mirasat illustrator instructions for use...implementing mirasat™ helps wafer fabs to remain within...
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• Tools, Parts & Equipment skin wipe downs during Install/StartUp/Ramp
• Front end modules (FEM), Mini-Environments and Wafer handling systems
• HiVac chamber PM related tasks
• Horizontal surfaces, Stainless steel carts, work surfaces
Where to UseMiraSAT™ Wiping Applications
SafetyEliminate the Risk Hazards (Storage, Handling & Exposure) of using Flammable Chemical Solvents
The VOC Free Cleanroom Wiper
Wilshire Contamination Control Division
Foamtec International1621 Ord WayOceanside, CA 92056
Foamtec International WCC Division1-760-599-7160www.foamtecintlwcc.com | [email protected]
©2017 Foamtec International. All rights reserved. MiraSAT™ is a registered trademark of Foamtec International.
According to OSHA, the most effective method to control flammable solvents in a wafer fab is to remove the source. MiraSAT™ presaturated with 100% UPW eliminates the need for IPA soaked wipers.
Substituting water for IPA allows wafer fabs to:
• Reduce fire risks associated with IPA squirtbottles & presaturated IPA wipes
• Eliminates the risk of mixing spent IPA wipesin oxidizer waste bins
• Reduces the long term hazard of exposingfab personnel to solvent fumes
Current WaferFab Protocols
MiraSAT™
APPLICATION NOTESMiraSAT ™
EnvironmentalEnvironmental Constraints for the Semiconductor Industry are only Increasing
The VOC Free Cleanroom WiperAPPLICATION NOTES
Wilshire Contamination Control Division
Foamtec International1621 Ord WayOceanside, CA 92056
Foamtec International WCC Division1-760-599-7160www.foamtecintlwcc.com | [email protected]
©2017 Foamtec International. All rights reserved. MiraSAT™ is a registered trademark of Foamtec International.
45%
5%
50%
Motor Vehicles
Consumer Solvents
Sources of VOC’s
Industrial / CommercialProcesses
Implementing MiraSAT™ helps wafer fabs to remain within their air permit limits while making a step change improvement in environmental compliance and cost avoidance:
• Fab wide implementations of MiraSAT™ have enabled the removal of 15-20 tons of fugitive VOC emissions per year.*
* Based on multiple 300mm wafer fabs converting from IPA wiping toMiraSAT® for equipment maintenance applications
• Reducing wiper usage = Reduction of waste removal cost
• Eliminating IPA wipes greatly reduces VOC process exposure & fugitive emissions costs
• MiraSAT’s advanced microfiber structure provides superior performance leaving a clean, dry surface
- Improved 1st Pass QUAL – Reduction in cost of Test Wafers
- Improved Particle Control (PC) – Reduction in cost associated with tool downtime
- Reduce Mean Time To Clean (MTTC)
Cost ReductionMiraSAT™ Combined w/ Foamtec’s HPM Technique Reduces the Cost of Wet Cleans
Current Method Foamtec HPM Method
Combined with the UltraSOLV® ScrubPAD and Sponge, MiraSAT’s capabilities to dislodge, entrap and remove stubbornly adhered contamination reduces wiper usage, hazardous waste and equipment recovery time.
MiraSAT™ enables reduced cost of ownership:
MiraSAT ™