minatec and cea-tech : at the core of the french ... · semiconductor materials for extreme...

| PAGE 1CEA | 10 AVRIL 2012NIMS WeekOct.20th, 2016

MINATEC and CEA-Tech :

At the core of the French

innovation hub of Grenoble

Jean-Charles GUIBERT,Director of Technology Transfer, CEA

Director of MINATEC

HIGH LEVEL FORUM 2016@GRENOBLE M. SUMIKAWA

The Policy Speech by Prime Minister Shinzo Abe

as of January 22, 2016

The Policy Speech by Prime Minister Shinzo Abe

as of January 22, 2016

Governmental Policy for Innovation

To foster innovation ～from basic research

to practical use and commercialization～

Open Innovation!

The most innovation friendly country

in the world

• 5th Science and Technology Basic Plan (2016-2020)- Council for Science, Technology and Innovation

2

3

MilitaryApplications

Division

Nuclear EnergyDivision

TechnologicalResearch Division

Mission DAM : France’s national security independence

Mission DEN : France’s energy independence

Mission DRT : French business’ economic competitiveness

CEA : Worldwide leader in technological research

SUMMARY

| PAGE 4Direction de la Valorisation

• The RTO model (Research Technological Organization)

• CEA, the French RTO

• MINATEC the Grenoble Innovation Campus

• Conclusion

5

GAP

Pump primingwith academics

5–10 years

Technology transferwith industry

1–3 years

the French RTO to bridge the gap between research and industry

6

Research Technological Organizations (RTO) :

A key structure in the research tool box of governments

Research leads to invention

Industry leads to products

Who cares of innovation ?

RTO mission isto bridge, to fill in the gap

Europe’s main RTOs, the way to coopetition

7

IMEC€270 million

Staff: 1,664

CSEM€45 million

Staff: 390

VTT€247 million

Staff: 2,700

TECNALIA€140 million

Staff: 1,700

SINTEF€ 315 million

Staff: 2,100

TNO€512 million

Staff: 3,833

FhG€1,800 million

Staff: 20,000

CEA-Tech€500 million

Staff: 4,500

CEA | Benchmark CEA Tech | 20 Janvier 2016

32% 27%40%

19%

35%

15%

28%32%

17% 28%

15%

8% 8% 8%

6%

13%

17%

32% 34% 36%

75%

24%

53%

0%

10%

20%

30%

40%

50%

60%

70%

80%

90%

100%

Funding mix 2014

Industrial funding

European funding

National public funding

Base funding

EUROPEAN RTOs – Funding benchmark

| PAGE 8

On long term, RTO funding equilibrium model : 1/3 Base, 1/3 Public competitive, 1/3 Industry

CEA | Benchmark CEA Tech | 20 Janvier 2016 | PAGE 9CSEM

IMEC

TNO

SANDIANREL

KAIST

NIMS / AIST

ITRI

A-STARFZK

FhG

Selection of centres for benchmark analysis

CNSI

JPL/CALTECH

Nth Carolina.

Georgia Tech.

MIT.

CATAPULTBOMBAY

OIST

ALBANY

NANOPOLIS

TECHNION

SUMMARY





• Conclusion

11

MilitaryApplications

Division

Nuclear EnergyDivision

TechnologicalResearch Division

Mission DAM : France’s national security independence

Mission DEN : France’s energy independence

Mission DRT : French business’ economic competitiveness

CEA : Worldwide leader in technological research

4 octobre


Ranking of the world most innovative research institutio ns

Thomson Reuters : CEA is topping the list thanks to its tech transfer and IP strategy

1 - CEA Score : 206 France2 - Fraunhofer Society Score: 202 Germany

3 - Japan Science & Technology Agency Score: 201 Japan

4 - U.S. Department of Health & Human Services Score: 193 USA

5 - National Center for Scientific Research Score: 189 France

6 - Korea Institute of Science & Technology Score: 183 South Korea

7 - National Institute of Advanced Industrial Science & Technology Score: 182 Japan

8 - U.S. Department of Energy Score: 179 USA

9 - Agency for Science, Technology & Research Score: 175 Singapore10 - French Institute of Health & Medical Research Score: 175 France

11 - Helmholtz Association Score: 157 Germany

12 - U.S. Department of Veterans Affairs Score: 157 USA

13 – RIKEN Score: 146 Japan

14 - National Research Council Canada Score: 139 Canada

15 - Max Planck Society Score: 137 Germany

16 - Chinese Academy of Sciences Score: 135 China

17 - Pasteur Institute International Network Score: 135 France

18 - National Institute for Materials Science Score: 132 Japan

19 - United States Navy Score: 123 USA

20 - Commonwealth Scientific & Industrial Research Organisation Score: 119 Australia

