Microchip FabricationA Practical Guide to Semiconductor Processing

半導體製程材料科學與工程研究所張翼 教授

Chapter 1 The Semiconductor Industry

Figure 1.1 Eniac statistics. (Foundations of Computector Technology, J. G. Giarratano, Howard W. Sams & Co., Indianapolis, Ind., 1983) (First electronic computer,1947)

Figure 1.2 Vacuum tube

Vacuum tube (better radiation hardening) → Transistor

NCTU is the first University to use transistor in student Lab.

→

Figure 1.3 The first transistor.

Bell Labs John Bardeen, Walter Brattin,

William Shockley 1956 Nobel Prize (Physicist) Si-Ge, bandgap increase, low

terminal noise

Figure 1.4 Solid-state discrete devices.

active device: transistors & diodes

passive element: capacitors & resistors

Discrete device account for 12% sale in 1998

Figure 1.5 Kilby integrated circuit from his notebook (Courtesy of Texas Instruments.)

In 1959, TI developed first IC. (Jack Kilby)

Figure 1.6 Horni “teardrop” transistor.

Planar Technology

Figure 1.7 Growth of Dram Density (After Campbell, The Science of Engineering and Microelectronics fabrication, Oxford Press.)

First demo, Bell Labs First production, NEC

Figure 1.8 IC integration table.

Figure 1.9 Decreasing image feature size. (After Wolf and Tauber, “Silicon Processing for the VSLI Era.”)

2000, 0.18µm, TSMC 2012, 0.005µm

Figure 1.10 Effect of processing larger die on larger wafers.

wafer size → 12 inch (1B USD to build)

ULSI chip size> 0.5 inch each side

# whole die in a wafer : 40 → Need to decrease contamination

use class 1 clean room

Figure 1.11 Relative size of airborne particles and wafer dimensions.

class 1 1 Particle/ft3

Particle size < 0.1µm

Figure 1.12 Cross section of typical planarized two-level metal VLI structure showing range of via depths after planarization. (Courtesy of Solid State Technology)

Use multilayer interconnect level to increase traffic

Figure 1.13 Wafer fabrication (and electrical test).

Figure 1.14 Price of chips per bit of memory.

Moore’s law (1965): Doubling of transistorsin the ICs every couple of years1971 22501982 120,0001993 3,100,0002000 42,000,000

Figure 1.15 Semiconductor chip uses. (Courtesy In-Stat-1995 SEMI ISS seminary)

original driving force: military demand

Figure 1.16 Semiconductor and vehicle parts growth (Courtesy Semiconductor Industry Association)

→ semiconductor→ motor vehicle parts

Figure 1.17 Future DRAM capacity. (Source: Business Week, July, 1994)

Figure 1.18 Growth of semiconductor industry-capital spending (Courtesy of Semiconductor Industry Association)

→ semiconductors

Figure 1.18

Wafer Fabrication Vertical Integration IDM:Integrated Device Manufacturer-include IC design and man

ufacture Fab Fabless company Foundry

Captive: produce in house for their own use Merchant supplier: sell to the open market

Figure 1.19 Stages of semiconductor manufacturing.

Figure 1.20 Conversion of silicon dioxide to semiconductor grade silicon.

Figure 1.21 Crystal growth and wafer preparation.

Figure 1.22 Wafer fabrication (and electrical test)

Figure 1.23 Packaging stage.

Packaging technology becomes important as CPU speed approaching 1 Gb/Sec

Figure 1.24 P-N and N-P junctions.

Figure 1.25 Basics of silicon planar processing.

Figure 1.26 Double diffused bipolar transistor formed in epitaxial layer.

Figure 1.27 DRAM growth design rule and number of process steps. (SEMI 1995 ISS Conference)