February 25, 2019

Introduction

Personal introduction

• Joint PhD student between Uni Paris-Sud (LAL) and Uni Birmingham• Supervisors:

• Lydia Fayard (LAL)• Dimitris Varouchas (LAL)• David Charlton (Birmingham)• Konstantinos Nikolopoulos (Birmingham)

• Working on market survey for quali-task• Technical supervisor: Jens Weingarten

• Based at LAL during quali-task

Planar Sensor MS Step3 1 / 9

Introduction

In this presentation:Comparison of measurements at LAL with measurements from LPNHE

presented by Giovanni on Jan 21, Feb 11, and Feb 18,

using the same 4 sensors from wafer WNO1Planar Sensor MS Step3 2 / 9

https://indico.cern.ch/event/790066/contributions/3288439/attachments/1781866/2899742/20190121_-_MS3_HPK_sensor_measurements_in_LPNHE.pdf



Setup

IV, CV, and It measurementsPerformed with Keithley 4200A SCS parameter analyser and RF Wavelink

WL350 Probe station

Geometric measurementsThickness and bow derived with microscope-focus-method


HPK WNO1 SINGLE1IV

0 20 40 60 80 100 120 140 160 180 200 220V [V]

4−10

3−10

2−10

I [uA

]

(75.49 V)=0.01 uAleakLPNHE: I

(78.74 V)=0.01 uAleakLAL: I

CV

0 20 40 60 80 100 120 140 160 180 200 220V [V]

0.05

0.1

0.15

0.2

0.25

0.3

3−10×]-2

[pF

21/

C

=75.49 VdeplLPNHE 1kHz: V

=78.74 VdeplLAL 10 kHz: V

It

0 10 20 30 40 50t [h]

0.009

0.0095

0.01

0.0105

0.011

0.0115

0.012

0.0125

0.013

I [uA

]

LPNHE

LAL

• IV: Similar shape, slightly largerabsolute values at LPNHE

• CV: Similar depl. voltage, slightlylarger absolute values at LPNHE

• It: Day-night cycle visible at LAL⇒ Lack of temp. and humid.

stabilisation at LAL probablyimportant contribution todiscrepancies


HPK WNO1 SINGLE3IV

0 20 40 60 80 100 120 140 160 180 200 220

V [V]

4−10

3−10

2−10I [uA

]



CV

0 20 40 60 80 100 120 140 160 180 200 220

V [V]

0.05

0.1

0.15

0.2

0.25

0.3

3−10×]-2

[pF

21/

C



It

0 10 20 30 40 50

t [h]

0.0105

0.011

0.0115

0.012

0.0125

0.013

I [uA

]

LPNHE

• IV: Larger difference in leakagecurrent as for Sensor1

• Probably due to temp. andhumidity

• Still in tolerated limit (0.75 µAcm2 )

• CV: Difference between 1 kHz and 10kHz at LPNHE, but similar depl.voltage


HPK WNO1 SINGLE4IV

0 20 40 60 80 100 120 140 160 180 200 220

V [V]

6−10

5−10

4−10

3−10

2−10

1−10

1

I [uA

]



CV

0 20 40 60 80 100 120 140 160 180 200 220

V [V]

0.05

0.1

0.15

0.2

0.25

3−10×]-2

[pF

21/

C




It

not measured yet(ongoing at LAL)

• IV: Similar shape for LAL andLPNHE

• Leakage current close totolerated limit

• CV: Similar depl. voltage in allmeasurements

• It: Measurement at LAL started today


HPK WNO1 DOUBLE2IV

0 20 40 60 80 100 120 140 160 180 200 220

V [V]

4−10

3−10

2−10

I [uA

]



CV

0 20 40 60 80 100 120 140 160 180 200 220

V [V]

0.01

0.02

0.03

0.04

0.05

0.06

0.073−10×]

-2 [p

F2

1/C




It

0 10 20 30 40 50

t [h]

0.02

0.025

0.03

0.035

0.04I [uA

]

LPNHE

LAL

• IV: Different slopes in IV for LAL andLPNHE

• CV: Similar depl. voltage in allmeasurements

• It: Day-night cycle not as prominentas for Sensor1


Geometry

Sensor thickness and bow (with microscope-focus method)

thickness bowSensor LAL LPNHE LAL LPNHESingle1 - 160 ± 5 µm - 3.7 µmSingle3 192 ± 8 µm 182.5 ± 37.5 µm 8.3 µm 16.3 µmSingle4 - 165.1 ± 4.1 µm - 1.9 µmDouble2 218 ± 22 µm 171.2 ± 8.7 µm 11.9 µm 4.8 µm

thickness: ⟨⟨hi⟩measurement − ⟨hi′ ⟩measurement⟩point i

bow: h4 + h5 + h63 − h1 + h2 + h3 + h7 + h8 + h9

6


Conclusion

• IV, CV, and It measurements can be performed at LAL as well now• No temperature and rel. humidity stabilisation in LAL clean room

• Most prominent in 48h It measurements• Leads to discrepancies between LAL and LPNHE measurements• Ongoing work on fixing this

• Similar results for depletion voltage at LAL and LPNHE• Slight discrepancies in leakage current

• Probably due to lack in T and RH stabilisation• Still in tolerance limit (except Single4)

• CV measurements at LAL only possible for 10 kHz (instead of 1 kHz) yet• Temperature and humidity sensors at LAL: work in progress• Suggestion: Central git repository to share scripts

• Conversion to official MS format and analysis scripts reading this format• Thanks to Giovanni for initiating that for LAL and LPNHE!


Backup

Timing options

HPK WNO1 SINGLE1

0

1x1020

2x1020

3x1020

4x1020

5x1020

6x1020

0 50 100 150 200 250

Measure Delay:

Presoak Time:

Filter Factor:

Delay Factor:

PLC:

1/C

2 [

1/F

2]

U [V]

20 1.3 5 0.1 110 1.3 3 0.1 110 1.0 3 0.1 1

1 1.0 1 0.1 120 1.0 3 0.1 120 1.0 5 0.1 120 1.3 5 0.1 1010 1.0 4 0.1 1

Better results for small measure delay & delay factor and large integration times (PLC)→ Options chosen for all of the following measurements: 20 1.0 5 0.1 1

Timing options

• Power Line Cycles (PLC): 201 PLC = 20 msec integration time (for 50 Hz AC power) for the A/D converterto measure the signal

• Delay Factor: 1.0Increases/decreases the delay time inbetween measurementsAllows for source settling

• Filter Factor: 5Noise reduction factor averaging multiple readings

• Preasoak Time: 0.1 sAdditional delay time only for the first measurement

• Measure Delay: 1 sAdditional settling time before each measurement

ms3 hpk sensor measurements at lal · ms3 hpk sensor measurements at lal planar sensor ms step3...

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