21 - Spanish National Research Council Score: 114 Spain

22 - Academia Sinica Score: 106 Taiwan

23 - United States Army Score: 100 USA

24 - National Aeronautics and Space Administration Score: 99 USA

25 - Russian Academy of Sciences Score: 98 Russia

“Silicon Valley’s hoodie-wearing techentrepreneurs are the poster kids ofinnovation. But the innovators who arereally changing the world are more likely towear labcoats and hold government-relatedjobs in Grenoble, Munich or Tokyo.”

Direction de la Valorisation

Attractiveness for industry : 3 pillars

Excellence of

research staff

Strong IP strategy

Up-to-date

tool set

BUSINESS MODEL OF RESEARCH FOR CEA


Excellence of staff

in research labs

R&D for industry and agencies

and subsequent Licensing

Spin-off strategy

IP portfolio generation

IP EXPLOITATION

through contracted research« mid-long term industrial partner » « new industrial partner»

300 mm clean room

The Leti silicon platform for nanoelectronics

Information

| PAGE 15

The LETI MEMS 200 platform

Information

16

200 mm clean room

The Leti silicon platform for N&MEMS

Access to large

research facilities

Characterization platform

~80 Researchers and Technicians,40 Principal characterization tools,2,500m2 of laboratories,3,5 � million of investments per year,7 Centers of expertise

18

MANUFACTURING

Architectures and systems-on-chip

> Manycore processor

> Safe RT OS

> IC Architecture

> IC & SOC simulation

> Imaging

> EMC / RF Reliability

> Smart Sensors

Systems engineering tools

> Green IT

> Wire diagnostic

> Pedestrian detection

> Vision-based geolocation

> Safe command-control

> Hardened camera

> Energy management

2626-2

Safety, reliability, and standards

Embedded systems

The batteries platform

| 20

Energy

NANOMATERIALS ARE STRATEGIC FOR THE PERFORMANCES OF THE COMPONENTS FOR LOW CARBON ENERGY

| PAGE 21

LWR GEN IV Fusion

ElectrochemicalStorage Hydrogen Solar

Ene

rgy

Effi

cien

cy&

Har

vest

ing

Nuc

lear

Ene

rgy

Alte

rnat

ive

Ene

rgie

s

NEW NANOCOMPOSITES FOR SUPERCAPACITORS THROUGHAEROSOL CVD OF VERTICALLY ALIGNED CNT

| PAGE 22

Transport, electronic, applications for unique use, …

Different fields of applications

� Time constant : few seconds - few minutes

Supercapacitors

- Electrodes, electroactive materials- Electrolyte

� Performances depends on their components :

PROCESS UPSCALING

Production on large silicon wafers : 300 mm diameter

P. Boulanger et al., Journal of Physics: Conference Series429, 012050 (2013)

E=100µm

V=6µm/min

707 cm2

Optimization in progress: increase of homogeneity in thickness and of growth rate

| PAGE 23

24

Up-scaled High QualityVACNT Growth

Conformal ECP coating

Creation of a start-upP. BoulangerApril 2013

Targeted market : next generation of supercapacitors based on VACNT-engineered electrodes

License agreement between CEA and NaWa : 4 patents

VALORIZATION AND TECHNOLOGY TRANSFER

Electrodes exhibiting

promising properties=

New concept of supercapacitorsContinuous and low

cost process

| PAGE 24

| 25

Technology background on MEMS

CharacterizationExpertiseCharacterizationExpertise

Packaging

reliability

Residual Gas Analysis

Physics of

contact Electrical contact failure

mechanisms

« 3D »

reliability

electromigrationmechanisms,..

MEMS device & Passive

component reliabilityThermal behavior, long term

stability, resonance freq.,…

Material ExpertiseMaterial Expertise

Piezoelectric materials(actuator, RF, high k)

Magnetic materials GMR, TMR, high permeability mat. (RF inductor) and high

permittivity and permeability mat. (for antenna)

PZT Sol-gel depositionAlN sputtering deposition

F/AF permanent magnet

BAW filter

CoFe/NiMn stackPZT stack

CEA-Leti confidential 2016

| 26

Technology background on MEMS

MEMS / CMOSCo-integrationMEMS / CMOSCo-integration

Above-IC co-integration

NEMS with 0.35µm CMOS

driver

RF switch on top of CMOS circuit

GMR sensor on top of CMOS circuit

Pre-CMOS co-integration

Nano-scaletechnologiesNano-scaletechnologies

M&NEMS platformNEMS resonator MEMS with nano-gap

Electrostatic gap:3µm high / 80nm width

Passive componentsintegrationPassive componentsintegration

500nF/mm²

3D Integrated Capacitors(ALD medium k material – h=50µm)

