Heat Heat

Plasma

Silicone

Bar

Micromirror

Pulled up and down by the movement of PZT film

Voltage

VoltagePiezoelectric PZT film Piezoelectric PZT film

Expands

Expands

Contract

Contract

MEMS

opens new

possibilities.

Expand Contract

View Images taken with a digital camera with the family and friends together

Color display is created by controlling timing and illumination colors.

Laser beams

Voltage

Micromirror Actuator

It is similar to a CRT-based television tube!

In the future...

A high level of technology is required in order to form a piezoelectric membrane on silicone, where our know-how on plasma technology works.

Silicone

Electrode

Electrode PZT film

Points of light move at high speed, but they look like a plane to the human eye.

That's the technique!

PZT film expands and contracts when it is energized. Its minor vibration travels to the bar and mirror moves.

POINTLet's take a closer look at the mechanism of how the micromirror moves! Piezoelectric PZT film

Bounce an RGB laser beam off the micromirror.

3

Actuator shakes.

1

Make a presentation with a mobile phone.

Will big projectors be still necessary?

The screen display for a car navigation system is reflected on the car window.

What are MEMS?

Micro Electro-Mechanical SystemsSystems that have a structure in which minimal machine components are made on silicone. The component moves from right to left or up and down by itself.

MEMS are used in many near at hand places as a detecting sensor. When they detect any tilt or acceleration...

The airbag inflates.

You can swing a tennis racket.

The display turns around.

They are similar to IC chips, but they moves by themselves.

Wii

iPhone

Extremely small!

(5 mm)

2

Control the movement of the micromirror and display an image on the screen.

4

Will a mobile phone turn into a projector?Recently, the development of ultra-miniature projection displays has accelerated. In such a projector, millimeter mechanical systems, called MEMS technology, are used. The projector is called a pico projector, for it is dramatically smaller than ordinary projectors used in the meetings. At this time, we would like to introduce moving small machines, MEMS technology.

MEMS display

MEMS enable us to produce the ultraminiature projection display.

Published by: General Affairs Section, General Affairs Department, Stanley Electric Co., Ltd.2-9-13, Nakameguro, Meguro-ku, Tokyo 153-8636Tel : (03) 3710-2222　Edited by : Tamotsu Tsuchiya　Created by : Sangyo Henshu Center Co., Ltd.

Be friendly to the environment!This magazine is printed on recycled paper.

2008.Autumn

No. 10

PZT films expand and contract alternately.

Micromirror moves in sympathetic vibration with the vibration of the actuator.

We combined this system with a LED array and produced the ultraminiature projection display.