modular cleanrooms, inc. silicon wafer fabrication taken from e.html
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Modular Cleanrooms, Inc.
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Silicon wafer fabrication• Taken from www.egg.or.jp/MSIL/english/index-
e.html
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Silicon wafer fabrication – slicing and polishing
• Taken from www.egg.or.jp/MSIL/english/index-e.html
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Wee
k 1
Wee
k 2
N-type Si wafer <100>
Pre-diffusion cleanPad oxidation
Spin photoresist
PR
SiO 2
O 2
ECE 1406 PMOS Fabrication Sequence
Expose PR with active area maskand develop
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Wee
k 3
Wee
k 4
Etch Active Area
Gate oxidation
Deposit LPCVD polysilicon
Poly
PR/etch gate m askStrip PR
O 2
SiH 4
SFO
6
2
Wee
k 2
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Wee
k 5
Wee
k 6
Ion im plant BF 2
+
Pre-diffusion cleanDrive-in/oxidation
PR/etch contact m askStrip PR
CleanSputter deposit A l/1% Si
Al/Si
P doped areas
OH O
2
2
Ar
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Wee
k 6
PR /etch metal maskStrip PRAnneal
Source
DrainGate (contact not shown)
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LPCVD Systems
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IBM 7-Level Cu Metallization
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What is a Microswitch?
Surface Micromachined5-500 Micron Size5-300 V Actuation
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so urc e
so urc e
so urc e
g a te
g a te
g a te
d ra in
d ra in
d ra in
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so urc e
so urc e
g a te
g a te
d ra in
d ra in
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MEMS Gyroscope Chip
1m D
rive
0.01Å Sen
se
J. Seeger, X. Jiang, and B. Boser
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Single chip six-degree-of-freedom inertial measurement unit (uIMU) designed by IMI
principals and fabricated by Sandia National Laboratories
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TI Digital Micromirror Device
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Micromachining Ink Jet Nozzles
Microtechnology group, TU Berlin
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Gene chips, proteomics arrays.
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NEMS: TOWARD PHONON COUNTING: Quantum Limit of Heat Flow.
RoukesGroupCal TechTito
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Biological Nanomotor
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