Magnetic core HF inductors (<100 MHz)

Magnetic shield RF inductors (2 -10 GHz)

CoFe/NiMn exchange

coupled material

10x[NiFe1µm / SiO2100nm]

Electro-Magnetic Transformer

Breakdown 7,5 KV R ≈ 4Ω, L ≈ 82nH


| 27

World premiere in 2015

Leti announces the first 300mm MEMS wafer

Test vehicle = 3-axis M&NEMS accelerometer

Expected benefits:

• Cost reduction

• More intelligence through the

stacking with ASIC based on

advanced CMOS nodes


SUMMARY





• Conclusion

MINATEC – June 2014

MINATECinnovation campus

MINATEC® 2015 - Jean-Charles Guibert – Director of MINATEC ®

Systems for biology & health

Smart systems, Telco, IT design

Microelectronics on silicon

Microsystems on silicon

Optoelectronics components

Technology research on micro and nanotechnologies

Research & Technology

Institute founded in 1967

Director : Dr Marie-Noëlle Semeria

1700 collaborators250+ PhD & post-docs

40 nationalities

2200 patent families40 % under licensing

300+ industry partners

50 start-ups

8 000m² clean roomsFor 200 and 300mm wafer fab, operated 24/7

CEA-Leti institute is the heart of MINATEC campus


2,400 people

560 PhDs & post-docs

� Interdisciplinarity

� Creativity

� Technology transfer

Research

1,400 people

� Attractivity

� Skills for the future

Education

MINATEC campus based on the triple helix concept : Education – Research - Industry

600 people

� Technology transfer

� Industrial partnerships

� Jobs creation

Industry

� >3000 research staff

� >1000 students

� Annual Budget 350 M€

Industry & contracts >60%

� 13 000m² cleanrooms

� 400 graduates MS/PhD

� 1600 scientific publications /year

� 400 new patents /year

� 20 joint laboratories

� 10 start-up /year

� Operated by the

joint labs

Start-ups


MINATEC® campus – from labs to shared platforms

TTO


1 official delegation weekly to discover our campus

International official delegations

• 2015 : 40 delegations received to visit

MINATEC campus

• from 20 nationalities

• > 40 000 visitors in 2015

• 126 events

• 627 meetings

They visited MINATEC in 2016

Yoichi SUZUKI, Japan Ambassador

Najat VALLAUT-BELCKACEM, French Minister for Higher Education & Research

Yuko HARAYAMA, Japan Prime Minister cabinet office, executive member of the council for science, technology and innovation

Hiroshi AMANO, 2014 Nobel Prizein Physics Nogoya University


MINATEC / JAPAN relationship highlights

2014/10 : MoU NIMS-GIANT - 2 offices opened in Grenoble (1 in MINATEC) 1 in Tsukuba to host researchers� 3 Tsukuba University’ students in internships in MINATEC Leti’s labs in 2015

- 2014/09 : MoU KEIO-CEA-CNRS on micro- and nano-technologies� 3 students in internship in MINATEC Leti’s labs in 2015

- 2014/07 : Hirofumi NAKASONE, visit Member of the House of Councillors of Japan

- 2014/10 : Hiroshi AMANO, 2014 Nobel Prize in Physics announcement in MINATEC – working with Aledia r&d team


Large part of MINATEC activity isdedicated to develop science and

technology and transfer to industry or create future industry through start-up


/. 1972- Leti EFCIS/. 1982 : EFCIS absorbed by THOMSON/.Created as SGS-THOMSON Microelectronics in June 1987, from merger of SGS Microelettronica (Italy) and Thomson Semiconducteurs (France)/. Renamed STMicroelectronics in May 1998

(Etude et Fabrication de Circuits Intégrés Spéciaux)

• Among the world’s largest semiconductor companies

• A leading Integrated Device Manufacturer serving all electronics segments

• A leading technology innovator ( around 8,700 R&D researchers, ~24,000 patents)

• Key strengths in Multimedia Convergence, Power Applications and Sensors

• Rich, balanced portfolio (ASICs, Application-Specific Standard Products and Multi-Segment Products)

• A pioneer and visionary leader in sustainability

A world leader in providing the semiconductor solutions

• Approximately 45,000 employees including ST-Ericsson (Dec.31, 2014)

