MEMS Solutions For VR & ARSensor Expo 2017

San Jose June 28th 2017

Piezo actuatorsFluidicMicro-actuators

MicroMirrors

MEMS Sensors & Actuators at ST 2

Physical change

Mechanical

Signal

Electric

Sense

Actuate

MEMSElectro

Mechanical

Motion Environmental Audio

ST as MEMS Sensor & Actuators Supplier 3

Expertise in multi-sensor Integration

High Volume Manufacturing

Market-proven Manufacturing Technologies

Front-End / Back-End/ Testing & Calibration

Leading Smart Functions Integration

Key Partnerships in product

development

SENSINGACTUATING

20 Years of MEMS Sensors & Actuators 4

ST Innovations

2000 2005

Accelerometer Gyroscope Inertialmodule

Pressuresensor

2015

MicroMirrors

Piezoactuators

FluidicMicro-

actuators

Microphones UVsensor

2010

Humidity sensor

2008 2012 2013 2014 2017

GAS & VOC

ACTUATINGSENSING

20 Years of MEMS Sensors & Actuators 5

And Some Iconic Products

2000 2005 201520102008 2012 2013 2014 2017

MEMS Sensors & Actuators 6

ST Key Technologies - Enabling Multiple Applications

Piezo-Electric Electrostatic

Thermal Electro-magnetic

+

Sensors Actuators

ThELMA* AMR - MAG

VENSENS** Bastille Cactus

* Thick Epi-Poly Layer for Microactuators and Accelerometers** VENice SENSor

Changing the MEMS Landscape 7

Strategic PartnershipsPiezo Autofocus

MEMS Loudspeaker

Ultrasound Ranging

Micro-mirror Projection

What is a MEMS μMirror Scanner?

• Tiny reflective mechanical device that swings at a given frequency

• Applications spanning Visible to Invisible (IR typically) light

8

Laser Beam Scanning (LBS) 9

• Principles:• Light from one/multiple lasers is combined into a

single beam• Beam is relayed onto MEMS scanning mirror(s) • Mirror(s) scan the beam in a raster pattern• A projected image is created by modulating the

lasers synchronously with the position of the scanned beam

Technology Principles and Applications

Green LD

Red LD

Blue LD

MEMS scanning mirror

Laser Beam Scanning (LBS) 10

• Principles:• Light from one/multiple lasers is combined into a

single beam• Beam is relayed onto MEMS scanning mirror(s) • Mirror(s) scan the beam in a raster pattern• A projected image is created by modulating the

lasers synchronously with the position of the scanned beam

• Applications:• Pico-projection and heads-up display (HUD)• Virtual and Augmented Reality (VR, AR)• 3D Sensing and Advanced Driver Assistance

Systems (ADAS)

Technology Principles and Applications

Movement TGT

Random Walk

Noise

Stab vs. temp

Bias Instability

VIRTUAL & AUGMENTED

REALITY

New Applications Driven by Accuracy 11

OPTICAL IMAGESTABILIZATION

AUTONOMOUSDRIVING

NAVIGATIONPDR

1 m <20 cm 10 cm <10 cm

Accuracy

Off & Sens tolerance Arm Swing, Max error 1 mTotal Distance 250 m

LSM6DSM 12

Google Daydream and Tango Certified

http://www.st.com/content/st_com/en/about/media-center/press-item.html/t3874.html

SensorTile 13

IoT Design Lab on the tip of a pencil

IMUCompass

BLE

Pressure Sensor

MCU

Microphone

STEVAL-STLKT01V1

SensorTile 14

IoT Design Lab on the tip of a pencilSTEVAL-STLKT01V1

LSM6DSMLSM303AGR

BlueNRG-MS

LPS22HB

STM32L476

MP34DT04

MEMS Solutions For VR & ARDemo DetailsSensor Expo 2017

San Jose June 28th 2017

Virtual Reality (VR) Demo Provides real sense of presence & immersive experience using SensorTile

• Showcases low noise, drift and current consumption of our sensors (6X: LSM6DSL) and ST Sensor Fusion algorithms.

• MotionFx and ST MEMS sensors performances allow Low latency ( < 6 ms) to overcome motion sickness.

• Demo to be conducted with Google Pixel phone, SensorTile and Google Cardboard. SensorTile is connected to mobile device using USB and motionFX is running on SensorTile.

SensorTilesolid with CardBoard

sends Sensor Fusion data

Android 7.0Mobile runningVR Reality App

USB

Cardboard

STEVAL-STLKT01V1 mounting:LSM6DSM / A + GLSM30AGR / A+MSTM32L476 / MCU

VR: Basic Requirements for Sensors • Minimum recommended sampling frequency for both Gyro and

Accelerometer is 200Hz

• Low-Pass Filter cutoff is 30Hz for accelerometer and 50Hz for Gyro. • For headset device, the head movement frequency spectrum must be acquired in

entirety. Accelerometer bandwidth can be lower because we are not integrating acceleration.

• In Pixel Phone (Google Daydream) Gyro and Accelerometer can reach 400Hz maximum (Android N implementation).

•

System Architecture• Communication between Phone and SensorTile;

• Phone Kernel needs to support Serial Communication over USB (ACM_CDC);• Data is sent from SensorTile to Phone over USB;• Algorithm used to achieve for common timebase for timestamping sensor data

SensorTile and Phone;• Sensor HAL receives data from USB and sync timestamps.

SensorTilesolid with CardBoardsends Sensors and

Fusion data

Android 7.0Mobile runningVR Reality App;

HAL Layer

Cardboard

USBTimestamp sync algo

Android Device Requirements for VR• MUST have at least 2 physical cores

• MUST support sustained performance mode.

• MUST provide an exclusive core to the foreground application

• The kernel must support cpusets and corethread affinity

• MUST support the Process.getExclusiveCores API to return the numbers of the cpu cores that are exclusive to the top foreground application. This core MUST not allow any other userspace processes to run on it (except device drivers used by the application), but MAY allow some kernel processes to run as necessary.

• Source: https://source.android.com/devices/tech/power/performance.html

Requirements for VR (Sensor Performance)Device implementations:

• are STRONGLY RECOMMENDED to support android.hardware.sensor.hifi_sensors feature

• MUST meet the gyroscope-, accelerometer-, and magnetometer-related requirements for android.hardware.hifi_sensors.

LSM6DSM 21

Best-in-class 6-axis IMU

LSM6DSM is Daydream and Tango certified Android N HiFi sensor specifications cover the Tango specs

Parameter Value LSM6DSM

Stationary Bias Stability < 0.0002 °/s *√Hz from 24-hour static dataset

Bias change vs. temp ≤ +/- 0.05 °/ s / °C

Best-Fit line Non-Linearity ≤ 0.2%

Sensitivity change vs. temp ≤ 0.02% / °C

Noise Density ≤ 0.07 °/s/√Hz

Parameter Value LSM6DSM

Stationary Noise Bias Stability <15 μg * √Hz from 24hr static dataset

Bias change vs. temp ≤ +/- 1mg / °C

Best-Fit line Non-Linearity ≤ 0.5%

Sensitivity change vs. temp ≤ 0.03%/C°

GYRO

XL

Thank you