• 2014 revenue: $7.40 billion

• Advanced R&D centers in 10 countries&11 main manufacturing sites

• Corporate Headquarters: Geneva, Schwtz

• Global presence with sales offices all around the world

• Public since 1994 - shares traded on New York Stock Exchange (NYSE: STM), Euronext Paris, and Borsa Italiana

STMicroelectronics // A world leader in providing the semiconductor solutions


Smart Cut™III-V EpitaxyStacking™

Concentratingphotovoltaic

International partners

French international industrial leader in the

generation and production of

semiconductor materials for extreme performance,

in the heart of electronics and energy

challenges

• Staff 2015 : > 1200 personnes

• Common lab CEA Leti-Soitecfrom 1991

/. 1992 DRT-Leti/. André-Jacques Auberton-Hervé & Jean-Michel LamureIngeneers from CEA-Leti, found SOITEC in 1992

Smart Stacking™

Transfer of thin layers of materials from a donor substrate to another substrate

Transfer of very thin layers of partially or fully processed wafers onto other wafers

EpitaxyGrow epitaxial layers on gallium arsenide (GaAs).Enables stacking of multiple layers

III-V based multi-junction solar cells + concentrating optics

SOITEC // #1 wwide for SOI


1986 - 2001700 personnes

200050 personnes

200730 personnes

1992> 1200 personnes

200480 personnes

200830 personnes

199780 personnes

200420 personnes

200860 personnes

(cooled) Infrared detectors SOI generation & production 1st foundry to offer MEMS on SOI

Proteins bioproduction Magnetoresistant semiconductors Diagnostics

Miniature OLED displays Physiological Cell-Based Assays Programmable multiprocessor circuits

# 195 companies incorporated, many based on material science


201030 personnes

200915 personnes

200950 personnes

200930 personnes

200935 personnes

201025 personnes

201010 personnes

201025 personnes

Motion sensing & data fusion Software for SUB-32 NM lithography fluorescence imaging solutions for real time guided surgery

Lithium-ion battery systems Organic and printed electronics Diagnostic kits for indoor air quality (formaldehyde)

Precision location technology high power Fuel Cell System



201415 personnes

201310 personnes

201315 personnes

201420 personnes

201142 personnes

201115 personnes

20146 personnes

20145 personnes

20145 personnes

High-power LEDs Multigas analysis Integrated electronics in thread

Blood test (pocket lab) Olfactory & Gustatory Nano Biosensors energy harvesting

new digitizing technology power components made from gallium nitride on silicon

microcontrollers


SUMMARY





• Conclusion


Vision and mission � cultural change

� Vision �have to be supported by politics and top management� focus on cultural change (ie public research favorize

employment….in private industry) � results only on long term � will not be seen at the timing

of political agendas ! �Comprehensive by all citizens

� Mission �daily job of middle management to focus on impact�explain why and how public salaries are paid !�Short / middle term oriented�Dedication of all research staff�Benchmark : programs, organization, costs, investment,..


The 3 pillars of attractivty

� Research staff platform � how much ? Permanent staff ? engineers, technicians, PhD ? International ? Master students available on site ?

� Equipments platform � Investment capacity along last years? Wwide unique ? Maintenance ? 24/7 operation for industry support ? Sharing costs with start-up ?

� Intellectual property platform � Investment capacity along last years? portfolio size ? In-house dedicated staff ? Strong management strategy ? Seen as an advertising tool or as a cost ?


The 3 requests from customers

� How to achieve customer goals � Project management ? Reporting ? ISO certified ? Results guaranteed ? SWOT analysis culture ?

� Business model � existing one ? Full cost per person per activity per year ? How much to cover for the customer : 50, 80, 100, 120 % ? Same cost for national and international customers ?

� Intellectual property access � Background access included in program cost ? Foreground proprietary rules ? Licence fee calculation ? Rules for exclusive or non exclusive licence ?


� International visibility � are you in premier league ? Do international rankings have a real impact ? and is your center attractive enough for the best students, researchers, industry, investors?

� Ecosystem generation and development � strength and commitment of collaborations and interactions between the different entities from education, research and industry ? Are you contributing to new research model generation ?

� Economic impact � to estimate per year, on your research area ? who is able to calculate? Who cares of precise datas ? Advertising tool or guideline for authorities ?

The 3 high level KPI (Key Performance Indicators)

46

Thank you, http://www.minatec.org/ja/

minatec and cea-tech : at the core of the french ... · semiconductor materials for extreme...

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